EP2039941A3 - Pompe à vide - Google Patents
Pompe à vide Download PDFInfo
- Publication number
- EP2039941A3 EP2039941A3 EP08016073.2A EP08016073A EP2039941A3 EP 2039941 A3 EP2039941 A3 EP 2039941A3 EP 08016073 A EP08016073 A EP 08016073A EP 2039941 A3 EP2039941 A3 EP 2039941A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- chambers
- gas inlet
- partition
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 abstract 2
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
- F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
- F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007044945A DE102007044945A1 (de) | 2007-09-20 | 2007-09-20 | Vakuumpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2039941A2 EP2039941A2 (fr) | 2009-03-25 |
EP2039941A3 true EP2039941A3 (fr) | 2016-06-01 |
EP2039941B1 EP2039941B1 (fr) | 2017-11-08 |
Family
ID=40019211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP08016073.2A Active EP2039941B1 (fr) | 2007-09-20 | 2008-09-12 | Pompe à vide |
Country Status (3)
Country | Link |
---|---|
US (1) | US8070418B2 (fr) |
EP (1) | EP2039941B1 (fr) |
DE (1) | DE102007044945A1 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5315100B2 (ja) * | 2009-03-18 | 2013-10-16 | 株式会社ニューフレアテクノロジー | 描画装置 |
WO2012165105A1 (fr) * | 2011-06-03 | 2012-12-06 | エドワーズ株式会社 | Pompe à vide |
DE102014117487B4 (de) * | 2014-11-28 | 2024-06-20 | VON ARDENNE Asset GmbH & Co. KG | Vakuumpumpenanordnung und Vakuumkammeranordnung |
EP3112688B2 (fr) * | 2015-07-01 | 2022-05-11 | Pfeiffer Vacuum GmbH | Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé |
GB2584603B (en) * | 2019-04-11 | 2021-10-13 | Edwards Ltd | Vacuum chamber module |
EP3693610B1 (fr) * | 2020-01-27 | 2021-12-22 | Pfeiffer Vacuum Technology AG | Pompe à vide moléculaire |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3713534A1 (de) * | 1986-05-08 | 1987-11-12 | Mitsubishi Electric Corp | Turbo-molekularpumpe |
DE19901340A1 (de) * | 1998-05-26 | 1999-12-09 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art |
GB2360066A (en) * | 2000-03-06 | 2001-09-12 | Boc Group Plc | Vacuum pump |
DE60002966T2 (de) * | 1999-09-16 | 2004-02-26 | The Boc Group Plc, Windlesham | Vakuumpumpen |
WO2006000745A1 (fr) * | 2004-06-25 | 2006-01-05 | The Boc Group Plc | Pompe à vide |
EP1992822A1 (fr) * | 2007-05-15 | 2008-11-19 | Agilent Technologies Inc | Diviseur sous vide pour pompage différentiel d'un système sous vide |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2337226A1 (de) * | 1973-07-21 | 1975-02-06 | Maschf Augsburg Nuernberg Ag | Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer |
US4116592A (en) * | 1976-08-20 | 1978-09-26 | Viktor Yakovlevich Cherny | Turbomolecular high-vacuum pulp |
DE4331589C2 (de) | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
DE19632375A1 (de) * | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
JP2002327698A (ja) * | 2001-04-27 | 2002-11-15 | Boc Edwards Technologies Ltd | 真空ポンプ |
US20080056886A1 (en) * | 2006-08-31 | 2008-03-06 | Varian, S.P.A. | Vacuum pumps with improved pumping channel cross sections |
-
2007
- 2007-09-20 DE DE102007044945A patent/DE102007044945A1/de active Pending
-
2008
- 2008-09-12 EP EP08016073.2A patent/EP2039941B1/fr active Active
- 2008-09-19 US US12/284,197 patent/US8070418B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3713534A1 (de) * | 1986-05-08 | 1987-11-12 | Mitsubishi Electric Corp | Turbo-molekularpumpe |
DE19901340A1 (de) * | 1998-05-26 | 1999-12-09 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art |
DE60002966T2 (de) * | 1999-09-16 | 2004-02-26 | The Boc Group Plc, Windlesham | Vakuumpumpen |
GB2360066A (en) * | 2000-03-06 | 2001-09-12 | Boc Group Plc | Vacuum pump |
WO2006000745A1 (fr) * | 2004-06-25 | 2006-01-05 | The Boc Group Plc | Pompe à vide |
EP1992822A1 (fr) * | 2007-05-15 | 2008-11-19 | Agilent Technologies Inc | Diviseur sous vide pour pompage différentiel d'un système sous vide |
Also Published As
Publication number | Publication date |
---|---|
EP2039941A2 (fr) | 2009-03-25 |
US8070418B2 (en) | 2011-12-06 |
DE102007044945A1 (de) | 2009-04-09 |
US20090092484A1 (en) | 2009-04-09 |
EP2039941B1 (fr) | 2017-11-08 |
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