DK79198A - Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft - Google Patents

Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft

Info

Publication number
DK79198A
DK79198A DK199800791A DK79198A DK79198A DK 79198 A DK79198 A DK 79198A DK 199800791 A DK199800791 A DK 199800791A DK 79198 A DK79198 A DK 79198A DK 79198 A DK79198 A DK 79198A
Authority
DK
Denmark
Prior art keywords
transducer
membrane
producing
clamping force
predetermined clamping
Prior art date
Application number
DK199800791A
Other languages
English (en)
Inventor
Matthias Muellenborn
Pirmin Rombach
Original Assignee
Microtronic As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microtronic As filed Critical Microtronic As
Priority to DK199800791A priority Critical patent/DK79198A/da
Priority to CA002334640A priority patent/CA2334640C/en
Priority to US09/719,208 priority patent/US6622368B1/en
Priority to JP2000554170A priority patent/JP4233218B2/ja
Priority to CNB998084190A priority patent/CN1162043C/zh
Priority to DE69926757T priority patent/DE69926757T2/de
Priority to EP99924802A priority patent/EP1093703B1/en
Priority to DK99924802T priority patent/DK1093703T3/da
Priority to AU41339/99A priority patent/AU4133999A/en
Priority to PCT/DK1999/000315 priority patent/WO1999065277A1/en
Publication of DK79198A publication Critical patent/DK79198A/da

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/003—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Measuring Fluid Pressure (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
DK199800791A 1998-06-11 1998-06-11 Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft DK79198A (da)

Priority Applications (10)

Application Number Priority Date Filing Date Title
DK199800791A DK79198A (da) 1998-06-11 1998-06-11 Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
CA002334640A CA2334640C (en) 1998-06-11 1999-06-10 A method of manufacturing a transducer having a diaphragm with a predetermined tension
US09/719,208 US6622368B1 (en) 1998-06-11 1999-06-10 Method of manufacturing a transducer having a diaphragm with a predetermined tension
JP2000554170A JP4233218B2 (ja) 1998-06-11 1999-06-10 所定張力を持つダイアフラムを有するトランスデューサを製造する方法
CNB998084190A CN1162043C (zh) 1998-06-11 1999-06-10 含预定张力的膜的转换器的制造方法
DE69926757T DE69926757T2 (de) 1998-06-11 1999-06-10 Verfahren zur herstellung eines wandlers mit vorgegebener spannung
EP99924802A EP1093703B1 (en) 1998-06-11 1999-06-10 A method of manufacturing a transducer having a diaphragm with a predetermined tension
DK99924802T DK1093703T3 (da) 1998-06-11 1999-06-10 Fremgangsmåde til fremstilling af en transducer med en membran med forudbestemt opspændingskraft
AU41339/99A AU4133999A (en) 1998-06-11 1999-06-10 A method of manufacturing a transducer having a diaphragm with a predetermined tension
PCT/DK1999/000315 WO1999065277A1 (en) 1998-06-11 1999-06-10 A method of manufacturing a transducer having a diaphragm with a predetermined tension

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DK199800791A DK79198A (da) 1998-06-11 1998-06-11 Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft

Publications (1)

Publication Number Publication Date
DK79198A true DK79198A (da) 1999-12-12

Family

ID=8097602

Family Applications (2)

Application Number Title Priority Date Filing Date
DK199800791A DK79198A (da) 1998-06-11 1998-06-11 Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
DK99924802T DK1093703T3 (da) 1998-06-11 1999-06-10 Fremgangsmåde til fremstilling af en transducer med en membran med forudbestemt opspændingskraft

Family Applications After (1)

Application Number Title Priority Date Filing Date
DK99924802T DK1093703T3 (da) 1998-06-11 1999-06-10 Fremgangsmåde til fremstilling af en transducer med en membran med forudbestemt opspændingskraft

Country Status (9)

Country Link
US (1) US6622368B1 (da)
EP (1) EP1093703B1 (da)
JP (1) JP4233218B2 (da)
CN (1) CN1162043C (da)
AU (1) AU4133999A (da)
CA (1) CA2334640C (da)
DE (1) DE69926757T2 (da)
DK (2) DK79198A (da)
WO (1) WO1999065277A1 (da)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
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DK79198A (da) * 1998-06-11 1999-12-12 Microtronic As Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
US6760454B1 (en) * 2000-08-04 2004-07-06 Trw Inc. Passive voice-activated microphone and transceiver system
US6741709B2 (en) * 2000-12-20 2004-05-25 Shure Incorporated Condenser microphone assembly
US6800912B2 (en) * 2001-05-18 2004-10-05 Corporation For National Research Initiatives Integrated electromechanical switch and tunable capacitor and method of making the same
US6859542B2 (en) 2001-05-31 2005-02-22 Sonion Lyngby A/S Method of providing a hydrophobic layer and a condenser microphone having such a layer
JP4181580B2 (ja) * 2003-11-20 2008-11-19 松下電器産業株式会社 エレクトレット及びエレクトレットコンデンサー
US7706554B2 (en) 2004-03-03 2010-04-27 Panasonic Corporation Electret condenser
KR20060129041A (ko) * 2004-03-05 2006-12-14 마츠시타 덴끼 산교 가부시키가이샤 일렉트릿 컨덴서
JP2006319595A (ja) * 2005-05-12 2006-11-24 Audio Technica Corp リボンマイクロホンの製造方法
JP4535046B2 (ja) 2006-08-22 2010-09-01 ヤマハ株式会社 静電容量センサ及びその製造方法
JP2007116650A (ja) * 2005-09-26 2007-05-10 Yamaha Corp ダイヤフラム及びダイヤフラムの製造方法並びにコンデンサマイクロホン
US20070121972A1 (en) * 2005-09-26 2007-05-31 Yamaha Corporation Capacitor microphone and diaphragm therefor
DE102005056759A1 (de) * 2005-11-29 2007-05-31 Robert Bosch Gmbh Mikromechanische Struktur zum Empfang und/oder zur Erzeugung von akustischen Signalen, Verfahren zur Herstellung einer mikromechanischen Struktur und Verwendung einer mikromechanischen Struktur
JP4787648B2 (ja) 2006-03-29 2011-10-05 パナソニック株式会社 コンデンサマイクロホンの製造方法およびコンデンサマイクロホン
JP4660426B2 (ja) * 2006-05-31 2011-03-30 三洋電機株式会社 センサ装置およびダイアフラム構造体
US8121315B2 (en) * 2007-03-21 2012-02-21 Goer Tek Inc. Condenser microphone chip
FR2922305B1 (fr) * 2007-10-12 2010-02-26 Senseor Procede de fabrication collective de capteurs de temperature et de pression sans calibrage a base de dispositifs a ondes acoustiques
IT1395550B1 (it) 2008-12-23 2012-09-28 St Microelectronics Rousset Trasduttore acustico integrato in tecnologia mems e relativo processo di fabbricazione
WO2010079574A1 (ja) * 2009-01-09 2010-07-15 パナソニック株式会社 Ｍｅｍｓデバイス
JP5321111B2 (ja) * 2009-02-13 2013-10-23 船井電機株式会社 マイクロホンユニット
WO2012114156A1 (en) * 2011-02-25 2012-08-30 Nokia Corporation A transducer apparatus with a tension actuator
TWI430424B (zh) * 2011-03-18 2014-03-11 Pixart Imaging Inc 微機電系統聲壓感測元件及其製作方法
JP5875244B2 (ja) * 2011-04-06 2016-03-02 キヤノン株式会社 電気機械変換装置及びその作製方法
DE102013108464B4 (de) * 2013-08-06 2020-06-25 Tdk Corporation Verfahren zur Herstellung eines mikroelektromechanischen Wandlers
JP2020022038A (ja) * 2018-07-31 2020-02-06 Tdk株式会社 Ｍｅｍｓマイクロフォン
WO2020112615A1 (en) * 2018-12-01 2020-06-04 Knowles Electronics, Llc Composite diaphragms having balanced stress

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JPS5019183B1 (da) * 1970-03-10 1975-07-04
JPS5121334B2 (da) * 1971-08-27 1976-07-01
JPS5650408B2 (da) * 1973-07-05 1981-11-28
US3978731A (en) * 1974-02-25 1976-09-07 United Technologies Corporation Surface acoustic wave transducer
US4429192A (en) * 1981-11-20 1984-01-31 Bell Telephone Laboratories, Incorporated Electret transducer with variable electret foil thickness
US4524247A (en) * 1983-07-07 1985-06-18 At&T Bell Laboratories Integrated electroacoustic transducer with built-in bias
US4764690A (en) * 1986-06-18 1988-08-16 Lectret S.A. Electret transducing
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
NL8702589A (nl) * 1987-10-30 1989-05-16 Microtel Bv Elektro-akoestische transducent van de als elektreet aangeduide soort, en een werkwijze voor het vervaardigen van een dergelijke transducent.
US5177579A (en) * 1989-04-07 1993-01-05 Ic Sensors, Inc. Semiconductor transducer or actuator utilizing corrugated supports
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
WO1993022140A1 (en) * 1992-04-23 1993-11-11 Seiko Epson Corporation Liquid jet head and production thereof
FR2697675B1 (fr) * 1992-11-05 1995-01-06 Suisse Electronique Microtech Procédé de fabrication de transducteurs capacitifs intégrés.
US6030851A (en) * 1995-06-07 2000-02-29 Grandmont; Paul E. Method for overpressure protected pressure sensor
US5573679A (en) * 1995-06-19 1996-11-12 Alberta Microelectronic Centre Fabrication of a surface micromachined capacitive microphone using a dry-etch process
JP2000508860A (ja) * 1996-04-18 2000-07-11 カリフォルニア インスティチュート オブ テクノロジー 薄膜エレクトレットマイクロフォン
US6556417B2 (en) * 1998-03-10 2003-04-29 Mcintosh Robert B. Method to construct variable-area capacitive transducers
DK79198A (da) * 1998-06-11 1999-12-12 Microtronic As Fremgangsmåde til fremstilling af en transducer med en membran med en forudbestemt opspændingskraft
US6522762B1 (en) * 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system

Also Published As

Publication number Publication date
EP1093703A1 (en) 2001-04-25
DE69926757D1 (de) 2005-09-22
CA2334640C (en) 2008-12-30
CA2334640A1 (en) 1999-12-16
US6622368B1 (en) 2003-09-23
JP4233218B2 (ja) 2009-03-04
JP2002518913A (ja) 2002-06-25
WO1999065277A1 (en) 1999-12-16
CN1162043C (zh) 2004-08-11
AU4133999A (en) 1999-12-30
CN1308832A (zh) 2001-08-15
EP1093703B1 (en) 2005-08-17
DE69926757T2 (de) 2006-06-14
DK1093703T3 (da) 2005-11-28

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Legal Events

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AHS Application shelved for other reasons than non-payment