EP1851433A1 - Einwellige vakuum-verdrängerpumpe - Google Patents

Einwellige vakuum-verdrängerpumpe

Info

Publication number
EP1851433A1
EP1851433A1 EP06707865A EP06707865A EP1851433A1 EP 1851433 A1 EP1851433 A1 EP 1851433A1 EP 06707865 A EP06707865 A EP 06707865A EP 06707865 A EP06707865 A EP 06707865A EP 1851433 A1 EP1851433 A1 EP 1851433A1
Authority
EP
European Patent Office
Prior art keywords
pump
shaft
positive displacement
displacement pump
motor rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06707865A
Other languages
German (de)
English (en)
French (fr)
Inventor
Michael HÖLZEMER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1851433A1 publication Critical patent/EP1851433A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06Combinations of two or more pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00Pumping installations or systems
    • F04D25/16Combinations of two or more pumps ; Producing two or more separate gas flows

Definitions

  • the invention relates to a single-shaft vacuum positive displacement pump with two or more successively connected pump stages and a drive motor.
  • the object of the invention is to provide a simplified single-shaft vacuum positive displacement pump.
  • the drive motor is arranged axially between the two pump stages, wherein a single common shaft carries the two pump rotors and the motor rotor, the vacuum positive displacement pump thus has only a single cinstuckige wave, resulting in a number of design advantages.
  • two common shaft bearings can be used for the storage of the drive motor rotor and the two axially adjacent pump rotors. In this way, the number of shaft bearings can be reduced to a few bearings.
  • the entire positive displacement pump comes with two shaft bearings. Due to the single-shaft design, a clutch is avoided, which further simplifies the structure. As a result, a simple, compact design and inexpensive producible two-stage positive displacement pump is provided.
  • further pump stages can each be connected axially, facing away from the drive motor.
  • the gas connection between the two pump stages is formed by the motor rotor-stator gap.
  • a gap is inevitable between the engine rotor and the engine. This gap serves as a connecting line between the two pump stages, ie between the fore-vacuum stage and the high-vacuum stage.
  • a separate connection between the two Pump stages no longer need to be provided. This is the
  • Connecting line is to be additionally provided only with greater pumping speed.
  • the gap between the motor rotor and the motor stator is cylindrical, d. H. the motor rotor is on the outside and the motor stator inside each cylindrical.
  • the motor rotor has a helical pumping groove.
  • the helical and rotating pumping groove improves the gas transport axially through the motor rotor-stator gap from the high-vacuum stage to the pre-vacuum stage.
  • the motor rotor acts as a lubricant pump, which pumps the lubricant from the upstream to the downstream pump stage
  • the pumping groove is suitable for wet vacuum displacement pumps, d. h, in the case of displacement pumps lubricated with a flowing lubricant, also to transport the liquid lubricant from the high vacuum stage to the fore-vacuum stage. In this way can be dispensed with a separate lubricant pump.
  • the drive motor and in particular the motor rotor is cooled, so that a separate engine cooling u U can be omitted.
  • a single stator housing surrounds the shaft, wherein the stator housing is shaft seal free.
  • the stator housing thus surrounds both pump stages and the motor rotor and possibly forms the stator of the pump stages and the drive motor.
  • the stator housing is surrounded by a lubricant housing.
  • the stator housing is spaced in the lubricant housing so that the lubricant is stored between the stator housing and the lubricant housing and can flow from the outlet to a lubricant pump.
  • both pump stages are designed as gate valves or rotary valve - pump stages.
  • multi-stage rotor stages can be provided, or claw-pump stages or other types of pump stages.
  • the figure shows a single-shaft vacuum positive displacement pump according to the invention with two rotary valve pump stages in longitudinal section.
  • the figure shows a vacuum displacement pump 10 with two pump stages 12,14, which are each designed as rotary valve pump stages and a drive motor 16 which is arranged axially between the two pump stages 12,14.
  • the inlet side pumping stage 14 is. connected to a gas inlet 18 and forms the high vacuum stage.
  • the downstream pump stage 12, viewed in the gas flow direction, is the pre-vacuum stage, which pumps into a gas outlet 20 against atmospheric pressure.
  • the two pump stages 12, 14 each have a pump rotor 13, 15 and the drive motor 16 has a motor rotor 17.
  • the pump rotors 13, 15 and the motor rotor 17 are fixedly mounted on a common one-piece shaft 22.
  • the motor rotor 17 is permanently energized.
  • the gas connection between the two pump stages 12,14 is formed by a cylindrical gap 24, the inside of the motor rotor 17 and outside of a motor stator 28 is limited.
  • the motor rotor 17 has a helical groove 30, which is embedded in the cylindrical outer side of the motor rotor 17.
  • the gas connection can also be realized via an external channel, z. B. if larger pumping speeds make this necessary.
  • the shaft 22 is held by two shaft bearings 32,34, which are designed as rolling bearings. As a shaft bearing and plain bearings or gas bearings come into question.
  • the pump protors 13, 15 are cantilevered, so that the shaft 21 is held solely by the two shaft bearings 32, 34.
  • the two pump stages 12,14 and the drive motor 16 are held including the shaft 22 and completely surrounded by a stator housing 40.
  • the stator housing 40 has no Wellenend ⁇ chtungen on.
  • the stator housing 40 in turn is arranged in a Schnnierstoffgephinuse 41, which serves to receive and transport the lubricant from the fore-vacuum side to the high-vacuum side.
  • a gear pump 44 is arranged, which pumps the liquid lubricant 46 via a channel 48 into the motor rotor-stator gap 24. Via a corresponding inlet, a small proportion of the lubricant delivered by the gear pump 44 passes directly into the working space of the high-vacuum pump stage 14. The mixture of the gas and lubricant leaving the high-vacuum pump stage 14 is pumped through the helical pumping groove 30 to the pre-vacuum pump stage 12 , whereby the motor rotor 17 and the motor stator 28 are lubricated and cooled.
  • An oil separator 50 connects to the pumping chamber outlet of the fore-vacuum pumping stage 12 and separates the downwardly dripping lubricant and the gas evacuated from the atmosphere.
  • the lubricant flows - p

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP06707865A 2005-02-26 2006-01-27 Einwellige vakuum-verdrängerpumpe Withdrawn EP1851433A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005008887A DE102005008887A1 (de) 2005-02-26 2005-02-26 Einwellige Vakuum-Verdränderpumpe
PCT/EP2006/050481 WO2006089828A1 (de) 2005-02-26 2006-01-27 Einwellige vakuum-verdrängerpumpe

Publications (1)

Publication Number Publication Date
EP1851433A1 true EP1851433A1 (de) 2007-11-07

Family

ID=36130115

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06707865A Withdrawn EP1851433A1 (de) 2005-02-26 2006-01-27 Einwellige vakuum-verdrängerpumpe

Country Status (7)

Country Link
US (1) US20080166247A1 (zh)
EP (1) EP1851433A1 (zh)
JP (1) JP2008531910A (zh)
KR (1) KR20070103775A (zh)
CN (1) CN101128671A (zh)
DE (1) DE102005008887A1 (zh)
WO (1) WO2006089828A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010033373A1 (de) * 2010-08-04 2012-02-09 Inficon Gmbh Lecksuchgerät
CN103206378B (zh) * 2012-01-11 2015-10-07 复盛股份有限公司 多段式热泵压缩机
KR102235562B1 (ko) * 2014-05-01 2021-04-05 아뜰리에 부쉬 에스.아. 펌핑 시스템에서의 펌핑 방법 및 진공 펌프 시스템
DE202014005279U1 (de) * 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
JP6608394B2 (ja) 2014-06-27 2019-11-20 アテリエ ビスク ソシエテ アノニム 真空ポンプシステムの圧送方法および真空ポンプシステム
WO2016070043A1 (en) * 2014-10-31 2016-05-06 Trane International Inc. Systems and methods to provide lubricant to a bearing
DE102018105142A1 (de) * 2018-03-06 2019-09-12 Schwäbische Hüttenwerke Automotive GmbH Dichtelement Vakuumpumpe

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2524269A (en) * 1946-10-14 1950-10-03 Sta Rite Products Inc Pump
US2902210A (en) * 1955-08-15 1959-09-01 Edwards High Vacuum Ltd Multi-stage mechanical vacuum pumps
DE1628313A1 (de) * 1966-08-20 1971-01-28 Leybold Heraeus Gmbh & Co Kg Vakuumpumpe
DE1916394A1 (de) * 1969-03-31 1970-10-15 Balzers & Pfeiffer Hochvakuum Als Verdraengerpumpe ausgebildete Vakuumpumpe
JPH03151989A (ja) * 1989-11-08 1991-06-28 Daiwa Golf Kk 管状体およびその製造方法
DE3937345A1 (de) * 1989-11-09 1991-05-16 Pfeiffer Vakuumtechnik Pumpe mit antriebsmotor
US5112200A (en) * 1990-05-29 1992-05-12 Nu-Tech Industries, Inc. Hydrodynamically suspended rotor axial flow blood pump
JPH05302581A (ja) * 1992-04-24 1993-11-16 Daikin Ind Ltd 縦形圧縮機
GB9223804D0 (en) * 1992-11-13 1993-01-06 Boc Group Plc Improvements in vacuum pumps
JPH07318179A (ja) * 1994-05-26 1995-12-08 Toshiba Corp 密閉型コンプレッサならびにこれを有する冷凍装置,空気調和機
JPH08219059A (ja) * 1995-02-17 1996-08-27 Hitachi Ltd 圧縮機
EP0738833B1 (en) * 1995-04-19 2000-09-20 Ebara Corporation Multistage positive-displacement vacuum pump
JP3432679B2 (ja) * 1996-06-03 2003-08-04 株式会社荏原製作所 容積式真空ポンプ
US6244835B1 (en) * 1996-06-26 2001-06-12 James F. Antaki Blood pump having a magnetically suspended rotor
JP4319274B2 (ja) * 1998-10-30 2009-08-26 株式会社日立製作所 スクロール式流体機械
DE19945871A1 (de) * 1999-09-24 2001-03-29 Leybold Vakuum Gmbh Schraubenpumpe, insbesondere Schraubenvakuumpumpe, mit zwei Pumpstufen
JP3475174B2 (ja) * 2000-02-10 2003-12-08 東芝テック株式会社 電動ポンプ
US6749405B2 (en) * 2000-06-16 2004-06-15 Stuart Bassine Reversible pivoting vane rotary compressor for a valve-free oxygen concentrator
JP2003254271A (ja) * 2002-03-04 2003-09-10 Teijin Ltd ツイン型スクロール式流体機械
US6631617B1 (en) * 2002-06-27 2003-10-14 Tecumseh Products Company Two stage hermetic carbon dioxide compressor
EP1522749B1 (en) * 2002-07-12 2008-03-19 Mitsubishi Denki Kabushiki Kaisha Magnetic bearing spindle
US6752605B2 (en) * 2002-10-15 2004-06-22 Tecumseh Products Company Horizontal two stage rotary compressor with a bearing-driven lubrication structure
JP4274841B2 (ja) * 2003-04-14 2009-06-10 三洋電機株式会社 コンプレッサ用密閉容器の製造方法
US7201567B2 (en) * 2003-06-20 2007-04-10 Emerson Climate Technologies, Inc. Plural compressors

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2006089828A1 *

Also Published As

Publication number Publication date
DE102005008887A1 (de) 2006-08-31
US20080166247A1 (en) 2008-07-10
KR20070103775A (ko) 2007-10-24
JP2008531910A (ja) 2008-08-14
CN101128671A (zh) 2008-02-20
WO2006089828A1 (de) 2006-08-31

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