EP3049676B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP3049676B1
EP3049676B1 EP14761870.6A EP14761870A EP3049676B1 EP 3049676 B1 EP3049676 B1 EP 3049676B1 EP 14761870 A EP14761870 A EP 14761870A EP 3049676 B1 EP3049676 B1 EP 3049676B1
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EP
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Prior art keywords
housing portion
vacuum pump
heat
housing
drive means
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EP14761870.6A
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German (de)
French (fr)
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EP3049676A1 (en
Inventor
Rainer Hölzer
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Leybold GmbH
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Leybold GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/5806—Cooling the drive system
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

Die Erfindung betrifft eine Vakuumpumpe, insbesondere eine Turbomolekularpumpe.The invention relates to a vacuum pump, in particular a turbomolecular pump.

Vakuumpumpen weisen eine Rotorwelle auf, die üblicherweise mit mehreren Rotorelementen verbunden ist. Bei den Rotorelementen handelt es sich beispielsweise bei einer Turbomolekularpumpe um mehrere im Wesentlichen radial zur Rotorwelle verlaufende Rotorscheiben. Zwischen den Rotorscheiben sind üblicherweise mit dem Gehäuse verbundene oder im Gehäuse angeordnete Statorscheiben, bei denen es sich somit um mehrere einzelne Statoreinrichtungen handelt, vorgesehen. Die einzelnen Statorscheiben sind somit zwischen benachbarten Rotorscheiben angeordnet. Ebenso kann es sich bei einem Rotorelement beispielsweise um rotierende Bauteile einer Holweckstufe, einer Siegbahnstufe oder Gaedestufe, sowie auch um einen Rotor eines Seitenkanalverdichters, handeln. Insbesondere in derartigen Pumpentypen treten aufgrund der Verdichtung hohe Temperaturen auf. Die Rotorwelle der Vakuumpumpe ist ferner mit einer Antriebseinrichtung wie einem Elektromotor verbunden. Auch derartige Bauteile erzeugen häufig hohe Temperaturen. Es ist daher erforderlich, dass derartige stark wärmeerzeugende Bauteile gekühlt werden.Vacuum pumps have a rotor shaft, which is usually connected to a plurality of rotor elements. In the case of a turbomolecular pump, the rotor elements are, for example, a plurality of rotor disks extending substantially radially relative to the rotor shaft. Between the rotor discs are usually connected to the housing or arranged in the housing stator, which is thus a plurality of individual stator devices, is provided. The individual stator disks are thus arranged between adjacent rotor disks. Likewise, a rotor element may, for example, be rotating components of a Holweck stage, a Siegbahn stage or Gaedestufe, as well as a rotor of a side channel compressor. Particularly in such types of pumps, high temperatures occur due to the compression. The rotor shaft of the vacuum pump is further connected to a drive device such as an electric motor. Even such components often produce high temperatures. It is therefore necessary that such highly heat-generating components are cooled.

Die Rotorwelle ist von Lagern getragen. Insbesondere Wälzlager sind jedoch temperaturempfindlich. Bei hohen Betriebstemperaturen sinkt die Lebensdauer der Wälzlager. Häufig sind die Lager, insbesondere das druckseitig angeordnete Lager, auf engem Bauraum und insofern nahe der elektrischen Antriebseinheit, sowie auch des Bereichs, in dem eine hohe Gasverdichtung und somit hohe Verlustwärme erzeugt wird, angeordnet. Dies führt dazu, dass die Lager bei hoher Betriebstemperatur betrieben werden.The rotor shaft is supported by bearings. In particular rolling bearings are temperature sensitive. At high operating temperatures, the life of the rolling bearing decreases. Frequently, the bearings, in particular the bearing arranged on the pressure side, are arranged in a small installation space and thus close to the electric drive unit as well as the area in which a high gas compression and thus high heat loss is generated. As a result, the bearings are operated at a high operating temperature.

Die Druckschrift WO 94/00694 A1 beschreibt eine Gasreibungsvakuumpumpe mit einem Hochvakuum- und einem Vorvakuum-Bereich, die mit unterschiedlichen Betriebstemperaturen arbeiten.The publication WO 94/00694 A1 describes a gas friction vacuum pump with a high vacuum and a pre-vacuum range operating at different operating temperatures.

Die Druckschrift DE 39 32 228 A1 beschreibt eine Turbovakuumpumpe mit einem Umfangsstromlaufrad und einem einstückigen Stator.The publication DE 39 32 228 A1 describes a turbo vacuum pump with a peripheral impeller and a one-piece stator.

Aufgabe der Erfindung ist es mit konstruktiv einfachen Mitteln die Betriebstemperatur von Lagern, insbesondere Wälzlagern, bei Vakuumpumpen zu verringern.The object of the invention is to reduce the operating temperature of bearings, in particular rolling bearings, with vacuum pumps with structurally simple means.

Die Lösung der Aufgabe erfolgt erfindungsgemäß durch die Merkmale des Anspruchs 1.The object is achieved according to the invention by the features of claim 1.

Eine Vakuumpumpe weist eine Rotorwelle und mindestens ein Rotorelement auf. Ferner ist mindestens eine mit dem mindestens einen Rotorelement zusammenwirkende Statoreinrichtung vorgesehen. Desweiteren ist mit der Rotorwelle eine elektrische Antriebseinrichtung, sowie die Rotorwelle tragende Lager verbunden. Desweiteren weist die Vakuumpumpe ein Gehäuse auf, in dem die Bauteile der Pumpe angeordnet sind. Insbesondere trägt das Gehäuse über die Lager die Rotorwelle. Ferner ist mit dem Gehäuse mittelbar oder unmittelbar die mindestens eine Statoreinrichtung verbunden. Erfindungsgemäß weist das Gehäuse mehrere Gehäuseteile auf, wobei wärmeempfindliche Bauteile mit einem ersten Gehäuseteil und stark wärmeerzeugende Bauteile mit einem zweiten Gehäuseteil verbunden sind. Aufgrund dieser Anordnung ist es möglich, dass die beispielsweise im Verdichterteil und/oder von der Antriebseinrichtung erzeugte starke Wärme abgeführt wird, sodass die Betriebstemperatur wärmeempfindlicher Bauteile wie insbesondere eines Lagers reduziert werden kann. Erfindungsgemäß wird somit die innerhalb der Pumpe erzeugte starke Wärme nur möglichst wenig in das Lager eingebracht. Dies ist erfindungsgemäß durch eine einfache konstruktive Maßnahme gelöst, da das Gehäuse mindestens zwei Gehäuseteile aufweist, und diese entweder die wärmeempfindlichen Bauteile oder die stark wärmeerzeugenden Bauteile tragen.A vacuum pump has a rotor shaft and at least one rotor element. Furthermore, at least one stator device cooperating with the at least one rotor element is provided. Furthermore, with the rotor shaft, an electric drive device, and the rotor shaft bearing bearing connected. Furthermore, the vacuum pump has a housing in which the components of the pump are arranged. In particular, the housing carries the rotor shaft via the bearings. Furthermore, the at least one stator device is indirectly or directly connected to the housing. According to the invention, the housing has a plurality of housing parts, wherein heat-sensitive components are connected to a first housing part and highly heat-generating components are connected to a second housing part. Due to this arrangement, it is possible that the strong heat generated, for example, in the compressor part and / or by the drive means is dissipated, so that the operating temperature of heat-sensitive components such as in particular a bearing can be reduced. According to the invention, the strong heat generated within the pump is thus introduced as little as possible in the camp. This is inventively achieved by a simple structural measure, since the housing at least two housing parts and carry either the heat-sensitive components or the highly heat-generating components.

Das zweite Gehäuseteil ist wärmeleitfähig mit der Antriebseinrichtung verbunden. Hierdurch kann die von der Antriebseinrichtung erzeugte Wärme auf einfache Weise abgeführt werden. Gemäß der Erfindung ist das zweite Gehäuseteil über ein Trägerteil mit der Antriebseinrichtung verbunden. Hierdurch ist insbesondere die Montage vereinfacht. Ferner ist es desweiteren bevorzugt, dass das Trägerteil weitere Bauteile trägt, über die Wärme zum zweiten Gehäuseteil abgeführt werden kann. Insbesondere handelt es sich hierbei um Bauteile die mit dem Verdichtungsbereich in Verbindung stehen, sodass aus diesem die Wärme zum zweiten Gehäuseteil abgeführt wird. Bevorzugt ist es somit, dass mit der Trägereinrichtung zumindest eine Statoreinrichtung verbunden ist. Hierbei kann es sich insbesondere um Statoreinrichtungen der Holweckstufe, der Siegbahnstufe, der Gaedestufe oder eines Seitenkanalverdichters handeln. Eine Verbindung mit derartigen Statoreinrichtungen ist insbesondere vorteilhaft, da in derartigen Stufen eine hohe Verdichtung und insofern eine hohe Wärmeerzeugung erfolgt.The second housing part is thermally conductive connected to the drive device. As a result, the heat generated by the drive means can be dissipated in a simple manner. According to the invention, the second housing part is connected via a carrier part with the drive device. As a result, in particular the assembly is simplified. Furthermore, it is further preferred that the carrier part carries further components, via which heat can be dissipated to the second housing part. In particular, these are components that are in communication with the compression area, so that the heat is dissipated to the second housing part from this. It is thus preferred that at least one stator device is connected to the carrier device. These may be, in particular, stator devices of the Holweck stage, the Siegbahn stage, the Gaedestufe or a side channel compressor. A connection with such stator devices is particularly advantageous because in such stages, a high compression and thus a high heat generation takes place.

In besonders bevorzugter Ausführungsform ist das zweite Gehäuseteil daher mit dem Trägerteil und/oder der Antriebseinrichtung und/oder mindestens einer Statoreinrichtung gut wärmeleitend verbunden. Die Verbindung erfolgt insbesondere über ein Verpressen der Bauteile mit Übermaß. Hierdurch kann eine gute Wärmeleitung verwirklicht werden.In a particularly preferred embodiment, the second housing part is therefore connected to the carrier part and / or the drive device and / or at least one stator good thermal conductivity. The connection is made in particular via a pressing of the components with oversize. As a result, a good heat conduction can be realized.

Bei einer bevorzugten Weiterbildung der Erfindung ist das erste Gehäuseteil mit einem Lager, insbesondere dem druckseitigen Lager, verbunden. Das druckseitige Lager ist insbesondere bei einer kompakten Bauweise der Vakuumpumpe stark von der Wärmeentwicklung der Antriebsweinrichtung und/oder des Verdichtungsbereichs der Pumpe beeinflusst. Dies ist insbesondere der Fall, wenn dieses Lager von einer Holweckstufe oder dergleichen umgeben ist.In a preferred development of the invention, the first housing part is connected to a bearing, in particular the pressure-side bearing. The pressure side bearing is particularly influenced in a compact design of the vacuum pump greatly by the heat of the Antriebsweinrichtung and / or the compression range of the pump. This is in particular, the case when this camp is surrounded by a Holweckstufe or the like.

Bei einer weiteren bevorzugten Weiterbildung ist das erste Gehäuseteil zusätzlich oder statt der Verbindung mit dem Lager mit einer insbesondere nur wenig wärmeerzeugenden Steuereinrichtung verbunden.In a further preferred development, the first housing part is additionally or instead of the connection to the bearing connected to a particular little heat-generating control device.

Erfindungsgemäß sind das erste Gehäuseteil und das zweite Gehäuseteil über eine geringe Wärmeleitfähigkeit aufweisende Verbindung miteinander verbunden. Hierbei handelt es sich beispielsweise um eine Verschraubung, wobei gegebenenfalls ein Dichteelement wie ein Luftspalt oder dergleichen vorgesehen sein kann. Alternativ ist es auch möglich, dass die Kammern der beiden Gehäuseteile thermisch voneinander entkoppelt sind. Durch das Vorsehen zweier gesonderter Gehäuseteile ist es möglich diese auf unterschiedlichem Temperaturniveau durch eine gesonderte Kühlung zu halten. Insbesondere kann das erste Gehäuseteil stärker gekühlt werden, sodass die Betriebstemperatur des Lagers und/oder einer Steuereinrichtung gering ist. Hierdurch kann beispielsweise die Lebensdauer eines Lagers deutlich erhöht werden. Dies wäre bei nicht getrennten Gehäuseteilen nur möglich, indem auch die stark wärmeerzeugenden Bauteile stark gekühlt würden. Dies würde einen erheblich höheren Energieaufwand mit sich bringen. Das Verbinden der stark wärmeerzeugenden Bauteile über ein Trägerteil insbesondere durch Verpressen hat ferner den Vorteil, dass neben einer guten Wärmeübertragung auch die Positionierung dieser Bauteile sehr exakt definiert ist. Dies ist insbesondere hinsichtlich eines von dem Trägerteil getragenen Stators einer Holweckstufe oder dergleichen zweckmäßig. Bevorzugt ist es ferner, dass mit dem Trägerteil der Stator des Motors durch Verpressen verbunden ist. Hierdurch ist auch die Position des Motorstators eindeutig definiert.According to the invention, the first housing part and the second housing part are connected to one another via a connection having a low thermal conductivity. This is, for example, a screw connection, wherein optionally a sealing element such as an air gap or the like can be provided. Alternatively, it is also possible that the chambers of the two housing parts are thermally decoupled from each other. By providing two separate housing parts, it is possible to keep them at different temperature levels by a separate cooling. In particular, the first housing part can be cooled more strongly, so that the operating temperature of the bearing and / or a control device is low. As a result, for example, the life of a bearing can be significantly increased. This would only be possible with non-separate housing parts by the strong heat-generating components would be strongly cooled. This would involve a considerably higher energy expenditure. The joining of the highly heat-generating components via a carrier part, in particular by pressing, has the further advantage that in addition to a good heat transfer, the positioning of these components is defined very precisely. This is particularly useful in terms of a supported by the support member stator Holweckstufe or the like. It is further preferred that the stator of the motor is connected by pressing with the carrier part. As a result, the position of the motor stator is clearly defined.

Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegende Zeichnung näher erläutert.The invention will be explained in more detail with reference to a preferred embodiment with reference to the accompanying drawings.

Die Figur zeigt eine stark vereinfachte schematische Schnittansicht eines Teils einer Vakuumpumpe.The figure shows a highly simplified schematic sectional view of a part of a vacuum pump.

In der in der Figur schematisch dargestellten Vakuumpumpe trägt eine Rotorwelle 10 mehrere als Rotorscheiben 12 ausgebildete Rotorelemente. Mit einem oberen Gehäuseteil 14 sind im Bereich der Turbomolekularstufe Statorscheiben 16 verbunden bzw. werden von dem oberen Gehäuseteil getragen.In the vacuum pump shown schematically in the figure, a rotor shaft 10 carries a plurality of rotor disks 12 formed as rotor elements. Stator disks 16 are connected to an upper housing part 14 in the region of the turbomolecular stage or are carried by the upper housing part.

Desweiteren ist mit der Rotorwelle 10 ein scheibenförmiger Träger 18 fest verbunden. Der Träger 18 trägt im dargestellten Ausführungsbeispiel zwei als Rohrzylinder ausgebildete Rotorelemente 20, 22 einer Holweckstufe. Zwischen den Rotorelementen 20, 22 der Holweckstufe ist eine innere Statoreinrichtung 24 der Holweckstufe angeordnet. Das äußere Rotorelement 22 ist von einer weiteren Statoreinrichtung 26 der Holweckstufe umgeben, wobei diese äußere Statoreinrichtung 26 im dargestellten Ausführungsbeispiel einstückig mit einem zweiten Gehäuseteil 28 verbunden bzw. an der Innenseite des zweiten Gehäuseteils 28 ausgebildet ist.Furthermore, with the rotor shaft 10, a disc-shaped carrier 18 is firmly connected. The carrier 18 carries in the illustrated embodiment, two tube cylinders designed as rotor elements 20, 22 of a Holweckstufe. Between the rotor elements 20, 22 of the Holweck stage, an inner stator 24 of the Holweck stage is arranged. The outer rotor element 22 is surrounded by a further Statoreinrichtung 26 Holweckstufe, said outer stator 26 is integrally connected in the illustrated embodiment with a second housing part 28 and formed on the inside of the second housing part 28.

Desweiteren trägt die Rotorwelle 10 eine Antriebseinrichtung 30. Das druckseitige, in der Figur untere Ende der Rotorwelle 10 ist von einem Wälzlager 32 getragen. Das Wälzlager 32 ist in einem ersten Gehäuseteil 34 angeordnet.Furthermore, the rotor shaft 10 carries a drive means 30. The pressure-side, in the figure lower end of the rotor shaft 10 is supported by a roller bearing 32. The rolling bearing 32 is arranged in a first housing part 34.

Im dargestellten Ausführungsbeispiel ist zur Wärmeabfuhr der Antriebseinrichtung 30 bzw. des Motorstators der Antriebseinrichtung 30 der Motorstator fest mit einem Trägerteil 36 verbunden. Die Verbindung erfolgt insbesondere durch Verpressen. Das Trägerteil 36 trägt ferner die Statoreinrichtung 24, die ebenfalls durch Verpressen mit dem Trägerteil 36 verbunden ist. Das Trägerteil 36 ist sodann fest und wiederum gut wärmeleitfähig mit dem zweiten Gehäuseteil 28 verbunden. Die im Bereich der Holweckstufe erzeugte starke Wärme, sowie die von der Antriebseinrichtung 30 erzeugte starke Wärme wird somit aufgrund der gut wärmeleitfähigen Verpressungen nach außen in das zweite Gehäuseteil 28 eingeleitet.In the illustrated embodiment, the motor stator is fixedly connected to a support member 36 for heat dissipation of the drive device 30 and the motor stator of the drive device 30. The connection is made in particular by pressing. The support member 36 also carries the stator 24, which also by pressing with the support member 36th connected is. The support member 36 is then fixed and again good thermal conductivity connected to the second housing part 28. The strong heat generated in the region of the Holweck stage, as well as the strong heat generated by the drive device 30 is thus introduced to the outside in the second housing part 28 due to the good heat conductive compressions.

Getrennt hiervon ist das Lager 32 mit dem ersten Gehäuseteil 34 verbunden. Das erste Gehäuseteil 34 ist beispielweise mittels Schrauben oder dergleichen mit dem zweiten Gehäuseteil 28 verbunden. Gegebenenfalls ist in diesem Bereich zusätzlich eine Dichtung 38 vorgesehen. Insbesondere ist die Wärmeleitfähigkeit zwischen dem ersten Gehäuseteil 34 und dem zweiten Gehäusetel 28 möglichst gering. Es ist hierdurch möglich das erste Gehäuseteil 34 gesondert von dem zweiten Gehäuseteil 28 zu kühlen, sodass die Betriebstemperatur des Lagers 32 reduziert werden kann. Dies führt zu einer Verlängerung der Lebensdauer.Separately, the bearing 32 is connected to the first housing part 34. The first housing part 34 is connected to the second housing part 28, for example by means of screws or the like. Optionally, a seal 38 is additionally provided in this area. In particular, the thermal conductivity between the first housing part 34 and the second housing part 28 is as low as possible. It is thereby possible to cool the first housing part 34 separately from the second housing part 28, so that the operating temperature of the bearing 32 can be reduced. This leads to an extension of the service life.

Claims (6)

  1. A vacuum pump, in particular a turbomolecular pump, comprising
    rotor elements (20, 22) connected to a rotor shaft (10),
    at least one stator means (24, 26) cooperating with a rotor element (20, 22),
    an electric drive means (30) driving said rotor shaft (10),
    bearings (32) supporting said rotor shaft (10), and
    a housing including a plurality of housing portions (14, 28, 34),
    wherein heat-sensitive components (32), such as said bearings (32), are connected to a first housing portion (34), and strongly heat-generating components (30, 24, 26), such as said drive means (30), are connected to a second housing portion (28), and
    said second housing portion (28) is connected to said drive means (30) in a heat-conducting manner,
    characterized in that
    said second housing portion (28) is connected to said drive means (30) via a supporting portion (36), wherein said first housing portion (34) and said second housing portion (28) are connected to each other via a connection which is heat-conducting to a small extent, or which are thermally decoupled from each other.
  2. The vacuum pump according to claim 1, characterized in that the supporting portion (36) has connected thereto [gemäß Epoline] a Holweck stage, a Siegbahn stage, a Gaede stage or a lateral channel compressor.
  3. The vacuum pump according to claims 1-2, characterized in that the second housing portion (28) is connected, in particular press-fitted, to the supporting portion (36) and/or the drive means (30) and/or the stator means (24) in a good heat-conducting manner.
  4. The vacuum pump according to claims 1-3, characterized in that the first housing portion (34) is connected to one of the bearings, in particular the discharge-side bearing (32).
  5. The vacuum pump according to claims 1-4, characterized in that the first housing portion (34) is connected to a controller which in particular generates heat to a small extent.
  6. The vacuum pump according to claims 1-5, characterized in that the first housing portion (34) and the second housing portion (28) are connected to a separate cooling means.
EP14761870.6A 2013-09-24 2014-09-11 Vacuum pump Active EP3049676B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202013008470.7U DE202013008470U1 (en) 2013-09-24 2013-09-24 vacuum pump
PCT/EP2014/069344 WO2015043962A1 (en) 2013-09-24 2014-09-11 Vacuum pump

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EP3049676A1 EP3049676A1 (en) 2016-08-03
EP3049676B1 true EP3049676B1 (en) 2019-07-10

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EP14761870.6A Active EP3049676B1 (en) 2013-09-24 2014-09-11 Vacuum pump

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US (1) US10221864B2 (en)
EP (1) EP3049676B1 (en)
DE (1) DE202013008470U1 (en)
WO (1) WO2015043962A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202013008470U1 (en) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh vacuum pump

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62168993A (en) 1985-11-27 1987-07-25 Shimadzu Corp Heat pipe cooling type turbo molecular pump
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DE202013008470U1 (en) 2015-01-08
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EP3049676A1 (en) 2016-08-03
WO2015043962A1 (en) 2015-04-02

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