EP2614399A1 - Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene - Google Patents

Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene

Info

Publication number
EP2614399A1
EP2614399A1 EP11763877.5A EP11763877A EP2614399A1 EP 2614399 A1 EP2614399 A1 EP 2614399A1 EP 11763877 A EP11763877 A EP 11763877A EP 2614399 A1 EP2614399 A1 EP 2614399A1
Authority
EP
European Patent Office
Prior art keywords
laser light
light sources
lighting device
laser
intensity distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11763877.5A
Other languages
German (de)
English (en)
French (fr)
Inventor
Aleksei Mikhailov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Limo GmbH
Original Assignee
Limo Patentverwaltung GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Limo Patentverwaltung GmbH and Co KG filed Critical Limo Patentverwaltung GmbH and Co KG
Publication of EP2614399A1 publication Critical patent/EP2614399A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00Reflectors for light sources
    • F21V7/0083Array of reflectors for a cluster of light sources, e.g. arrangement of multiple light sources in one plane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073Shaping the laser spot
    • B23K26/0738Shaping the laser spot into a linear shape
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2051Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2053Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21YINDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2103/00Elongate light sources, e.g. fluorescent tubes
    • F21Y2103/10Elongate light sources, e.g. fluorescent tubes comprising a linear array of point-like light-generating elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21YINDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00Light-generating elements of semiconductor light sources
    • F21Y2115/10Light-emitting diodes [LED]
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905Dividing and/or superposing multiple light beams

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Lasers (AREA)
  • Semiconductor Lasers (AREA)
  • Laser Beam Processing (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
EP11763877.5A 2010-09-09 2011-09-08 Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene Withdrawn EP2614399A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010044875A DE102010044875A1 (de) 2010-09-09 2010-09-09 Beleuchtungsvorrichtung zur Erzeugung einer linienförmigen Intensitätsverteilung in einer Arbeitsebene
PCT/EP2011/065553 WO2012032116A1 (de) 2010-09-09 2011-09-08 Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene

Publications (1)

Publication Number Publication Date
EP2614399A1 true EP2614399A1 (de) 2013-07-17

Family

ID=44720857

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11763877.5A Withdrawn EP2614399A1 (de) 2010-09-09 2011-09-08 Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene

Country Status (7)

Country Link
US (1) US8967826B2 (ja)
EP (1) EP2614399A1 (ja)
JP (1) JP5918768B2 (ja)
KR (1) KR101769653B1 (ja)
CN (1) CN103180774B (ja)
DE (1) DE102010044875A1 (ja)
WO (1) WO2012032116A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014095836A1 (en) 2012-12-20 2014-06-26 Shell Internationale Research Maatschappij B.V. Pipe connector and method
FR3012226B1 (fr) * 2013-10-18 2015-10-30 Saint Gobain Appareil laser modulaire
US20170145554A1 (en) 2014-06-26 2017-05-25 Shell Oil Company Coating method and coated substrate
US11224937B2 (en) * 2015-12-25 2022-01-18 Hon Hai Precision Industry Co., Ltd. Line beam light source, line beam irradiation device, and laser lift off method
DE102019102511B4 (de) * 2019-01-31 2020-08-20 Trumpf Laser- Und Systemtechnik Gmbh Lasersystem
US11237483B2 (en) 2020-06-15 2022-02-01 Taiwan Semiconductor Manufacturing Co., Ltd. Method and apparatus for controlling droplet in extreme ultraviolet light source

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0260179A (ja) * 1988-08-26 1990-02-28 Fuji Photo Film Co Ltd 合波用レーザ光源装置
WO1997031284A1 (de) * 1996-02-23 1997-08-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Anordnung zur formung des geometrischen querschnitts mehrerer festkörper- und/oder halbleiterlaser
CN1101544C (zh) * 1998-01-07 2003-02-12 中国科学院大连化学物理研究所 一种紫外拉曼光谱仪
IL140386A0 (en) 2000-12-18 2002-02-10 Rayteq Laser Ind Ltd Optical device for unifying light beams emitted by several light sources
US20020051360A1 (en) 1998-11-04 2002-05-02 Solodovnikov Vladimir Vadimovich Method and apparatus for unifying light beams
US6356577B1 (en) * 1999-07-15 2002-03-12 Silicon Light Machines Method and apparatus for combining light output from multiple laser diode bars
JP2001215443A (ja) * 2000-02-04 2001-08-10 Hamamatsu Photonics Kk 光学装置
DE10061265A1 (de) 2000-12-06 2002-06-27 Jenoptik Jena Gmbh Diodenlaseranordnung
US7148933B2 (en) * 2002-05-03 2006-12-12 Hewlett-Packard Development Company, L.P. Projector having alignment optics and electronics
CN100406872C (zh) * 2002-11-04 2008-07-30 天津市先石光学技术有限公司 复合光谱测量方法及其光谱检测仪器
DE10306668B4 (de) * 2003-02-13 2009-12-10 Xtreme Technologies Gmbh Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas
JP2004354898A (ja) * 2003-05-30 2004-12-16 Toshiba Corp 光モジュール、光ファイバレーザ装置、映像表示装置
US20080225361A1 (en) * 2004-01-29 2008-09-18 Matsushita Electric Industrial Co., Ltd. Light Source Device, and Two-Dimensional Image Display Device
JP4121477B2 (ja) * 2004-03-31 2008-07-23 三洋電機株式会社 照明装置及び投写型映像表示装置
ATE405976T1 (de) 2004-07-19 2008-09-15 Trumpf Laser Gmbh & Co Kg Diodenlaseranordnung und strahlformungseinheit dafür
JP4739819B2 (ja) * 2005-05-31 2011-08-03 リコー光学株式会社 光束配列密度変換方法および光束配列密度変換部材および光源装置
WO2007019878A1 (de) 2005-08-19 2007-02-22 Limo Patentverwaltung Gmbh & Co. Kg Laseranordnung
US7494272B2 (en) 2006-06-27 2009-02-24 Applied Materials, Inc. Dynamic surface annealing using addressable laser array with pyrometry feedback
EP2003484B1 (en) 2007-06-12 2018-04-11 Lumentum Operations LLC A Light Source
EP2061122B1 (en) * 2007-11-16 2014-07-02 Fraunhofer USA, Inc. A high power laser diode array comprising at least one high power diode laser, laser light source comprising the same and method for production thereof
DE102008027231B4 (de) * 2008-06-06 2016-03-03 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Strahlformung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2012032116A1 *

Also Published As

Publication number Publication date
JP2013541419A (ja) 2013-11-14
DE102010044875A1 (de) 2012-03-15
US20130182435A1 (en) 2013-07-18
US8967826B2 (en) 2015-03-03
CN103180774A (zh) 2013-06-26
KR20140004070A (ko) 2014-01-10
WO2012032116A1 (de) 2012-03-15
KR101769653B1 (ko) 2017-08-18
CN103180774B (zh) 2016-09-21
JP5918768B2 (ja) 2016-05-18

Similar Documents

Publication Publication Date Title
DE19800590B4 (de) Optische Anordnung zur Symmetrierung der Strahlung eines oder mehrerer übereinander angeordneter Hochleistungsdiodenlaser
DE19632460C1 (de) Optische Vorrichtung zum Homogenisieren von Laserstrahlung und Erzeugen von mehreren Beleuchtungsfeldern
EP2430491B1 (de) Vorrichtung zur formung von laserstrahlung sowie laservorrichtung mit einer derartigen vorrichtung
WO2020016336A1 (de) Vorrichtung, lasersystem und verfahren zur kombination von kohärenten laserstrahlen
EP2614399A1 (de) Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene
EP1081819A2 (de) Optische Anordnung zur Verwendung bei einer Laserdiodenanordnung sowie Laserdiodenanordnung mit einer solchen optischen Anordnung
EP2217961A1 (de) Vorrichtung zur strahlformung
EP1839083A1 (de) Vorrichtung zur homogenisierung von licht
DE102007061358B4 (de) Vorrichtung zur Formung von Laserstrahlung
EP2401646A1 (de) Vorrichtung zur homogenisierung von laserstrahlung
WO2008006460A1 (de) Vorrichtung zur homogenisierung von licht sowie laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene
EP2976672B1 (de) Vorrichtung zur homogenisierung eines laserstrahls
DE102012107456A1 (de) Anordnung zur Formung von Laserstrahlung
DE102021101373A1 (de) Anordnung zur Lasermaterialbearbeitung
WO2014140285A1 (de) Laserdiodenbarrenbeleuchtungsvorrichtung
EP2960706B1 (de) Beleuchtungsvorrichtung für ein optisches beobachtungsgerät
EP2165235A1 (de) Vorrichtung zur formung von laserstrahlung
DE102013114083A1 (de) Vorrichtung zur Formung von Laserstrahlung
WO2001069304A1 (de) Laseroptik sowie diodenlaser
DE102010045620B4 (de) Vorrichtung zur Erzeugung einer linienförmigen Intensitätsverteilung in einer Arbeitsebene
WO2021144250A1 (de) Vorrichtung, lasersystem und verfahren zur kombination von kohärenten laserstrahlen
DE102011085978A1 (de) Laser-leuchtstoff-vorrichtung mit laserarray
DE10062453A1 (de) Verfahren und Vorrichtung zur Überlagerung von Strahlenbündeln
DE10007123A1 (de) Optische Anordnung zur Verwendung bei einer Laserdiodenanordnung sowie Laserdiodenanordnung mit einer solchen Anordnung
DE10062454B4 (de) Verfahren und Vorrichtung zur Überlagerung von Strahlenbündeln

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20130409

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20150917

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: LIMO GMBH

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20190402