EP1422423B2 - Appareil avec boîtier pouvant être mis à vide - Google Patents

Appareil avec boîtier pouvant être mis à vide Download PDF

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Publication number
EP1422423B2
EP1422423B2 EP03029746.9A EP03029746A EP1422423B2 EP 1422423 B2 EP1422423 B2 EP 1422423B2 EP 03029746 A EP03029746 A EP 03029746A EP 1422423 B2 EP1422423 B2 EP 1422423B2
Authority
EP
European Patent Office
Prior art keywords
pump
vacuum
housing
stator
friction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03029746.9A
Other languages
German (de)
English (en)
Other versions
EP1422423A1 (fr
EP1422423B1 (fr
Inventor
Ralf Adamietz
Christian Dr. Beyer
Günter Schütz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
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Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Priority claimed from EP99917896.5A external-priority patent/EP1090231B2/fr
Publication of EP1422423A1 publication Critical patent/EP1422423A1/fr
Application granted granted Critical
Publication of EP1422423B1 publication Critical patent/EP1422423B1/fr
Publication of EP1422423B2 publication Critical patent/EP1422423B2/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F04D29/602—Mounting in cavities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the invention relates to a device with a friction vacuum pump and with a housing in which there is at least one evacuable chamber, and with the further features of the preamble of claim 1.
  • the associated friction vacuum pump is equipped with several connection openings. These each have a different pressure level.
  • Frictional vacuum pumps of this type are preferably used to evacuate particle beam devices (eg mass spectrometers) with chambers separated from each other by diaphragms, in which different pressures are to be generated and maintained during operation of the particle beam device.
  • Such devices with the associated, to be evacuated chambers are located in an independent housing. With this housing, the connection openings of the friction vacuum pump are connected via a separate connection housing with relatively long connection lines (15, 16, 17) with the disadvantage of relatively high conductance losses.
  • Reibungsvakuumpumpen (turbomolecular pumps, pumps with turbomolecular pump stages and other friction pump stages) of a type known as z.
  • a chassis which is equipped with the drive motor and on which the rotor is supported.
  • the housing of the pump is supported on the chassis. It surrounds the rotor and the stator and also more or less the chassis.
  • the housing ensures the assignment of said components to each other.
  • it has the task of exactly centering the Stator Halbring disks and spacers existing stator so that the necessary in friction vacuum pumps small gap can be met.
  • the housing seals the vacuum pump to the outside.
  • the connection flange on the front side, with which the friction vacuum pumps are connected to devices with chambers to be evacuated.
  • DE 2442614 which forms the closest prior art, discloses a turbomolecular vacuum pump having an inlet and an outlet.
  • the housing is provided with a further connection, which is located between inlet and outlet.
  • the inlets are connected to different subspaces in an electron microscope and produce different pressures.
  • the present invention has for its object to provide a device of the type concerned here with a much improved connection geometry between the / to be evacuated chambers and the friction vacuum pump.
  • a particular advantage of the invention is that a friction pump can be used, in which the functions of the previously described, one-piece housing described above are distributed over two components.
  • An inner component ensures the assignment of chassis, stator and rotor to each other. This creates a friction vacuum pump in the form of a slot that already has many functional tests, eg. B. that of balancing, can be subjected.
  • the outer housing has the task of adapting the functional without the outer housing friction vacuum pump to the application of the customer. It is no longer necessary to produce or maintain a variety of friction pump types but only one or a few universal, compact and functional pumping units (bays, cartridges). It is sufficient to inform the customer about the external dimensions of the slide-in friction vacuum pump.
  • a particularly simple solution for him is that he can use only a slide-in friction vacuum pump in the housing or housing part of its provided with the bore device (system, device or the like with one or more chambers to be evacuated).
  • the housing or housing part of the device of the customer then forms the second outer housing of the friction vacuum pump according to the invention.
  • FIG. 1 a friction vacuum pump 1 with stator 3, rotor 4 and chassis 5 is shown.
  • the chassis 5 is the motor drive 6, 7, the armature 7 is supported on the bearings 8 in the chassis 5.
  • shaft 9 With the armature 7 which led out of the chassis 5 shaft 9 is connected, which carries the rotor 4.
  • the axis of rotation of the rotor system is denoted by 11.
  • the friction vacuum pump 1 has after FIG. 1 three pumping stages 12, 13, 14, two of which (12, 13) are designed as turbomolecular vacuum pumping stages and one (14) as molecular (Holweck) pumping stage. At the molecular pumping stage 14, the outlet of the pump 17 connects.
  • the pump 1 is equipped with two housings 18, 19.
  • the inner housing 18 is is substantially cylindrical and surrounds the stator 3. On its high vacuum-side end face it is equipped with an inwardly directed edge 20 which rests on the stator 3 and in this case simultaneously forms the upper stator ring.
  • the housing 18 is fixed to the chassis 5, with the aid of the flange 21.
  • Flange 21 and chassis 5 are connected to each other vacuum-tight. For this purpose, between the flange 21 and the chassis 5 of the sealing ring 21 'is arranged.
  • the outer housing 19 has an inner bore 22 with an inwardly directed gradation 23, whose height corresponds to the width of the rim 20 on the first housing 18.
  • a seal 24 which is expediently embedded in the end face of the housing 18.
  • the housing 19 has a device, e.g. the flange 25, with which it is attached to the chassis 5 or on the housing 18. After releasing this attachment, the unit formed by the inner housing 18 and the components therein can be removed as a whole from the bore 22. It forms an independent from the second housing 19 slot 27th
  • the first, high vacuum side pump stage 12 consists of four pairs of rotor blade rows and Statorschaufelschschitzschn. Its inlet, the effective gas passage area, is designated 26.
  • the edge 20 of the housing 18 surrounds the gas passage surface 26 and forms a passage opening 28 for entering the pump 1 gases.
  • the first pumping stage 12 is followed by the second pumping stage 13, which consists of three pairs of one stator blade row and one rotor blade row. Your inlet is designated 29.
  • the second pumping stage 13 is spaced from the first pumping stage 12.
  • the selected distance (height) a ensures the free accessibility of the gas molecules to be conveyed to the gas inlet 29.
  • the distance a is greater than a quarter, preferably greater than one third, of the diameter of the rotor system 4.
  • the adjoining Holweck pump comprises a rotating cylinder section 30, the outside and inside in a known manner, each with a thread groove 31, 32 equipped stator elements 33, 34 facing each other.
  • Another, formed by the inner housing 18 gas passage opening is arranged laterally and designated 35. It serves for the passage of gases, which are fed directly to the inlet 29 of the second pumping stage 13.
  • the outer housing 19 has the task of connecting the pump 1 or two pump stages (12, 13) of this pump with the device of the customer.
  • the housing 19 is after FIG. 1 formed such that the levels of all connection openings 36, 37 are located laterally.
  • the distance of the opening 37 to the associated gas inlet 29 is very small, so that the suction capacity of the pumping stage 13 impairing conductance losses are negligible.
  • the diameter of the connection opening 37 exceeds the height a by about twice. This measure also serves to reduce the conductance losses between inlet 29 and connection opening 37.
  • the lateral connection openings can each be equipped with a flange. To FIG. 1 a common flange 39 is provided.
  • the illustrated pump 1 or its pump-effective elements are expediently designed such that in the region of the connection opening 36 a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and im Area of the connection opening 37, a pressure of about 10 -2 to 10 -4 mbar is generated.
  • a high pumping speed is to be generated (eg 200 l / s).
  • the subsequent, two-stage Holweck pumping stage (29, 30, 29, 31) ensures a high prevacuum resistance, so that usually the pumping speed of the second pumping stage is independent of the fore-vacuum pressure.
  • this goal can be achieved by appropriate design of the blades of the first pumping stage 12.
  • Another possibility is to arrange a diaphragm 38 in front of the inlet 26 of the first pumping stage, the inner diameter of which determines the desired pumping speed.
  • FIG. 2 shows a device 51 according to the invention with evacuated chambers 52, 53, 54 and a push-in unit 27, as to FIG. 1 has been described.
  • the housing of the device - for example, a corpuscular beam device - is substantially integrally formed and designated 55.
  • the housing In the immediate vicinity of the chambers to be evacuated 53, 54, the housing is equipped with the bore 22 in which the insert 27 is located.
  • the chambers 53, 54 communicate with the respective inlets 26, 29 via the gas passage openings 28, 35 in the housing 18 of the insert 27 and the connection openings 36, 37.
  • the integration of the insert 27 in the housing of the device 51 accounts for separate connection means.
  • the distances between the chambers 53, 54 to be evacuated and the inlets 26, 29 are optimally small.
  • the essence of the present idea is that a largely functional unit (insert, cartridge) of a friction vacuum pump in a housing adapted to the application is releasably supported.
  • the inner housing 18 described so far has the task of functional elements the friction vacuum pump to the desired unit.
  • other components - such as tie rods, brackets or the like - be present, which fulfill this task.
  • two components 18 and 19, 55 are provided for the fulfillment of the functions of the usual housing in the subject matter of the invention.
  • the two components are formed by two concentric housings, of which the inner of the centering, assignment and support of chassis 5, stator 3 and rotor 4 is used, which thereby form the already operable, independent of the outer housing slot.
  • the outer housing 19, 55 seals the vacuum pump to the outside and serves for connection to the chambers to be evacuated, either via connecting flanges or in that it is already part of the device with the chambers to be evacuated.
  • FIGS. 3 and 4 show embodiments ( FIG. 3 : Longitudinal section through a slot 27; FIG. 4 Cross section through a slot 27 at the level of the gas passage opening 35) for an inner slot 27 with a Switzerlandankersystem 61.
  • This includes three to six (or more) tie rods 62 and holes and threads in the components (chassis 5, stator 3), the Tie rod system 61 are to be joined together to form a structural unit.
  • FIGS. 3 and 4 can be seen that the gas passage opening 35 extends over the entire circumference of the insert 27 and is interrupted only by the tie rods 62.
  • the access of the gas molecules to the inlet 29 of the pumping stage 13 (in FIG. 4 shown in plan view) is thereby free almost unhindered.
  • the attachment of the outer housing - be it the second housing 18, which fulfills further functions of a pump housing, or a housing 55 which is part of a device with chambers to be evacuated - takes place on the flange 21 of the chassis 5.
  • FIG. 3 allows the construction of particularly advantageous designed tie rod 62 recognize. They are designed in two parts.
  • the vorvakuum solutionen Anlagenankerabête 63 with their heads 64 pass through the stator of the pumping stage 13 and the outer stator 33 of the pumping stage 14. Their threaded ends are screwed into the flange 21 of the chassis 5.
  • the length of the heads 64 determines the axial extent of the gas passage opening 35.
  • the heads 64 are each provided with an internal thread into which respective high vacuum-side tie rod sections 65 can be screwed.
  • Their heads 66 are the top stator of the pumping stage 13. In addition, they enforce the stator of the pumping stage 12 and thereby cause in the screwed state, not only a compound of the high vacuum stage 12 with the other stages 13 and 14 but also a centering of the stator rings.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Claims (18)

  1. Appareil (51) avec une pompe moléculaire à vide et un boîtier (55) dans lequel se situent au moins deux chambres (52, 53, 54) à évacuer disposées l'une derrière l'autre, dans lesquelles des pressions différentes sont générées et maintenues pendant le fonctionnement, et qui présente un alésage (22) pour recevoir la pompe à vide (1) ainsi qu'une ouverture de liaison (36, 37) par laquelle une entrée de la pompe à vide est reliée à l'une des chambres à évacuer, dans lequel la pompe à vide présente au moins deux étages et par conséquent au moins deux ouvertures de raccordement (36, 37), les ouvertures de raccordement (36, 37) se trouvant à côté de la pompe à vide (1), l'alésage (22) étant disposé latéralement à côté des chambres (52, 53, 54), les distances entre les chambres à évacuer et les entrées (26, 29) respectives des étages de pompe (12, 13, 14) présentant une petite taille optimale, les chambres (52, 53, 54) étant reliées par les ouvertures de raccordement (36, 37) dans le boîtier (55) commun aux entrées (26, 29) respectives d'étages de pompe (12, 13, 14), la pompe à vide présente un boîtier, un châssis (5), un stator (3) et un rotor (4), deux composants (18, 61 ; 55) étant prévus pour accomplir les fonctions du boîtier de la pompe à vide, dont le premier composant intérieur (18, 61) sert à l'affectation, au centrage et au maintien du châssis (5), du stator (3), et du rotor (4) et forme un ensemble avec ces éléments, et dont le deuxième composant (55) sert à étancher la pompe à vide par rapport à l'extérieur et à relier la chambre à évacuer et est formé par le boîtier (55) commun de l'appareil (51).
  2. Appareil selon la revendication 1, caractérisé en ce
    - que la pompe à vide (1) est formée du moins par segments comme une pompe à vide turbomoléculaire avec des rangées d'aubes de rotor et des rangées d'aubes de stator,
    - que le stator présente plusieurs bagues de stator, et
    - que le premier composant Intérieur (18, 61), sert outre à l'affectation et au maintien du châssis (5), du stator (3) et du rotor (4), également au centrage des bagues de stator et forme un ensemble avec ces éléments.
  3. Appareil selon la revendication 1 ou 2, caractérisé en ce que le premier composant intérieur de la pompe (1) est un boîtier intérieur (18).
  4. Appareil selon la revendication 3, caractérisé en ce qu'une garniture d'étanchéité (24) est disposée dans la zone du côté vide poussé de la pompe (1) entre le boîtier intérieur (18) et le boîtier extérieur (19, 55).
  5. Appareil selon la revendication 3 ou 4, caractérisé en ce que dans la zone du côté vide préliminaire de la pompe (1) les boîtiers intérieur et extérieur (18; 19, 55) sont munis de brides fixées de façon amovible au châssis (5).
  6. Appareil selon l'une quelconque des revendications 3 à 5, caractérisé en ce que le boîtier Intérieur (18) de la pompe (1) est muni du côté vide poussé d'un bord (20) dirigé vers l'intérieur.
  7. Appareil selon la revendication 6, caractérisé en ce que le bord (20) de la pompe (1) dirigé vers l'intérieur forme une première bague de stator disposée du côté vide poussé.
  8. Appareil selon l'une quelconque des revendications précédentes 3 à 7, caractérisé en ce que la face frontale du côté vide poussé du boîtier intérieur (18) de la pompe (1) est associé un rétrécissement (23) étagé de l'alésage (22) du boîtier extérieur (19, 55).
  9. Appareil selon les revendications 4 et 8, caractérisé en ce qu'un joint torique (24) est disposé entre la face frontale du boîtier intérieur (18) et l'étage (23) du boîtier extérieur (19, 55) de la pompe (1) formé par le rétrécissement de diamètre.
  10. Appareil selon l'une quelconque des revendications précédentes 3 à 9, caractérisé en ce que l'extrémité du boîtier intérieur (18) située du côté vide poussé forme une ouverture de passage (28) pour les gaz entrant dans la pompe (1).
  11. Appareil selon la revendication 10, caractérisé en ce que la pompe à vide présente trois étages de pompe (12, 13, 14) et le boîtier intérieur (18) de la pompe (1) est muni d'au moins une autre ouverture de passage située en aval pour les gaz entrant dans le troisième étage de pompe (14).
  12. Appareil selon la revendication 11, caractérisé en ce que le troisième étage de pompe (14) est un étage de pompe moléculaire.
  13. Appareil selon la revendication 1 ou 2, caractérisé en ce que le premier composant intérieur de la pompe (1) est formé par un système de tirants (61).
  14. Appareil selon la revendication 15, caractérisé en ce que le système de tirants (61) comprend plusieurs tirants (62) qui relient le stator (3) au châssis (6).
  15. Appareil selon la revendication 14, caractérisé en ce que les tirants (62) traversent les bagues de stator.
  16. Appareil selon l'une quelconque des revendications 13 à 15, caractérisé en ce que les tirants (62) sont réalisés en deux pièces et comprennent respectivement un segment de tirant (63) avec tête (64) du côté vide préliminaire et un segment de tirant (65) avec tête (66) du côté vide poussé.
  17. Appareil selon la revendication 16, caractérisé en ce que la longueur de la tête (64) du segment de tirant (63) du côté vide préliminaire détermine l'étendue axiale d'une ouverture de passage (35) entre l'étage de vide poussée (12) et l'étage de vide préliminaire (13 ou 13, 14).
  18. Appareil selon l'une quelconque des revendications 16 ou 17, caractérisé en ce que les têtes (64) des segments de tirant (63) du côté vide préliminaire présentent chacune un filet sur la face frontale dans lequel on peut visser les segments de tirant (65) du côté vide poussé.
EP03029746.9A 1998-05-26 1999-03-27 Appareil avec boîtier pouvant être mis à vide Expired - Lifetime EP1422423B2 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE19823270 1998-05-26
DE19823270 1998-05-26
DE19901340 1999-01-15
DE19901340.3A DE19901340B4 (de) 1998-05-26 1999-01-15 Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
EP99917896.5A EP1090231B2 (fr) 1998-05-26 1999-03-27 Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type

Related Parent Applications (3)

Application Number Title Priority Date Filing Date
EP99917896.5A Division-Into EP1090231B2 (fr) 1998-05-26 1999-03-27 Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
EP99917896.5A Division EP1090231B2 (fr) 1998-05-26 1999-03-27 Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
EP99917896.5 Division 1999-03-27

Publications (3)

Publication Number Publication Date
EP1422423A1 EP1422423A1 (fr) 2004-05-26
EP1422423B1 EP1422423B1 (fr) 2005-10-05
EP1422423B2 true EP1422423B2 (fr) 2016-01-20

Family

ID=7868823

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03029746.9A Expired - Lifetime EP1422423B2 (fr) 1998-05-26 1999-03-27 Appareil avec boîtier pouvant être mis à vide

Country Status (4)

Country Link
EP (1) EP1422423B2 (fr)
JP (1) JP5069264B2 (fr)
KR (1) KR100613957B1 (fr)
DE (1) DE19901340B4 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
GB0414316D0 (en) 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
DE102007010068B4 (de) 2007-02-28 2024-06-13 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102007044945A1 (de) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3564538B1 (fr) 2019-02-20 2021-04-07 Pfeiffer Vacuum Gmbh Système à vide et procédé de fabrication d'un tel système à vide
KR102669882B1 (ko) * 2022-02-08 2024-05-28 (주)엘오티베큠 터보 분자 펌프

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2442614A1 (de) † 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe
US5722819A (en) † 1995-06-30 1998-03-03 Alcatel Cit Molecular drag pump
US5733104A (en) † 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system

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Publication number Priority date Publication date Assignee Title
US1942139A (en) * 1930-12-26 1934-01-02 Central Scientific Co Molecular vacuum pump
DE2229725B2 (de) * 1972-06-19 1975-05-07 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Turbomolekularpumpe
DE3402549A1 (de) * 1984-01-26 1985-08-01 Leybold-Heraeus GmbH, 5000 Köln Molekularvakuumpumpe
CH674785A5 (en) * 1988-03-07 1990-07-13 Dino Systems Limited Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls
EP0408791B1 (fr) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Pompe à effet visqueux à rotor en forme de cloche
JPH04330397A (ja) * 1991-04-30 1992-11-18 Fujitsu Ltd ターボ分子ポンプ
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
EP0603694A1 (fr) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Système à vide
DE4314419A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit Lagerabstützung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2442614A1 (de) † 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe
US5733104A (en) † 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US5722819A (en) † 1995-06-30 1998-03-03 Alcatel Cit Molecular drag pump
DE69623700T2 (de) † 1995-06-30 2003-07-31 Alcatel, Paris Turbomolekularpumpe

Also Published As

Publication number Publication date
KR100613957B1 (ko) 2006-08-18
DE19901340A1 (de) 1999-12-09
JP2009121491A (ja) 2009-06-04
JP5069264B2 (ja) 2012-11-07
DE19901340B4 (de) 2016-03-24
KR20010043815A (ko) 2001-05-25
EP1422423A1 (fr) 2004-05-26
EP1422423B1 (fr) 2005-10-05

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