DE69314205T2 - Methode und Vorrichtung zur Messung der Grösse von Teilchen oder Fehlern - Google Patents
Methode und Vorrichtung zur Messung der Grösse von Teilchen oder FehlernInfo
- Publication number
- DE69314205T2 DE69314205T2 DE69314205T DE69314205T DE69314205T2 DE 69314205 T2 DE69314205 T2 DE 69314205T2 DE 69314205 T DE69314205 T DE 69314205T DE 69314205 T DE69314205 T DE 69314205T DE 69314205 T2 DE69314205 T2 DE 69314205T2
- Authority
- DE
- Germany
- Prior art keywords
- defects
- particles
- measuring
- size
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 title 1
- 239000002245 particle Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
- G01N2015/0238—Single particle scatter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1765—Method using an image detector and processing of image signal
- G01N2021/177—Detector of the video camera type
- G01N2021/1772—Array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4726—Detecting scatter at 90°
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4792—Polarisation of scatter light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N2021/8477—Investigating crystals, e.g. liquid crystals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4071593A JP2722362B2 (ja) | 1992-03-27 | 1992-03-27 | 粒子または欠陥の大きさ情報の測定方法および装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69314205D1 DE69314205D1 (de) | 1997-11-06 |
DE69314205T2 true DE69314205T2 (de) | 1998-01-29 |
Family
ID=13465126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69314205T Expired - Lifetime DE69314205T2 (de) | 1992-03-27 | 1993-03-26 | Methode und Vorrichtung zur Messung der Grösse von Teilchen oder Fehlern |
Country Status (4)
Country | Link |
---|---|
US (1) | US5471298A (de) |
EP (1) | EP0562630B1 (de) |
JP (1) | JP2722362B2 (de) |
DE (1) | DE69314205T2 (de) |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9323054D0 (en) * | 1993-11-09 | 1994-01-05 | British Nuclear Fuels Plc | Determination of the surface properties of an omject |
FR2734905B1 (fr) * | 1995-05-30 | 1997-08-01 | Lasur | Procede et dispositif pour determiner la taille de particules microniques ou submicroniques |
US6045056A (en) * | 1996-12-26 | 2000-04-04 | Concurrent Technologies Corporation | Optimized spray device (OSD) apparatus and method |
US5976612A (en) * | 1996-12-26 | 1999-11-02 | Concurrent Technologies Corporation | Apparatus and method for optimizing a compressed air system |
US5870186A (en) * | 1997-07-15 | 1999-02-09 | The United States Of America As Represented By The Administrator National Aeronautics And Space Administration | Detector for particle surface contamination |
JP3266107B2 (ja) * | 1998-07-29 | 2002-03-18 | 株式会社島津製作所 | 粒子個数計測方法および粒子計測装置 |
US6553849B1 (en) | 1998-10-28 | 2003-04-29 | Dillon F. Scofield | Electrodynamic particle size analyzer |
US6122047A (en) * | 1999-01-14 | 2000-09-19 | Ade Optical Systems Corporation | Methods and apparatus for identifying the material of a particle occurring on the surface of a substrate |
JP3689278B2 (ja) * | 1999-05-19 | 2005-08-31 | 株式会社堀場製作所 | 粒子径分布測定装置および粒子径分布測定方法 |
US6326608B1 (en) * | 1999-07-09 | 2001-12-04 | Chung-Shan Institute Of Science And Technology | Polarization-type laser detection system |
US7006682B1 (en) | 1999-09-09 | 2006-02-28 | Nec Corporation | Apparatus for monitoring particles and method of doing the same |
KR100327340B1 (ko) * | 1999-09-30 | 2002-03-06 | 윤종용 | 웨이퍼 표면 검사방법 |
DE19958729C2 (de) | 1999-12-01 | 2002-02-28 | Fresenius Hemocare Gmbh | Verfahren zur Bestimmung einer Partikelkonzentration und Vorrichtung zur Durchführung des Verfahrens |
WO2001073408A1 (en) * | 2000-03-29 | 2001-10-04 | Corning Incorporated | Inclusion detection |
US6936835B2 (en) | 2000-09-21 | 2005-08-30 | Hitachi, Ltd. | Method and its apparatus for inspecting particles or defects of a semiconductor device |
US8072597B2 (en) | 2000-09-21 | 2011-12-06 | Hitachi, Ltd. | Method and its apparatus for inspecting particles or defects of a semiconductor device |
US6797975B2 (en) | 2000-09-21 | 2004-09-28 | Hitachi, Ltd. | Method and its apparatus for inspecting particles or defects of a semiconductor device |
US6864979B2 (en) * | 2000-12-08 | 2005-03-08 | Horiba, Ltd | Particle size distribution measuring apparatus |
JP4266075B2 (ja) * | 2001-02-19 | 2009-05-20 | 株式会社堀場製作所 | 粒径分布測定装置 |
US6760100B2 (en) | 2001-03-12 | 2004-07-06 | Ade Corporation | Method and apparatus for classifying defects occurring at or near a surface of a smooth substrate |
GB2377012B (en) * | 2001-03-21 | 2005-03-16 | Univ Loughborough | Measurement method and apparatus |
EP1432972A1 (de) * | 2001-09-07 | 2004-06-30 | Inficon, Inc. | Signalverarbeitungsverfahren zur in-situ-teilchenüberwachung mit einem gescannten strahl |
US7105848B2 (en) * | 2002-04-15 | 2006-09-12 | Wintriss Engineering Corporation | Dual level out-of-focus light source for amplification of defects on a surface |
DE10227614B4 (de) * | 2002-06-20 | 2006-04-20 | Novar Gmbh | Rauchsimulationskörper zum Abgleichen von Streulichtrauchmeldern |
US7066868B2 (en) * | 2003-07-07 | 2006-06-27 | Rockfit Industries, Llc | Exercise apparatus |
IL156856A (en) * | 2003-07-09 | 2011-11-30 | Joseph Shamir | Method for particle size and concentration measurement |
JP4043417B2 (ja) | 2003-08-28 | 2008-02-06 | シスメックス株式会社 | 粒子径計測装置 |
US7163510B2 (en) * | 2003-09-17 | 2007-01-16 | Applied Medical Resources Corporation | Surgical instrument access device |
DE102004017237B4 (de) * | 2004-04-05 | 2006-04-06 | Schott Ag | Verfahren und Vorrichtung zur quantitativen Bestimmung der optischen Güte eines transparenten Materials |
US7292329B2 (en) * | 2005-01-13 | 2007-11-06 | Komag, Inc. | Test head for optically inspecting workpieces comprising a lens for elongating a laser spot on the workpieces |
JP4313322B2 (ja) * | 2005-02-03 | 2009-08-12 | 株式会社レイテックス | 欠陥粒子測定装置および欠陥粒子測定方法 |
JP2007024737A (ja) | 2005-07-20 | 2007-02-01 | Hitachi High-Technologies Corp | 半導体の欠陥検査装置及びその方法 |
JP4785041B2 (ja) * | 2005-10-18 | 2011-10-05 | 古河電気工業株式会社 | 被測定線状体の外径測定方法 |
JP2007304044A (ja) * | 2006-05-15 | 2007-11-22 | Sysmex Corp | 粒子画像分析装置 |
JP4945181B2 (ja) * | 2006-07-12 | 2012-06-06 | 株式会社日立ハイテクノロジーズ | 表面検査方法および表面検査装置 |
JP4905029B2 (ja) * | 2006-09-28 | 2012-03-28 | 住友金属鉱山株式会社 | 光散乱観察装置 |
JP4911509B2 (ja) | 2007-04-03 | 2012-04-04 | 三洋電機株式会社 | 電解コンデンサおよびその製造方法 |
JP5178079B2 (ja) | 2007-07-23 | 2013-04-10 | 株式会社日立ハイテクノロジーズ | 欠陥検査方法およびその装置 |
CN101925809B (zh) | 2007-12-04 | 2013-03-27 | 粒子监测***有限公司 | 用于粒子检测的二维光学成像方法和*** |
JP5308321B2 (ja) * | 2009-12-14 | 2013-10-09 | 株式会社日立ハイテクノロジーズ | ディスクの表面欠陥検査方法および検査装置 |
BR112012017967A2 (pt) | 2010-02-17 | 2016-03-29 | Dow Global Technologies Llc | sistema para localizar em um substrato adaptado para separar fluidos tendo pelo menos duas superfícies e método para localizar vazamentos em um substrato |
US8988673B2 (en) * | 2010-03-23 | 2015-03-24 | Ophir-Spiricon, Llc | Beam scattering laser monitor |
WO2012044570A1 (en) | 2010-10-01 | 2012-04-05 | Dow Global Technologies Llc | System and method for analyzing pore sizes of substrates |
EP2729790A1 (de) * | 2011-07-05 | 2014-05-14 | Boehringer Ingelheim Microparts GmbH | Verfahren zur messung des streulichts von partikeln in einem medium |
CA2856664A1 (en) | 2011-12-01 | 2013-06-06 | P.M.L. - Particles Monitoring Technologies Ltd. | Detection scheme for particle size and concentration measurement |
CN105218689A (zh) * | 2015-11-06 | 2016-01-06 | 河南工业大学 | 一种激光处理制备变性淀粉的装置 |
FR3062209B1 (fr) * | 2017-01-25 | 2021-08-27 | Commissariat Energie Atomique | Detecteur optique de particules |
AU2017398403B2 (en) * | 2017-02-10 | 2023-02-23 | Amgen Inc. | Imaging system for counting and sizing particles in fluid-filled vessels |
KR20230156814A (ko) | 2017-10-26 | 2023-11-14 | 파티클 머슈어링 시스템즈, 인크. | 입자 측정을 위한 시스템 및 방법 |
JP7017133B2 (ja) * | 2018-09-26 | 2022-02-08 | 株式会社Sumco | 欠陥評価装置の調整状態評価方法及び調整方法 |
US11016024B2 (en) * | 2019-02-19 | 2021-05-25 | Kla Corporation | Air scattering standard for light scattering based optical instruments and tools |
US10514331B1 (en) * | 2019-03-23 | 2019-12-24 | Horiba Instruments Incorporated | Method for determining the size of nanoparticles in a colloid |
WO2020219841A1 (en) | 2019-04-25 | 2020-10-29 | Particle Measuring Systems, Inc. | Particle detection systems and methods for on-axis particle detection and/or differential detection |
EP4062146A4 (de) | 2019-11-22 | 2024-02-28 | Particle Measuring Syst | Fortgeschrittene systeme und verfahren zur interferometrischen teilchendetektion und detektion von teilchen mit kleinen abmessungen |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2175395A5 (de) * | 1972-01-28 | 1973-10-19 | Sartorius Membranfilter Gmbh | |
US4636075A (en) * | 1984-08-22 | 1987-01-13 | Particle Measuring Systems, Inc. | Particle measurement utilizing orthogonally polarized components of a laser beam |
US4740079A (en) * | 1984-10-29 | 1988-04-26 | Hitachi, Ltd. | Method of and apparatus for detecting foreign substances |
US4679939A (en) * | 1985-12-23 | 1987-07-14 | The United States Of America As Represented By The Secretary Of The Air Firce | In situ small particle diagnostics |
US4676641A (en) * | 1986-01-08 | 1987-06-30 | Coulter Electronics Of New England, Inc. | System for measuring the size distribution of particles dispersed in a fluid |
JPS6451243A (en) * | 1987-08-18 | 1989-02-27 | Honda Motor Co Ltd | Clamping device for work |
JP2604607B2 (ja) * | 1987-12-09 | 1997-04-30 | 三井金属鉱業株式会社 | 欠陥分布測定法および装置 |
US4854705A (en) * | 1988-04-05 | 1989-08-08 | Aerometrics, Inc. | Method and apparatus to determine the size and velocity of particles using light scatter detection from confocal beams |
US4952226A (en) * | 1989-02-27 | 1990-08-28 | American Telephone And Telegraph Company | Lightguide coating control |
DE59004078D1 (de) * | 1989-04-07 | 1994-02-17 | Grimm Labortechnik | Vorrichtung und Verfahren zum Bestimmen der Korngrössenverteilung und der Gesamtkonzentration von Partikeln in einem Gas, insbesondere in Luft. |
US4957526A (en) * | 1989-06-02 | 1990-09-18 | At&T Bell Laboratories | Optical fiber coating control process |
US5037202A (en) * | 1990-07-02 | 1991-08-06 | International Business Machines Corporation | Measurement of size and refractive index of particles using the complex forward-scattered electromagnetic field |
US5256886A (en) * | 1991-04-30 | 1993-10-26 | E. I. Du Pont De Nemours And Company | Apparatus for optically detecting contamination in particles of low optical-loss material |
-
1992
- 1992-03-27 JP JP4071593A patent/JP2722362B2/ja not_active Expired - Fee Related
-
1993
- 1993-03-25 US US08/036,986 patent/US5471298A/en not_active Expired - Lifetime
- 1993-03-26 DE DE69314205T patent/DE69314205T2/de not_active Expired - Lifetime
- 1993-03-26 EP EP93105052A patent/EP0562630B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5471298A (en) | 1995-11-28 |
DE69314205D1 (de) | 1997-11-06 |
JP2722362B2 (ja) | 1998-03-04 |
EP0562630B1 (de) | 1997-10-01 |
JPH05273110A (ja) | 1993-10-22 |
EP0562630A1 (de) | 1993-09-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: RAYTEX CORP., TAMA, TOKIO, JP |