DE60333174D1 - Herstellungsverfahren für eine sic-monitor-wafer - Google Patents
Herstellungsverfahren für eine sic-monitor-waferInfo
- Publication number
- DE60333174D1 DE60333174D1 DE60333174T DE60333174T DE60333174D1 DE 60333174 D1 DE60333174 D1 DE 60333174D1 DE 60333174 T DE60333174 T DE 60333174T DE 60333174 T DE60333174 T DE 60333174T DE 60333174 D1 DE60333174 D1 DE 60333174D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- monitor wafer
- sic monitor
- sic
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/931—Silicon carbide semiconductor
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002045725A JP3881562B2 (ja) | 2002-02-22 | 2002-02-22 | SiCモニタウェハ製造方法 |
PCT/JP2003/000175 WO2003071588A1 (en) | 2002-02-22 | 2003-01-10 | Production method of sic monitor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60333174D1 true DE60333174D1 (de) | 2010-08-12 |
Family
ID=27750595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60333174T Expired - Lifetime DE60333174D1 (de) | 2002-02-22 | 2003-01-10 | Herstellungsverfahren für eine sic-monitor-wafer |
Country Status (7)
Country | Link |
---|---|
US (1) | US7022545B2 (de) |
EP (1) | EP1483782B1 (de) |
JP (1) | JP3881562B2 (de) |
KR (1) | KR100857751B1 (de) |
DE (1) | DE60333174D1 (de) |
TW (1) | TW583733B (de) |
WO (1) | WO2003071588A1 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2846788B1 (fr) * | 2002-10-30 | 2005-06-17 | Procede de fabrication de substrats demontables | |
FR2857895B1 (fr) * | 2003-07-23 | 2007-01-26 | Soitec Silicon On Insulator | Procede de preparation de surface epiready sur films minces de sic |
JP3816484B2 (ja) * | 2003-12-15 | 2006-08-30 | 日本航空電子工業株式会社 | ドライエッチング方法 |
US7323111B1 (en) * | 2004-01-30 | 2008-01-29 | Metadigm Llc | Angle control of multi-cavity molded components for MEMS and NEMS group assembly |
JP2008502150A (ja) * | 2004-06-03 | 2008-01-24 | エピオン コーポレーション | 改善された二重ダマシン集積構造およびその製造方法 |
JP4665443B2 (ja) * | 2004-06-22 | 2011-04-06 | 旭硝子株式会社 | ガラス基板の研磨方法 |
US7314520B2 (en) | 2004-10-04 | 2008-01-01 | Cree, Inc. | Low 1c screw dislocation 3 inch silicon carbide wafer |
US7514725B2 (en) * | 2004-11-30 | 2009-04-07 | Spire Corporation | Nanophotovoltaic devices |
US7405152B2 (en) | 2005-01-31 | 2008-07-29 | International Business Machines Corporation | Reducing wire erosion during damascene processing |
DE102005024073A1 (de) * | 2005-05-25 | 2006-11-30 | Siltronic Ag | Halbleiter-Schichtstruktur und Verfahren zur Herstellung einer Halbleiter-Schichtstruktur |
US7709344B2 (en) | 2005-11-22 | 2010-05-04 | International Business Machines Corporation | Integrated circuit fabrication process using gas cluster ion beam etching |
EP1988854A2 (de) * | 2006-02-15 | 2008-11-12 | M. S. Abdou | Vorrichtungen und verfahren zur positionierung orthopädischer bandscheibenvorrichtungen |
KR100795363B1 (ko) | 2006-11-24 | 2008-01-17 | 삼성전자주식회사 | 반도체 소자의 도전성 배선 및 이의 형성방법과 이를구비하는 플래시 메모리 장치 및 이의 제조 방법 |
EP2172967A1 (de) | 2008-08-04 | 2010-04-07 | Siltronic AG | Verfahren zur Herstellung von Siliciumcarbid |
US8226835B2 (en) * | 2009-03-06 | 2012-07-24 | Tel Epion Inc. | Ultra-thin film formation using gas cluster ion beam processing |
JP5236687B2 (ja) * | 2010-05-26 | 2013-07-17 | 兵庫県 | 表面処理方法及び表面処理装置 |
US8193094B2 (en) | 2010-06-21 | 2012-06-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Post CMP planarization by cluster ION beam etch |
JP4956649B2 (ja) * | 2010-07-06 | 2012-06-20 | 三井造船株式会社 | 炭化珪素基板、半導体装置およびsoiウエハ |
DE112012002299T5 (de) | 2011-06-02 | 2014-05-15 | Sumitomo Electric Industries, Ltd. | Verfahren zum Herstellen eines Siliziumkarbidsubstrates |
KR101926687B1 (ko) * | 2011-10-24 | 2018-12-07 | 엘지이노텍 주식회사 | 에피 웨이퍼 제조 장치, 에피 웨이퍼 제조 방법 및 에피 웨이퍼 |
KR101158343B1 (ko) | 2011-12-29 | 2012-06-22 | 주식회사 티씨케이 | 실리콘 카바이드 구조물 및 그 제조방법 |
US8860040B2 (en) | 2012-09-11 | 2014-10-14 | Dow Corning Corporation | High voltage power semiconductor devices on SiC |
US9018639B2 (en) | 2012-10-26 | 2015-04-28 | Dow Corning Corporation | Flat SiC semiconductor substrate |
US9738991B2 (en) | 2013-02-05 | 2017-08-22 | Dow Corning Corporation | Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a supporting shelf which permits thermal expansion |
US9797064B2 (en) | 2013-02-05 | 2017-10-24 | Dow Corning Corporation | Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a support shelf which permits thermal expansion |
US9240357B2 (en) | 2013-04-25 | 2016-01-19 | Samsung Electronics Co., Ltd. | Method of fabricating semiconductor device having preliminary stacked structure with offset oxide etched using gas cluster ion |
US20150361585A1 (en) * | 2013-06-04 | 2015-12-17 | Nippon Steel & Sumitomo Metal Corporation | Method for manufacturing sic single-crystal substrate for epitaxial sic wafer, and sic single-crystal substrate for epitaxial sic wafer |
CN104779135A (zh) * | 2014-01-10 | 2015-07-15 | 上海华虹宏力半导体制造有限公司 | 在批量式多晶硅沉积制程中消除控片影响的方法 |
WO2016006663A1 (ja) * | 2014-07-10 | 2016-01-14 | 株式会社豊田自動織機 | 半導体基板および半導体基板の製造方法 |
US9279192B2 (en) | 2014-07-29 | 2016-03-08 | Dow Corning Corporation | Method for manufacturing SiC wafer fit for integration with power device manufacturing technology |
JP6444249B2 (ja) * | 2015-04-15 | 2018-12-26 | 株式会社ディスコ | ウエーハの生成方法 |
US10654150B2 (en) | 2017-12-26 | 2020-05-19 | Industrial Technology Research Institute | Grinding disk and method of manufacturing the same |
JP7220844B2 (ja) * | 2018-11-30 | 2023-02-13 | 住友金属鉱山株式会社 | SiC多結晶基板の製造方法 |
JP7234703B2 (ja) * | 2019-03-11 | 2023-03-08 | 住友金属鉱山株式会社 | 炭化ケイ素多結晶基板の製造方法、及び、炭化ケイ素多結晶基板の製造装置 |
JP7385459B2 (ja) * | 2019-12-19 | 2023-11-22 | イビデン株式会社 | 非酸化物系気相成長セラミック材料の形成用の型、非酸化物系気相成長セラミック材料、及び、非酸化物系気相成長セラミック材料の形成用の型の製造方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1147806A (zh) * | 1995-03-01 | 1997-04-16 | 圣戈本/诺顿工业搪瓷有限公司 | 新颖的碳化硅仿真晶片 |
US6534380B1 (en) * | 1997-07-18 | 2003-03-18 | Denso Corporation | Semiconductor substrate and method of manufacturing the same |
JPH1187202A (ja) * | 1997-09-09 | 1999-03-30 | Mitsui Eng & Shipbuild Co Ltd | 炭化ケイ素モニタウエハ |
JP3525038B2 (ja) * | 1997-09-09 | 2004-05-10 | 三井造船株式会社 | SiCダミーウェハ |
JPH11121311A (ja) * | 1997-10-13 | 1999-04-30 | Mitsui Eng & Shipbuild Co Ltd | 炭化ケイ素材およびその製造方法並びに炭化ケイ素ウエハ |
JPH11121312A (ja) * | 1997-10-13 | 1999-04-30 | Mitsui Eng & Shipbuild Co Ltd | 炭化ケイ素ウエハ |
JP4531870B2 (ja) * | 1997-10-14 | 2010-08-25 | 三井造船株式会社 | 多層炭化ケイ素ウエハ |
JP3733762B2 (ja) * | 1997-11-07 | 2006-01-11 | 旭硝子株式会社 | ダミーウエハ及びその製造法 |
JPH11199323A (ja) * | 1998-01-14 | 1999-07-27 | Tokai Carbon Co Ltd | ダミーウエハ |
JP4275767B2 (ja) * | 1998-05-28 | 2009-06-10 | 東洋炭素株式会社 | 炭化ケイ素質ダミーウェハの製造方法 |
JP3857446B2 (ja) * | 1998-12-01 | 2006-12-13 | 東海カーボン株式会社 | SiC成形体 |
JP2000178751A (ja) * | 1998-12-16 | 2000-06-27 | Ngk Insulators Ltd | 炭化珪素体の製造方法 |
JP2000243706A (ja) * | 1999-02-22 | 2000-09-08 | Asahi Glass Co Ltd | Cvd膜の形成方法およびダミーウエハ |
US6375790B1 (en) * | 1999-07-19 | 2002-04-23 | Epion Corporation | Adaptive GCIB for smoothing surfaces |
US6614576B2 (en) * | 2000-12-15 | 2003-09-02 | Texas Instruments Incorporated | Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices |
JP2002237008A (ja) * | 2001-02-08 | 2002-08-23 | Hitachi Ltd | 薄膜磁気ヘッド |
ATE504082T1 (de) * | 2003-05-27 | 2011-04-15 | Soitec Silicon On Insulator | Verfahren zur herstellung einer heteroepitaktischen mikrostruktur |
FR2857895B1 (fr) * | 2003-07-23 | 2007-01-26 | Soitec Silicon On Insulator | Procede de preparation de surface epiready sur films minces de sic |
-
2002
- 2002-02-22 JP JP2002045725A patent/JP3881562B2/ja not_active Expired - Fee Related
-
2003
- 2003-01-10 WO PCT/JP2003/000175 patent/WO2003071588A1/en active Application Filing
- 2003-01-10 DE DE60333174T patent/DE60333174D1/de not_active Expired - Lifetime
- 2003-01-10 US US10/502,537 patent/US7022545B2/en not_active Expired - Lifetime
- 2003-01-10 EP EP03700537A patent/EP1483782B1/de not_active Expired - Fee Related
- 2003-01-10 KR KR1020047012919A patent/KR100857751B1/ko not_active IP Right Cessation
- 2003-01-14 TW TW092100674A patent/TW583733B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20050042800A1 (en) | 2005-02-24 |
US7022545B2 (en) | 2006-04-04 |
WO2003071588A1 (en) | 2003-08-28 |
KR20040080004A (ko) | 2004-09-16 |
EP1483782A1 (de) | 2004-12-08 |
JP2003249426A (ja) | 2003-09-05 |
TW200303580A (en) | 2003-09-01 |
TW583733B (en) | 2004-04-11 |
KR100857751B1 (ko) | 2008-09-09 |
EP1483782B1 (de) | 2010-06-30 |
JP3881562B2 (ja) | 2007-02-14 |
EP1483782A4 (de) | 2008-05-21 |
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