EP1920160A1 - Pompe a vide - Google Patents

Pompe a vide

Info

Publication number
EP1920160A1
EP1920160A1 EP06792816A EP06792816A EP1920160A1 EP 1920160 A1 EP1920160 A1 EP 1920160A1 EP 06792816 A EP06792816 A EP 06792816A EP 06792816 A EP06792816 A EP 06792816A EP 1920160 A1 EP1920160 A1 EP 1920160A1
Authority
EP
European Patent Office
Prior art keywords
pump
rotor
transducer
stator
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06792816A
Other languages
German (de)
English (en)
Other versions
EP1920160B1 (fr
Inventor
Alois Greven
Thomas Longerich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1920160A1 publication Critical patent/EP1920160A1/fr
Application granted granted Critical
Publication of EP1920160B1 publication Critical patent/EP1920160B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Definitions

  • the invention relates to a vacuum pump with a pump rotor and a pump stator
  • the pump rotor In vacuum pumps, and particularly in high speed turbomolecular pumps, the pump rotor can be heated to a great extent by heat of compression, frictional heat and possibly other influences. Excessively high rotor temperatures increase the risk of crashes, accelerate material fatigue and change other characteristics of the pump rotor. For this Reason, it is necessary to monitor the rotor temperature and record if necessary.
  • the rotor temperature is determined either by a relatively expensive pyrometric measurement.
  • the rotor temperature can be determined indirectly by measuring the stator temperature and from this conclusions about the rotor temperature are drawn.
  • the indirect measurement is not very accurate and is not suitable for monitoring rapid temperature changes of the pump rotor.
  • the object of the invention is in contrast to provide a vacuum pump, can be detected inexpensively and accurately in the physical parameters of the pump rotor.
  • the pump rotor has an electrical transducer and a transmitter antenna connected to the transducer.
  • a receiving antenna is provided on the pump stator, which receives measurements from the transmitter from the transmitter antenna that transmits measured values of the transducer. This creates a wireless radio link for transmitting measured values between the pump rotor and the pump stator. An expensive pyrometric measurement or inaccurate indirect measurements of physically variable parameters of the pump rotor can therefore be dispensed with. Since the transducer is located directly on the pump stator, the relevant parameter can be determined very accurately.
  • the measured value is transmitted via the transmitting antenna to the receiving antenna analog or digital, whereby a safe, fast, accurate and error-free transmission can be ensured.
  • the transducer is preferably a temperature sensor, but may also be an acceleration or vibration sensor or a strain sensor, or a combination of a plurality of said sensors.
  • an energy transfer coil is provided on the pump stator and on the pump rotor, wherein the pumpenrotorse ⁇ tige coil is connected via aistswandier with the transducer, so that wireless electrical energy from the pump stator to the pump rotor for electrical power supply of the Meßwandiers be transmitted can.
  • the two energy transfer coils form the primary circuit and the secondary circuit of a transformer. By feeding a corresponding alternating voltage into the pump stator-side energy transmission coil, this is transmitted to the pump rotor-side energy transfer coil, so that in the pump rotor electrical energy is available to supply the Meßwandiers and possibly other aggregates available.
  • the two energy transfer coils may also be parts of the drive motor, i. be through a portion of a motor stator-side stator coil and a motor rotor-side rotor coil.
  • the transmitting antenna and the receiving antenna can serve as a power transmission coil.
  • the transmitting antenna and the receiving antenna may be arranged axially or radially to each other.
  • the transmitting and receiving antenna can be arranged in the region of the axial of the pump rotor.
  • the transmitting and receiving antenna can also be arranged outside and away from the axial of the pump rotor.
  • one of the two antennas is annular. This is necessary when the two antennas are arranged around a rotor shaft.
  • the two antennas overlap over a large part or the entire circumference. As a result, a relatively long or optionally continuous transmission of measured values between the transmitting antenna and the receiving antenna is possible. If both antennas are annular, but interrupted, they can each be used simultaneously as a primary and secondary coil for energy transmission.
  • a transponder is arranged on the pump rotor, which sends a transducer measured value only on request via the transmitting antenna to the receiving antenna.
  • the measured value transfer interval I J can be adapted to the respective situation.
  • the number of measured value transfers is kept as low as possible, which in turn keeps the rotor-side demand for electrical energy as small as possible.
  • the units concerned with the rotor power supply can be designed as small as possible.
  • the figure shows a vacuum pump in a schematic representation.
  • the vacuum pump 10 has a pump part, which is essentially formed by a pump stator 12 and a pump rotor 14. Furthermore, the vacuum pump 10 has a drive and storage part in which two shaft bearings 16, 18 and a drive motor 20 are arranged.
  • a receiving antenna 30 is provided, which is designed to be open and arranged in an annular ring around the rotor shaft 22.
  • the stator-side receiving antenna 30 is electrically connected to a control module 32 which the control of the transmitting and receiving operation and the evaluation of received by Empfangsanten ⁇ e 30 signals is used.
  • Rotor side and the receiving antenna 30 axially exactly opposite a corresponding annular transmitting antenna 40 is provided. Furthermore, the pump rotor 14 has a temperature sensor which is connected to a transponder 42, which in turn is connected to the transmitting antenna 40.
  • the transducer 44 is a temperature sensor that measures the rotor temperature and sends that value to the transponder 42 continuously or upon request.
  • strain sensors, acceleration or vibration sensors or other sensors can be used.
  • the receiving antenna 30 is formed as an open circular ring and is used in addition to their antenna characteristics as a secondary coil of a transformer to which the receiving antenna 30 forms the primary coil.
  • a corresponding alternating voltage is fed to the receiving antenna 30, which is induced in the transmitting antenna 40.
  • the axial distance between the receiving antenna 30 and the transmitting antenna 40 is a few millimeters and possibly even less than 1 mm.
  • the transponder 42 in the pump rotor 14 has a transceiver unit, which receives, amplifies and interprets request signals of the control module 32 and forwards measured values of the transducer 44 correspondingly amplified to the transmission antenna 40 upon request.
  • a voltage converter 46 is provided which rectifies the AC voltage received, regulates to a constant supply voltage and supplied via supply lines the transducer 44 and the transponder 42 with electrical energy.
  • the pump rotor With wireless wireless transmission of measured values provided by pump rotor-side transducers, the pump rotor can be comprehensively, precisely and promptly monitored. This can intervene quickly in case of imminent risk of accident by overheating rotor by a motor control and damage or destruction of the vacuum pump can be avoided.
  • the aging of the pump rotor can be tracked and extrapolated in particular by monitoring and recording of the pump rotor temperature or the life of the vacuum pump can be increased considerably by avoiding high pump rotor temperatures.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne une pompe à vide (10) présentant un rotor (14) et un stator (12). Le rotor (14) présente un convertisseur de mesure électrique (44), par ex. un capteur de température. Le rotor (14) comporte une antenne d'émission (40) pourvue du convertisseur de mesure (44). Le stator (12) comporte une antenne de réception (30) faisant face à l'antenne d'émission (40), recevant des valeurs de mesure du convertisseur de mesure (44) provenant de l'antenne d'émission (40). De cette manière, des valeurs de mesure précises peuvent être transmises du rotor (14) au stator (12).
EP06792816A 2005-09-01 2006-08-15 Pompe a vide Not-in-force EP1920160B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005041500A DE102005041500A1 (de) 2005-09-01 2005-09-01 Vakuumpumpe
PCT/EP2006/065315 WO2007025854A1 (fr) 2005-09-01 2006-08-15 Pompe a vide

Publications (2)

Publication Number Publication Date
EP1920160A1 true EP1920160A1 (fr) 2008-05-14
EP1920160B1 EP1920160B1 (fr) 2009-01-07

Family

ID=37115720

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06792816A Not-in-force EP1920160B1 (fr) 2005-09-01 2006-08-15 Pompe a vide

Country Status (6)

Country Link
US (1) US20100303640A1 (fr)
EP (1) EP1920160B1 (fr)
JP (1) JP2009507166A (fr)
CN (1) CN100585188C (fr)
DE (2) DE102005041500A1 (fr)
WO (1) WO2007025854A1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007053980A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102008019451A1 (de) 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102008019472A1 (de) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
WO2011140276A2 (fr) * 2010-05-04 2011-11-10 Remy Technologies, Llc Surveillance de la température d'un composant de machine électrique
FR2964164B1 (fr) * 2010-09-01 2014-05-09 Snecma Turbomachine comprenant un element tournant soumis a des conditions extremes
US20120075070A1 (en) * 2010-09-27 2012-03-29 General Electric Company Real time measurement of rotor surface
DE102010049138A1 (de) * 2010-10-22 2012-04-26 Ksb Aktiengesellschaft Vorrichtung zur Pumpenüberwachung
DE102011112748B3 (de) * 2011-09-07 2012-12-27 Maschinenfabrik Reinhausen Gmbh Motorantrieb zur Betätigung eines Stufenschalters
US9046431B2 (en) * 2012-06-28 2015-06-02 Honeywell International Inc. Single ear stator antenna for wireless torque measurement system
CN104005968B (zh) * 2014-06-05 2016-01-20 核工业理化工程研究院 可测转子表面温度的牵引式分子泵
CN104612984B (zh) * 2015-01-26 2017-02-22 核工业理化工程研究院 牵引式分子泵的转子端面测温装置
JP2018035684A (ja) * 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
EP3443993A1 (fr) * 2017-08-17 2019-02-20 Berlin Heart GmbH Pompe pourvue de capteur de rotor permettant la détermination des paramètres physiologiques, des paramètres de débit et des paramètres de mouvement

Family Cites Families (21)

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Publication number Priority date Publication date Assignee Title
US3824857A (en) * 1972-08-07 1974-07-23 Electric Machinery Mfg Co Temperature measuring system for rotating machines
US4723445A (en) * 1986-05-19 1988-02-09 Neotech Industries, Inc. Vehicle wheel and tire pressure monitor
US5252962A (en) * 1990-08-03 1993-10-12 Bio Medic Data Systems System monitoring programmable implantable transponder
US5160925C1 (en) * 1991-04-17 2001-03-06 Halliburton Co Short hop communication link for downhole mwd system
DE4309018A1 (de) * 1993-03-20 1994-09-22 Balzers Pfeiffer Gmbh Temperatur-Meßanordnung
US5844130A (en) * 1996-04-03 1998-12-01 Ssi Technologies Apparatus for maintaining a constant radial distance between a transmitting circuit and an antenna coil
JP2000064986A (ja) * 1998-08-12 2000-03-03 Seiko Seiki Co Ltd ターボ分子ポンプ
DE69909507T2 (de) * 1998-12-03 2004-06-09 Psi Global Ltd., Bowburn Verdichter oder vakuumpumpe, die einen fluidfilter mit verborgener maschinenlesbarer identifizierung anwendet
DE19857453B4 (de) * 1998-12-12 2008-03-20 Pfeiffer Vacuum Gmbh Temperaturüberwachung an Rotoren von Vakuumpumpen
US6369712B2 (en) * 1999-05-17 2002-04-09 The Goodyear Tire & Rubber Company Response adjustable temperature sensor for transponder
DE10018513A1 (de) * 2000-04-14 2001-10-18 Knorr Bremse Systeme Überwachungseinrichtung für Bremsscheiben und Überwachungsverfahren zur Überwachung der Temperatur von Bremsscheiben
JP3632561B2 (ja) * 2000-05-12 2005-03-23 株式会社デンソー 空気圧検出装置及びタイヤ状態監視システム
JP2002039088A (ja) * 2000-07-26 2002-02-06 Seiko Instruments Inc 回転体装置
DE10114969A1 (de) * 2001-03-27 2002-10-10 Leybold Vakuum Gmbh Turbomolekularpumpe
JP2003269367A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
DE20206267U1 (de) * 2002-04-20 2003-08-28 Leybold Vakuum Gmbh Vakuumpumpe
US6739840B2 (en) * 2002-05-22 2004-05-25 Applied Materials Inc Speed control of variable speed pump
JP4082345B2 (ja) * 2003-12-12 2008-04-30 トヨタ自動車株式会社 車輪状態検出装置、車輪及び車体
US20060078435A1 (en) * 2004-08-19 2006-04-13 Metropolitan Industries Pump monitoring system
US7336153B2 (en) * 2005-06-30 2008-02-26 Hewlett-Packard Development Company, L.P. Wireless temperature monitoring for an electronics system
WO2007044593A2 (fr) * 2005-10-07 2007-04-19 Chemimage Corporation Procede et systeme destines a un estimateur de menace a imagerie chimique muni d'une sonde

Non-Patent Citations (1)

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Title
See references of WO2007025854A1 *

Also Published As

Publication number Publication date
WO2007025854A1 (fr) 2007-03-08
CN101253332A (zh) 2008-08-27
EP1920160B1 (fr) 2009-01-07
US20100303640A1 (en) 2010-12-02
DE502006002609D1 (de) 2009-02-26
JP2009507166A (ja) 2009-02-19
CN100585188C (zh) 2010-01-27
DE102005041500A1 (de) 2007-03-08

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