DE60230989D1 - Dehnungsmessvorrichtung mit temperaturabgleich - Google Patents

Dehnungsmessvorrichtung mit temperaturabgleich

Info

Publication number
DE60230989D1
DE60230989D1 DE60230989T DE60230989T DE60230989D1 DE 60230989 D1 DE60230989 D1 DE 60230989D1 DE 60230989 T DE60230989 T DE 60230989T DE 60230989 T DE60230989 T DE 60230989T DE 60230989 D1 DE60230989 D1 DE 60230989D1
Authority
DE
Germany
Prior art keywords
strain
gauge
temperature
strain gauge
temperature compensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60230989T
Other languages
English (en)
Inventor
John David Barnett
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of DE60230989D1 publication Critical patent/DE60230989D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/02Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation
    • G01D3/022Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation having an ideal characteristic, map or correction data stored in a digital memory
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/036Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225Measuring circuits therefor
    • G01L1/2256Measuring circuits therefor involving digital counting
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281Arrangements for correcting or for compensating unwanted effects for temperature variations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G01L9/045Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Technology Law (AREA)
  • Measurement Of Force In General (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Fire-Detection Mechanisms (AREA)
  • Details Of Flowmeters (AREA)
DE60230989T 2001-07-13 2002-05-21 Dehnungsmessvorrichtung mit temperaturabgleich Expired - Lifetime DE60230989D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0117085A GB2369889B (en) 2001-07-13 2001-07-13 Strain sensing installation
PCT/GB2002/002378 WO2003006943A1 (en) 2001-07-13 2002-05-21 Temperature compensated strain sensing apparatus

Publications (1)

Publication Number Publication Date
DE60230989D1 true DE60230989D1 (de) 2009-03-12

Family

ID=9918417

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60230989T Expired - Lifetime DE60230989D1 (de) 2001-07-13 2002-05-21 Dehnungsmessvorrichtung mit temperaturabgleich

Country Status (6)

Country Link
US (1) US6973837B2 (de)
EP (1) EP1407239B1 (de)
AT (1) ATE421682T1 (de)
DE (1) DE60230989D1 (de)
GB (1) GB2369889B (de)
WO (1) WO2003006943A1 (de)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6962088B2 (en) * 2002-09-17 2005-11-08 Harmonic Drive Systems Inc. Torque detection device for wave gearing
DE10341482B4 (de) * 2003-09-05 2005-07-21 Sartorius Hamburg Gmbh Gehäuselose Wägezelle
US6939036B2 (en) * 2003-11-04 2005-09-06 Certainteed Corporation Temperature-expansion indicator for siding panels
US7495542B2 (en) * 2004-08-12 2009-02-24 Kelk Ltd. Film temperature sensor and temperature sensing substrate
DE102004054644A1 (de) * 2004-11-11 2006-05-18 Endress + Hauser Gmbh + Co. Kg Vorrichtung und Verfahren zum Kompensieren von Messwertaufnehmern
DE102005017853A1 (de) * 2005-04-18 2006-10-19 Siemens Ag Drucksensorvorrichtung
US20060288795A1 (en) * 2005-06-27 2006-12-28 Vishay Measurements Group, Inc. Strain gage with off axis creep compensation feature
DE102005051848B4 (de) * 2005-10-28 2008-08-21 Infineon Technologies Ag Schaltungsanordnung zur temperaturdriftkompensierten Strommessung
US7647837B2 (en) * 2007-08-29 2010-01-19 Honeywell International Inc. Active temperature differential compensation for strain gage based sensors
WO2009108230A1 (en) * 2007-12-13 2009-09-03 The Timken Company Sensor module with stress isolated temperature compensation and method of manufacture
US8563336B2 (en) 2008-12-23 2013-10-22 International Business Machines Corporation Method for forming thin film resistor and terminal bond pad simultaneously
JP5507323B2 (ja) * 2010-04-23 2014-05-28 本田技研工業株式会社 力覚センサの温度補償方法および力覚センサ
DE102010023033A1 (de) * 2010-06-08 2011-12-08 Siemens Aktiengesellschaft Medizinischer Tisch mit einem Liegenbrett
JP5752852B2 (ja) * 2011-06-07 2015-07-22 ジャワハルラール ネール センター フォー アドバンスド サイエンティフィク リサーチ 金属および炭素母材からの歪み感知センサーおよび/または歪みに強いコンジットの製造
EP2554962A1 (de) * 2011-08-01 2013-02-06 Honeywell Romania S.R.L. Drahtlose SAW-Differentialdehnungsmesser
CN102661752B (zh) * 2012-04-25 2015-06-10 中航电测仪器股份有限公司 一种箔式应变计的制造方法
DE112013002288T5 (de) 2012-05-03 2015-04-16 Apple Inc. Momentkompensierter Biegebalkensensor zur Lastmessung auf einer Biegebalken-gestützten Plattform
BE1020791A3 (fr) * 2012-07-13 2014-05-06 Ct Rech Metallurgiques Asbl Procede et dispositif de mesure des niveaux de fonte et de laitier dans un haut-fourneau.
WO2014149023A1 (en) 2013-03-15 2014-09-25 Rinand Solutions Llc Force sensing of inputs through strain analysis
CN110134283B (zh) 2013-10-28 2022-10-11 苹果公司 基于压电的力感测
WO2015102613A1 (en) 2013-12-31 2015-07-09 Halliburton Energy Services, Inc. Method for multiplexing wheatstone bridge measurements
AU2015100011B4 (en) 2014-01-13 2015-07-16 Apple Inc. Temperature compensating transparent force sensor
DE102014206759A1 (de) * 2014-04-08 2015-10-08 Schaeffler Technologies AG & Co. KG Messelement und ein Messelement aufweisendes Bauteil
US20150296607A1 (en) * 2014-04-11 2015-10-15 Apple Inc. Electronic Device With Flexible Printed Circuit Strain Gauge Sensor
US20150296622A1 (en) * 2014-04-11 2015-10-15 Apple Inc. Flexible Printed Circuit With Semiconductor Strain Gauge
CN104165712B (zh) * 2014-08-09 2016-11-02 大连理工大学 一种用于铁路钢轨应力测量的补偿块安装装置
US20160349122A1 (en) * 2015-05-26 2016-12-01 Sikorsky Aircraft Corporation Applications of multi-grid strain gages
US9612170B2 (en) 2015-07-21 2017-04-04 Apple Inc. Transparent strain sensors in an electronic device
US10101145B2 (en) * 2016-01-19 2018-10-16 Rosemount Aerospace Inc. Passive temperature error compensation for strain gauge pressure sensors
US10209830B2 (en) * 2016-03-31 2019-02-19 Apple Inc. Electronic device having direction-dependent strain elements
US10133418B2 (en) 2016-09-07 2018-11-20 Apple Inc. Force sensing in an electronic device using a single layer of strain-sensitive structures
GB2558896B (en) * 2017-01-17 2019-10-09 Cambridge Entpr Ltd A single membane flow-pressure sensing device
US10444091B2 (en) 2017-04-11 2019-10-15 Apple Inc. Row column architecture for strain sensing
EP3392633B1 (de) * 2017-04-19 2019-12-11 Huba Control Ag Drucksensor
US10309846B2 (en) 2017-07-24 2019-06-04 Apple Inc. Magnetic field cancellation for strain sensors
US10557770B2 (en) * 2017-09-14 2020-02-11 Sensata Technologies, Inc. Pressure sensor with improved strain gauge
JP6950427B2 (ja) * 2017-10-03 2021-10-13 株式会社デンソー 位置検出装置
IT201800005299A1 (it) 2018-05-11 2019-11-11 Componente di bicicletta dotato di sensore di sforzi/deformazioni compensato in temperatura
IT201800005302A1 (it) 2018-05-11 2019-11-11 Pedivella di bicicletta dal lato trasmissione, dotata di rilevatore di sforzi/deformazioni per un misuratore di coppia o di potenza, nonche' metodi correlati
IT201800005294A1 (it) 2018-05-11 2019-11-11 Componente di bicicletta in materiale composito e relativo processo di fabbricazione
TWI804619B (zh) 2018-05-11 2023-06-11 義大利商坎帕克諾羅公司 設有電氣/電子系統的自行車曲柄臂
IT201800005297A1 (it) 2018-05-11 2019-11-11 Pedivella di bicicletta e relativa guarnitura
DE102018117594A1 (de) * 2018-07-20 2020-01-23 Ifm Electronic Gmbh Druckmesszelle mit Temperatursensor und Druckmessgerät mit einer solchen Druckmesszelle
US10782818B2 (en) 2018-08-29 2020-09-22 Apple Inc. Load cell array for detection of force input to an electronic device enclosure
US11638353B2 (en) * 2018-09-17 2023-04-25 Hutchinson Technology Incorporated Apparatus and method for forming sensors with integrated electrical circuits on a substrate
JP2020085627A (ja) * 2018-11-22 2020-06-04 アズビル株式会社 圧力センサ
US11598686B2 (en) 2019-10-31 2023-03-07 DJ Instruments Temperature compensation of strain gauge output
JP7164837B2 (ja) * 2020-02-21 2022-11-02 Tdk株式会社 圧力センサ
US11585204B2 (en) 2020-05-26 2023-02-21 Heath Poulson Crowding avoidance apparatus and method
CN114062135B (zh) * 2021-11-16 2024-03-26 武汉工程大学 高温三轴试验机岩石应变数据修正方法
CN114414123B (zh) * 2022-01-24 2023-08-25 上海交通大学 一种异形金属基底上的应变传感器芯片及其原位制备方法
KR20230137635A (ko) * 2022-03-22 2023-10-05 동우 화인켐 주식회사 온도 및 압력 측정용 복합 센서
US11714015B1 (en) 2022-03-29 2023-08-01 Rosemount Aerospace Inc. Method for thermoelectric effect error correction
WO2023247837A1 (fr) * 2022-06-23 2023-12-28 Scaime Capteur a jauges de deformation

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2344642A (en) * 1939-09-16 1944-03-21 Arthur C Ruge Temperature compensated strain gauge
GB1097761A (en) * 1963-11-14 1968-01-03 British Aircraft Corp Ltd Improvements relating to strain gauges
US3665756A (en) * 1965-10-18 1972-05-30 Microdot Inc Strain gauge temperature compensation system
US3621436A (en) * 1969-04-14 1971-11-16 Blh Electronics Strain gage with built-in dummy gage
US4287772A (en) * 1978-05-18 1981-09-08 Gulton Industries, Inc. Strain gage transducer and process for fabricating same
US4299130A (en) * 1979-10-22 1981-11-10 Gould Inc. Thin film strain gage apparatus with unstrained temperature compensation resistances
EP0053337B1 (de) * 1980-11-29 1987-05-20 Tokyo Electric Co., Ltd. Lastmessvorrichtung und ihr Herstellungsverfahren
US4430895A (en) * 1982-02-02 1984-02-14 Rockwell International Corporation Piezoresistive accelerometer
US4462018A (en) * 1982-11-05 1984-07-24 Gulton Industries, Inc. Semiconductor strain gauge with integral compensation resistors
US4448078A (en) * 1982-11-23 1984-05-15 The United States Of America As Represented By The Secretary Of The Air Force Three-wire static strain gage apparatus
JPS62213280A (ja) * 1986-03-14 1987-09-19 Nissan Motor Co Ltd 半導体加速度センサ
JPS6381867A (ja) * 1986-09-25 1988-04-12 Yokogawa Electric Corp 半導体拡散ストレンゲ−ジ
JPH07113647B2 (ja) * 1988-09-02 1995-12-06 日産自動車株式会社 半導体加速度センサ
DE68911630T2 (de) * 1988-09-12 1994-06-01 Toyota Chuo Kenkyusho Aichi Kk Dünnschichtwiderstand für Dehnungsmesser.
US5294910A (en) * 1991-07-01 1994-03-15 Murata Manufacturing Co., Ltd. Platinum temperature sensor
US5375474A (en) * 1992-08-12 1994-12-27 The United States Of America As Represented By The United States National Aeronautics And Space Administration Compensated high temperature strain gage
US6301775B1 (en) * 1998-12-17 2001-10-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Alumina encapsulated strain gage, not mechanically attached to the substrate, used to temperature compensate an active high temperature gage in a half-bridge configuration
CA2395898C (en) * 2001-08-10 2006-11-21 Leslie Dale Hiebert Non-intrusive locating of a blockage in a pipeline

Also Published As

Publication number Publication date
WO2003006943A1 (en) 2003-01-23
EP1407239B1 (de) 2009-01-21
EP1407239A1 (de) 2004-04-14
US6973837B2 (en) 2005-12-13
GB2369889B (en) 2004-06-09
GB0117085D0 (en) 2001-09-05
GB2369889A (en) 2002-06-12
ATE421682T1 (de) 2009-02-15
US20040159161A1 (en) 2004-08-19

Similar Documents

Publication Publication Date Title
DE60230989D1 (de) Dehnungsmessvorrichtung mit temperaturabgleich
ATE256865T1 (de) Absolutmessung von eigenschaften mit luftkalibrierung
FR2847982B1 (fr) Dispositif et procedes pour la mesure de la pression de pertes de chaleur
NO20006311D0 (no) Innretning og fremgangsmåte for å benytte anordninger, især fiberoptiske anordninger, i barske omgivelser
ATE208036T1 (de) Genaue hochgeschwindigkeitstemperaturmessvorrichtung
ATE284188T1 (de) Vorrichtung zum feststellen des angewandten druckes einer kompressionsorthese
ATE326902T1 (de) Fingerabdruck- fühler
TW200724881A (en) Circuit board monitoring system
DE69634201D1 (de) Dampfdrucksensor und verfahren
DE60215962D1 (de) Flexible Konstruktion mit integriertem Sensor/stellglied
ATE506607T1 (de) Verfahren zur bestimmung einer oberflächenkontaktkraft
MY134681A (en) Method and system to measure characteristics of a film disposed on a substrate
EP3367087A3 (de) Sensor zur bestimmung der wärmekapazität von flüssigkeiten
ATE326688T1 (de) Dehnungsmesser
DE60317501D1 (de) Einstellbares, selbst-korrigierendes bahnfaltungssystem
ATE501424T1 (de) Differenzdrucksensor
ATE349000T1 (de) Wägezellenmodul
DE50006646D1 (de) Temperaturkompensierter Tetraeder Prüfkörper
ATE298091T1 (de) Mess-sonde
FI129899B (fi) Rakennemittauslaite
WO2005006397A3 (en) System and method for load sensing using piezoelectric effect
ATE249639T1 (de) Anordnung zur temperaturmessung und -regelung
ES2165164T3 (es) Manometro de capas multiples.
ATE372508T1 (de) Druckaufnehmer mit bezüglich mechanischer spannungen isolierter trägerplatte
JPS6416941A (en) Method for detecting latent stress of structure

Legal Events

Date Code Title Description
8364 No opposition during term of opposition