DE69124630D1 - Infrarotsensor und Herstellungsverfahren dafür - Google Patents
Infrarotsensor und Herstellungsverfahren dafürInfo
- Publication number
- DE69124630D1 DE69124630D1 DE69124630T DE69124630T DE69124630D1 DE 69124630 D1 DE69124630 D1 DE 69124630D1 DE 69124630 T DE69124630 T DE 69124630T DE 69124630 T DE69124630 T DE 69124630T DE 69124630 D1 DE69124630 D1 DE 69124630D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- infrared sensor
- process therefor
- therefor
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/30—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of the effect of a material on X-radiation, gamma radiation or particle radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/023—Particular leg structure or construction or shape; Nanotubes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/046—Materials; Selection of thermal materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
- G01J5/064—Ambient temperature sensor; Housing temperature sensor; Constructional details thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0831—Masks; Aperture plates; Spatial light modulators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/035281—Shape of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2100454A JPH041535A (ja) | 1990-04-18 | 1990-04-18 | 赤外線センサ |
JP2287105A JP2946351B2 (ja) | 1990-10-26 | 1990-10-26 | 赤外線センサおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69124630D1 true DE69124630D1 (de) | 1997-03-20 |
DE69124630T2 DE69124630T2 (de) | 1997-07-17 |
Family
ID=26441479
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69106763T Expired - Fee Related DE69106763T2 (de) | 1990-04-18 | 1991-04-18 | Infrarotsensor. |
DE69124630T Expired - Fee Related DE69124630T2 (de) | 1990-04-18 | 1991-04-18 | Infrarotsensor und Herstellungsverfahren dafür |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69106763T Expired - Fee Related DE69106763T2 (de) | 1990-04-18 | 1991-04-18 | Infrarotsensor. |
Country Status (6)
Country | Link |
---|---|
US (1) | US5118944A (de) |
EP (2) | EP0604405B1 (de) |
KR (1) | KR940003274B1 (de) |
AU (1) | AU631734B2 (de) |
CA (1) | CA2040631C (de) |
DE (2) | DE69106763T2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2081306C (en) * | 1990-04-26 | 2000-07-18 | Kevin Charles Liddiard | Semiconductor film bolometer thermal infrared detector |
JPH06317475A (ja) * | 1991-07-19 | 1994-11-15 | Terumo Corp | 赤外線センサおよびその製造方法 |
EP0566156B1 (de) * | 1992-04-17 | 1997-08-27 | Terumo Kabushiki Kaisha | Infrarotsensor und Verfahren für dessen Herstellung |
EP0645002B1 (de) * | 1992-06-11 | 1997-04-02 | Honeywell Inc. | Wärmeisolierungs-mikrostruktur |
GB2282261A (en) * | 1992-09-17 | 1995-03-29 | Mitsubishi Electric Corp | Infrared detector array and production method therefor |
EP0734589B1 (de) * | 1993-12-13 | 1998-03-25 | Honeywell Inc. | Integrierte silizium-vakuum-mikropackung für infrarot-geräte |
US5602043A (en) * | 1995-01-03 | 1997-02-11 | Texas Instruments Incorporated | Monolithic thermal detector with pyroelectric film and method |
JP3494747B2 (ja) * | 1995-03-31 | 2004-02-09 | 石塚電子株式会社 | 薄膜温度センサ及びその製造方法 |
EP0773435A3 (de) * | 1995-07-21 | 1998-03-11 | Texas Instruments Incorporated | Verfahren und Vorrichtungen zur Strahlungsmessung |
GB2310218B (en) * | 1996-02-13 | 1999-12-22 | Marconi Gec Ltd | Coatings |
GB2316225A (en) * | 1996-08-06 | 1998-02-18 | Northern Telecom Ltd | Semiconductor photodetector packaging |
US5962909A (en) * | 1996-09-12 | 1999-10-05 | Institut National D'optique | Microstructure suspended by a microsupport |
US5831266A (en) * | 1996-09-12 | 1998-11-03 | Institut National D'optique | Microbridge structure for emitting or detecting radiations and method for forming such microbridge structure |
GB2334141A (en) * | 1998-01-30 | 1999-08-11 | Northern Telecom Ltd | Semiconductor device packaging |
US6036872A (en) | 1998-03-31 | 2000-03-14 | Honeywell Inc. | Method for making a wafer-pair having sealed chambers |
CN1103498C (zh) * | 1999-01-28 | 2003-03-19 | 北京工业大学 | 红外探测器 |
FR2822541B1 (fr) | 2001-03-21 | 2003-10-03 | Commissariat Energie Atomique | Procedes et dispositifs de fabrication de detecteurs de rayonnement |
DE10144343A1 (de) * | 2001-09-10 | 2003-03-27 | Perkinelmer Optoelectronics | Sensor zum berührugslosen Messen einer Temperatur |
EP1369929B1 (de) * | 2002-05-27 | 2016-08-03 | STMicroelectronics Srl | Herstellungsverfahren von verkapselten optischen Sensoren und so hergestellter verkapselter optischer Sensor |
GB0405201D0 (en) * | 2004-03-09 | 2004-04-21 | Melexis Nv | Infra red sensing devices |
US8766186B2 (en) | 2006-12-27 | 2014-07-01 | Analog Devices, Inc. | Control aperture for an IR sensor |
DE102007024903B4 (de) * | 2007-05-29 | 2009-05-07 | Pyreos Ltd. | Vorrichtung mit Sandwichstruktur zur Detektion von Wärmestrahlung, Verfahren zum Herstellen und Verwendung der Vorrichtung |
CN104425644B (zh) * | 2013-09-09 | 2016-08-17 | 钜晶电子股份有限公司 | 结合红外线感测功能的多波段光感测器及其制造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3949223A (en) * | 1973-11-01 | 1976-04-06 | Honeywell Inc. | Monolithic photoconductive detector array |
JPS57178149A (en) * | 1981-04-28 | 1982-11-02 | Ricoh Co Ltd | Manufacture of electric heater |
JPS5879122A (ja) * | 1981-11-05 | 1983-05-12 | Kureha Chem Ind Co Ltd | 焦電性赤外線検出器 |
JPH06103218B2 (ja) * | 1984-07-23 | 1994-12-14 | 光照 木村 | 光センサ |
US4771325A (en) * | 1985-02-11 | 1988-09-13 | American Telephone & Telegraph Co., At&T Bell Laboratories | Integrated photodetector-amplifier device |
JPH0765937B2 (ja) * | 1986-05-27 | 1995-07-19 | 石塚電子株式会社 | センサ素子およびその製造方法 |
CA1317034C (en) * | 1988-09-30 | 1993-04-27 | Alliedsignal Inc. | Fabrication of oxynitride frontside microstructures |
-
1991
- 1991-04-16 AU AU75051/91A patent/AU631734B2/en not_active Ceased
- 1991-04-17 CA CA002040631A patent/CA2040631C/en not_active Expired - Fee Related
- 1991-04-17 US US07/686,439 patent/US5118944A/en not_active Expired - Lifetime
- 1991-04-18 EP EP94200254A patent/EP0604405B1/de not_active Expired - Lifetime
- 1991-04-18 DE DE69106763T patent/DE69106763T2/de not_active Expired - Fee Related
- 1991-04-18 DE DE69124630T patent/DE69124630T2/de not_active Expired - Fee Related
- 1991-04-18 EP EP91401037A patent/EP0453372B1/de not_active Expired - Lifetime
- 1991-04-18 KR KR1019910006223A patent/KR940003274B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU7505191A (en) | 1991-12-19 |
US5118944A (en) | 1992-06-02 |
CA2040631A1 (en) | 1991-10-19 |
EP0604405A1 (de) | 1994-06-29 |
AU631734B2 (en) | 1992-12-03 |
KR910018789A (ko) | 1991-11-30 |
KR940003274B1 (ko) | 1994-04-16 |
CA2040631C (en) | 1996-05-14 |
DE69124630T2 (de) | 1997-07-17 |
EP0604405B1 (de) | 1997-02-05 |
DE69106763D1 (de) | 1995-03-02 |
EP0453372B1 (de) | 1995-01-18 |
DE69106763T2 (de) | 1995-09-21 |
EP0453372A1 (de) | 1991-10-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |