EP2510236A1 - Element flexible pour micro-pompe - Google Patents
Element flexible pour micro-pompeInfo
- Publication number
- EP2510236A1 EP2510236A1 EP10803638A EP10803638A EP2510236A1 EP 2510236 A1 EP2510236 A1 EP 2510236A1 EP 10803638 A EP10803638 A EP 10803638A EP 10803638 A EP10803638 A EP 10803638A EP 2510236 A1 EP2510236 A1 EP 2510236A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- micro
- pump according
- membrane
- actuator
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 claims abstract description 10
- 239000012528 membrane Substances 0.000 claims description 32
- 238000004026 adhesive bonding Methods 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000003292 glue Substances 0.000 claims description 3
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000008602 contraction Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
Definitions
- the invention relates to micro-pumps obtained by micromachining and activatable by means of an actuator such as a piezoelectric element.
- these devices are in the form of a stack, or a support plate, an intermediate layer acting as a flexible membrane, a pumping chamber and a closure plate, the pumping chamber communicating with the outside, p. ex. through the support plate.
- Part of the membrane is secured to a piezoelectric element disposed outside the device. The connection between these two elements is achieved via at least one element, e.g. ex. a block obtained by micromachining in the support plate.
- the problem that the present invention proposes to solve lies in the difficulty of ensuring a high-performance link between a membrane and an actuator that deforms when activated.
- the solution of the aforementioned problem consists of a micro-pump in the form of a stack successively comprising a support plate, an intermediate layer acting as a flexible membrane, a pumping chamber and a closure plate said pump chamber communicating with the outside of the micro-pump, e.g. ex. through the support plate, said membrane being secured to an actuator disposed outside the micro-pump, the connection being made through a passage passing through the support plate.
- the actuator can be chosen from piezoelectric bi-morphs, piezoelectric multi-morphs, thermal bi-morphs or shape-memory alloy beams.
- this type of actuator can exert significant forces, typically of the order of 0.1 N to 100 N.
- this type of actuator can exert a small amplitude movement along a non-rectilinear trajectory, for example on a circular arc.
- the length of the trajectory may be less than 1 mm.
- the invention is characterized in that the membrane is secured to the actuator by means of at least one element in the form of a strip, rigid along its main axis and flexible in the direction perpendicular to its main axis. Rigidity allows the force of the actuator to be transmitted in a linear movement of the membrane while the flexibility ensures the lateral transmission of this force.
- the actuator is a bi-morphic piezoelectric blade.
- the actuator comprises a fixed end and a free end, the latter being disposed cantilever at the exit of the passage.
- One end of the band being attached to said free end.
- the strip is adhesively bonded to the piezoelectric element.
- the strip is in direct contact with the membrane.
- the band is preferably fixed by gluing to the membrane.
- the end of the strip which is attached to the membrane preferably has holes or a crenellated contour.
- the tape may be made of any material that achieves the intended purpose.
- it is made of stainless steel.
- the piezoelectric element comprises electrical contacts disposed near said fixed end.
- a particularly interesting configuration is to fix the micro-pump on a rigid part, on which part is also fixed said fixed end of the piezoelectric element.
- the constituent elements of this set thus form a closed loop.
- the bonding between the membrane of the micropump and the flexible element is then carried out last. In this way these two elements are fixed in their relative position by the other elements and fasteners of the loop.
- the last fixation (eg gluing) allows to absorb the variations of geometry and to avoid the hyper - statisms by fixing this relative position.
- FIG. 1 shows a type of micro-pump that can be used in the context of the present invention.
- FIG. 2 represents an embodiment variant according to the invention.
- Figure 3 shows a way of securing the tape to the membrane.
- the micro-pump illustrated in FIG. 1 is formed preferably of elements made of silicon and glass. It is carried out by means of microraming technologies known per se. It comprises in particular a glass base plate 12, a silicon support plate 1, a silicon flexible membrane 2, a pumping chamber 4 and a glass closure plate 3, the pumping chamber 4 being defined between the membrane 2 and the closure plate 3.
- a piezoelectric element 5 (not shown in FIG. 1) is made integral with a transmission block 13 machined in the support plate 3.
- Figure 2 schematically illustrates a sectional view of a variant of the invention.
- the electrical voltage applied to the fixed end 8 of a piezoelectric element 5 induces its contraction, contraction which results in a circular movement of its free end 9.
- the maximum displacement of the piezoelectric element 5 is therefore at its free end 9.
- Several electrical contacts 15 are placed in such a way that by applying a tension on each of them, the displacement occurs either in one direction or in the other and / or increasing the displacement.
- the free end 9 of the piezoelectric element is attached to an upper end 10 of a strip 6 disposed in a vertical direction, inside a cylindrical passage 7.
- the invention consists mainly in using as connecting element 6 a band, easily deformable horizontally. Furthermore, the strip 6 is sufficiently rigid and resistant along its main axis so as to transmit the movement of the piezoelectric element to the membrane 2.
- the variant illustrated in FIG. 2 has the following characteristics:
- a micro-pump is attached to a rigid part 1 1.
- the flexible strip 6 is fixed to the end 9 of the piezoelectric element 5 and to the membrane 2.
- One end 14 of the strip 6 is fixed by bonding to the membrane 2 (see FIG. 3), the other end 1 0 being fixed by gluing on the piezoelectric element 5.
- the material of the strip 6 is preferably made of stainless steel, 0.05 mm thick. It is cut and folded.
- the piezoelectric element 5 is preferably a bi-morphic blade having 3 electrical contacts.
- the rigid part 1 1 is subjected to the forces transmitted by the deformation of the piezoelectric element 5.
- the rigid part 1 1 is preferably made of ceramic.
- the membrane 2 is delicate, the connection with the strip 6 is preferably performed by a glue, a safety distance between the parts prevents damage to the membrane 2. Variations in the thickness of the rigid part or the length of the band are compensated by a more or less deep penetration into the drop of glue.
- the strip 6 is dimensioned sufficiently rigid to push and pull the membrane 2, but also sufficiently deformable by buckling in the elastic limit if an overpressure due to an occlusion generates a greater force, in this way it prevents damage from occurring. on the pump.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Micromachines (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10803638.5A EP2510236B1 (fr) | 2009-12-07 | 2010-11-19 | Element flexible pour micro-pompe |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP09178168A EP2333340A1 (fr) | 2009-12-07 | 2009-12-07 | Elément flexible pour micro-pompe |
PCT/IB2010/055310 WO2011070468A1 (fr) | 2009-12-07 | 2010-11-19 | Element flexible pour micro-pompe |
EP10803638.5A EP2510236B1 (fr) | 2009-12-07 | 2010-11-19 | Element flexible pour micro-pompe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2510236A1 true EP2510236A1 (fr) | 2012-10-17 |
EP2510236B1 EP2510236B1 (fr) | 2013-08-28 |
Family
ID=42112213
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09178168A Withdrawn EP2333340A1 (fr) | 2009-12-07 | 2009-12-07 | Elément flexible pour micro-pompe |
EP10803638.5A Active EP2510236B1 (fr) | 2009-12-07 | 2010-11-19 | Element flexible pour micro-pompe |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09178168A Withdrawn EP2333340A1 (fr) | 2009-12-07 | 2009-12-07 | Elément flexible pour micro-pompe |
Country Status (7)
Country | Link |
---|---|
US (1) | US9822774B2 (fr) |
EP (2) | EP2333340A1 (fr) |
JP (1) | JP5778169B2 (fr) |
CN (1) | CN102667158B (fr) |
IN (1) | IN2012DN04834A (fr) |
RU (1) | RU2012124971A (fr) |
WO (1) | WO2011070468A1 (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011086042A1 (de) * | 2011-11-09 | 2013-05-16 | Johnson Matthey Catalysts (Germany) Gmbh | Biegewandler sowie Mikropumpe mit einem Biegewandler |
DE102012221832A1 (de) * | 2012-11-29 | 2014-06-05 | Robert Bosch Gmbh | Dosierpumpe, Pumpenelement für die Dosierpumpe sowie Verfahren zum Herstellen eines Pumpenelements für eine Dosierpumpe |
CN103334907A (zh) * | 2013-07-08 | 2013-10-02 | 吉林大学 | 悬臂式压电隔膜泵 |
CN103362786B (zh) * | 2013-07-12 | 2018-07-13 | 重庆中镭科技有限公司 | 一种压电微型隔膜泵 |
TWI539076B (zh) * | 2013-09-25 | 2016-06-21 | 馬小康 | 腔體分離式薄膜幫浦 |
CN103925199B (zh) * | 2014-05-06 | 2016-06-15 | 吉林大学 | 一种新型叠层式压电隔膜泵 |
EP3185931A1 (fr) | 2014-08-26 | 2017-07-05 | Debiotech S.A. | Détection d'une anomalie de perfusion |
WO2020104994A1 (fr) * | 2018-11-23 | 2020-05-28 | Hnp Mikrosysteme Gmbh | Structure d'étanchéité pour un dispositif de transport avec alliage à mémoire de forme |
DE102020002351A1 (de) * | 2020-04-19 | 2021-10-21 | Exel Industries Sa | Druckkopf mit mikropneumatischer Steuereinheit |
CN112177903A (zh) * | 2020-09-29 | 2021-01-05 | 长春工业大学 | 一种矩形腔柔性膜双振子无阀压电泵 |
CN113944615A (zh) * | 2021-10-26 | 2022-01-18 | 上海应用技术大学 | 一种一体化微压电液体泵送装置及其制造和驱动方法 |
Family Cites Families (34)
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GB311629A (en) * | 1928-06-27 | 1929-05-16 | Ac Spark Plug Co | Improvement in fuel pump |
US2228565A (en) * | 1937-09-25 | 1941-01-14 | John K Haddaway | Pumping mechanism |
US2488995A (en) * | 1948-02-17 | 1949-11-22 | George A Thiberg | Pump for gases and liquids to obtain variating pressures |
US2829601A (en) * | 1953-12-09 | 1958-04-08 | Mc Graw Edison Co | Vibratory pump |
US3833876A (en) * | 1973-11-21 | 1974-09-03 | Honeywell Inc | Temperature compensated snap-beam actuator |
US4162876A (en) * | 1976-01-28 | 1979-07-31 | Erwin Kolfertz | Electromagnetically driven diaphragm pump |
JPS56133190A (en) * | 1980-03-22 | 1981-10-19 | Sharp Corp | Temperature compensator for ink feeder |
JPS6035191A (ja) * | 1983-08-05 | 1985-02-22 | Kureha Chem Ind Co Ltd | ポンプ |
CH667701A5 (de) * | 1985-11-05 | 1988-10-31 | Hans Meyer | Pumpe. |
JP2912372B2 (ja) | 1988-04-15 | 1999-06-28 | 科学技術振興事業団 | 液体マイクロバルブ |
US5759015A (en) * | 1993-12-28 | 1998-06-02 | Westonbridge International Limited | Piezoelectric micropump having actuation electrodes and stopper members |
CH689836A5 (fr) * | 1994-01-14 | 1999-12-15 | Westonbridge Int Ltd | Micropompe. |
JPH0842457A (ja) * | 1994-07-27 | 1996-02-13 | Aisin Seiki Co Ltd | マイクロポンプ |
TW388748B (en) * | 1996-06-28 | 2000-05-01 | Sintokogio Ltd | Apparatus for setting a gap between glass substrates |
US5758014A (en) | 1996-08-05 | 1998-05-26 | Delco Electronics Corp. | Electric vehicle traction control system and method |
FR2757906A1 (fr) * | 1996-12-31 | 1998-07-03 | Westonbridge Int Ltd | Micropompe avec piece intermediaire integree |
JPH11142780A (ja) * | 1997-11-12 | 1999-05-28 | Mitsubishi Electric Corp | 光源装置及び投写型表示装置 |
US6368079B2 (en) * | 1998-12-23 | 2002-04-09 | Battelle Pulmonary Therapeutics, Inc. | Piezoelectric micropump |
US6425740B1 (en) * | 2000-07-28 | 2002-07-30 | Sarcos, L.C. | Resonator pumping system |
US6428289B1 (en) * | 2000-12-21 | 2002-08-06 | Grigori Lishanski | Automated pump |
US6777007B2 (en) * | 2002-07-06 | 2004-08-17 | Edward Z. Cai | Pod and method for making fluid comestible |
GB0108258D0 (en) * | 2001-04-03 | 2001-05-23 | Univ Birmingham | Actuator assembly |
JP2003145751A (ja) * | 2001-11-07 | 2003-05-21 | Ricoh Co Ltd | マイクロポンプ、該マイクロポンプを用いたインクジェット記録ヘッド、及びインクジェット記録装置 |
JP2004116327A (ja) * | 2002-09-25 | 2004-04-15 | Fuji Electric Holdings Co Ltd | マイクロディスペンサ |
JP2005084166A (ja) * | 2003-09-05 | 2005-03-31 | Fuji Photo Film Co Ltd | 画像表示装置および画像表示方法 |
US7790325B2 (en) * | 2004-03-31 | 2010-09-07 | Canon Kabushiki Kaisha | Valve having valve element displaced by at least one of a movement of a diaphragm and a movement of an actuator, and fuel cell using the valve |
WO2006056967A1 (fr) * | 2004-11-29 | 2006-06-01 | Debiotech Sa | Dispositif microfluidique mecanique, le procede de fabrication d'un empilement intermediaire et de ce dispositif microfluidique, et une micropompe. |
US7267043B2 (en) * | 2004-12-30 | 2007-09-11 | Adaptivenergy, Llc | Actuators with diaphragm and methods of operating same |
FR2885411B1 (fr) * | 2005-05-04 | 2007-07-06 | Michelin Soc Tech | Pneumatique comportant un dispositif de mesure de force a tige rigide |
FR2895986B1 (fr) * | 2006-01-06 | 2008-09-05 | Centre Nat Rech Scient | Preparation de microcomposants multicouches par la methode de la couche epaisse sacrificielle |
JP4935159B2 (ja) * | 2006-04-11 | 2012-05-23 | 株式会社村田製作所 | マイクロポンプ |
US7663294B2 (en) * | 2006-10-20 | 2010-02-16 | The Boeing Company | Enhanced displacement piezoelectric motor |
JP2009108715A (ja) * | 2007-10-29 | 2009-05-21 | Alps Electric Co Ltd | 圧電ポンプ |
US8057198B2 (en) * | 2007-12-05 | 2011-11-15 | Ford Global Technologies, Llc | Variable displacement piezo-electric pumps |
-
2009
- 2009-12-07 EP EP09178168A patent/EP2333340A1/fr not_active Withdrawn
-
2010
- 2010-11-19 JP JP2012542648A patent/JP5778169B2/ja active Active
- 2010-11-19 WO PCT/IB2010/055310 patent/WO2011070468A1/fr active Application Filing
- 2010-11-19 US US13/512,463 patent/US9822774B2/en active Active
- 2010-11-19 IN IN4834DEN2012 patent/IN2012DN04834A/en unknown
- 2010-11-19 RU RU2012124971/06A patent/RU2012124971A/ru not_active Application Discontinuation
- 2010-11-19 CN CN201080048311.5A patent/CN102667158B/zh not_active Expired - Fee Related
- 2010-11-19 EP EP10803638.5A patent/EP2510236B1/fr active Active
Non-Patent Citations (1)
Title |
---|
See references of WO2011070468A1 * |
Also Published As
Publication number | Publication date |
---|---|
IN2012DN04834A (fr) | 2015-09-25 |
WO2011070468A1 (fr) | 2011-06-16 |
JP5778169B2 (ja) | 2015-09-16 |
EP2333340A1 (fr) | 2011-06-15 |
US9822774B2 (en) | 2017-11-21 |
RU2012124971A (ru) | 2014-01-20 |
US20120237375A1 (en) | 2012-09-20 |
EP2510236B1 (fr) | 2013-08-28 |
CN102667158B (zh) | 2015-04-22 |
CN102667158A (zh) | 2012-09-12 |
JP2013513066A (ja) | 2013-04-18 |
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