JP2009507166A - 真空ポンプ - Google Patents
真空ポンプ Download PDFInfo
- Publication number
- JP2009507166A JP2009507166A JP2008528456A JP2008528456A JP2009507166A JP 2009507166 A JP2009507166 A JP 2009507166A JP 2008528456 A JP2008528456 A JP 2008528456A JP 2008528456 A JP2008528456 A JP 2008528456A JP 2009507166 A JP2009507166 A JP 2009507166A
- Authority
- JP
- Japan
- Prior art keywords
- pump
- rotor
- pump rotor
- vacuum pump
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005041500A DE102005041500A1 (de) | 2005-09-01 | 2005-09-01 | Vakuumpumpe |
PCT/EP2006/065315 WO2007025854A1 (fr) | 2005-09-01 | 2006-08-15 | Pompe a vide |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009507166A true JP2009507166A (ja) | 2009-02-19 |
Family
ID=37115720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008528456A Pending JP2009507166A (ja) | 2005-09-01 | 2006-08-15 | 真空ポンプ |
Country Status (6)
Country | Link |
---|---|
US (1) | US20100303640A1 (fr) |
EP (1) | EP1920160B1 (fr) |
JP (1) | JP2009507166A (fr) |
CN (1) | CN100585188C (fr) |
DE (2) | DE102005041500A1 (fr) |
WO (1) | WO2007025854A1 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011516794A (ja) * | 2008-04-17 | 2011-05-26 | オーリコン レイボルド バキューム ゲーエムベーハー | 真空ポンプ |
JP2012074035A (ja) * | 2010-09-27 | 2012-04-12 | General Electric Co <Ge> | 回転子表面のリアルタイム測定 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007053980A1 (de) * | 2007-11-13 | 2009-05-14 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102008019451A1 (de) | 2008-04-17 | 2009-10-22 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
JP2013529453A (ja) * | 2010-05-04 | 2013-07-18 | レミー テクノロジーズ, エルエルシー | 電気機械構成要素の温度監視 |
FR2964164B1 (fr) * | 2010-09-01 | 2014-05-09 | Snecma | Turbomachine comprenant un element tournant soumis a des conditions extremes |
DE102010049138A1 (de) * | 2010-10-22 | 2012-04-26 | Ksb Aktiengesellschaft | Vorrichtung zur Pumpenüberwachung |
DE102011112748B3 (de) * | 2011-09-07 | 2012-12-27 | Maschinenfabrik Reinhausen Gmbh | Motorantrieb zur Betätigung eines Stufenschalters |
US9046431B2 (en) * | 2012-06-28 | 2015-06-02 | Honeywell International Inc. | Single ear stator antenna for wireless torque measurement system |
CN104005968B (zh) * | 2014-06-05 | 2016-01-20 | 核工业理化工程研究院 | 可测转子表面温度的牵引式分子泵 |
CN104612984B (zh) * | 2015-01-26 | 2017-02-22 | 核工业理化工程研究院 | 牵引式分子泵的转子端面测温装置 |
JP2018035684A (ja) * | 2016-08-29 | 2018-03-08 | 株式会社島津製作所 | 真空ポンプ |
EP3443993A1 (fr) * | 2017-08-17 | 2019-02-20 | Berlin Heart GmbH | Pompe pourvue de capteur de rotor permettant la détermination des paramètres physiologiques, des paramètres de débit et des paramètres de mouvement |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3824857A (en) * | 1972-08-07 | 1974-07-23 | Electric Machinery Mfg Co | Temperature measuring system for rotating machines |
JP2001322411A (ja) * | 2000-05-12 | 2001-11-20 | Denso Corp | 空気圧検出装置及びタイヤ状態監視システム |
JP2002039088A (ja) * | 2000-07-26 | 2002-02-06 | Seiko Instruments Inc | 回転体装置 |
JP2005170274A (ja) * | 2003-12-12 | 2005-06-30 | Toyota Motor Corp | 車輪状態検出装置、車輪及び車体 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4723445A (en) * | 1986-05-19 | 1988-02-09 | Neotech Industries, Inc. | Vehicle wheel and tire pressure monitor |
US5252962A (en) * | 1990-08-03 | 1993-10-12 | Bio Medic Data Systems | System monitoring programmable implantable transponder |
US5160925C1 (en) * | 1991-04-17 | 2001-03-06 | Halliburton Co | Short hop communication link for downhole mwd system |
DE4309018A1 (de) * | 1993-03-20 | 1994-09-22 | Balzers Pfeiffer Gmbh | Temperatur-Meßanordnung |
US5844130A (en) * | 1996-04-03 | 1998-12-01 | Ssi Technologies | Apparatus for maintaining a constant radial distance between a transmitting circuit and an antenna coil |
JP2000064986A (ja) * | 1998-08-12 | 2000-03-03 | Seiko Seiki Co Ltd | ターボ分子ポンプ |
DE69909507T2 (de) * | 1998-12-03 | 2004-06-09 | Psi Global Ltd., Bowburn | Verdichter oder vakuumpumpe, die einen fluidfilter mit verborgener maschinenlesbarer identifizierung anwendet |
DE19857453B4 (de) * | 1998-12-12 | 2008-03-20 | Pfeiffer Vacuum Gmbh | Temperaturüberwachung an Rotoren von Vakuumpumpen |
US6369712B2 (en) * | 1999-05-17 | 2002-04-09 | The Goodyear Tire & Rubber Company | Response adjustable temperature sensor for transponder |
DE10018513A1 (de) * | 2000-04-14 | 2001-10-18 | Knorr Bremse Systeme | Überwachungseinrichtung für Bremsscheiben und Überwachungsverfahren zur Überwachung der Temperatur von Bremsscheiben |
DE10114969A1 (de) * | 2001-03-27 | 2002-10-10 | Leybold Vakuum Gmbh | Turbomolekularpumpe |
JP2003269367A (ja) * | 2002-03-13 | 2003-09-25 | Boc Edwards Technologies Ltd | 真空ポンプ |
DE20206267U1 (de) * | 2002-04-20 | 2003-08-28 | Leybold Vakuum GmbH, 50968 Köln | Vakuumpumpe |
US6739840B2 (en) * | 2002-05-22 | 2004-05-25 | Applied Materials Inc | Speed control of variable speed pump |
US20060078435A1 (en) * | 2004-08-19 | 2006-04-13 | Metropolitan Industries | Pump monitoring system |
US7336153B2 (en) * | 2005-06-30 | 2008-02-26 | Hewlett-Packard Development Company, L.P. | Wireless temperature monitoring for an electronics system |
EP1949053A2 (fr) * | 2005-10-07 | 2008-07-30 | Chemimage Corporation | Procede et systeme destines a un estimateur de menace a imagerie chimique muni d'une sonde |
-
2005
- 2005-09-01 DE DE102005041500A patent/DE102005041500A1/de not_active Withdrawn
-
2006
- 2006-08-15 WO PCT/EP2006/065315 patent/WO2007025854A1/fr active Application Filing
- 2006-08-15 JP JP2008528456A patent/JP2009507166A/ja active Pending
- 2006-08-15 CN CN200680031638A patent/CN100585188C/zh not_active Expired - Fee Related
- 2006-08-15 EP EP06792816A patent/EP1920160B1/fr not_active Not-in-force
- 2006-08-15 US US11/991,222 patent/US20100303640A1/en not_active Abandoned
- 2006-08-15 DE DE502006002609T patent/DE502006002609D1/de active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3824857A (en) * | 1972-08-07 | 1974-07-23 | Electric Machinery Mfg Co | Temperature measuring system for rotating machines |
JP2001322411A (ja) * | 2000-05-12 | 2001-11-20 | Denso Corp | 空気圧検出装置及びタイヤ状態監視システム |
JP2002039088A (ja) * | 2000-07-26 | 2002-02-06 | Seiko Instruments Inc | 回転体装置 |
JP2005170274A (ja) * | 2003-12-12 | 2005-06-30 | Toyota Motor Corp | 車輪状態検出装置、車輪及び車体 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011516794A (ja) * | 2008-04-17 | 2011-05-26 | オーリコン レイボルド バキューム ゲーエムベーハー | 真空ポンプ |
JP2012074035A (ja) * | 2010-09-27 | 2012-04-12 | General Electric Co <Ge> | 回転子表面のリアルタイム測定 |
Also Published As
Publication number | Publication date |
---|---|
DE502006002609D1 (de) | 2009-02-26 |
EP1920160A1 (fr) | 2008-05-14 |
US20100303640A1 (en) | 2010-12-02 |
CN100585188C (zh) | 2010-01-27 |
DE102005041500A1 (de) | 2007-03-08 |
EP1920160B1 (fr) | 2009-01-07 |
CN101253332A (zh) | 2008-08-27 |
WO2007025854A1 (fr) | 2007-03-08 |
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Legal Events
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A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090616 |
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