DE502006002609D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE502006002609D1
DE502006002609D1 DE502006002609T DE502006002609T DE502006002609D1 DE 502006002609 D1 DE502006002609 D1 DE 502006002609D1 DE 502006002609 T DE502006002609 T DE 502006002609T DE 502006002609 T DE502006002609 T DE 502006002609T DE 502006002609 D1 DE502006002609 D1 DE 502006002609D1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE502006002609T
Other languages
English (en)
Inventor
Alois Greven
Thomas Longerich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of DE502006002609D1 publication Critical patent/DE502006002609D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE502006002609T 2005-09-01 2006-08-15 Vakuumpumpe Active DE502006002609D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005041500A DE102005041500A1 (de) 2005-09-01 2005-09-01 Vakuumpumpe
PCT/EP2006/065315 WO2007025854A1 (de) 2005-09-01 2006-08-15 Vakuumpumpe

Publications (1)

Publication Number Publication Date
DE502006002609D1 true DE502006002609D1 (de) 2009-02-26

Family

ID=37115720

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102005041500A Withdrawn DE102005041500A1 (de) 2005-09-01 2005-09-01 Vakuumpumpe
DE502006002609T Active DE502006002609D1 (de) 2005-09-01 2006-08-15 Vakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102005041500A Withdrawn DE102005041500A1 (de) 2005-09-01 2005-09-01 Vakuumpumpe

Country Status (6)

Country Link
US (1) US20100303640A1 (de)
EP (1) EP1920160B1 (de)
JP (1) JP2009507166A (de)
CN (1) CN100585188C (de)
DE (2) DE102005041500A1 (de)
WO (1) WO2007025854A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007053980A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102008019451A1 (de) 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102008019472A1 (de) * 2008-04-17 2009-10-22 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
WO2011140276A2 (en) * 2010-05-04 2011-11-10 Remy Technologies, Llc Electric machine component temperature monitoring
FR2964164B1 (fr) * 2010-09-01 2014-05-09 Snecma Turbomachine comprenant un element tournant soumis a des conditions extremes
US20120075070A1 (en) * 2010-09-27 2012-03-29 General Electric Company Real time measurement of rotor surface
DE102010049138A1 (de) * 2010-10-22 2012-04-26 Ksb Aktiengesellschaft Vorrichtung zur Pumpenüberwachung
DE102011112748B3 (de) * 2011-09-07 2012-12-27 Maschinenfabrik Reinhausen Gmbh Motorantrieb zur Betätigung eines Stufenschalters
US9046431B2 (en) * 2012-06-28 2015-06-02 Honeywell International Inc. Single ear stator antenna for wireless torque measurement system
CN104005968B (zh) * 2014-06-05 2016-01-20 核工业理化工程研究院 可测转子表面温度的牵引式分子泵
CN104612984B (zh) * 2015-01-26 2017-02-22 核工业理化工程研究院 牵引式分子泵的转子端面测温装置
JP2018035684A (ja) * 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
EP3443993A1 (de) * 2017-08-17 2019-02-20 Berlin Heart GmbH Pumpe mit einem rotorsensor zur erfassung von physiologischen parametern, strömungs- und bewegungsparametern

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3824857A (en) * 1972-08-07 1974-07-23 Electric Machinery Mfg Co Temperature measuring system for rotating machines
US4723445A (en) * 1986-05-19 1988-02-09 Neotech Industries, Inc. Vehicle wheel and tire pressure monitor
US5252962A (en) * 1990-08-03 1993-10-12 Bio Medic Data Systems System monitoring programmable implantable transponder
US5160925C1 (en) * 1991-04-17 2001-03-06 Halliburton Co Short hop communication link for downhole mwd system
DE4309018A1 (de) * 1993-03-20 1994-09-22 Balzers Pfeiffer Gmbh Temperatur-Meßanordnung
US5844130A (en) * 1996-04-03 1998-12-01 Ssi Technologies Apparatus for maintaining a constant radial distance between a transmitting circuit and an antenna coil
JP2000064986A (ja) * 1998-08-12 2000-03-03 Seiko Seiki Co Ltd ターボ分子ポンプ
DE69909507T2 (de) * 1998-12-03 2004-06-09 Psi Global Ltd., Bowburn Verdichter oder vakuumpumpe, die einen fluidfilter mit verborgener maschinenlesbarer identifizierung anwendet
DE19857453B4 (de) * 1998-12-12 2008-03-20 Pfeiffer Vacuum Gmbh Temperaturüberwachung an Rotoren von Vakuumpumpen
US6369712B2 (en) * 1999-05-17 2002-04-09 The Goodyear Tire & Rubber Company Response adjustable temperature sensor for transponder
DE10018513A1 (de) * 2000-04-14 2001-10-18 Knorr Bremse Systeme Überwachungseinrichtung für Bremsscheiben und Überwachungsverfahren zur Überwachung der Temperatur von Bremsscheiben
JP3632561B2 (ja) * 2000-05-12 2005-03-23 株式会社デンソー 空気圧検出装置及びタイヤ状態監視システム
JP2002039088A (ja) * 2000-07-26 2002-02-06 Seiko Instruments Inc 回転体装置
DE10114969A1 (de) * 2001-03-27 2002-10-10 Leybold Vakuum Gmbh Turbomolekularpumpe
JP2003269367A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
DE20206267U1 (de) * 2002-04-20 2003-08-28 Leybold Vakuum Gmbh Vakuumpumpe
US6739840B2 (en) * 2002-05-22 2004-05-25 Applied Materials Inc Speed control of variable speed pump
JP4082345B2 (ja) * 2003-12-12 2008-04-30 トヨタ自動車株式会社 車輪状態検出装置、車輪及び車体
US20060078435A1 (en) * 2004-08-19 2006-04-13 Metropolitan Industries Pump monitoring system
US7336153B2 (en) * 2005-06-30 2008-02-26 Hewlett-Packard Development Company, L.P. Wireless temperature monitoring for an electronics system
WO2007044593A2 (en) * 2005-10-07 2007-04-19 Chemimage Corporation System and method for a chemical imaging threat assessor with a probe

Also Published As

Publication number Publication date
WO2007025854A1 (de) 2007-03-08
CN101253332A (zh) 2008-08-27
EP1920160B1 (de) 2009-01-07
US20100303640A1 (en) 2010-12-02
EP1920160A1 (de) 2008-05-14
JP2009507166A (ja) 2009-02-19
CN100585188C (zh) 2010-01-27
DE102005041500A1 (de) 2007-03-08

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Legal Events

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