EP2195832A1 - Verfahren zur herstellung und kontaktierung von elektronischen bauelementen mittels einer substratplatte, insbesondere dcb-keramik-substratplatte - Google Patents
Verfahren zur herstellung und kontaktierung von elektronischen bauelementen mittels einer substratplatte, insbesondere dcb-keramik-substratplatteInfo
- Publication number
- EP2195832A1 EP2195832A1 EP08802958A EP08802958A EP2195832A1 EP 2195832 A1 EP2195832 A1 EP 2195832A1 EP 08802958 A EP08802958 A EP 08802958A EP 08802958 A EP08802958 A EP 08802958A EP 2195832 A1 EP2195832 A1 EP 2195832A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- conductor part
- substrate
- carrier film
- electrically
- electrically insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
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- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
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Definitions
- the present invention relates to a method according to the preamble of the main claim, and a device according to the preamble of the independent claim.
- DCB ceramics direct copper bonding
- the substrate in which the components are surface-mounted on the DCB ceramics.
- Contacting can be carried out by means of thick-wire bonding or alternatively by means of the so-called planar contacting according to WO 03030247.
- planar contacting takes place by laminating an insulating film onto the substrate electronic component, opening of contact windows in particular by means of laser ablation and generating the planar connection by means of galvanically deposited metallization.
- the object of the present invention is a cost-effective electrical contacting of at least one unhoused electronic component, in particular a power component or semiconductor power component, especially for the high voltage range greater than 1000 volts, with pads for attachment and / or electrical contact on a top and / or bottom ready to put. Furthermore, a high integration density, low-inductance behavior of the contacting, a high current carrying capacity, an effective cooling and / or a high reliability with regard to electrical and thermal cyclic stress shall be created. Electrocycle stress means alternating exposure to low electrical power and high electrical power to a certain number of load cycles.
- Thermal Zykelbe screwung means the alternate exposure to a low temperature, for example -40 0 C, and a high temperature, for example + 125 ° C, with a certain number of changes in temperature, for example 100 to 1000 Zykeln.
- Ladder part is an electrical conductor with high electrical conductivity and high current carrying capacity, wherein the conductor is easily machined mechanically, for example by means of punching and / or bending, and plastically deformable.
- a conductor part can also be referred to as stamped and bent part.
- a conductor part may be a leadframe, in particular a copper leadframe.
- Connecting bracket is a bent portion of the conductor part for electrically contacting and / or fixing the conductor part to a connection surface of the substrate.
- DCB means "Direct Copper Bonding”.
- copper plates are rolled on the top and bottom of a ceramic and are connected to it in a form-fitting manner at approx. 1080 ° C. Subsequently, at least one of the two copper sides is structured wet-chemically.
- a well-known manufacturer of such ceramics is called "Curamik”.
- the object is achieved by a method according to the main claim in a device according to the independent claim.
- the conductor part forms at least one extending to the film plane terminal bracket. Likewise, a removal of the carrier film is carried out in the region of the connecting bracket. The terminal bracket is fastened and / or electrically contacted to an opposite terminal surface on the substrate plate. In this way, a high current carrying capacity can be provided by thick compounds of electrically highly conductive material.
- the conductor part is an embodiment for an electrical connection of electrically highly conductive material with high current carrying capacity and simple mechanical workability, such as by punching and / or bending. The material can be plastically formed.
- a removal of the carrier foil in the region of the terminal yoke is carried out, and the terminal yoke is fastened and / or electrically contacted to an opposite terminal surface on the substrate.
- conductor parts are fastened by means of soldering and / or electrically contacted. In this way, this part is easily processable in a conventional manner.
- the applied on the film electronic components are soldered on the exposed top with a correspondingly preformed conductor part having, for example, copper.
- the electrically insulating mass is produced by means of injection molding, in which case the insulating material forms one end side of the film and the other a correspondingly preformed three-dimensional injection mold according to the design of the stamped and bent part.
- the carrier film is so photosensitive that in a simple manner, a removal of the carrier film can be performed by means of photo exposure.
- Another advantageous and simple way of removing the carrier film is by means of ablation, in particular laser ablation. In this way, the underside of the electronic component, as well as the led down connecting bracket by means of photo-exposure or by means of
- the carrier film can be opened at a suitable location in a later step.
- the carrier foil need not be photosensitive.
- the fastening and / or electrical contacting of the connection surface on the underside and / or the connection bracket with the respective connection surface of the substrate plate is carried out by means of soldering and / or gluing.
- soldering and / or gluing are easy.
- a final soldering or bonding process electrically connects a provided DCB substrate plate to the exposed areas of the electrical contacts.
- the components are fastened at specific positions on the carrier film, corresponding to a specific functional structure of a device to be generated. That means in a first
- Step on the electrically insulating carrier film at certain positions with the underside electronic components elements adhered a design of a device can be implemented particularly early.
- a device for cooling in particular a cooling channel, a heat sink or a heat pipe is positioned in the electrically insulating mass and / or on the substrate plate.
- a cooling can be provided with a high cooling capacity.
- cooling can be formed on both sides, that is to say both on the underside of the DCB substrate and on the upper side of the electronic components.
- the conductor part has an electrically highly conductive material, for example copper.
- the expansion coefficients of the conductor part and electrically insulating material for generating a high thermomechanical see and electric Zykestestmaschine adapted to each other.
- devices are provided which remain fixed on the carrier film.
- Figure 1 shows an embodiment of a device according to the invention
- Figure 2 shows an embodiment of an inventive
- FIG. 1 shows two unhoused electronic components 1, namely two insulated gate bipolar transistors (IGBTS). On a top 3 each a connection surface 7 is generated. On a bottom 5 each two pads 7 are generated. All pads 7 are used for mounting and / or for electrical contacting of the electronic component see 1.
- the electronic component 1 is, for example, a power semiconductor component, and in particular an electronic component for voltages over 1000 volts.
- the component 1 is fastened with its underside 5 on an electrically insulating carrier film 13 which extends beyond the surface of the underside 5.
- With the connection surface 7 on the upper side 3, a preformed, three-dimensional structure is fixed and electrically contacted as an electrically conductive conductor part 15, wherein the conductor part 15 extends beyond the surface of the upper side 3.
- an electrically insulating mass 17 is produced between the carrier foil 13 and the three-dimensional structure of the conductor part 15.
- the electrically insulating mass 17 may be produced by means of injection molding.
- conventional injection molding tools for shaping the electrically insulating mass 17 can be used.
- the conductor part 15 generates a connection bracket 16 extending down to the plane of the carrier film 13.
- the carrier film 13 with openings 21 is produced on the connection surfaces 7 on the underside 5 of the component 1.
- the carrier film 13 is removed in the region of the connection bracket 16 and correspondingly has an opening 21.
- a substrate 11 is produced, which is particularly advantageously a direct copper bonding ceramic substrate.
- conductor tracks are pre-structured, on which connection surfaces 9 of the substrate 11 are produced.
- connection surfaces 9 are opposite the connection surfaces 7 on the side of the components 1.
- the component 1 is attached to the underside 5, in the region of the two connection surfaces 7, with the two opposing connection surfaces 9 on the substrate 11 and electrically contacted.
- the contacting takes place especially
- the conductor part 15 extending up to the plane of the carrier film 13
- the carrier film 13 is removed in the region of the connection bracket 16 and has an opening 21.
- the terminal bracket 16 is fastened to the opposite terminal surface 9 on the substrate 11 and electrically contacted.
- a device for cooling in particular a cooling channel, a heat sink 23 and / or a heat pipe can be positioned or generated on the conductor part 15, in the electrically insulating mass 17 and / or on the substrate 11.
- the upward arrow in FIG. 1 indicates the attachment and electrical contacting of substrate 11 with the pads 9 and the electronic components 1 with the pads 7.
- FIG. 2 shows an exemplary embodiment of a method according to the invention for contacting at least one unpackaged electronic component 1, in particular a power component or semiconductor power component, with at least one connection surface 7 arranged on an upper side 3 and / or a lower side 5 for attachment and / or electrical contacting.
- a step Sl the component 1 is fastened with its underside 5 to an electrically insulating carrier film 13 extending beyond the surface of the underside 5.
- the connecting surface 7 is fastened and / or electrically contacted on the upper side 3 with one each a preformed three-dimensional structure forming electrically conductive conductor part 15 which extends beyond the surface of the upper side 3 addition.
- an electrically insulating mass 17 is produced between the carrier film 13 and the three-dimensional structure of the conductor part 15.
- a conventional injection molding method can be used.
- conventional tool parts for limiting the electrically insulating mass 17 are used.
- a step S4 the carrier film 13 is removed from the underside 5 in the region of the connection surfaces. Finally, a fastening and electrical contacting of the connection surfaces 7 on the undersides 5 with the corresponding connection surfaces 7 opposite connection surfaces 9 on the conductor tracks 25 takes place in a step S5 on the substrate 11, wherein a Direct Copper Bonding (DCB) ceramic substrate plate 11 is particularly advantageously used.
- DCB Direct Copper Bonding
- the device according to FIG. 1 is merely one embodiment of the present invention.
- any unhoused electronic components 1 can be used.
- the present invention is particularly suitable for components in the high voltage range greater than 1000 volts.
- the components can be fastened and / or electrically contacted at specific positions on the carrier film 13 in accordance with a specific functional design.
- Further examples of electronic components 1 are diodes, thyristors, transistors and the like.
- a plurality of terminal hangers 16 may be used. Connecting bracket 16 are basically not required.
- Reference numeral 25 denotes a conductor track structure on the substrate 11 in the case of a DCB substrate, the conductor tracks 25 have in particular copper.
- the device according to the invention without a substrate plate 11 as a device is also encompassed by the scope of protection.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Die Bonding (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007041921A DE102007041921A1 (de) | 2007-09-04 | 2007-09-04 | Verfahren zur Herstellung und Kontaktierung von elektronischen Bauelementen mittels einer Substratplatte, insbesondere DCB-Keramik-Substratplatte |
PCT/EP2008/060196 WO2009030562A1 (de) | 2007-09-04 | 2008-08-04 | Verfahren zur herstellung und kontaktierung von elektronischen bauelementen mittels einer substratplatte, insbesondere dcb-keramik-substratplatte |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2195832A1 true EP2195832A1 (de) | 2010-06-16 |
Family
ID=40030334
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08802958A Withdrawn EP2195832A1 (de) | 2007-09-04 | 2008-08-04 | Verfahren zur herstellung und kontaktierung von elektronischen bauelementen mittels einer substratplatte, insbesondere dcb-keramik-substratplatte |
Country Status (7)
Country | Link |
---|---|
US (1) | US8261439B2 (ja) |
EP (1) | EP2195832A1 (ja) |
JP (1) | JP2010538483A (ja) |
KR (1) | KR20100067097A (ja) |
CN (1) | CN101842887B (ja) |
DE (1) | DE102007041921A1 (ja) |
WO (1) | WO2009030562A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2594867T3 (es) | 2007-03-09 | 2016-12-23 | Alexza Pharmaceuticals, Inc. | Unidad de calentamiento para usar en un dispositivo de administración de fármaco |
US20100065052A1 (en) * | 2008-09-16 | 2010-03-18 | Alexza Pharmaceuticals, Inc. | Heating Units |
US20120048963A1 (en) | 2010-08-26 | 2012-03-01 | Alexza Pharmaceuticals, Inc. | Heat Units Using a Solid Fuel Capable of Undergoing an Exothermic Metal Oxidation-Reduction Reaction Propagated without an Igniter |
US8941208B2 (en) * | 2012-07-30 | 2015-01-27 | General Electric Company | Reliable surface mount integrated power module |
DE102014203306A1 (de) * | 2014-02-25 | 2015-08-27 | Siemens Aktiengesellschaft | Herstellen eines Elektronikmoduls |
DK3268072T3 (da) | 2015-03-11 | 2024-01-22 | Alexza Pharmaceuticals Inc | Anvendelse af antistatiske materialer i luftvejen til termisk aerosolkondensationsproces |
DE102016220553A1 (de) | 2016-10-20 | 2018-04-26 | Robert Bosch Gmbh | Leistungsmodul |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2751450B2 (ja) * | 1989-08-28 | 1998-05-18 | セイコーエプソン株式会社 | テープキャリアの実装構造及びその実装方法 |
US5200362A (en) * | 1989-09-06 | 1993-04-06 | Motorola, Inc. | Method of attaching conductive traces to an encapsulated semiconductor die using a removable transfer film |
JPH09116045A (ja) * | 1995-10-13 | 1997-05-02 | Dainippon Printing Co Ltd | リードフレームを用いたbgaタイプの樹脂封止型半導体装置およびその製造方法 |
US6306680B1 (en) * | 1999-02-22 | 2001-10-23 | General Electric Company | Power overlay chip scale packages for discrete power devices |
WO2001024260A1 (en) * | 1999-09-24 | 2001-04-05 | Virginia Tech Intellectual Properties, Inc. | Low cost 3d flip-chip packaging technology for integrated power electronics modules |
JP2005515616A (ja) | 2001-09-28 | 2005-05-26 | シーメンス アクチエンゲゼルシヤフト | 基板の電気的コンタクト面の接続方法及び電気的コンタクト面を備えた基板からなるデバイス |
JP2003204027A (ja) * | 2002-01-09 | 2003-07-18 | Matsushita Electric Ind Co Ltd | リードフレーム及びその製造方法、樹脂封止型半導体装置及びその製造方法 |
JP2003341782A (ja) * | 2002-05-27 | 2003-12-03 | Oki Electric Ind Co Ltd | 電子デバイス収容体、電子デバイスの搬送方法、電子デバイスの実装方法、電子デバイスの収容方法 |
JP3809168B2 (ja) * | 2004-02-03 | 2006-08-16 | 株式会社東芝 | 半導体モジュール |
DE102004030042B4 (de) * | 2004-06-22 | 2009-04-02 | Infineon Technologies Ag | Halbleiterbauelement mit einem auf einem Träger montierten Halbleiterchip, bei dem die vom Halbleiterchip auf den Träger übertragene Wärme begrenzt ist, sowie Verfahren zur Herstellung eines Halbleiterbauelementes |
EP1641035A1 (en) * | 2004-09-27 | 2006-03-29 | STMicroelectronics S.r.l. | Mounting method of electronic power components on printed circuit boards |
-
2007
- 2007-09-04 DE DE102007041921A patent/DE102007041921A1/de not_active Withdrawn
-
2008
- 2008-08-04 KR KR1020107007086A patent/KR20100067097A/ko not_active Application Discontinuation
- 2008-08-04 WO PCT/EP2008/060196 patent/WO2009030562A1/de active Application Filing
- 2008-08-04 EP EP08802958A patent/EP2195832A1/de not_active Withdrawn
- 2008-08-04 CN CN2008801137606A patent/CN101842887B/zh not_active Expired - Fee Related
- 2008-08-04 JP JP2010523459A patent/JP2010538483A/ja not_active Ceased
- 2008-08-04 US US12/733,507 patent/US8261439B2/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
---|
See references of WO2009030562A1 * |
Also Published As
Publication number | Publication date |
---|---|
US20100208438A1 (en) | 2010-08-19 |
JP2010538483A (ja) | 2010-12-09 |
CN101842887A (zh) | 2010-09-22 |
KR20100067097A (ko) | 2010-06-18 |
DE102007041921A1 (de) | 2009-03-05 |
US8261439B2 (en) | 2012-09-11 |
CN101842887B (zh) | 2012-10-10 |
WO2009030562A1 (de) | 2009-03-12 |
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