DE69213157D1 - Elektronenstrahlvorrichtung - Google Patents

Elektronenstrahlvorrichtung

Info

Publication number
DE69213157D1
DE69213157D1 DE69213157T DE69213157T DE69213157D1 DE 69213157 D1 DE69213157 D1 DE 69213157D1 DE 69213157 T DE69213157 T DE 69213157T DE 69213157 T DE69213157 T DE 69213157T DE 69213157 D1 DE69213157 D1 DE 69213157D1
Authority
DE
Germany
Prior art keywords
electron beam
beam device
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69213157T
Other languages
English (en)
Other versions
DE69213157T2 (de
Inventor
Harald Rose
Ralf Degenhardt
Der Mast Karel D Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of DE69213157D1 publication Critical patent/DE69213157D1/de
Application granted granted Critical
Publication of DE69213157T2 publication Critical patent/DE69213157T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
DE69213157T 1991-10-24 1992-10-15 Elektronenstrahlvorrichtung Expired - Lifetime DE69213157T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP91202753 1991-10-24

Publications (2)

Publication Number Publication Date
DE69213157D1 true DE69213157D1 (de) 1996-10-02
DE69213157T2 DE69213157T2 (de) 1997-03-06

Family

ID=8207959

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69213157T Expired - Lifetime DE69213157T2 (de) 1991-10-24 1992-10-15 Elektronenstrahlvorrichtung

Country Status (4)

Country Link
US (1) US5336885A (de)
EP (1) EP0538938B1 (de)
JP (1) JP3471039B2 (de)
DE (1) DE69213157T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4310559A1 (de) * 1993-03-26 1994-09-29 Zeiss Carl Fa Abbildendes Elektronenenergiefilter
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
US5798524A (en) * 1996-08-07 1998-08-25 Gatan, Inc. Automated adjustment of an energy filtering transmission electron microscope
DE19633496B4 (de) * 1996-08-20 2006-06-08 Ceos Corrected Electron Optical Systems Gmbh Monchromator für die Elektronenoptik, insbesondere Elketronenmikroskopie
FR2753303B1 (fr) * 1996-09-12 1998-12-04 Centre Nat Rech Scient Filtre d'energie, microscope electronique a transmission et procede de filtrage d'energie associe
US7022987B2 (en) 2001-02-20 2006-04-04 Carl Zeiss Nis Gmbh Particle-optical arrangements and particle-optical systems
DE10107910A1 (de) * 2001-02-20 2002-08-22 Leo Elektronenmikroskopie Gmbh Teilchenstrahlsystem mit einem Spiegelkorrektor
DE10235456B4 (de) * 2002-08-02 2008-07-10 Leo Elektronenmikroskopie Gmbh Elektronenmikroskopiesystem
US7394069B1 (en) 2005-08-30 2008-07-01 Kla-Tencor Technologies Corporation Large-field scanning of charged particles
US7205542B1 (en) 2005-11-14 2007-04-17 Kla-Tencor Technologies Corporation Scanning electron microscope with curved axes
US7348566B2 (en) * 2006-02-28 2008-03-25 International Business Machines Corporation Aberration-correcting cathode lens microscopy instrument
DE102007007923A1 (de) * 2007-02-14 2008-08-21 Carl Zeiss Nts Gmbh Phasenschiebendes Element und Teilchenstrahlgerät mit phasenschiebenden Element
US8351036B1 (en) 2009-03-26 2013-01-08 J. A. Woollam Co., Inc. System for naturally adjusting the cross-sectional area of a beam of electromagnetic radiation entered to a focusing means
US10018815B1 (en) 2014-06-06 2018-07-10 J.A. Woolam Co., Inc. Beam focusing and reflective optics
US10338362B1 (en) 2014-06-06 2019-07-02 J.A. Woollam Co., Inc. Beam focusing and reflecting optics with enhanced detector system
US10209528B1 (en) 2015-06-09 2019-02-19 J.A. Woollam Co., Inc. Operation of an electromagnetic radiation focusing element
US9921395B1 (en) 2015-06-09 2018-03-20 J.A. Woollam Co., Inc. Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145221B2 (de) * 1973-01-31 1976-12-02
DE3423149A1 (de) * 1984-06-22 1986-01-02 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und anordnung zur elektronenenergiegefilterten abbildung eines objektes oder eines objektbeugungsdiagrammes mit einem transmissions-elektronenmikroskop
DE3532699A1 (de) * 1985-09-13 1987-03-26 Zeiss Carl Fa Elektronenenergiefilter vom omega-typ
EP0470299B1 (de) * 1990-08-08 1996-06-26 Koninklijke Philips Electronics N.V. Energiefilter für Ladungsträgervorrichtung
US5097126A (en) * 1990-09-25 1992-03-17 Gatan, Inc. High resolution electron energy loss spectrometer
DE4041495A1 (de) * 1990-12-22 1992-06-25 Zeiss Carl Fa Elektronenenergiefilter, vorzugsweise vom alpha- oder omega-typ

Also Published As

Publication number Publication date
JP3471039B2 (ja) 2003-11-25
EP0538938A1 (de) 1993-04-28
JPH05314938A (ja) 1993-11-26
EP0538938B1 (de) 1996-08-28
US5336885A (en) 1994-08-09
DE69213157T2 (de) 1997-03-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8327 Change in the person/name/address of the patent owner

Owner name: FEI CO., HILLSBORO, OREG., US

R071 Expiry of right

Ref document number: 538938

Country of ref document: EP