DE69030643D1 - Lichtempfindliche Harzzusammensetzung und ihre Verwendung zur Herstellung eines Halbleiterapparats - Google Patents

Lichtempfindliche Harzzusammensetzung und ihre Verwendung zur Herstellung eines Halbleiterapparats

Info

Publication number
DE69030643D1
DE69030643D1 DE69030643T DE69030643T DE69030643D1 DE 69030643 D1 DE69030643 D1 DE 69030643D1 DE 69030643 T DE69030643 T DE 69030643T DE 69030643 T DE69030643 T DE 69030643T DE 69030643 D1 DE69030643 D1 DE 69030643D1
Authority
DE
Germany
Prior art keywords
manufacture
resin composition
photosensitive resin
semiconductor apparatus
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69030643T
Other languages
English (en)
Other versions
DE69030643T2 (de
Inventor
Akira Tokoh
Nobuyuki Sashida
Etsu Takeuchi
Takashi Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1309312A external-priority patent/JPH03170554A/ja
Priority claimed from JP1309314A external-priority patent/JPH03170556A/ja
Priority claimed from JP1309311A external-priority patent/JPH03170553A/ja
Priority claimed from JP1309313A external-priority patent/JPH03170555A/ja
Priority claimed from JP2003377A external-priority patent/JPH03210360A/ja
Priority claimed from JP2011944A external-priority patent/JPH03216657A/ja
Priority claimed from JP2250135A external-priority patent/JPH04130323A/ja
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Publication of DE69030643D1 publication Critical patent/DE69030643D1/de
Publication of DE69030643T2 publication Critical patent/DE69030643T2/de
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F283/00—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G
    • C08F283/04—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G on to polycarbonamides, polyesteramides or polyimides
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/42—Block-or graft-polymers containing polysiloxane sequences
    • C08G77/458—Block-or graft-polymers containing polysiloxane sequences containing polyurethane sequences
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
    • C08L83/10—Block- or graft-copolymers containing polysiloxane sequences
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Materials For Photolithography (AREA)
DE69030643T 1989-11-30 1990-11-28 Lichtempfindliche Harzzusammensetzung und ihre Verwendung zur Herstellung eines Halbleiterapparats Expired - Fee Related DE69030643T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP1309313A JPH03170555A (ja) 1989-11-30 1989-11-30 感光性樹脂組成物
JP1309312A JPH03170554A (ja) 1989-11-30 1989-11-30 感光性樹脂組成物
JP1309311A JPH03170553A (ja) 1989-11-30 1989-11-30 感光性樹脂組成物
JP1309314A JPH03170556A (ja) 1989-11-30 1989-11-30 感光性樹脂組成物
JP2003377A JPH03210360A (ja) 1990-01-12 1990-01-12 感光性樹脂組成物
JP2011944A JPH03216657A (ja) 1990-01-23 1990-01-23 感光性樹脂組成物
JP2250135A JPH04130323A (ja) 1990-09-21 1990-09-21 感光性樹脂組成物

Publications (2)

Publication Number Publication Date
DE69030643D1 true DE69030643D1 (de) 1997-06-12
DE69030643T2 DE69030643T2 (de) 1997-09-25

Family

ID=27563226

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69030643T Expired - Fee Related DE69030643T2 (de) 1989-11-30 1990-11-28 Lichtempfindliche Harzzusammensetzung und ihre Verwendung zur Herstellung eines Halbleiterapparats

Country Status (4)

Country Link
US (1) US5385808A (de)
EP (1) EP0430220B1 (de)
KR (1) KR0147307B1 (de)
DE (1) DE69030643T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0622682B1 (de) * 1993-04-28 1998-03-04 Hitachi Chemical Co., Ltd. Photoempfindliche Harzzusammensetzung
EP0624826B1 (de) * 1993-05-14 1997-07-16 OCG Microelectronic Materials Inc. Verfahren zur Herstellung von Reliefstrukturen durch i-Linien-Bestrahlung
US6071667A (en) * 1995-04-13 2000-06-06 Hitachi Chemical Co., Ltd. Photosensitive resin composition containing a photosensitive polyamide resin
JP3170174B2 (ja) * 1995-04-18 2001-05-28 日本ゼオン株式会社 ポリイミド系樹脂組成物
JP3037633B2 (ja) * 1997-04-18 2000-04-24 オクシデンタル ケミカル コーポレイション ポリイミドのパターン作製
CN1324402C (zh) * 2001-10-30 2007-07-04 钟渊化学工业株式会社 感光性树脂组合物、使用该组合物的感光性薄膜及层压体
US7632906B2 (en) * 2003-07-16 2009-12-15 Rolic Ag Polymerizable copolymers for alignment layers
US20090186295A1 (en) * 2006-03-03 2009-07-23 Maw Soe Win Photosensitive Ink Composition for Screen Printing and Method of Forming Positive Relief Pattern with Use Thereof
TWI311142B (en) * 2006-10-18 2009-06-21 Eternal Chemical Co Ltd Amic acid ester oligomer, precursor composition for polyimide resin containing the same, and uses
US9665049B2 (en) * 2015-02-26 2017-05-30 Canon Kabushiki Kaisha Member for electrophotography, method for manufacturing member for electrophotography, and image-forming apparatus
JP7092887B2 (ja) * 2017-12-11 2022-06-28 アイジーエム レシンス イタリア ソチエタ レスポンサビリタ リミタータ ベンゾイル－クマリン重合性光開始剤
KR102437920B1 (ko) 2022-05-17 2022-08-30 주식회사 삼보화성 튜브절단장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559538A (en) * 1978-07-07 1980-01-23 Asahi Chem Ind Co Ltd Heat resistant photoresist composition
US4515887A (en) * 1983-08-29 1985-05-07 General Electric Company Photopatternable dielectric compositions, method for making and use
JPS62179563A (ja) * 1986-01-31 1987-08-06 Hitachi Chem Co Ltd 感光性重合体組成物
JPS62288826A (ja) * 1986-06-09 1987-12-15 Nippon Oil & Fats Co Ltd ドライフイルムフオトレジスト
JPH01105241A (ja) * 1987-07-10 1989-04-21 Hitachi Chem Co Ltd 感光性樹脂組成物
JP2626696B2 (ja) * 1988-04-11 1997-07-02 チッソ株式会社 感光性重合体
JPH03186849A (ja) * 1989-12-18 1991-08-14 Sumitomo Bakelite Co Ltd 感光性樹脂組成物
JPH03186848A (ja) * 1989-12-18 1991-08-14 Sumitomo Bakelite Co Ltd 感光性樹脂組成物

Also Published As

Publication number Publication date
KR0147307B1 (ko) 1998-08-01
US5385808A (en) 1995-01-31
EP0430220A3 (en) 1991-08-21
EP0430220A2 (de) 1991-06-05
DE69030643T2 (de) 1997-09-25
EP0430220B1 (de) 1997-05-07
KR910010245A (ko) 1991-06-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee