US5210455A
(en)
*
|
1990-07-26 |
1993-05-11 |
Ngk Insulators, Ltd. |
Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
|
US5162691A
(en)
*
|
1991-01-22 |
1992-11-10 |
The United States Of America As Represented By The Secretary Of The Army |
Cantilevered air-gap type thin film piezoelectric resonator
|
US5668057A
(en)
*
|
1991-03-13 |
1997-09-16 |
Matsushita Electric Industrial Co., Ltd. |
Methods of manufacture for electronic components having high-frequency elements
|
US5747857A
(en)
*
|
1991-03-13 |
1998-05-05 |
Matsushita Electric Industrial Co., Ltd. |
Electronic components having high-frequency elements and methods of manufacture therefor
|
US5339051A
(en)
*
|
1991-12-09 |
1994-08-16 |
Sandia Corporation |
Micro-machined resonator oscillator
|
US5270263A
(en)
*
|
1991-12-20 |
1993-12-14 |
Micron Technology, Inc. |
Process for depositing aluminum nitride (AlN) using nitrogen plasma sputtering
|
US5348617A
(en)
*
|
1991-12-23 |
1994-09-20 |
Iowa State University Research Foundation, Inc. |
Selective etching process
|
US5166646A
(en)
*
|
1992-02-07 |
1992-11-24 |
Motorola, Inc. |
Integrated tunable resonators for use in oscillators and filters
|
JPH06291587A
(ja)
*
|
1992-07-08 |
1994-10-18 |
Matsushita Electric Ind Co Ltd |
圧電振動子
|
JPH06350376A
(ja)
*
|
1993-01-25 |
1994-12-22 |
Matsushita Electric Ind Co Ltd |
気密封止された圧電デバイスおよび気密封止パッケージ
|
US5373268A
(en)
*
|
1993-02-01 |
1994-12-13 |
Motorola, Inc. |
Thin film resonator having stacked acoustic reflecting impedance matching layers and method
|
US5410208A
(en)
*
|
1993-04-12 |
1995-04-25 |
Acuson Corporation |
Ultrasound transducers with reduced sidelobes and method for manufacture thereof
|
EP0651449B1
(de)
*
|
1993-11-01 |
2002-02-13 |
Matsushita Electric Industrial Co., Ltd. |
Elektronische Anordnung und Verfahren zur Herstellung
|
DE69409215T2
(de)
*
|
1993-12-06 |
1998-07-16 |
Matsushita Electric Ind Co Ltd |
Hybrid Magnetstruktur und deren Herstellungsverfahren
|
JP3435844B2
(ja)
*
|
1994-03-07 |
2003-08-11 |
株式会社デンソー |
半導体加速度センサ及びその製造方法
|
JPH08148968A
(ja)
*
|
1994-11-24 |
1996-06-07 |
Mitsubishi Electric Corp |
薄膜圧電素子
|
US5956292A
(en)
*
|
1995-04-13 |
1999-09-21 |
The Charles Stark Draper Laboratory, Inc. |
Monolithic micromachined piezoelectric acoustic transducer and transducer array and method of making same
|
US5596239A
(en)
*
|
1995-06-29 |
1997-01-21 |
Motorola, Inc. |
Enhanced quality factor resonator
|
US5617065A
(en)
*
|
1995-06-29 |
1997-04-01 |
Motorola, Inc. |
Filter using enhanced quality factor resonator and method
|
US5696423A
(en)
*
|
1995-06-29 |
1997-12-09 |
Motorola, Inc. |
Temperature compenated resonator and method
|
DE19630150B4
(de)
*
|
1995-07-28 |
2009-03-05 |
Denso Corp., Kariya-shi |
Verfahren zum Entwerfen einer Halbleitervorrichtung
|
FR2746229B1
(fr)
*
|
1996-03-15 |
1998-05-22 |
|
Dispositif electronique comprenant une base de temps integree
|
US5801476A
(en)
*
|
1996-08-09 |
1998-09-01 |
The United States Of America As Represented By The Secretary Of The Army |
Thickness mode acoustic wave resonator
|
US5783973A
(en)
|
1997-02-24 |
1998-07-21 |
The Charles Stark Draper Laboratory, Inc. |
Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
|
US6963155B1
(en)
*
|
1997-04-24 |
2005-11-08 |
Mitsubishi Denki Kabushiki Kaisha |
Film acoustic wave device, manufacturing method and circuit device
|
US5932953A
(en)
*
|
1997-06-30 |
1999-08-03 |
Iowa State University Research Foundation, Inc. |
Method and system for detecting material using piezoelectric resonators
|
JPH11163022A
(ja)
*
|
1997-11-28 |
1999-06-18 |
Sony Corp |
半導体装置、その製造方法及び電子機器
|
FI106894B
(fi)
*
|
1998-06-02 |
2001-04-30 |
Nokia Mobile Phones Ltd |
Resonaattorirakenteita
|
US6478412B1
(en)
*
|
1999-01-22 |
2002-11-12 |
Kansai Research Institute |
Piezoelectric thin film device, its production method, and ink-jet recording head
|
JP3531522B2
(ja)
*
|
1999-04-19 |
2004-05-31 |
株式会社村田製作所 |
圧電共振子
|
US6699400B1
(en)
*
|
1999-06-04 |
2004-03-02 |
Arne W. Ballantine |
Etch process and apparatus therefor
|
US6300706B1
(en)
*
|
1999-07-14 |
2001-10-09 |
The United States Of America As Represented By The Secretary Of The Army |
Compound semiconductor monolithic frequency sources and actuators
|
SE519915C2
(sv)
|
1999-09-08 |
2003-04-22 |
Ericsson Telefon Ab L M |
Anordning och metod vid spänningskontrollerad oscillator
|
US6339276B1
(en)
*
|
1999-11-01 |
2002-01-15 |
Agere Systems Guardian Corp. |
Incremental tuning process for electrical resonators based on mechanical motion
|
US6746577B1
(en)
|
1999-12-16 |
2004-06-08 |
Agere Systems, Inc. |
Method and apparatus for thickness control and reproducibility of dielectric film deposition
|
US6524971B1
(en)
|
1999-12-17 |
2003-02-25 |
Agere Systems, Inc. |
Method of deposition of films
|
US6441703B1
(en)
|
2000-01-18 |
2002-08-27 |
Texas Instruments Incorporated |
Multiple frequency acoustic reflector array and monolithic cover for resonators and method
|
US6452310B1
(en)
|
2000-01-18 |
2002-09-17 |
Texas Instruments Incorporated |
Thin film resonator and method
|
US6323744B1
(en)
|
2000-02-04 |
2001-11-27 |
Agere Systems Guardian Corp. |
Grounding of TFR ladder filters
|
US7296329B1
(en)
|
2000-02-04 |
2007-11-20 |
Agere Systems Inc. |
Method of isolation for acoustic resonator device
|
US6306313B1
(en)
|
2000-02-04 |
2001-10-23 |
Agere Systems Guardian Corp. |
Selective etching of thin films
|
US6377136B1
(en)
|
2000-02-04 |
2002-04-23 |
Agere Systems Guardian Corporation |
Thin film resonator filter having at least one component with different resonant frequency sets or electrode capacitance
|
US6437667B1
(en)
|
2000-02-04 |
2002-08-20 |
Agere Systems Guardian Corp. |
Method of tuning thin film resonator filters by removing or adding piezoelectric material
|
US6384697B1
(en)
*
|
2000-05-08 |
2002-05-07 |
Agilent Technologies, Inc. |
Cavity spanning bottom electrode of a substrate-mounted bulk wave acoustic resonator
|
US6420202B1
(en)
*
|
2000-05-16 |
2002-07-16 |
Agere Systems Guardian Corp. |
Method for shaping thin film resonators to shape acoustic modes therein
|
US6603241B1
(en)
|
2000-05-23 |
2003-08-05 |
Agere Systems, Inc. |
Acoustic mirror materials for acoustic devices
|
US6555946B1
(en)
*
|
2000-07-24 |
2003-04-29 |
Motorola, Inc. |
Acoustic wave device and process for forming the same
|
US6355498B1
(en)
|
2000-08-11 |
2002-03-12 |
Agere Systems Guartian Corp. |
Thin film resonators fabricated on membranes created by front side releasing
|
US6486751B1
(en)
|
2000-09-26 |
2002-11-26 |
Agere Systems Inc. |
Increased bandwidth thin film resonator having a columnar structure
|
US6525610B1
(en)
*
|
2000-10-20 |
2003-02-25 |
Itt Manufacturing Enterprises, Inc. |
Dual plane microstrip power amplifier
|
US6674291B1
(en)
|
2000-10-30 |
2004-01-06 |
Agere Systems Guardian Corp. |
Method and apparatus for determining and/or improving high power reliability in thin film resonator devices, and a thin film resonator device resultant therefrom
|
US6587212B1
(en)
|
2000-10-31 |
2003-07-01 |
Agere Systems Inc. |
Method and apparatus for studying vibrational modes of an electro-acoustic device
|
US6743731B1
(en)
*
|
2000-11-17 |
2004-06-01 |
Agere Systems Inc. |
Method for making a radio frequency component and component produced thereby
|
US6424237B1
(en)
*
|
2000-12-21 |
2002-07-23 |
Agilent Technologies, Inc. |
Bulk acoustic resonator perimeter reflection system
|
US6515402B2
(en)
*
|
2001-01-24 |
2003-02-04 |
Koninklijke Philips Electronics N.V. |
Array of ultrasound transducers
|
US7435613B2
(en)
|
2001-02-12 |
2008-10-14 |
Agere Systems Inc. |
Methods of fabricating a membrane with improved mechanical integrity
|
US6710681B2
(en)
*
|
2001-07-13 |
2004-03-23 |
Agilent Technologies, Inc. |
Thin film bulk acoustic resonator (FBAR) and inductor on a monolithic substrate and method of fabricating the same
|
US6548937B1
(en)
*
|
2002-05-01 |
2003-04-15 |
Koninklijke Philips Electronics N.V. |
Array of membrane ultrasound transducers
|
DE20221966U1
(de)
*
|
2002-06-06 |
2010-02-25 |
Epcos Ag |
Mit akustischen Wellen arbeitendes Bauelement mit einem Anpaßnetzwerk
|
JP4215717B2
(ja)
|
2002-07-19 |
2009-01-28 |
シーメンス アクチエンゲゼルシヤフト |
物質を検出する装置および物質を検出する方法
|
US6816035B2
(en)
*
|
2002-08-08 |
2004-11-09 |
Intel Corporation |
Forming film bulk acoustic resonator filters
|
US7152289B2
(en)
*
|
2002-09-25 |
2006-12-26 |
Intel Corporation |
Method for forming bulk resonators silicon <110> substrate
|
US7275292B2
(en)
|
2003-03-07 |
2007-10-02 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Method for fabricating an acoustical resonator on a substrate
|
JP2004320127A
(ja)
*
|
2003-04-11 |
2004-11-11 |
Tdk Corp |
薄膜圧電共振子の製造方法、薄膜圧電共振子の製造装置、薄膜圧電共振子および電子部品
|
US7303996B2
(en)
*
|
2003-10-01 |
2007-12-04 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
High-K gate dielectric stack plasma treatment to adjust threshold voltage characteristics
|
JP2005130068A
(ja)
*
|
2003-10-22 |
2005-05-19 |
Tdk Corp |
圧電共振器の製造方法
|
US7057477B2
(en)
*
|
2003-12-24 |
2006-06-06 |
Intel Corporation |
Integration of FBAR filter(s) and on-chip inductors
|
DE102004018854A1
(de)
*
|
2004-04-19 |
2005-11-03 |
Work Microwave Elektronische Bauelemente Gmbh |
Kompakte Aufbauform für Hochfreuenz-Oszillatoren mit integrierter Schaltung und externem Resonator
|
US7615833B2
(en)
|
2004-07-13 |
2009-11-10 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Film bulk acoustic resonator package and method of fabricating same
|
US7388454B2
(en)
|
2004-10-01 |
2008-06-17 |
Avago Technologies Wireless Ip Pte Ltd |
Acoustic resonator performance enhancement using alternating frame structure
|
US8981876B2
(en)
|
2004-11-15 |
2015-03-17 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Piezoelectric resonator structures and electrical filters having frame elements
|
US7202560B2
(en)
|
2004-12-15 |
2007-04-10 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Wafer bonding of micro-electro mechanical systems to active circuitry
|
US7791434B2
(en)
|
2004-12-22 |
2010-09-07 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
|
US7427819B2
(en)
*
|
2005-03-04 |
2008-09-23 |
Avago Wireless Ip Pte Ltd |
Film-bulk acoustic wave resonator with motion plate and method
|
US7214564B2
(en)
*
|
2005-03-17 |
2007-05-08 |
Chung Shan Institute Of Science And Technology |
Method of forming film bulk acoustic wave filter assembly
|
US7369013B2
(en)
|
2005-04-06 |
2008-05-06 |
Avago Technologies Wireless Ip Pte Ltd |
Acoustic resonator performance enhancement using filled recessed region
|
US7868522B2
(en)
*
|
2005-09-09 |
2011-01-11 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Adjusted frequency temperature coefficient resonator
|
US7425787B2
(en)
|
2005-10-18 |
2008-09-16 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Acoustic galvanic isolator incorporating single insulated decoupled stacked bulk acoustic resonator with acoustically-resonant electrical insulator
|
US7675390B2
(en)
|
2005-10-18 |
2010-03-09 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Acoustic galvanic isolator incorporating single decoupled stacked bulk acoustic resonator
|
US7525398B2
(en)
|
2005-10-18 |
2009-04-28 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Acoustically communicating data signals across an electrical isolation barrier
|
US7737807B2
(en)
|
2005-10-18 |
2010-06-15 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators
|
US7463499B2
(en)
|
2005-10-31 |
2008-12-09 |
Avago Technologies General Ip (Singapore) Pte Ltd. |
AC-DC power converter
|
US7561009B2
(en)
|
2005-11-30 |
2009-07-14 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Film bulk acoustic resonator (FBAR) devices with temperature compensation
|
US7612636B2
(en)
|
2006-01-30 |
2009-11-03 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Impedance transforming bulk acoustic wave baluns
|
US7746677B2
(en)
|
2006-03-09 |
2010-06-29 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
AC-DC converter circuit and power supply
|
US7479685B2
(en)
|
2006-03-10 |
2009-01-20 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Electronic device on substrate with cavity and mitigated parasitic leakage path
|
JP4252584B2
(ja)
*
|
2006-04-28 |
2009-04-08 |
富士通メディアデバイス株式会社 |
圧電薄膜共振器およびフィルタ
|
US7629865B2
(en)
*
|
2006-05-31 |
2009-12-08 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Piezoelectric resonator structures and electrical filters
|
US7508286B2
(en)
|
2006-09-28 |
2009-03-24 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
HBAR oscillator and method of manufacture
|
US7791435B2
(en)
|
2007-09-28 |
2010-09-07 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Single stack coupled resonators having differential output
|
WO2009076534A1
(en)
*
|
2007-12-11 |
2009-06-18 |
Cornell University |
Resonant body transistor and oscillator
|
US8476809B2
(en)
|
2008-04-29 |
2013-07-02 |
Sand 9, Inc. |
Microelectromechanical systems (MEMS) resonators and related apparatus and methods
|
US8410868B2
(en)
*
|
2009-06-04 |
2013-04-02 |
Sand 9, Inc. |
Methods and apparatus for temperature control of devices and mechanical resonating structures
|
US7732977B2
(en)
|
2008-04-30 |
2010-06-08 |
Avago Technologies Wireless Ip (Singapore) |
Transceiver circuit for film bulk acoustic resonator (FBAR) transducers
|
US7855618B2
(en)
|
2008-04-30 |
2010-12-21 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Bulk acoustic resonator electrical impedance transformers
|
DE102008052437A1
(de)
*
|
2008-10-21 |
2010-04-29 |
Siemens Aktiengesellschaft |
Vorrichtung und Verfahren zur Detektion einer Substanz mit Hilfe eines Dünnfilmresonators mit Isolationsschicht
|
US9048811B2
(en)
|
2009-03-31 |
2015-06-02 |
Sand 9, Inc. |
Integration of piezoelectric materials with substrates
|
US8248185B2
(en)
|
2009-06-24 |
2012-08-21 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Acoustic resonator structure comprising a bridge
|
US8902023B2
(en)
|
2009-06-24 |
2014-12-02 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Acoustic resonator structure having an electrode with a cantilevered portion
|
US8193877B2
(en)
|
2009-11-30 |
2012-06-05 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Duplexer with negative phase shifting circuit
|
US8796904B2
(en)
|
2011-10-31 |
2014-08-05 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
|
US9243316B2
(en)
|
2010-01-22 |
2016-01-26 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Method of fabricating piezoelectric material with selected c-axis orientation
|
US8962443B2
(en)
|
2011-01-31 |
2015-02-24 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Semiconductor device having an airbridge and method of fabricating the same
|
US9083302B2
(en)
|
2011-02-28 |
2015-07-14 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
|
US9154112B2
(en)
|
2011-02-28 |
2015-10-06 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Coupled resonator filter comprising a bridge
|
US9048812B2
(en)
|
2011-02-28 |
2015-06-02 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
|
US9148117B2
(en)
|
2011-02-28 |
2015-09-29 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Coupled resonator filter comprising a bridge and frame elements
|
US9425764B2
(en)
|
2012-10-25 |
2016-08-23 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Accoustic resonator having composite electrodes with integrated lateral features
|
US9136818B2
(en)
|
2011-02-28 |
2015-09-15 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Stacked acoustic resonator comprising a bridge
|
US9203374B2
(en)
|
2011-02-28 |
2015-12-01 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Film bulk acoustic resonator comprising a bridge
|
US9444426B2
(en)
|
2012-10-25 |
2016-09-13 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Accoustic resonator having integrated lateral feature and temperature compensation feature
|
US8575820B2
(en)
|
2011-03-29 |
2013-11-05 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Stacked bulk acoustic resonator
|
JP5735099B2
(ja)
|
2011-04-01 |
2015-06-17 |
ルネサスエレクトロニクス株式会社 |
半導体装置およびその製造方法ならびに携帯電話機
|
US8350445B1
(en)
|
2011-06-16 |
2013-01-08 |
Avago Technologies Wireless Ip (Singapore) Pte. Ltd. |
Bulk acoustic resonator comprising non-piezoelectric layer and bridge
|
US8922302B2
(en)
|
2011-08-24 |
2014-12-30 |
Avago Technologies General Ip (Singapore) Pte. Ltd. |
Acoustic resonator formed on a pedestal
|
US9653516B2
(en)
*
|
2014-12-30 |
2017-05-16 |
Win Semiconductors Corp. |
Acoustic wave device structure, integrated structure of power amplifier and acoustic wave device, and fabrication methods thereof
|
US11056532B2
(en)
*
|
2016-07-01 |
2021-07-06 |
Intel Corporation |
Techniques for monolithic co-integration of polycrystalline thin-film bulk acoustic resonator devices and monocrystalline III-N semiconductor transistor devices
|
US10547286B2
(en)
|
2017-02-03 |
2020-01-28 |
Samsung Electro-Mechanics Co., Ltd. |
Filter and front end module including the same
|
KR101862514B1
(ko)
*
|
2017-05-18 |
2018-05-29 |
삼성전기주식회사 |
체적 음향 공진기
|