EP2614399A1 - Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene - Google Patents
Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebeneInfo
- Publication number
- EP2614399A1 EP2614399A1 EP11763877.5A EP11763877A EP2614399A1 EP 2614399 A1 EP2614399 A1 EP 2614399A1 EP 11763877 A EP11763877 A EP 11763877A EP 2614399 A1 EP2614399 A1 EP 2614399A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- laser light
- light sources
- lighting device
- laser
- intensity distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V7/00—Reflectors for light sources
- F21V7/0083—Array of reflectors for a cluster of light sources, e.g. arrangement of multiple light sources in one plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2103/00—Elongate light sources, e.g. fluorescent tubes
- F21Y2103/10—Elongate light sources, e.g. fluorescent tubes comprising a linear array of point-like light-generating elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2115/00—Light-generating elements of semiconductor light sources
- F21Y2115/10—Light-emitting diodes [LED]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0905—Dividing and/or superposing multiple light beams
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Lasers (AREA)
- Semiconductor Lasers (AREA)
- Laser Beam Processing (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010044875A DE102010044875A1 (de) | 2010-09-09 | 2010-09-09 | Beleuchtungsvorrichtung zur Erzeugung einer linienförmigen Intensitätsverteilung in einer Arbeitsebene |
PCT/EP2011/065553 WO2012032116A1 (de) | 2010-09-09 | 2011-09-08 | Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2614399A1 true EP2614399A1 (de) | 2013-07-17 |
Family
ID=44720857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11763877.5A Withdrawn EP2614399A1 (de) | 2010-09-09 | 2011-09-08 | Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene |
Country Status (7)
Country | Link |
---|---|
US (1) | US8967826B2 (ja) |
EP (1) | EP2614399A1 (ja) |
JP (1) | JP5918768B2 (ja) |
KR (1) | KR101769653B1 (ja) |
CN (1) | CN103180774B (ja) |
DE (1) | DE102010044875A1 (ja) |
WO (1) | WO2012032116A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014095836A1 (en) | 2012-12-20 | 2014-06-26 | Shell Internationale Research Maatschappij B.V. | Pipe connector and method |
FR3012226B1 (fr) * | 2013-10-18 | 2015-10-30 | Saint Gobain | Appareil laser modulaire |
US20170145554A1 (en) | 2014-06-26 | 2017-05-25 | Shell Oil Company | Coating method and coated substrate |
US11224937B2 (en) * | 2015-12-25 | 2022-01-18 | Hon Hai Precision Industry Co., Ltd. | Line beam light source, line beam irradiation device, and laser lift off method |
DE102019102511B4 (de) * | 2019-01-31 | 2020-08-20 | Trumpf Laser- Und Systemtechnik Gmbh | Lasersystem |
US11237483B2 (en) | 2020-06-15 | 2022-02-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for controlling droplet in extreme ultraviolet light source |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0260179A (ja) * | 1988-08-26 | 1990-02-28 | Fuji Photo Film Co Ltd | 合波用レーザ光源装置 |
WO1997031284A1 (de) * | 1996-02-23 | 1997-08-28 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Anordnung zur formung des geometrischen querschnitts mehrerer festkörper- und/oder halbleiterlaser |
CN1101544C (zh) * | 1998-01-07 | 2003-02-12 | 中国科学院大连化学物理研究所 | 一种紫外拉曼光谱仪 |
IL140386A0 (en) | 2000-12-18 | 2002-02-10 | Rayteq Laser Ind Ltd | Optical device for unifying light beams emitted by several light sources |
US20020051360A1 (en) | 1998-11-04 | 2002-05-02 | Solodovnikov Vladimir Vadimovich | Method and apparatus for unifying light beams |
US6356577B1 (en) * | 1999-07-15 | 2002-03-12 | Silicon Light Machines | Method and apparatus for combining light output from multiple laser diode bars |
JP2001215443A (ja) * | 2000-02-04 | 2001-08-10 | Hamamatsu Photonics Kk | 光学装置 |
DE10061265A1 (de) | 2000-12-06 | 2002-06-27 | Jenoptik Jena Gmbh | Diodenlaseranordnung |
US7148933B2 (en) * | 2002-05-03 | 2006-12-12 | Hewlett-Packard Development Company, L.P. | Projector having alignment optics and electronics |
CN100406872C (zh) * | 2002-11-04 | 2008-07-30 | 天津市先石光学技术有限公司 | 复合光谱测量方法及其光谱检测仪器 |
DE10306668B4 (de) * | 2003-02-13 | 2009-12-10 | Xtreme Technologies Gmbh | Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas |
JP2004354898A (ja) * | 2003-05-30 | 2004-12-16 | Toshiba Corp | 光モジュール、光ファイバレーザ装置、映像表示装置 |
US20080225361A1 (en) * | 2004-01-29 | 2008-09-18 | Matsushita Electric Industrial Co., Ltd. | Light Source Device, and Two-Dimensional Image Display Device |
JP4121477B2 (ja) * | 2004-03-31 | 2008-07-23 | 三洋電機株式会社 | 照明装置及び投写型映像表示装置 |
ATE405976T1 (de) | 2004-07-19 | 2008-09-15 | Trumpf Laser Gmbh & Co Kg | Diodenlaseranordnung und strahlformungseinheit dafür |
JP4739819B2 (ja) * | 2005-05-31 | 2011-08-03 | リコー光学株式会社 | 光束配列密度変換方法および光束配列密度変換部材および光源装置 |
WO2007019878A1 (de) | 2005-08-19 | 2007-02-22 | Limo Patentverwaltung Gmbh & Co. Kg | Laseranordnung |
US7494272B2 (en) | 2006-06-27 | 2009-02-24 | Applied Materials, Inc. | Dynamic surface annealing using addressable laser array with pyrometry feedback |
EP2003484B1 (en) | 2007-06-12 | 2018-04-11 | Lumentum Operations LLC | A Light Source |
EP2061122B1 (en) * | 2007-11-16 | 2014-07-02 | Fraunhofer USA, Inc. | A high power laser diode array comprising at least one high power diode laser, laser light source comprising the same and method for production thereof |
DE102008027231B4 (de) * | 2008-06-06 | 2016-03-03 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Strahlformung |
-
2010
- 2010-09-09 DE DE102010044875A patent/DE102010044875A1/de not_active Withdrawn
-
2011
- 2011-09-08 WO PCT/EP2011/065553 patent/WO2012032116A1/de active Application Filing
- 2011-09-08 US US13/822,061 patent/US8967826B2/en not_active Expired - Fee Related
- 2011-09-08 CN CN201180043579.4A patent/CN103180774B/zh active Active
- 2011-09-08 JP JP2013527602A patent/JP5918768B2/ja active Active
- 2011-09-08 EP EP11763877.5A patent/EP2614399A1/de not_active Withdrawn
- 2011-09-08 KR KR1020137008644A patent/KR101769653B1/ko active IP Right Grant
Non-Patent Citations (1)
Title |
---|
See references of WO2012032116A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP2013541419A (ja) | 2013-11-14 |
DE102010044875A1 (de) | 2012-03-15 |
US20130182435A1 (en) | 2013-07-18 |
US8967826B2 (en) | 2015-03-03 |
CN103180774A (zh) | 2013-06-26 |
KR20140004070A (ko) | 2014-01-10 |
WO2012032116A1 (de) | 2012-03-15 |
KR101769653B1 (ko) | 2017-08-18 |
CN103180774B (zh) | 2016-09-21 |
JP5918768B2 (ja) | 2016-05-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20130409 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
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DAX | Request for extension of the european patent (deleted) | ||
17Q | First examination report despatched |
Effective date: 20150917 |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: LIMO GMBH |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20190402 |