DE69926757T2 - Verfahren zur herstellung eines wandlers mit vorgegebener spannung - Google Patents

Verfahren zur herstellung eines wandlers mit vorgegebener spannung Download PDF

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Publication number
DE69926757T2
DE69926757T2 DE69926757T DE69926757T DE69926757T2 DE 69926757 T2 DE69926757 T2 DE 69926757T2 DE 69926757 T DE69926757 T DE 69926757T DE 69926757 T DE69926757 T DE 69926757T DE 69926757 T2 DE69926757 T2 DE 69926757T2
Authority
DE
Germany
Prior art keywords
converter
producing
specified voltage
specified
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69926757T
Other languages
English (en)
Other versions
DE69926757D1 (de
Inventor
Matthias Muellenborn
Pirmin Rombach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Epcos Pte Ltd
Original Assignee
Sonion Mems AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sonion Mems AS filed Critical Sonion Mems AS
Publication of DE69926757D1 publication Critical patent/DE69926757D1/de
Application granted granted Critical
Publication of DE69926757T2 publication Critical patent/DE69926757T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
DE69926757T 1998-06-11 1999-06-10 Verfahren zur herstellung eines wandlers mit vorgegebener spannung Expired - Lifetime DE69926757T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DK199800791A DK79198A (da) 1998-06-11 1998-06-11 Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
PCT/DK1999/000315 WO1999065277A1 (en) 1998-06-11 1999-06-10 A method of manufacturing a transducer having a diaphragm with a predetermined tension

Publications (2)

Publication Number Publication Date
DE69926757D1 DE69926757D1 (de) 2005-09-22
DE69926757T2 true DE69926757T2 (de) 2006-06-14

Family

ID=8097602

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69926757T Expired - Lifetime DE69926757T2 (de) 1998-06-11 1999-06-10 Verfahren zur herstellung eines wandlers mit vorgegebener spannung

Country Status (9)

Country Link
US (1) US6622368B1 (de)
EP (1) EP1093703B1 (de)
JP (1) JP4233218B2 (de)
CN (1) CN1162043C (de)
AU (1) AU4133999A (de)
CA (1) CA2334640C (de)
DE (1) DE69926757T2 (de)
DK (2) DK79198A (de)
WO (1) WO1999065277A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013108464A1 (de) * 2013-08-06 2015-02-12 Epcos Ag Verfahren zur Herstellung eines mikroelektromechanischen Wandlers

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* Cited by examiner, † Cited by third party
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DK79198A (da) * 1998-06-11 1999-12-12 Microtronic As Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
US6760454B1 (en) * 2000-08-04 2004-07-06 Trw Inc. Passive voice-activated microphone and transceiver system
US6741709B2 (en) * 2000-12-20 2004-05-25 Shure Incorporated Condenser microphone assembly
US6800912B2 (en) * 2001-05-18 2004-10-05 Corporation For National Research Initiatives Integrated electromechanical switch and tunable capacitor and method of making the same
US6859542B2 (en) 2001-05-31 2005-02-22 Sonion Lyngby A/S Method of providing a hydrophobic layer and a condenser microphone having such a layer
JP4181580B2 (ja) * 2003-11-20 2008-11-19 松下電器産業株式会社 エレクトレット及びエレクトレットコンデンサー
WO2005086534A1 (ja) 2004-03-03 2005-09-15 Matsushita Electric Industrial Co., Ltd. エレクトレットコンデンサーマイクロフォンユニット
JP4137158B2 (ja) * 2004-03-05 2008-08-20 松下電器産業株式会社 エレクトレットコンデンサーマイクロフォン
JP2006319595A (ja) * 2005-05-12 2006-11-24 Audio Technica Corp リボンマイクロホンの製造方法
EP1771036A3 (de) * 2005-09-26 2013-05-22 Yamaha Corporation Kondensatormikrofon und Membran für ein Kondensatormikrofon
JP2007116650A (ja) * 2005-09-26 2007-05-10 Yamaha Corp ダイヤフラム及びダイヤフラムの製造方法並びにコンデンサマイクロホン
JP4535046B2 (ja) * 2006-08-22 2010-09-01 ヤマハ株式会社 静電容量センサ及びその製造方法
DE102005056759A1 (de) * 2005-11-29 2007-05-31 Robert Bosch Gmbh Mikromechanische Struktur zum Empfang und/oder zur Erzeugung von akustischen Signalen, Verfahren zur Herstellung einer mikromechanischen Struktur und Verwendung einer mikromechanischen Struktur
JP4787648B2 (ja) 2006-03-29 2011-10-05 パナソニック株式会社 コンデンサマイクロホンの製造方法およびコンデンサマイクロホン
JP4660426B2 (ja) * 2006-05-31 2011-03-30 三洋電機株式会社 センサ装置およびダイアフラム構造体
US8121315B2 (en) * 2007-03-21 2012-02-21 Goer Tek Inc. Condenser microphone chip
FR2922305B1 (fr) * 2007-10-12 2010-02-26 Senseor Procede de fabrication collective de capteurs de temperature et de pression sans calibrage a base de dispositifs a ondes acoustiques
IT1395550B1 (it) 2008-12-23 2012-09-28 St Microelectronics Rousset Trasduttore acustico integrato in tecnologia mems e relativo processo di fabbricazione
CN102066239A (zh) * 2009-01-09 2011-05-18 松下电器产业株式会社 微电子机械***器件
JP5321111B2 (ja) * 2009-02-13 2013-10-23 船井電機株式会社 マイクロホンユニット
EP2679024B1 (de) * 2011-02-25 2020-01-08 Nokia Technologies Oy Wandlervorrichtung mit zugkraftbetätigung
TWI430424B (zh) * 2011-03-18 2014-03-11 Pixart Imaging Inc 微機電系統聲壓感測元件及其製作方法
JP5875244B2 (ja) * 2011-04-06 2016-03-02 キヤノン株式会社 電気機械変換装置及びその作製方法
JP2020022038A (ja) * 2018-07-31 2020-02-06 Tdk株式会社 Ｍｅｍｓマイクロフォン
WO2020112615A1 (en) * 2018-12-01 2020-06-04 Knowles Electronics, Llc Composite diaphragms having balanced stress

Family Cites Families (19)

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JPS5019183B1 (de) * 1970-03-10 1975-07-04
JPS5121334B2 (de) * 1971-08-27 1976-07-01
JPS5650408B2 (de) * 1973-07-05 1981-11-28
US3978731A (en) * 1974-02-25 1976-09-07 United Technologies Corporation Surface acoustic wave transducer
US4429192A (en) * 1981-11-20 1984-01-31 Bell Telephone Laboratories, Incorporated Electret transducer with variable electret foil thickness
US4524247A (en) * 1983-07-07 1985-06-18 At&T Bell Laboratories Integrated electroacoustic transducer with built-in bias
US4764690A (en) * 1986-06-18 1988-08-16 Lectret S.A. Electret transducing
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
NL8702589A (nl) * 1987-10-30 1989-05-16 Microtel Bv Elektro-akoestische transducent van de als elektreet aangeduide soort, en een werkwijze voor het vervaardigen van een dergelijke transducent.
US5177579A (en) * 1989-04-07 1993-01-05 Ic Sensors, Inc. Semiconductor transducer or actuator utilizing corrugated supports
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
JP3379106B2 (ja) * 1992-04-23 2003-02-17 セイコーエプソン株式会社 液体噴射ヘッド
FR2697675B1 (fr) * 1992-11-05 1995-01-06 Suisse Electronique Microtech Procédé de fabrication de transducteurs capacitifs intégrés.
US6030851A (en) * 1995-06-07 2000-02-29 Grandmont; Paul E. Method for overpressure protected pressure sensor
US5573679A (en) * 1995-06-19 1996-11-12 Alberta Microelectronic Centre Fabrication of a surface micromachined capacitive microphone using a dry-etch process
JP2000508860A (ja) * 1996-04-18 2000-07-11 カリフォルニア インスティチュート オブ テクノロジー 薄膜エレクトレットマイクロフォン
US6556417B2 (en) * 1998-03-10 2003-04-29 Mcintosh Robert B. Method to construct variable-area capacitive transducers
DK79198A (da) * 1998-06-11 1999-12-12 Microtronic As Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
US6522762B1 (en) * 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013108464A1 (de) * 2013-08-06 2015-02-12 Epcos Ag Verfahren zur Herstellung eines mikroelektromechanischen Wandlers
US9637379B2 (en) 2013-08-06 2017-05-02 Tdk Corporation Method for producing a microelectromechanical transducer
DE102013108464B4 (de) * 2013-08-06 2020-06-25 Tdk Corporation Verfahren zur Herstellung eines mikroelektromechanischen Wandlers

Also Published As

Publication number Publication date
CA2334640A1 (en) 1999-12-16
DK1093703T3 (da) 2005-11-28
JP2002518913A (ja) 2002-06-25
JP4233218B2 (ja) 2009-03-04
CN1308832A (zh) 2001-08-15
DK79198A (da) 1999-12-12
EP1093703A1 (de) 2001-04-25
WO1999065277A1 (en) 1999-12-16
DE69926757D1 (de) 2005-09-22
EP1093703B1 (de) 2005-08-17
CN1162043C (zh) 2004-08-11
AU4133999A (en) 1999-12-30
US6622368B1 (en) 2003-09-23
CA2334640C (en) 2008-12-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: EPPING HERMANN FISCHER, PATENTANWALTSGESELLSCHAFT

8327 Change in the person/name/address of the patent owner

Owner name: EPCOS PTE LTD, SINGAPORE, SG