DE69213868T2 - Elektronenstrahlkanone - Google Patents

Elektronenstrahlkanone

Info

Publication number
DE69213868T2
DE69213868T2 DE69213868T DE69213868T DE69213868T2 DE 69213868 T2 DE69213868 T2 DE 69213868T2 DE 69213868 T DE69213868 T DE 69213868T DE 69213868 T DE69213868 T DE 69213868T DE 69213868 T2 DE69213868 T2 DE 69213868T2
Authority
DE
Germany
Prior art keywords
electron beam
beam gun
gun
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69213868T
Other languages
English (en)
Other versions
DE69213868D1 (de
Inventor
Rusell J Hill
P A Joel Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ferrotec USA Corp
Original Assignee
BOC Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Inc filed Critical BOC Group Inc
Application granted granted Critical
Publication of DE69213868D1 publication Critical patent/DE69213868D1/de
Publication of DE69213868T2 publication Critical patent/DE69213868T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/143—Electron beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
DE69213868T 1991-08-27 1992-08-26 Elektronenstrahlkanone Expired - Lifetime DE69213868T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/750,363 US5182488A (en) 1991-08-27 1991-08-27 Electron beam gun for use in an electron beam evaporation source

Publications (2)

Publication Number Publication Date
DE69213868D1 DE69213868D1 (de) 1996-10-24
DE69213868T2 true DE69213868T2 (de) 1997-01-30

Family

ID=25017564

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69213868T Expired - Lifetime DE69213868T2 (de) 1991-08-27 1992-08-26 Elektronenstrahlkanone

Country Status (5)

Country Link
US (1) US5182488A (de)
EP (1) EP0530004B1 (de)
KR (1) KR930005093A (de)
CA (1) CA2070457C (de)
DE (1) DE69213868T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0660835A (ja) * 1992-05-04 1994-03-04 Internatl Business Mach Corp <Ibm> エミッター銃アッセンブリ
US5418348A (en) * 1992-10-29 1995-05-23 Mdc Vacuum Products, Inc. Electron beam source assembly
US6196889B1 (en) 1998-12-11 2001-03-06 United Technologies Corporation Method and apparatus for use an electron gun employing a thermionic source of electrons
US6455990B1 (en) 1998-12-11 2002-09-24 United Technologies Corporation Apparatus for an electron gun employing a thermionic electron source
US6064686A (en) * 1999-03-30 2000-05-16 Tfi Telemark Arc-free electron gun
WO2001059808A1 (en) * 2000-02-11 2001-08-16 Mdc Vacuum Products Corporation Electron beam emitter for use in an electron beam evaporation source
GB0307745D0 (en) * 2003-04-03 2003-05-07 Microemissive Displays Ltd Method and apparatus for depositing material on a substrate
KR100787168B1 (ko) 2006-02-10 2007-12-21 (주)인텍 전자빔 발생장치
US7764008B2 (en) * 2006-02-24 2010-07-27 Ferrotec (Usa) Corporation Electron beam gun

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2956192A (en) * 1959-01-02 1960-10-11 Eitel Mccullough Inc Gettering electron gun
DE1789188C3 (de) * 1965-10-22 1979-04-05 N.V. Philips' Gloeilampenfabrieken, Eindhoven (Niederlande) Verfahren zum Einbringen und Befestigen eines Heizers in eine Kathodenhülse
JPS4929969A (de) * 1972-07-20 1974-03-16
US3801719A (en) * 1973-01-18 1974-04-02 Western Electric Co Emitter block assembly
DE2410050A1 (de) * 1974-03-02 1975-09-11 Leybold Heraeus Gmbh & Co Kg Elektronenstrahlerzeuger mit linearer katode
US4048462A (en) * 1975-01-17 1977-09-13 Airco, Inc. Compact rotary evaporation source
US4126811A (en) * 1977-06-30 1978-11-21 Movchan Boris A Electron gun with linear thermionic cathode for electron-beam heating
US4866239A (en) * 1988-05-31 1989-09-12 The Boc Group, Inc. Vapor source assembly with crucible
US5012064A (en) * 1990-06-29 1991-04-30 The Boc Group, Inc. Electron beam evaporation source

Also Published As

Publication number Publication date
CA2070457C (en) 1996-04-30
CA2070457A1 (en) 1993-02-28
KR930005093A (ko) 1993-03-23
EP0530004A1 (de) 1993-03-03
US5182488A (en) 1993-01-26
DE69213868D1 (de) 1996-10-24
EP0530004B1 (de) 1996-09-18

Similar Documents

Publication Publication Date Title
DE69224506D1 (de) Elektronenstrahlgerät
KR920013626U (ko) 전자총 전극
DE69318269D1 (de) Fokussierender Elektronendetektor
DE69406739T2 (de) Elektronenstrahlgerät
DE59303531D1 (de) Elektronenstrahl-Vorrichtung
KR900008600A (ko) 다이나믹 포커스 전자총
DE69213157D1 (de) Elektronenstrahlvorrichtung
GB2243943B (en) Electron beam tube arrangements
GB2244854B (en) Electron beam tube arrangements
DE69202782D1 (de) Feldemissions-Elektronenkanone geringer Aberration.
DE69213868D1 (de) Elektronenstrahlkanone
DE69108092D1 (de) Elektronenstrahlschweissen.
KR910001580U (ko) 다이나믹 포커스 전자총
EP0463829A3 (en) Electron beam evaporation source
ITTO910408A0 (it) cannone elettronico
DE69311443D1 (de) Hochauflösende Elektronenkanone
EP0505862A3 (en) Electron beam tube
GB2244173B (en) Electron beam tube arrangements
NO923514L (no) Bjelke
NL194991B (nl) Elektronenbundel-kanonstelsel.
KR950009898U (ko) 전자총
KR920017204U (ko) 전자총 전극
KR920013606U (ko) 전자총 구조체
KR950009911U (ko) 전자총
KR950009902U (ko) 전자총

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS VACCUM.INC. (N. D. GES. D. STAATES DEL, US

8327 Change in the person/name/address of the patent owner

Owner name: FERROTEC (USA) CORP. (N.D. GES. D. STAATES MAS, US

8328 Change in the person/name/address of the agent

Representative=s name: WUESTHOFF & WUESTHOFF PATENT- UND RECHTSANWAELTE,

R071 Expiry of right

Ref document number: 530004

Country of ref document: EP