EP2846044B1 - Pompe à vide et système doté d'une pompe à vide - Google Patents

Pompe à vide et système doté d'une pompe à vide Download PDF

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Publication number
EP2846044B1
EP2846044B1 EP14181981.3A EP14181981A EP2846044B1 EP 2846044 B1 EP2846044 B1 EP 2846044B1 EP 14181981 A EP14181981 A EP 14181981A EP 2846044 B1 EP2846044 B1 EP 2846044B1
Authority
EP
European Patent Office
Prior art keywords
housing
vacuum pump
housing part
pump
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14181981.3A
Other languages
German (de)
English (en)
Other versions
EP2846044A1 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Robert Watz
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2846044A1 publication Critical patent/EP2846044A1/fr
Application granted granted Critical
Publication of EP2846044B1 publication Critical patent/EP2846044B1/fr
Active legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the invention relates to a vacuum pump and an arrangement with a vacuum pump.
  • Vacuum pumps in particular turbo-molecular pumps, have at least one rotor arranged in a pump housing.
  • the rotor is surrounded by one or more stators that are carried by the pump housing.
  • a drive device for example an electric motor, which drives the at least one rotor, is arranged within the pump housing.
  • the drive shaft is usually arranged axially to the rotor axis.
  • Turbomolecular pumps have opposite the inlet opening or the inlet nozzle has a very small outlet opening or a small outlet nozzle.
  • a backing pump is usually connected to the outlet connection via a line.
  • Arrangements with a vacuum pump and recipient hereinafter referred to as a chamber, are subject to a large number of requirements with regard to their geometric design.
  • a vacuum pump and recipient hereinafter referred to as a chamber
  • Arrangements with a vacuum pump and recipient are subject to a large number of requirements with regard to their geometric design.
  • mass spectrometers for example, there is a desire for compact dimensions of the overall system. This often leads to a positioning of the vacuum pump in the end device in which its accessibility is considerably restricted. Nevertheless, servicing these vacuum pumps, for example preventive replacement of rolling bearings, should be easy.
  • an arrangement with a vacuum pump which has a pump flange.
  • the arrangement has a chamber flange and a flange connection comprising the pump flange and the chamber flange for the vacuum-tight connection of the chamber and vacuum.
  • a force transmission structure is provided which transmits a force from an introduction point to at least one active point located in the flange connection.
  • the vacuum pump is usually arranged in a receptacle in the arrangement provided for this purpose.
  • the receptacle can be designed in the manner of a rail system.
  • the pump flange and chamber flange are connected to one another in a vacuum-tight manner.
  • the inlet openings of the pump are arranged in such a way that they are in alignment and overlapping with the outlet openings of the chamber are arranged.
  • This prior art pump can easily be pulled out of the arrangement after releasing the corresponding connecting and fastening means, for example in order to carry out a preventive exchange of rolling bearings.
  • Time-of-flight mass spectrometers are a subclass of mass spectrometers. It is a time-of-flight mass spectrometer.
  • split-flow pumps are vacuum pump systems for multi-stage gas inlet systems, such as those from the DE 43 31 589 A1 are known.
  • split-flow pumps which belong to the state of the art, usually have overall lengths of up to 500 millimeters.
  • housings can only be manufactured with very large and very expensive processing machines that are long enough to bridge the large distances between the suction openings.
  • EP 0 731 278 A1 belongs to a molecular vacuum pump, the housing of which is divided into several housing components.
  • This vacuum pump which belongs to the state of the art, can still be improved with regard to its operation in terms of vibration decoupling or thermal decoupling.
  • the technical problem on which the invention is based is to improve the vacuum pump belonging to the prior art and the arrangement with a vacuum pump in such a way that customer-specific requirements can be implemented more easily and inexpensively and that vacuum pumps with large overall lengths can be manufactured inexpensively.
  • the vacuum pump according to the invention with a housing and a pump unit which only has a drive unit for a rotor which is rotatably mounted in a stator, in which at least one additional housing part attached to the housing, which can be connected to the housing, is arranged in the axial direction, and in which an inlet opening is provided in the axial direction in the housing and an outlet opening is provided in the at least one additional housing part, is characterized in that the housing and the at least one attached housing part have a total length of at least 550 millimeters, preferably of at least 700 millimeters that the at least one attached housing part has no axial inlet and at least one radial inlet and that the at least one radial inlet of the attached housing part is preferably arranged at an end of the attached housing part remote from the drive, that in the housing and in the attached G epurteil at least partially pump-active structures of the vacuum pump are arranged, and that the inlet opening of the housing and the outlet opening of the attached housing part are designed to overlap.
  • the vacuum pump according to the invention has the advantage that the additional housing part attached in the axial direction enables the vacuum pump to have a large overall length, as is often required by customers.
  • a standard vacuum pump can be used, and the attached housing part then has the dimensions required for the customer-specific requirements.
  • vacuum pumps can be manufactured with a continuous housing with greater overall lengths, than is possible with the previously known tools.
  • the overall length of the housing is limited in length by the machine tools belonging to the prior art.
  • any length can in principle be created.
  • the attached housing part has the advantage over an attached pipe, for example, that the diameter and the outer contour of the housing are continuous and constant for the entire vacuum pump, so that flanges, openings, rail systems and the like in arrangements, for example with a mass spectrometer from the Pump according to the invention can be used.
  • attached pipes often have an angle in order to be able to be connected to an outlet of a pump chamber arranged in the radial direction to the longitudinal axis of the pump.
  • a vacuum pump belonging to the prior art with an attached pipe cannot be used in existing receptacles in an arrangement.
  • the at least one attached housing part has at least one radial inlet.
  • This radial inlet serves to connect to an outlet of a pump chamber of the arrangement in which the vacuum pump is arranged.
  • At least one thermally insulating and / or vibration decoupling and / or electrically insulating element is provided between the housing of the vacuum pump and the attached housing part.
  • This function can, for example, be integrated in a specially designed sealing element.
  • the attached housing part has a corresponding number of inlets, each of which is congruent with the outlet of the chambers.
  • a further advantageous embodiment of the invention provides that the at least one radial inlet of the attached housing part is arranged at an end of the attached housing part remote from the drive.
  • Arrangements for example with mass spectrometers with time-of-flight systems, often have considerable distances between the various suction openings.
  • the radial inlets in the attached housing part can be designed in a customer-specific manner, it is advantageous to have the at least one inlet or the last radial inlet at the end remote from the drive, i.e. at the end of the housing part which is arranged away from the active pumping structures. to be provided.
  • the housing of the vacuum pump has at least one radial inlet. This means that the vacuum pump itself already has at least one radial inlet in the housing to which the additional housing is attached.
  • the at least one attached housing part has at least partially an outer contour that is the same as that of the housing. This ensures that the housing of the vacuum pump and the attached housing part have the outer contour and shape of a single housing. This makes it possible to use the vacuum pump particularly advantageously in one Recording an arrangement, for example with a mass spectrometer, to be arranged.
  • the identical outer contours of the housing and the attached housing part can be interrupted, for example, by constrictions.
  • At least partially active pumping structures of the vacuum pump are arranged in the attached housing part.
  • An example not claimed provides that no pump-active structures of the vacuum pump are arranged in the attached housing part.
  • the at least one attached housing part forms a pure extension of the housing of the vacuum pump.
  • the housing and the at least one attached housing part have a total length of at least 550 millimeters.
  • Vacuum pump housings with lengths of less than 500 millimeters can be manufactured on conventional machines at the usual expense.
  • the housing and the at least one attached housing part advantageously have a total length of at least 700 millimeters.
  • the invention is particularly advantageous for lengths greater than 550 millimeters, for example Lengths of more than 700 millimeters can be used sensibly.
  • the inlet openings of the housing and the outlet opening of the attached housing part are designed to overlap. This ensures that the attached housing part acts like an extension of the housing of the vacuum pump.
  • the inlet opening of a first attached housing part and the outlet opening of a second attached housing part are also designed to overlap in order to enable a further extension of the housing.
  • the vacuum pump is designed as a turbo molecular pump.
  • the vacuum pump can be designed as a pump with at least two gas inlets.
  • This type of pump is also called a split flow pump.
  • This type of pump with a multi-stage gas inlet system is often used in arrangements with, for example, mass spectrometers. With these arrangements in particular, a design of the housing that is adapted to customer-specific requirements is also often desired.
  • the vacuum pump can, for example, have at least one turbo-molecular pump stage and / or at least one Holweck pump stage.
  • the at least one Holweck pump stage is usually arranged downstream of the at least one turbo-molecular pump stage in the direction of gas delivery.
  • the gas inlets are preferably arranged in front of, between or behind the turbo molecular pump stages and / or Holweck pump stages.
  • the inventive arrangement according to claim 5 with a vacuum pump with the features according to claim 1 is characterized in that the arrangement has a mass spectrometer, that the arrangement has at least one pump flange and a chamber with a chamber flange, the arrangement having a pump flange and a chamber flange has comprehensive flange connection for the vacuum-tight connection of the chamber and vacuum pump, and that the at least one attached housing part has at least one radial inlet which is designed to be connectable to at least one chamber of the arrangement.
  • the vacuum pump can be used in an arrangement with several suction openings, in which the suction openings are far apart, without particularly high processing and manufacturing costs in the manufacture of the housing.
  • the arrangement has a force transmission structure which is designed as a force transmission structure which transmits a force from an introduction point to at least one active point located in the flange connection.
  • This power transmission structure is in the EP 2 228 540 A2 described.
  • the arrangement according to the invention is used in arrangements with mass spectrometers, since in these arrangements there are several gas inlets which, under certain circumstances, have suction openings that are far apart.
  • the housing of the vacuum pump and the at least one attached housing part have an outer contour that is adapted to a receptacle arranged in the arrangement. This makes it possible to insert the vacuum pump with the at least one attached housing part into a predetermined structure of an arrangement.
  • the recordings in the arrangements for housings of vacuum pumps are the outer contour of the housing of the vacuum pump adapted.
  • the attached housing part has the same outer contour so that the housing can also be accommodated with the attached housing part without any problems.
  • the at least one attached housing part is offset from the housing of the vacuum pump. This configuration is implemented with corresponding customer-specific requirements.
  • the pump according to the invention is advantageously fastened in an arrangement with a rail system.
  • the rail system allows the vacuum pump to be assembled and disassembled from one side by axially pushing it in or pulling it out, as in the EP 2 228 540 A2 described.
  • the pump must then only be accessible from one side for assembly and disassembly, which means that the systems can be built more compactly and the pump can be serviced or replaced with less effort.
  • the areas between the sealing levels on the attached housing parts are set back, so that due to crowning and other shapes and bearing errors, the housing is not put under tension and is thus impermissibly deformed.
  • a modular construction of a housing of a vacuum pump as a basic pump with different housing extensions, that is to say housing parts of different lengths, is possible with the invention.
  • Fig. 1 shows a not claimed vacuum pump 1 with a housing 2.
  • the vacuum pump 1 has a rotor 3 which carries rotor blades 4.
  • the rotor blades 4 alternate with stator blades 5 and form different vacuum pump stages of pump 1.
  • the rotor 3 is mounted on the high vacuum side by means of a bearing star 6. For the sake of clarity, the bearings are not shown. On the fore-vacuum side, the rotor 3 is also supported by means of bearings, for example ball bearings.
  • the housing 2 of the vacuum pump 1 has an axial inlet 7.
  • two radial inlets 8 and 9 are provided.
  • the housing part 10 has the same cross section and the same outer contour as the housing 2.
  • An outlet 12 of the housing part 10 is designed so that it completely overlaps the inlet 7 of the housing 2.
  • the housing 2 also has a radial outlet 13 which can be connected, for example, to a backing pump (not shown).
  • the pump-active structures such as rotor 3, rotor blades 4, stator blades 5, bearing star 6 are shown in FIG Fig. 1 arranged completely in the housing 2.
  • the attached housing part 10 merely forms an extension of the housing part 2. This example makes it possible for the housing 2 and the attached housing part 10 to have a total length L of at least 550 millimeters, preferably of at least 700 millimeters. This makes it possible to arrange the suction opening 11 relatively far away from the suction openings 8, 9 without the housing 2, if it were made in one piece, it would have to be manufactured with complex manufacturing machines.
  • an interface 19 is provided, which is in the Figures 5 to 8 is described.
  • Fig. 2 Z shows the vacuum pump 1 with the housing 2 and the attached housing part 10.
  • the housing 2 has only one radial inlet 9.
  • the attached housing part 10 extends the overall length of the housing part 2, so that the overall length of the housing 2 and the attached housing part 10 are almost twice as long as the overall length of the housing part 2.
  • the active pumping structures are arranged in the attached housing part 10.
  • the bearing star 6 and the pump stage arranged on the high vacuum side are located in the attached housing part 10.
  • Fig. 3 shows a further vacuum pump 1, in which no active pumping structures are shown within the housing 2.
  • the inlets 8, 9 and the radial outlet 13 are arranged.
  • the housing part 10 has a radial inlet 11.
  • the housing 2 also has a constriction 14 in order to reduce a reduction in the heat flow from the high vacuum to the rotor or to the housing part 2.
  • Fig. 4 shows the vacuum pump 1 with the housing 2 and the attached housing part 10 as well as the inlets 8, 9 and 11.
  • the housing and the housing part 10 have the same outer contour.
  • cooling fins 15 of housing 2 continue with identical shape as cooling fins 16 on housing part 10.
  • the constriction 14 can also be clearly seen.
  • strips 17, 18 are arranged on the housing 2 and on the housing part 10, which ensure additional stabilization of the housing parts 2, 10 with respect to one another and over the entire length of the vacuum pump 1.
  • FIG. Fig. 5 which represents an exemplary embodiment not belonging to the invention, an O-ring seal 20 is provided in the interface 19 in order to achieve a vacuum-tight connection between the housing 2 and the housing part 10.
  • the interface 19 has a sealing element 21 in addition to the O-ring 20.
  • the sealing element can be designed as a thermal and / or vibration-decoupling and / or electrical sealing element.
  • Fig. 7 shows the interface 19 with the O-ring 20 and a sealing element 22, which can also be designed as a thermal and / or vibration-decoupling and / or electrical sealing element 22.
  • a screw connection for connecting the housing 2 and the housing part 10 is shown. These The screw connection is used for the vacuum-tight and mechanical connection of the housing 2 and the housing part 10.
  • the screw connection consists of a screw 25 and a washer 26, which is mounted on an elastomer 24 for vibration decoupling.
  • a sleeve 23 is provided as a force transmission element.
  • Fig. 9 shows the arrangement of a not claimed vacuum pump 1, which is shown in an overall system with an arrangement of the vacuum pump 1 and a chamber 102.
  • the chamber 102 is designed as a multi-chamber system for differential pumping and therefore has a fore-vacuum chamber 121, a middle chamber 122, a further middle chamber 123 and a high-vacuum chamber 166. These chambers are connected to one another via openings 125, 126, 167, through which, for example, a gas particle beam passes.
  • a detector for example a mass spectrometer 124, is provided in the high vacuum chamber 166 and is controlled by a control assembly 136.
  • the chamber 102 has a chamber flange 120 to which a pump flange 110 is connected.
  • the pump flange 110 is part of the vacuum pump 1, which comprises a shaft 111 which is rotatably supported by a bearing 113 on the high vacuum side, for example a permanent magnet bearing.
  • the shaft 111 is set in rotation by a drive 114, so that compression and pumping speed are built up in the pump stages 115, 116.
  • the inlet of the pump stage 115 is connected to the central chamber 122 via a suction opening 127.
  • the pumping stage 116 is connected to the central chamber 123 via the suction opening 128.
  • the pumping stage 168 protrudes the suction port 169 with the high vacuum pumping chamber 166 in communication.
  • the outlets of the vacuum pump 1 and the fore-vacuum chamber 121 are connected via a fore-vacuum feed line 141 to a fore-pump 140, which further the gas condenses and expels against the atmosphere.
  • the pump stages 115, 116 and 168 are preferably designed as turbo-molecular pump stages.
  • the vacuum pump 1 and chamber 102 are supported by a frame 130.
  • the vacuum pump 1 is connected to the vacuum-tight chamber via a flange connection, that is to say via its flange and a pump flange.
  • This frame 130 also carries the control assembly 136 of the mass spectrometer as well as further components 133, 134, 135, for example power supply units, processing units and the like.
  • the frame 130 is covered with a cladding 131.
  • the vacuum pump 1 and the chamber 102 are accessible through a flap 132, but are surrounded by the other assemblies and components carried by the frame 130.
  • the flange connection is therefore difficult and essentially only accessible from the side facing the flap 132.
  • the assembly and disassembly of the vacuum pump can therefore only be carried out from this side.
  • the vacuum pump 1 has the housing 2 and the attached housing part 10.
  • the attached housing part 10 has the inlet 11, which is in communication with the suction opening 169. Due to the attached housing part 10, the vacuum pump has an overall length which, due to the in Fig. 9 arrangement shown is required.
  • the assembly is easy by the power transmission structure according to the Fig. 10 and 11 enables.
  • Fig. 10 shows a power transmission structure 165 in cross section to the shaft 111 through the vacuum pump and flange connection along the line II 'of FIG Fig. 9 .
  • Chamber flange 120 and pump flange 110 touch one another.
  • a seal 119 is provided which surrounds the suction opening 127 on the flange.
  • the spacer sleeve 118 provided between the pump stages and their components spaced apart and the last stator disk 117 of the high vacuum-side pump stage 168 can be seen in this section.
  • a fastening screw 151 fastens a bracket 150 to the chamber flange.
  • a first expansion element 152 and a second expansion element 153 are arranged between the bracket and the pump flange.
  • Fig. 11 is the corresponding section along the line II-II 'of Fig. 10 and shown parallel to shaft 111. It can be seen that part of the bracket 150, first expansion element 152, second expansion element 153 and part of pump flange 110 lie in a common plane.
  • the first expansion element 152 has a wedge surface 158 ′ and the second expansion element 153 has a wedge surface 158.
  • These wedge surfaces 158, 158 ′ touch one another in such a way that they can be displaced with respect to one another.
  • the displacement is brought about by a force introduction screw 155, which protrudes through a through hole in an arm 154 of the first expansion element and whose threaded part engages in a thread of the second expansion element 153.
  • the spreading elements 152, 153 have the effect that a force is transmitted from the introduction point 156 to an effective point 159 in the force transmission structure 165.
  • This power transmission makes it possible to generate a pressing force 160 even at the points that are associated with Fig. 9 and components surrounding the vacuum pump 1 are not accessible.
  • Another advantage of this example is that, in addition to the transmission of force, there is also force distribution via the pump flange and thus uniform contact pressure is achieved.
  • the force distribution of the force introduced on the flange 10 can be adjusted with the number of wedge surfaces and their angles.
  • the vacuum pump 1 can easily be in an arrangement as in Fig. 9 shown, assemble.
  • the vacuum pump is, as according to the Fig. 10 and 11 described, firmly fixed in the arrangement.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (7)

  1. Pompe à vide munie d'un boîtier et d'une unité de pompe, qui comprend uniquement une unité d'entraînement pour un rotor, qui est monté de manière rotative dans un stator, dans laquelle au moins une partie de boîtier supplémentaire rattachée (10), pouvant être reliée au boîtier (2), est agencée sur le boîtier (2) dans la direction axiale, et dans laquelle une ouverture d'entrée (7) est prévue dans la direction axiale dans le boîtier (2) et une ouverture de sortie (12) est prévue dans l'au moins une partie de boîtier supplémentaire (10),
    le boîtier (2) et l'au moins une partie de boîtier rattachée (10) présentant une longueur totale (L) d'au moins 550 millimètres, de préférence d'au moins 700 millimètres,
    l'au moins une partie de boîtier rattachée (10) ne comprenant pas d'entrée axiale et comprenant au moins une entrée radiale (11), et
    l'au moins une entrée radiale (11) de la partie de boîtier rattachée (10) étant de préférence agencée à une extrémité éloignée de l'entraînement de la partie de boîtier rattachée (10),
    des structures actives en pompage (4, 5, 6) de la pompe à vide (1) étant agencées au moins partiellement dans le boîtier (2) et dans la partie de boîtier rattachée (10), et
    l'ouverture d'entrée (7) du boîtier et l'ouverture de sortie (12) de la partie de boîtier rattachée (10) étant configurées pour se recouvrir.
  2. Pompe à vide selon la revendication 1, caractérisée en ce que le boîtier (2) de la pompe à vide (1) comprend au moins une entrée radiale (8, 9).
  3. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que l'au moins une partie de boîtier rattachée (10) présente un contour extérieur identique à celui du boîtier (2).
  4. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que la pompe à vide (1) comprend au moins un étage de pompe turbomoléculaire et/ou au moins un étage de pompe Holweck et au moins deux entrées de gaz (8, 9, 11).
  5. Agencement muni d'une pompe à vide ayant les caractéristiques selon la revendication 1, caractérisé en ce que l'agencement comprend un spectromètre de masse, en ce que l'agencement comprend au moins une bride de pompe et une chambre munie d'une bride de chambre, l'agencement comprenant une liaison à bride comprenant une bride de pompe et une bride de chambre pour la liaison étanche au vide de la chambre et de la pompe à vide, et en ce que l'au moins une entrée radiale (11) est configurée pour pouvoir être reliée à au moins une chambre (166) de l'agencement.
  6. Agencement selon la revendication 5, caractérisé en ce que l'agencement comprend une structure de transmission de force (165), qui est configurée sous la forme d'une structure de transmission de force (165) transmettant une force depuis un point d'introduction (156) jusqu'à au moins un point d'action (159) situé dans la liaison à bride (110, 120).
  7. Agencement selon l'une quelconque des revendications 5 ou 6, caractérisé en ce que le boîtier (2) de la pompe à vide (1) et l'au moins une partie de boîtier rattachée (10) présentent un contour extérieur adapté à un logement agencé dans l'agencement.
EP14181981.3A 2013-09-04 2014-08-22 Pompe à vide et système doté d'une pompe à vide Active EP2846044B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013109637.9A DE102013109637A1 (de) 2013-09-04 2013-09-04 Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe

Publications (2)

Publication Number Publication Date
EP2846044A1 EP2846044A1 (fr) 2015-03-11
EP2846044B1 true EP2846044B1 (fr) 2021-10-13

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Family Applications (1)

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EP14181981.3A Active EP2846044B1 (fr) 2013-09-04 2014-08-22 Pompe à vide et système doté d'une pompe à vide

Country Status (4)

Country Link
US (1) US20150064033A1 (fr)
EP (1) EP2846044B1 (fr)
JP (1) JP5902777B2 (fr)
DE (1) DE102013109637A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3085963B1 (fr) * 2015-04-20 2019-09-04 Pfeiffer Vacuum Gmbh Pompe à vide
EP3112688B2 (fr) * 2015-07-01 2022-05-11 Pfeiffer Vacuum GmbH Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé
DE102015111049B4 (de) 2015-07-08 2022-10-13 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3135917B1 (fr) * 2015-08-24 2020-10-07 Pfeiffer Vacuum Gmbh Pompe à vide
JP6578838B2 (ja) * 2015-09-15 2019-09-25 株式会社島津製作所 真空ポンプおよび質量分析装置
WO2020071872A1 (fr) * 2018-10-05 2020-04-09 (주)오메가오토메이션 Ensemble logement de pompe à vide à anneau liquide

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EP1715190A1 (fr) * 2005-04-23 2006-10-25 Pfeiffer Vacuum GmbH Dispositif réduisant les vibrations et système de pompe à vide ainsi équipé

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DE102013109637A1 (de) 2015-03-05
JP2015048849A (ja) 2015-03-16
US20150064033A1 (en) 2015-03-05
JP5902777B2 (ja) 2016-04-13
EP2846044A1 (fr) 2015-03-11

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