DE69329669D1 - Magnetoresistiver Sensor und Herstellungsverfahren dafür - Google Patents
Magnetoresistiver Sensor und Herstellungsverfahren dafürInfo
- Publication number
- DE69329669D1 DE69329669D1 DE69329669T DE69329669T DE69329669D1 DE 69329669 D1 DE69329669 D1 DE 69329669D1 DE 69329669 T DE69329669 T DE 69329669T DE 69329669 T DE69329669 T DE 69329669T DE 69329669 D1 DE69329669 D1 DE 69329669D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- magnetoresistive sensor
- process therefor
- therefor
- magnetoresistive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3929—Disposition of magnetic thin films not used for directly coupling magnetic flux from the track to the MR film or for shielding
- G11B5/3932—Magnetic biasing films
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/398—Specially shaped layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3113—Details for improving the magnetic domain structure or avoiding the formation or displacement of undesirable magnetic domains
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Hall/Mr Elements (AREA)
- Measuring Magnetic Variables (AREA)
- Magnetic Heads (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US93618592A | 1992-08-25 | 1992-08-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69329669D1 true DE69329669D1 (de) | 2000-12-21 |
Family
ID=25468292
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69332530T Expired - Fee Related DE69332530T2 (de) | 1992-08-25 | 1993-08-12 | Magneto-resistiver Sensor und Herstellungsverfahren dafür |
DE69329669T Expired - Fee Related DE69329669D1 (de) | 1992-08-25 | 1993-08-12 | Magnetoresistiver Sensor und Herstellungsverfahren dafür |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69332530T Expired - Fee Related DE69332530T2 (de) | 1992-08-25 | 1993-08-12 | Magneto-resistiver Sensor und Herstellungsverfahren dafür |
Country Status (6)
Country | Link |
---|---|
US (2) | US5737155A (de) |
EP (2) | EP0585008B1 (de) |
JP (1) | JP3228608B2 (de) |
DE (2) | DE69332530T2 (de) |
HK (1) | HK1013729A1 (de) |
SG (2) | SG82628A1 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
MY108956A (en) * | 1992-11-12 | 1996-11-30 | Quantum Peripherals Colorado Inc | Magnetoresistive device and method having improved barkhausen noise suppression |
US5483402A (en) * | 1994-06-15 | 1996-01-09 | Quantum Corporation | Magneto resistive head having symmetric off-track performance profile |
DE69415177T2 (de) * | 1994-06-22 | 1999-04-29 | Seagate Technology, Scotts Valley, Calif. | Einzeldomän magnetoresistiver sensor unter benutzung von permanentmagnetstabilisierung |
US5712565A (en) * | 1994-06-22 | 1998-01-27 | Seagate Technology, Inc. | MR sensor having thick active region between two thinner inactive MR regions topped with respective permanent magnets |
EP0747886A3 (de) * | 1995-06-05 | 1997-02-26 | Quantum Peripherals Colorado | Mit einer weichmagnetischen benachbarten Schicht vorgespannte magnetoresistive Anordnung, so aufgebaut, dass der Fluss sich natürlich schliesst, die mit einer koplanaren Permanent-Magnet-Dünnschicht stabilisiert wird, und Verfahren zu deren Herstellung |
US5654854A (en) * | 1995-11-30 | 1997-08-05 | Quantum Corporation | Longitudinally biased magnetoresistive sensor having a concave shaped active region to reduce Barkhausen noise by achieving a substantially single magnetic domain state |
JPH09180936A (ja) * | 1995-12-27 | 1997-07-11 | Unitika Ltd | 磁気素子 |
JPH09260742A (ja) * | 1996-03-26 | 1997-10-03 | Sony Corp | 磁気抵抗効果素子 |
JP3471520B2 (ja) * | 1996-04-30 | 2003-12-02 | 富士通株式会社 | 磁気抵抗効果型磁気ヘッドの製造方法及び磁気抵抗効果型磁気ヘッドの製造装置 |
JP3188232B2 (ja) * | 1997-12-09 | 2001-07-16 | アルプス電気株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
JP2000222711A (ja) * | 1999-01-28 | 2000-08-11 | Alps Electric Co Ltd | 薄膜磁気ヘッドの製造方法および製造装置 |
US6713237B2 (en) | 2000-07-27 | 2004-03-30 | Seagate Technology Llc | Single layer lift-off method for making an electronic device |
US6785101B2 (en) | 2001-07-12 | 2004-08-31 | Hitachi Global Storage Technologies Netherlands B.V. | Overlaid lead giant magnetoresistive head with side reading reduction |
US6930865B2 (en) * | 2002-05-14 | 2005-08-16 | Seagate Technology Llc | Magnetoresistive read sensor with short permanent magnets |
US7177122B2 (en) * | 2003-10-27 | 2007-02-13 | Seagate Technology Llc | Biasing for tri-layer magnetoresistive sensors |
US7580228B1 (en) * | 2004-05-29 | 2009-08-25 | Lauer Mark A | Current perpendicular to plane sensor with non-rectangular sense layer stack |
US7570461B2 (en) * | 2005-02-28 | 2009-08-04 | Seagate Technology Llc | Magnetic sensor with in-stack biasing |
US8582251B2 (en) * | 2009-08-26 | 2013-11-12 | Seagate Technology Llc | Magnetic sensor with non-rectangular geometry |
US20110050211A1 (en) * | 2009-08-26 | 2011-03-03 | Seagate Technology Llc | Trapezoidal reader for ultra high density magnetic recording |
US8537496B2 (en) | 2010-07-27 | 2013-09-17 | HGST Netherlands B.V. | Perpendicular magnetic write head having a trailing wrap-around magnetic shield magnetically biased in a cross track direction |
US8559140B2 (en) * | 2011-04-26 | 2013-10-15 | Seagate Technology Llc | Magnetic element with varying stripe heights |
DE102013104486A1 (de) | 2013-05-02 | 2014-11-20 | Sensitec Gmbh | Magnetfeldsensorvorrichtung |
US9841469B2 (en) | 2016-01-26 | 2017-12-12 | Nxp Usa, Inc. | Magnetic field sensor with multiple sense layer magnetization orientations |
US9897667B2 (en) | 2016-01-26 | 2018-02-20 | Nxp Usa, Inc. | Magnetic field sensor with permanent magnet biasing |
US10545196B2 (en) * | 2016-03-24 | 2020-01-28 | Nxp Usa, Inc. | Multiple axis magnetic sensor |
US10145907B2 (en) | 2016-04-07 | 2018-12-04 | Nxp Usa, Inc. | Magnetic field sensor with permanent magnet biasing |
US9933496B2 (en) | 2016-04-21 | 2018-04-03 | Nxp Usa, Inc. | Magnetic field sensor with multiple axis sense capability |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3987485A (en) * | 1973-02-20 | 1976-10-19 | Matsushita Electric Industrial Co., Ltd. | Magnetic head with thin film components |
US4052748A (en) * | 1974-04-01 | 1977-10-04 | U.S. Philips Corporation | Magnetoresistive magnetic head |
JPS6020802B2 (ja) * | 1976-04-26 | 1985-05-23 | 日本電気株式会社 | 磁気ヘツド |
JPS56153523A (en) * | 1980-04-23 | 1981-11-27 | Hitachi Ltd | Magnetic resistance head |
JPS58216A (ja) * | 1981-06-26 | 1983-01-05 | Fuji Electric Co Ltd | 空気清浄機の風速制御方式 |
JPS58100216A (ja) * | 1981-12-11 | 1983-06-14 | Hitachi Ltd | 磁気抵抗効果ヘツド |
JPS58100217A (ja) * | 1981-12-11 | 1983-06-14 | Hitachi Ltd | 磁気抵抗効果ヘツド |
JPS58192391A (ja) * | 1982-05-07 | 1983-11-09 | Hitachi Ltd | 磁気抵抗効果素子 |
US4802043A (en) * | 1985-03-25 | 1989-01-31 | Hitachi, Ltd. | Magneto-resistive head for protecting against output spike noises |
JPS62137713A (ja) * | 1985-12-10 | 1987-06-20 | Victor Co Of Japan Ltd | 磁気抵抗効果型磁気ヘツド |
US4967298A (en) * | 1987-02-17 | 1990-10-30 | Mowry Greg S | Magnetic head with magnetoresistive sensor, inductive write head, and shield |
US4821133A (en) * | 1987-02-17 | 1989-04-11 | Magnetic Peripherals, Inc. | Bottleneck magnetoresistive element |
JPS641112A (en) * | 1987-06-24 | 1989-01-05 | Hitachi Ltd | Magneto-resistance effect type head |
JPH077012B2 (ja) * | 1987-08-18 | 1995-01-30 | 富士通株式会社 | 加速度センサ |
US4843505A (en) * | 1988-04-25 | 1989-06-27 | Magnetic Peripherals Inc. | Magnetoresistive sensing element with a projection for enhanced data reading |
US4956736A (en) * | 1988-12-16 | 1990-09-11 | Eastman Kodak Company | Thin film magnetic element having a rhombic shape |
US4987508A (en) * | 1988-12-23 | 1991-01-22 | Eastman Kodak Company | Permanent magnet shaped to provide uniform biasing of a magnetoresistive reproduce head |
US4972284A (en) * | 1989-01-03 | 1990-11-20 | Eastman Kodak Company | Deposited permanent magnet for hard and easy axes biasing of a magnetoresistive head |
US5079035A (en) * | 1989-10-10 | 1992-01-07 | International Business Machines Corporation | Method of making a magnetoresistive read transducer having hard magnetic bias |
US5018037A (en) * | 1989-10-10 | 1991-05-21 | Krounbi Mohamad T | Magnetoresistive read transducer having hard magnetic bias |
US5206590A (en) * | 1990-12-11 | 1993-04-27 | International Business Machines Corporation | Magnetoresistive sensor based on the spin valve effect |
US5285339A (en) * | 1992-02-28 | 1994-02-08 | International Business Machines Corporation | Magnetoresistive read transducer having improved bias profile |
US5309304A (en) * | 1992-06-05 | 1994-05-03 | Hewlett-Packard Company | Magnetoresistive transducer conductor configuration |
US5287238A (en) * | 1992-11-06 | 1994-02-15 | International Business Machines Corporation | Dual spin valve magnetoresistive sensor |
-
1993
- 1993-08-12 DE DE69332530T patent/DE69332530T2/de not_active Expired - Fee Related
- 1993-08-12 SG SG9903779A patent/SG82628A1/en unknown
- 1993-08-12 SG SG1996002130A patent/SG47479A1/en unknown
- 1993-08-12 EP EP93306362A patent/EP0585008B1/de not_active Expired - Lifetime
- 1993-08-12 EP EP98203512A patent/EP0896324B1/de not_active Expired - Lifetime
- 1993-08-12 DE DE69329669T patent/DE69329669D1/de not_active Expired - Fee Related
- 1993-08-24 JP JP20969793A patent/JP3228608B2/ja not_active Expired - Fee Related
-
1995
- 1995-04-10 US US08/420,450 patent/US5737155A/en not_active Expired - Lifetime
-
1997
- 1997-05-27 US US08/863,606 patent/US5736060A/en not_active Expired - Fee Related
-
1998
- 1998-12-23 HK HK98115072A patent/HK1013729A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US5737155A (en) | 1998-04-07 |
HK1013729A1 (en) | 1999-09-03 |
SG47479A1 (en) | 1998-04-17 |
JPH06177455A (ja) | 1994-06-24 |
SG82628A1 (en) | 2001-08-21 |
DE69332530D1 (de) | 2003-01-09 |
EP0585008A2 (de) | 1994-03-02 |
EP0585008B1 (de) | 2000-11-15 |
EP0896324A1 (de) | 1999-02-10 |
US5736060A (en) | 1998-04-07 |
DE69332530T2 (de) | 2003-07-03 |
JP3228608B2 (ja) | 2001-11-12 |
EP0896324B1 (de) | 2002-11-27 |
EP0585008A3 (en) | 1995-11-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |