DE69935760D1 - Gerät und verfahren zur impedanzdetektion - Google Patents

Gerät und verfahren zur impedanzdetektion

Info

Publication number
DE69935760D1
DE69935760D1 DE69935760T DE69935760T DE69935760D1 DE 69935760 D1 DE69935760 D1 DE 69935760D1 DE 69935760 T DE69935760 T DE 69935760T DE 69935760 T DE69935760 T DE 69935760T DE 69935760 D1 DE69935760 D1 DE 69935760D1
Authority
DE
Germany
Prior art keywords
impedance detection
impedance
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69935760T
Other languages
English (en)
Other versions
DE69935760T2 (de
Inventor
Toshiyuki Matsumoto
Yoshihiro Hirota
Muneo Harada
Takaya Miyano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of DE69935760D1 publication Critical patent/DE69935760D1/de
Publication of DE69935760T2 publication Critical patent/DE69935760T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/2405—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by varying dielectric
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R5/00—Stereophonic arrangements
    • H04R5/04—Circuit arrangements, e.g. for selective connection of amplifier inputs/outputs to loudspeakers, for loudspeaker detection, or for adaptation of settings to personal preferences or hearing impairments

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE69935760T 1998-02-19 1999-02-19 Gerät und verfahren zur impedanzdetektion Expired - Lifetime DE69935760T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP7824498 1998-02-19
JP7824498 1998-02-19
JP11635798 1998-04-27
JP11635798 1998-04-27
JP13173698 1998-05-14
JP13173698 1998-05-14
PCT/JP1999/000735 WO1999042847A1 (en) 1998-02-19 1999-02-19 Impedance detection apparatus and method

Publications (2)

Publication Number Publication Date
DE69935760D1 true DE69935760D1 (de) 2007-05-24
DE69935760T2 DE69935760T2 (de) 2007-08-16

Family

ID=27302652

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69936551T Expired - Lifetime DE69936551T2 (de) 1998-02-19 1999-02-19 Frequenzdetektor
DE69935760T Expired - Lifetime DE69935760T2 (de) 1998-02-19 1999-02-19 Gerät und verfahren zur impedanzdetektion
DE69938636T Expired - Lifetime DE69938636D1 (de) 1998-02-19 1999-02-19 Kapazitives detektionssystem und verfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69936551T Expired - Lifetime DE69936551T2 (de) 1998-02-19 1999-02-19 Frequenzdetektor

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69938636T Expired - Lifetime DE69938636D1 (de) 1998-02-19 1999-02-19 Kapazitives detektionssystem und verfahren

Country Status (10)

Country Link
US (2) US6326795B1 (de)
EP (3) EP0975982B1 (de)
JP (2) JP3498318B2 (de)
KR (2) KR100341964B1 (de)
CN (2) CN1161624C (de)
AU (2) AU730847B2 (de)
DE (3) DE69936551T2 (de)
IL (2) IL132448A0 (de)
TW (2) TW526327B (de)
WO (2) WO1999042847A1 (de)

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IL132450A0 (en) 2001-03-19
EP0975982B1 (de) 2007-04-11
JP3498317B2 (ja) 2004-02-16
EP0975982A1 (de) 2000-02-02
CN1165773C (zh) 2004-09-08
WO1999042848A2 (en) 1999-08-26
TW526327B (en) 2003-04-01
EP0975983A2 (de) 2000-02-02
IL132448A0 (en) 2001-03-19
CN1256757A (zh) 2000-06-14
AU731610B2 (en) 2001-04-05
DE69938636D1 (de) 2008-06-19
CN1161624C (zh) 2004-08-11
KR20010020129A (ko) 2001-03-15
WO1999042847A1 (en) 1999-08-26
TW418323B (en) 2001-01-11
EP0975983B1 (de) 2008-05-07
US6373264B1 (en) 2002-04-16
JP2001510580A (ja) 2001-07-31
DE69935760T2 (de) 2007-08-16
CN1256756A (zh) 2000-06-14
WO1999042848A3 (en) 1999-11-25
AU2548099A (en) 1999-09-06
EP1653771A1 (de) 2006-05-03
DE69936551D1 (de) 2007-08-23
AU730847B2 (en) 2001-03-15
EP1653771B1 (de) 2007-07-11
KR20010006527A (ko) 2001-01-26
AU2547999A (en) 1999-09-06
JP2001525071A (ja) 2001-12-04
KR100341964B1 (ko) 2002-06-26
US6326795B1 (en) 2001-12-04
JP3498318B2 (ja) 2004-02-16
KR100377027B1 (ko) 2003-03-26
DE69936551T2 (de) 2008-03-13

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