DE69218856D1 - Festkörperstrahlungsdetektor mit einer reflektierenden und einer schützenden Beschichtung - Google Patents

Festkörperstrahlungsdetektor mit einer reflektierenden und einer schützenden Beschichtung

Info

Publication number
DE69218856D1
DE69218856D1 DE69218856T DE69218856T DE69218856D1 DE 69218856 D1 DE69218856 D1 DE 69218856D1 DE 69218856 T DE69218856 T DE 69218856T DE 69218856 T DE69218856 T DE 69218856T DE 69218856 D1 DE69218856 D1 DE 69218856D1
Authority
DE
Germany
Prior art keywords
reflective
solid state
protective coating
radiation detector
state radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69218856T
Other languages
English (en)
Other versions
DE69218856T2 (de
Inventor
Jack Dean Kingsley
Stanley Joseph Lubowski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of DE69218856D1 publication Critical patent/DE69218856D1/de
Application granted granted Critical
Publication of DE69218856T2 publication Critical patent/DE69218856T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C51/00—Shaping by thermoforming, i.e. shaping sheets or sheet like preforms after heating, e.g. shaping sheets in matched moulds or by deep-drawing; Apparatus therefor
    • B29C51/16—Lining or labelling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2002—Optical details, e.g. reflecting or diffusing layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G01T1/20188—Auxiliary details, e.g. casings or cooling
    • G01T1/20189—Damping or insulation against damage, e.g. caused by heat or pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Radiation (AREA)
  • Nuclear Medicine (AREA)
DE69218856T 1991-08-21 1992-08-18 Festkörperstrahlungsdetektor mit einer reflektierenden und einer schützenden Beschichtung Expired - Lifetime DE69218856T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/747,827 US5179284A (en) 1991-08-21 1991-08-21 Solid state radiation imager having a reflective and protective coating

Publications (2)

Publication Number Publication Date
DE69218856D1 true DE69218856D1 (de) 1997-05-15
DE69218856T2 DE69218856T2 (de) 1997-11-13

Family

ID=25006815

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69218856T Expired - Lifetime DE69218856T2 (de) 1991-08-21 1992-08-18 Festkörperstrahlungsdetektor mit einer reflektierenden und einer schützenden Beschichtung

Country Status (4)

Country Link
US (1) US5179284A (de)
EP (1) EP0528676B1 (de)
JP (1) JP2680228B2 (de)
DE (1) DE69218856T2 (de)

Families Citing this family (98)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69301867T2 (de) * 1992-06-16 1996-10-02 Agfa Gevaert Nv Röntgenschirm
DE69416460D1 (de) * 1993-07-01 1999-03-25 Gen Electric Anschmiegendes Aufbringen von einer dünnen Membrane auf eine unregelmässig geformte Oberfläche
CZ156893A3 (en) * 1993-08-03 1995-06-14 Conte Prof Dott Francesco De N Scintillation detector
US5399884A (en) * 1993-11-10 1995-03-21 General Electric Company Radiation imager with single passivation dielectric for transistor and diode
US5521385A (en) * 1994-03-01 1996-05-28 Optoscint, Inc. Long life gamma camera plate assembly with improved reflector system
US5430298A (en) * 1994-06-21 1995-07-04 General Electric Company CT array with improved photosensor linearity and reduced crosstalk
US5517031A (en) * 1994-06-21 1996-05-14 General Electric Company Solid state imager with opaque layer
US5641984A (en) * 1994-08-19 1997-06-24 General Electric Company Hermetically sealed radiation imager
JP3417079B2 (ja) * 1994-08-31 2003-06-16 ソニー株式会社 半導体装置の製造方法
WO1996018914A1 (en) * 1994-12-13 1996-06-20 Siemens Medical Systems, Inc. Improved scintillation crystal module for use in scintillation cameras
JP3776485B2 (ja) * 1995-09-18 2006-05-17 東芝医用システムエンジニアリング株式会社 Ｘ線診断装置
US5614721A (en) * 1995-12-13 1997-03-25 Optoscint, Inc. Modular gamma camera plate assembly with enhanced energy detection and resolution
FR2758630B1 (fr) * 1997-01-21 1999-04-09 Thomson Tubes Electroniques Procede de scellement etanche d'un detecteur de rayonnement a l'etat solide et detecteur obtenu par ce procede
AU5878898A (en) 1997-02-14 1998-09-08 Hamamatsu Photonics K.K. Radiation detection device and method of producing the same
AU5878798A (en) * 1997-02-14 1998-09-08 Hamamatsu Photonics K.K. Radiation detection device and method of producing the same
US7019301B2 (en) * 1997-02-14 2006-03-28 Hamamatsu Photonics K.K. Radiation detection device and method of making the same
JP3805100B2 (ja) 1997-04-10 2006-08-02 キヤノン株式会社 光電変換装置
US6172371B1 (en) 1998-06-15 2001-01-09 General Electric Company Robust cover plate for radiation imager
US7034306B2 (en) * 1998-06-18 2006-04-25 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
AU4168499A (en) * 1998-06-18 2000-01-05 Hamamatsu Photonics K.K. Scintillator panel, radiation image sensor, and method for manufacturing the same
EP1684095B1 (de) 1998-06-18 2013-09-04 Hamamatsu Photonics K.K. Szintillatortafel und Strahlungsbildsensor
CA2310017C (en) * 1998-06-18 2005-10-25 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
AU4168699A (en) * 1998-06-18 2000-01-05 Hamamatsu Photonics K.K. Method of organic film deposition
WO2002061459A1 (fr) * 2001-01-30 2002-08-08 Hamamatsu Photonics K.K. Panneau de scintillation et detecteur d'images de rayonnement
DE69926769T2 (de) 1998-06-18 2006-06-29 Hamamatsu Photonics K.K., Hamamatsu Szintillatorpanel, strahlungsbildsensor und verfahren zu deren herstellung
JP4220017B2 (ja) * 1998-06-23 2009-02-04 浜松ホトニクス株式会社 シンチレータパネル、放射線イメージセンサ及びその製造方法
FR2782388B1 (fr) * 1998-08-11 2000-11-03 Trixell Sas Detecteur de rayonnement a l'etat solide a duree de vie accrue
JP3582825B2 (ja) * 1998-12-14 2004-10-27 浜松ホトニクス株式会社 光学素子及びこれを用いた放射線検出器
US6350990B1 (en) * 1999-11-04 2002-02-26 General Electric Company End cap and sealing method for imager
KR100747800B1 (ko) * 2000-01-13 2007-08-08 하마마츠 포토닉스 가부시키가이샤 방사선 이미지 센서 및 신틸레이터 패널
WO2001051951A1 (fr) * 2000-01-13 2001-07-19 Hamamatsu Photonics K.K. Capteur d'image radiologique et panneau de scintillateur
JP4398065B2 (ja) * 2000-05-19 2010-01-13 浜松ホトニクス株式会社 放射線検出器
WO2001088568A1 (fr) * 2000-05-19 2001-11-22 Hamamatsu Photonics K.K. Detecteur de rayonnement et procede de fabrication de ce detecteur
JP4234304B2 (ja) * 2000-05-19 2009-03-04 浜松ホトニクス株式会社 放射線検出器
FR2812089B1 (fr) * 2000-07-21 2007-11-30 Trixell Sas Detecteur de rayonnement a duree de vie accrue
US7141803B2 (en) * 2000-09-11 2006-11-28 Hamamatsu Photonics K.K. Scintillator panel, radiation image sensor and methods of producing them
CN1304853C (zh) * 2000-09-11 2007-03-14 浜松光子学株式会社 闪烁器面板、放射线图象传感器和它们的制造方法
DE10054678A1 (de) * 2000-11-03 2002-05-16 Siemens Ag Verfahren zur Herstellung eines ein- oder mehrdimensionalen Detektorarrays
US6541774B1 (en) 2000-11-03 2003-04-01 General Electric Company Radiation imager cover
JP4298177B2 (ja) * 2001-02-07 2009-07-15 キヤノン株式会社 シンチレータパネル、放射線検出装置及びシステム
DE10119783A1 (de) * 2001-04-23 2002-10-31 Siemens Ag Strahlungswandler
IL143851A0 (en) * 2001-06-19 2002-04-21 Real Time Radiography Ltd Systems for detection, imaging and absorption of high energy radiation
US6657201B2 (en) 2001-06-29 2003-12-02 General Electric Company Cover plate having spacer lip with hermetic barrier for radiation imager and method of manufacturing same
US6770885B2 (en) * 2001-08-29 2004-08-03 General Electric Company Systems and methods for detecting ionizing radiation with an imaging system
FR2831671B1 (fr) * 2001-10-26 2004-05-28 Trixell Sas Detecteur de rayonnement x a l'etat solide
US6720561B2 (en) 2001-12-06 2004-04-13 General Electric Company Direct CsI scintillator coating for improved digital X-ray detector assembly longevity
US7053381B2 (en) 2001-12-06 2006-05-30 General Electric Company Dual para-xylylene layers for an X-ray detector
US7126130B2 (en) * 2001-12-06 2006-10-24 General Electric Company Direct scintillator coating for radiation detector assembly longevity
US6642524B2 (en) * 2002-01-09 2003-11-04 Ge Medical Systems Global Technology Company, Llc Scintillator sealing for solid state X-ray detector
JP4393048B2 (ja) * 2002-09-11 2010-01-06 キヤノン株式会社 放射線変換基板、放射線撮影装置および放射線撮影システム
US7473903B2 (en) * 2003-02-12 2009-01-06 General Electric Company Method and apparatus for deposited hermetic cover for digital X-ray panel
US7164134B2 (en) * 2003-08-01 2007-01-16 General Electric Company High performance CT reflector for a scintillator array and method for making same
US7129498B2 (en) * 2003-09-23 2006-10-31 General Electric Company Compact structural CT detector module
US6898265B1 (en) * 2003-11-20 2005-05-24 Ge Medical Systems Global Technology Company, Llc Scintillator arrays for radiation detectors and methods of manufacture
US7067817B2 (en) 2004-01-29 2006-06-27 Hamamatsu Photonics K.K. Radiation image sensor and making method of same
JP2005283483A (ja) * 2004-03-30 2005-10-13 Toshiba Corp Ｘ線検出器
JP4612815B2 (ja) * 2004-08-10 2011-01-12 キヤノン株式会社 放射線検出装置、シンチレータパネル、これらの製造方法及び放射線検出システム
US8907268B2 (en) 2004-10-08 2014-12-09 Schlumberger Technology Corporation Electron focusing systems and techniques integrated with a scintillation detector covered with a reflective coating
EP1853161A4 (de) * 2004-12-29 2011-03-23 Siemens Medical Solutions Kombiniertes pet/mr-system und apd-basierter pet-detektor zur verwendung bei der simultanen pet/mr-darstellung
JP4537322B2 (ja) * 2005-01-13 2010-09-01 アロカ株式会社 シンチレータ部材の製造方法及び放射線測定装置の製造方法
DE102006022138A1 (de) * 2006-05-11 2007-11-15 Siemens Ag Szintillatorplatte
JP2008014859A (ja) * 2006-07-07 2008-01-24 Fujifilm Corp 放射線像変換パネルおよび放射線像変換パネルの製造方法
WO2008029610A1 (fr) * 2006-09-05 2008-03-13 Konica Minolta Medical & Graphic, Inc. Écran scintillateur
JP2008082852A (ja) * 2006-09-27 2008-04-10 Toshiba Corp 放射線検出装置
US7732788B2 (en) * 2007-10-23 2010-06-08 Hamamatsu Photonics K.K. Radiation image converting panel, scintillator panel and radiation image sensor
JP2009025075A (ja) * 2007-07-18 2009-02-05 Konica Minolta Medical & Graphic Inc 放射線用シンチレータパネルおよびフラットパネルディテクター
EP2220515A2 (de) * 2007-11-09 2010-08-25 Koninklijke Philips Electronics N.V. Schutz für hygroskopische szintillatoren
US7755054B1 (en) * 2007-12-17 2010-07-13 Radiation Monitoring Devices, Inc. Lutetium gadolinium halide scintillators
WO2010018496A2 (en) * 2008-08-11 2010-02-18 Koninklijke Philips Electronics N.V. Radiation detector and method for preparing same
WO2010041191A2 (en) * 2008-10-07 2010-04-15 Koninklijke Philips Electronics, N.V. Enclosure for hygroscopic scintillation crystal for nuclear imaging
JP2011017683A (ja) * 2009-07-10 2011-01-27 Fujifilm Corp 放射線画像検出器及びその製造方法
JP5883556B2 (ja) * 2010-06-04 2016-03-15 浜松ホトニクス株式会社 放射線イメージセンサ
JP2012185123A (ja) * 2011-03-08 2012-09-27 Sony Corp 放射線撮像装置および放射線撮像装置の製造方法
RU2595795C2 (ru) * 2011-03-24 2016-08-27 Конинклейке Филипс Н.В. Спектральный детектор изображения
JP2012211781A (ja) * 2011-03-30 2012-11-01 Sony Corp 放射線撮像装置および放射線撮像表示システム
JP2013019796A (ja) * 2011-07-12 2013-01-31 Canon Inc 放射線検出器
JP5657614B2 (ja) * 2011-08-26 2015-01-21 富士フイルム株式会社 放射線検出器および放射線画像撮影装置
FR2984585A1 (fr) * 2011-12-14 2013-06-21 Commissariat Energie Atomique Imageur de rayonnement presentant un rendement de detection ameliore
JP6071283B2 (ja) * 2012-07-04 2017-02-01 キヤノン株式会社 放射線検出装置及びその製造方法
US9063238B2 (en) * 2012-08-08 2015-06-23 General Electric Company Complementary metal-oxide-semiconductor X-ray detector
KR101405536B1 (ko) * 2012-10-19 2014-06-11 주식회사 아비즈알 직접 방식의 신틸레이터 패널 및 그 제조 방법
KR101405537B1 (ko) * 2012-10-19 2014-06-11 주식회사 아비즈알 간접방식 신틸레이터 패널 및 그 제조방법
KR101368480B1 (ko) * 2012-11-21 2014-03-03 주식회사 아비즈알 엑스선 검지 소자
US9405083B2 (en) * 2013-05-20 2016-08-02 Lawrence Livermore National Security, Llc Omnidirectional optical waveguide
JP6226579B2 (ja) * 2013-06-13 2017-11-08 東芝電子管デバイス株式会社 放射線検出器及びその製造方法
JP2015004560A (ja) * 2013-06-20 2015-01-08 株式会社東芝 放射線検出器およびその製造方法
US9515276B2 (en) * 2014-09-02 2016-12-06 General Electric Company Organic X-ray detector and X-ray systems
US9535173B2 (en) 2014-09-11 2017-01-03 General Electric Company Organic x-ray detector and x-ray systems
US9799699B2 (en) * 2014-09-24 2017-10-24 Omnivision Technologies, Inc. High near infrared sensitivity image sensor
US9419046B2 (en) * 2015-01-21 2016-08-16 Terapede Systems Inc. Integrated scintillator grid with photodiodes
US10670741B2 (en) 2015-03-20 2020-06-02 Varex Imaging Corporation Scintillator
JP6549950B2 (ja) * 2015-09-15 2019-07-24 浜松ホトニクス株式会社 シンチレータパネル、及び、放射線検出器
EP3391089A4 (de) * 2015-12-15 2019-07-10 Saint-Gobain Ceramics&Plastics, Inc. Szintillationsvorrichtung mit feuchtigkeitsbarriere
JP2018009803A (ja) * 2016-07-11 2018-01-18 コニカミノルタ株式会社 シンチレータパネル
IT201700034664A1 (it) 2017-03-29 2018-09-29 St Microelectronics Srl Rilevatore di radiazione a scintillamento, relativo involucro per rilevatore e processo di fabbricazione
WO2020125139A1 (zh) * 2018-12-19 2020-06-25 同方威视技术股份有限公司 闪烁体反射层制备模具及方法
CN114586110A (zh) * 2019-10-31 2022-06-03 株式会社东芝 闪烁器阵列、闪烁器阵列的制造方法、放射线检测器及放射线检查装置
US11747493B2 (en) * 2020-09-16 2023-09-05 Amir Massoud Dabiran Multi-purpose high-energy particle sensor array and method of making the same for high-resolution imaging

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4029964A (en) * 1975-08-11 1977-06-14 G. D. Searle & Co. Detector construction for a scintillation camera
FR2356957A1 (fr) * 1976-06-28 1978-01-27 Bicron Corp Detecteur a scintillation a rayons gamma a haute resistance aux chocs
FR2471610A1 (fr) * 1979-12-14 1981-06-19 Thomson Csf Module de scintillateurs pour la detection de rayons x ou gamma, son procede de realisation, et dispositif detecteur incorporant de tels modules
EP0303730A3 (de) * 1983-11-09 1989-04-26 Siemens Aktiengesellschaft Strahlungsdetektor mit einem Szintillationskristall und Verfahren zu seiner Herstellung
US4658141A (en) * 1984-04-03 1987-04-14 Harshaw/Filtrol Partnership Inorganic scintillator crystal having a highly reflective surface
US4631409A (en) * 1984-04-03 1986-12-23 Harshaw/Filtrol Scintillator crystal having a highly reflective surface
JPH076483B2 (ja) * 1984-06-29 1995-01-30 日産自動車株式会社 内燃機関の点火時期制御装置
JPS6263881A (ja) * 1985-09-14 1987-03-20 Horiba Ltd 放射線検出器
US4720426A (en) * 1986-06-30 1988-01-19 General Electric Company Reflective coating for solid-state scintillator bar
JPH01191087A (ja) * 1988-01-27 1989-08-01 Hitachi Medical Corp 放射線検出器
JP2720162B2 (ja) * 1988-02-08 1998-02-25 株式会社日立メディコ 放射線検出器
JPH02295181A (ja) * 1989-05-10 1990-12-06 Sumitomo Metal Mining Co Ltd 半導体レーザ励起固体レーザ素子

Also Published As

Publication number Publication date
US5179284A (en) 1993-01-12
DE69218856T2 (de) 1997-11-13
JP2680228B2 (ja) 1997-11-19
JPH05196742A (ja) 1993-08-06
EP0528676B1 (de) 1997-04-09
EP0528676A1 (de) 1993-02-24

Similar Documents

Publication Publication Date Title
DE69218856D1 (de) Festkörperstrahlungsdetektor mit einer reflektierenden und einer schützenden Beschichtung
DE69610118D1 (de) Infrarot-strahlungsdetektor mit verkleinerter wirksamer fläche
DE59305627D1 (de) Strahlungstrocknerleiste und Strahlungstrockner mit einer solchen Strahlungstrocknerleiste
DE69417317D1 (de) Festkörperstrahlungsdetektor mit einer Sperrschicht
DE69210888D1 (de) Arbeitseinheit und Bilderzeugungsgerät mit einer solchen Einheit
DE69206895D1 (de) Antireflektierende Beschichtung mit Gradientzone
DE69413882T2 (de) Strahlende Mehrschichtenstruktur mit variabelem Strahlungsdiagramm
DE69130380D1 (de) Arbeitseinheit und Bilderzeugungsgerät mit einer solchen Einheit
DE69217701D1 (de) Optoelektronisches Element mit integriertem optischem Wellenleiter und Detektor
DE69302232D1 (de) Optisches Reflektometer mit niedriger Kohärenz und einer Verzögerungsfolge
FR2637741B1 (fr) Dispositif a rayonnement laser a angle de rayonnement variable
DE69132410D1 (de) Arbeitseinheit und Bilderzeugungsgerät mit einer solchen Einheit
DE69212936D1 (de) Infrarot-Detektor mit einer Brückenstruktur
DE69211751D1 (de) Strahlungstechnologie
BR9200710A (pt) Copolimeros reticulaveis cataliticamente por acidos,composicao sensivel a radiacao e emprego
DE69637498D1 (de) Strahlungsdetektor mit grossem Bereich
DE69419142T2 (de) Lageempfindlicher strahlungsdetektor
IL97530A0 (en) Passive protection of optically sensitive materials with transition metal organo-metallic
EP0330386A3 (en) Radiation sensitive materials and devices made therewith
DE69415737D1 (de) Gegenstandsdetektor mit einfacher Struktur
FR2629274B1 (fr) Detecteur de rayonnement infrarouge, et camera a infrarouges comportant ce detecteur
DE69212397D1 (de) Infrarotdetektor mit einer Kühlvorrichtung
GB2214327B (en) Optical window and radiation position-sensitive detector using it
DE69208366D1 (de) Strahlungsdetektoren
DE69222693D1 (de) Überspannungsdetektor mit Hysterese

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: ROEGER UND KOLLEGEN, 73728 ESSLINGEN

R071 Expiry of right

Ref document number: 528676

Country of ref document: EP