EP0084084A1 - Pompe à vide à joint d'huile - Google Patents

Pompe à vide à joint d'huile Download PDF

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Publication number
EP0084084A1
EP0084084A1 EP82109588A EP82109588A EP0084084A1 EP 0084084 A1 EP0084084 A1 EP 0084084A1 EP 82109588 A EP82109588 A EP 82109588A EP 82109588 A EP82109588 A EP 82109588A EP 0084084 A1 EP0084084 A1 EP 0084084A1
Authority
EP
European Patent Office
Prior art keywords
oil
pump
pressure
vacuum pump
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP82109588A
Other languages
German (de)
English (en)
Other versions
EP0084084B1 (fr
Inventor
Hanns-Peter Dr. Berges
Peter Frieden
Wolfgang Leier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of EP0084084A1 publication Critical patent/EP0084084A1/fr
Application granted granted Critical
Publication of EP0084084B1 publication Critical patent/EP0084084B1/fr
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors

Definitions

  • the invention relates to an oil-sealed vacuum pump with an oil circuit for supplying the bearings and the pump chamber with oil and a valve arranged in the oil circuit for shutting off the oil supply to the pump chamber when the pump is at a standstill.
  • An oil-sealed vacuum pump of this type is known from GB-PS 875 444.
  • the oil pump of the oil circuit sucks the oil from the oil supply in the pump housing and conveys it to a kind of check valve, the closing piece of which is under the action of a very weak spring, so that the oil pressure in the oil circuit is only slightly above the ambient pressure. From the valve, which opens against the spring pressure, the excess oil pumped by the oil pump passed through the bearing of the pump shaft into the pump chamber and from there is fed back to the oil reservoir via the outlet valve.
  • the disadvantage of this is that no oil can be supplied to the bearings with a pressure that is significantly above the ambient pressure, which is desirable for safe and continuous bearing lubrication.
  • the present invention has for its object to provide an oil-sealed vacuum pump of the type mentioned, in which despite safe bearing lubrication Pressure oil a pump operation up to 1000 mbar suction pressure is guaranteed without unnecessary loading of the pumped gases with oil vapors.
  • this object is achieved in that the oil circuit serving to supply the bearings of the pump chamber with oil has a pressure stage for reducing the excess pressure generated by the oil pump to the ambient pressure, and in that the branches leading to the bearings - based on the direction of the flowing oil - upstream of the pressure stage and the branch line leading to the pump chamber as well as the shut-off valve behind the pressure stage.
  • the oil pump and the pressure stage can be used to maintain a relatively high pressure in the first part of the oil circuit from which the bearings are supplied with lubricating oil.
  • the pump room is supplied with pressure-relieved oil, so that the pump works as a self-priming pump.
  • Such a pump sucks little oil at high suction pressures, and a lot of oil during final pressure operation.
  • the increased oil consumption and the disturbing environmental impact at high suction pressures are therefore greatly reduced.
  • the oil supply to the bearings from an oil circuit with a relatively high pressure allows an oil filter to be switched on in this part of the oil line, via which a relatively high pressure difference drops, so that only cleaned oil can be supplied to the bearings. It is also possible to monitor the pump via the oil pressure, which allows a clear statement about the operating state of the pump.
  • the supply of oil to the pump chamber from the subsequent pressure-relieved part of the oil circuit has the advantage that only cleaned oil gets into the pump chamber.
  • the shut-off valve ensures that when the pump is switched off, the amount of oil that remains inside the pump chamber is reliably limited. This gives decisive advantages when the pump is cold started, which has a direct influence on the dimensioning of the motor of the pump. An undesirable increase in oil in the pump and in the suction port when the pump is accidentally reversed is also reliably prevented.
  • the oil circuit of the pump is formed by the suction line 11, via which oil is conveyed from the oil supply 2 into the oil pressure line 13 by means of the oil pump 12.
  • a throttle 15 is arranged, which is used for the maintenance the desired oil pressure (between 1.5 and 2 bar, preferably 1.7 bar) and via which the pressure is reduced to the pressure in the oil box 1.
  • the bearings in the pump are supplied with pressure oil via branches 16, 17, 18.
  • Three oil supply lines (16, 17, 18) are required in the case of a two-stage pump, in which two end bearings and an intermediate bearing of the two rotors have to be supplied with oil. In the case of a single-stage pump, two of the three branch lines are sufficient. After flowing through the bearings, the oil that has entered the branch lines 16, 17, 18 returns to the oil reservoir 2.
  • An oil filter 19 is switched on in the pressure oil line 13 immediately behind the oil pump 12, so that it is ensured that only cleaned oil flows through the line 13 and through the branch lines connected to it.
  • Another branch line 21 opens into the control cylinder 22, in which the control piston 23 is located.
  • the pressure medium line 24 opens into the cylinder 22, the other end of which is connected to the cylinder 9 on the side of the piston 8 facing away from the valve plate 7.
  • the inlet opening 25 of the pressure medium line 24 in the cylinder 22 is designed as a valve seat.
  • a plug 26 with a sealing bead 27 is inserted into the inlet opening 25.
  • the end face 28 of a cylindrical projection 29 on the control piston 23 with a reduced diameter compared to the control piston serves as the closure member.
  • the control piston 23 is under the action of a spring 31, which is arranged between the control piston 23 and the end wall 32 with the inlet opening 25 of the pressure medium line 24 and is designed as a compression spring.
  • the cylindrical projection 29 can be screwed into the control piston 23 by means of the thread 33, so that in the Closing state of the control valve 27, 28 acting force of the spring 31 can be influenced.
  • a further line 34 opens into the cylinder 22 and is connected to an oil reservoir 35 of small volume which is open at the top.
  • the junction of the line 34 in the cylinder 22 lies on the side of the control piston 23 opposite the junction of the line 21.
  • the oil pump 12 conveys oil from the oil reservoir 2 into the oil pressure line 13.
  • the oil pump 12 can be designed as a rotary vane pump or gear pump and coupled in a known manner to the pump shaft as a drive (cf.
  • the delivery properties of the pump 12 and the size of the throttle 15 are dimensioned such that the desired oil pressure builds up and is maintained in the line 13 after the vacuum pump has started. This pressure acts on the piston 23 and overcomes the force of the spring 31, so that the inlet opening 25 of the pressure medium line 24 is closed.
  • the suction nozzle valve 4 is in its open position, so that the recipient connected to the suction nozzle 3 is evacuated.
  • the pump is switched off, the amount of oil delivered by the oil pump 12 decreases at the same time, so that the oil pressure in the line 13 decreases.
  • the inlet opening 25 is opened so that, owing to the atmospheric pressure prevailing on the surface of the oil in the oil reservoir 35, oil is pressed into the pressure medium line 24 and reaches the cylinder 9 under the piston 8.
  • the amount of oil located below the piston 23 and in the oil reservoir 35 is so small that the oil entering the cylinder 9 essentially serves only to seal the piston 8 against its cylinder wall.
  • the actual pressure medium for actuating the piston 8 is the air which, following the oil, passes through the oil supply 35 into the pressure medium line 24.
  • the total amount of oil in the cylinder 2 and in the oil reservoir 35 is a few cm 3 . It should be low so that it essentially serves only to seal the gap existing between the piston 8 and the cylinder 9. These processes cause the suction nozzle valve 4 to close without the undesirable air intake. After the suction nozzle valve 4 is closed and the urging air has displaced the oil located between the piston 8 and the cylinder wall 9, the pump chamber is ventilated.
  • the function of the suction nozzle valve control is independent of the existence of an oil filter 19, ie, even in an oil circuit without an oil filter 19 (cf. line section 20 shown in broken lines), the suction nozzle valve and its control means work perfectly.
  • a particular advantage of the described embodiment of the suction nozzle valves 4 and its control means which operate as a function of the oil pressure is that both cylinder-piston devices 8, 9 and 22, 23 are hardly susceptible to tolerances because of the desired gap between the piston and the cylinder and therefore without special costs can be produced.
  • the control means can be adjusted in such a way that the inlet opening 25 of the pressure medium line 24 is opened even with relatively small pressure drops in the oil circuit (e.g. a drop in the target pressure from approximately 1.7 bar to 1.5 bar).
  • the response time of the intake port valve 4 is so short due to the hydro-pneumatic actuation that it is ensured that the intake port valve is closed before the vacuum pump finally runs out.
  • the control of the suction port valve by the oil pressure in an oil circuit which is supplied by an oil pump arranged on the pump shaft, has the advantage of a fast and safe mode of operation, since the operating state of the pump can clearly be derived from the oil pressure in the oil circuit.
  • the outlet opening 14 of the line 13 is assigned a resilient cover 41 which - together with a special design of the wall 42 in the region of the outlet opening 14 - fulfills several functions.
  • the outlet opening 14 is surrounded by a concentric groove 43 in the wall 42, which extends into a bore 44 through which the oil serving to supply the pump chamber passes.
  • This bore is also equipped with a throttle 45, the size of which is adapted to the suction power of the respective pump.
  • the resilient cover 41 which preferably consists of an elastic steel band section, covers both the outlet opening 14 of the oil pressure line 13 and the bore 44. Their force and the distance of the fastening points 46, 47 from the oil channels 13, 44 are selected so that they represents a pressure level of a negligible pressure difference for the oil emerging from the outlet opening 14.
  • the oil emerges from the outlet opening 14 with the pressure of the oil box.
  • it also applies at this point in the oil circuit that it is operated with excess oil, that is to say that even when the pump is operating at the end pressure, more oil passes through the outlet opening emerges as is sucked in by the pump through the bore 44 or throttle 45.
  • the pressure oil is expanded to the pressure in the oil box as a result of the throttle 15 and initially flows into the groove 43 surrounding the outlet opening 14. Part of the oil flows out of this groove, which is connected to the bore 44, as a result of the Suction effect of the pump chamber through the bore 44 or throttle 45. Excess oil is returned to oil reservoir 2.
  • the resilient cover 41 ensures that only such oil flows through the bore 44 and the throttle 45 that has emerged from the outlet opening 14. Therefore, only oil that has flowed through the oil filter 19 enters the pump chamber. The pump room is therefore no longer affected by dirty oil. Nevertheless, the pump works like a self-priming pump, i.e. that is, it determines the amount of oil it needs itself. B. small amounts of oil through the throttle 45, so that undesirably high oil vapor shares .n the conveyed media emerging from the pump are not available. Regardless of this, it is ensured that the bearings are supplied with pressure oil.
  • the resilient cover and the special groove design ensure that the oil is shut off when the pump is at a standstill.
  • the negative pressure acting through the bore 44 in the pump chamber causes the resilient cover to bear tightly against the wall 42.
  • the cover completely blocks the bore 44, so that the oil supply to the vacuum pump does not occur.
  • This solution has another advantage. There is generally the problem that an accidental reverse running of the pump (due to incorrect power connection) leads to an undesirable increase in oil in the suction nozzle. This arrangement reliably prevents this increase in oil.
  • Fig. 2 shows a rotary vane vacuum pump.
  • the conveyed gases pass through the suction port 3, the open suction port valve 4, via the suction channel 51, which is not visible in the plane of the drawing and is therefore shown as an arrow, into the pump chamber 52, in which the rotor 53 with the slides 54 is located.
  • the compressed gases pass through the outlet channel 55 into the oil box 1, which is filled with oil up to the line 56, so that the resilient cover 41 lies below the oil level.
  • the actual exhaust pipe is not shown.
  • the resilient cover 41 (shown in broken lines in FIG. 2) is fastened on the end wall 42 by means of the screws 46, 47. It covers the two openings 14 and 44 and the groove 43 surrounding the opening 14.
  • the nozzle 15 is produced by drilling the end wall 42 on both sides.
  • the nozzle 45 is screwed into the end wall 42 by means of a thread 59, so that different nozzles can be used depending on the suction power of the pump.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP82109588A 1981-12-17 1982-10-16 Pompe à vide à joint d'huile Expired EP0084084B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3150000 1981-12-17
DE19813150000 DE3150000A1 (de) 1981-12-17 1981-12-17 Oelgedichtete vakuumpumpe

Publications (2)

Publication Number Publication Date
EP0084084A1 true EP0084084A1 (fr) 1983-07-27
EP0084084B1 EP0084084B1 (fr) 1985-02-06

Family

ID=6148983

Family Applications (1)

Application Number Title Priority Date Filing Date
EP82109588A Expired EP0084084B1 (fr) 1981-12-17 1982-10-16 Pompe à vide à joint d'huile

Country Status (3)

Country Link
US (1) US4525129A (fr)
EP (1) EP0084084B1 (fr)
DE (2) DE3150000A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1207829B (it) * 1987-02-04 1989-06-01 Galileo Spa Off Perfezionamento nel circuito di lubrificazione delle pompe rotative per vuoto.
US4903505A (en) * 1989-01-30 1990-02-27 Hoshizaki Electric Co., Ltd. Automatic ice manufacturing apparatus
JPH02275089A (ja) * 1989-04-13 1990-11-09 Kobe Steel Ltd スクリュ式真空ポンプ
KR950007519B1 (ko) * 1992-09-09 1995-07-11 김영수 로터리 형식의 진공펌프장치
US6190149B1 (en) 1999-04-19 2001-02-20 Stokes Vacuum Inc. Vacuum pump oil distribution system with integral oil pump
US20020170979A1 (en) * 2001-05-21 2002-11-21 Victor Martinez Drainage system
KR100408153B1 (ko) 2001-08-14 2003-12-01 주식회사 우성진공 드라이 진공펌프
US8096781B2 (en) * 2008-09-24 2012-01-17 Caterpillar Inc. Hydraulic pump system with reduced cold start parasitic loss
US9080569B2 (en) * 2009-01-22 2015-07-14 Gregory S. Sundheim Portable, rotary vane vacuum pump with automatic vacuum breaking arrangement
EP2530325B1 (fr) * 2010-01-29 2018-10-17 Ulvac Kiko, Inc. Pompe
DE102018109866A1 (de) * 2018-04-24 2019-10-24 Nidec Gpm Gmbh Regelbares Schmierölfördersystem für Verbrennungsmaschinen

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB875444A (en) * 1957-02-07 1961-08-23 Edwards High Vacuum Ltd Improvements in or relating to rotary vacuum pumps
US3406897A (en) * 1966-07-18 1968-10-22 Leybold Holding Ag Mechanical vacuum pump
DE1628285A1 (de) * 1966-10-29 1970-03-19 Leybold Heraeus Gmbh & Co Kg Rotationskolbenvakuumpumpe
US3838950A (en) * 1970-06-18 1974-10-01 Cenco Inc Vacuum pump with lubricant metering groove
US4120621A (en) * 1976-07-19 1978-10-17 Puritan Bennett Corporation Oil sealed single stage vacuum pump

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB783770A (en) * 1955-09-19 1957-09-25 Gen Motors Corp Improved rotary constant displacement pump
DE1011115B (de) * 1956-05-26 1957-06-27 Leybolds Nachfolger E Rotierende OElluftpumpe nach dem Gasballastprinzip
DE1190134B (de) * 1957-02-07 1965-04-01 Edwards High Vacuum Ltd Drehkolben-Vakuumpumpe mit oelueberlagertem Auspuffventil
GB899202A (en) * 1959-02-05 1962-06-20 Gunnar Axel Wahlmark Improvements in or relating to fluid delivery systems which deliver at a substantially constant pressure
GB1126886A (en) * 1966-10-18 1968-09-11 Genevac Ltd Improvements in or relating to rotary vacuum pumps
GB1303430A (fr) * 1969-06-12 1973-01-17
GB1334225A (en) * 1969-12-16 1973-10-17 Edwards High Vacuum Int Ltd Vacuum pumps
DE2035938C3 (de) * 1970-07-20 1975-10-16 Danfoss A/S, Nordborg (Daenemark) Ölpumpe für Feuerungsanlagen
US3811468A (en) * 1972-03-10 1974-05-21 Fedders Corp Compressor valve assembly
FI761780A (fr) * 1976-06-18 1977-12-19 Rauma Repola Oy
US4342547A (en) * 1979-04-04 1982-08-03 Matsushita Electric Industrial Co., Ltd. Rotary vane compressor with valve control of oil to bias the vanes
DE2948992A1 (de) * 1979-12-05 1981-06-11 Karl Prof.Dr.-Ing. 3000 Hannover Bammert Rotorverdichter, insbesondere schraubenrotorverdichter, mit schmiermittelzufuhr zu und schmiermitteldrainage von den lagern
US4366834A (en) * 1980-10-10 1983-01-04 Sargent-Welch Scientific Company Back-flow prevention valve

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB875444A (en) * 1957-02-07 1961-08-23 Edwards High Vacuum Ltd Improvements in or relating to rotary vacuum pumps
US3406897A (en) * 1966-07-18 1968-10-22 Leybold Holding Ag Mechanical vacuum pump
DE1628285A1 (de) * 1966-10-29 1970-03-19 Leybold Heraeus Gmbh & Co Kg Rotationskolbenvakuumpumpe
US3838950A (en) * 1970-06-18 1974-10-01 Cenco Inc Vacuum pump with lubricant metering groove
US4120621A (en) * 1976-07-19 1978-10-17 Puritan Bennett Corporation Oil sealed single stage vacuum pump

Also Published As

Publication number Publication date
EP0084084B1 (fr) 1985-02-06
DE3262232D1 (en) 1985-03-21
DE3150000A1 (de) 1983-07-14
US4525129A (en) 1985-06-25

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