DE60215962D1 - Flexible Konstruktion mit integriertem Sensor/stellglied - Google Patents

Flexible Konstruktion mit integriertem Sensor/stellglied

Info

Publication number
DE60215962D1
DE60215962D1 DE60215962T DE60215962T DE60215962D1 DE 60215962 D1 DE60215962 D1 DE 60215962D1 DE 60215962 T DE60215962 T DE 60215962T DE 60215962 T DE60215962 T DE 60215962T DE 60215962 D1 DE60215962 D1 DE 60215962D1
Authority
DE
Germany
Prior art keywords
silicon
polymer
actuator
integrated sensor
flexible construction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60215962T
Other languages
English (en)
Other versions
DE60215962T2 (de
Inventor
Jacob Thaysen
Ole Hansen
Aric Menon
Anja Boisen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Danmarks Tekniskie Universitet
Original Assignee
Danmarks Tekniskie Universitet
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Danmarks Tekniskie Universitet filed Critical Danmarks Tekniskie Universitet
Application granted granted Critical
Publication of DE60215962D1 publication Critical patent/DE60215962D1/de
Publication of DE60215962T2 publication Critical patent/DE60215962T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Pressure Sensors (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Geophysics And Detection Of Objects (AREA)
DE60215962T 2001-09-07 2002-09-06 Flexible Konstruktion mit integriertem Sensor/stellglied Expired - Lifetime DE60215962T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US31748801P 2001-09-07 2001-09-07
US317488P 2001-09-07
US10/006,582 US20030062193A1 (en) 2001-09-07 2001-12-10 Flexible structure with integrated sensor/actuator
US6582 2001-12-10
PCT/DK2002/000582 WO2003022731A1 (en) 2001-09-07 2002-09-06 Flexible structure with integrated sensor/actuator

Publications (2)

Publication Number Publication Date
DE60215962D1 true DE60215962D1 (de) 2006-12-21
DE60215962T2 DE60215962T2 (de) 2007-09-13

Family

ID=26675817

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60215962T Expired - Lifetime DE60215962T2 (de) 2001-09-07 2002-09-06 Flexible Konstruktion mit integriertem Sensor/stellglied

Country Status (6)

Country Link
US (2) US20030062193A1 (de)
EP (1) EP1429992B1 (de)
AT (1) ATE344783T1 (de)
DE (1) DE60215962T2 (de)
DK (1) DK1429992T3 (de)
WO (1) WO2003022731A1 (de)

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US7552645B2 (en) * 2003-05-07 2009-06-30 California Institute Of Technology Detection of resonator motion using piezoresistive signal downmixing
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WO2008091294A2 (en) 2006-07-28 2008-07-31 California Institute Of Technology Polymer nems for cell physiology and microfabricated cell positioning system for micro-biocalorimeter
US7709264B2 (en) * 2006-09-21 2010-05-04 Philip Morris Usa Inc. Handheld microcantilever-based sensor for detecting tobacco-specific nitrosamines
DE102007031128A1 (de) * 2007-06-29 2009-01-02 IHP GmbH - Innovations for High Performance Microelectronics/Institut für innovative Mikroelektronik MEMS-Mikroviskosimeter und Verfahren zu seiner Herstellung
GB0716202D0 (en) 2007-08-11 2007-09-26 Microvisk Ltd Improved fluid probe
US8476005B2 (en) * 2008-02-05 2013-07-02 California Institute Of Technology Microfluidic embedded polymer NEMS force sensors
KR101096533B1 (ko) 2010-02-19 2011-12-20 전남대학교산학협력단 생체용 무선 유량센서 구조물 및 유량센서 제조방법
JP2011242386A (ja) * 2010-04-23 2011-12-01 Immersion Corp 接触センサと触覚アクチュエータとの透明複合圧電材結合体
US8394625B2 (en) * 2010-05-02 2013-03-12 Angelo Gaitas Lab-on-a-pipette
CN102249181A (zh) * 2011-03-28 2011-11-23 大连理工大学 一种su-8胶微力传感器的制作方法
US8857275B2 (en) 2011-05-02 2014-10-14 California Institute Of Technology NEMS sensors for cell force application and measurement
RU2481669C2 (ru) * 2011-08-02 2013-05-10 Федеральное государственное унитарное предприятие "Научно-производственное объединение им. С.А. Лавочкина" Наклеиваемый полупроводниковый тензорезистор
ITMI20112296A1 (it) 2011-12-16 2013-06-17 St Microelectronics Srl Dispositivo elettronico flessibile incapsulato e relativo metodo di fabbricazione
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US20150122531A1 (en) * 2013-11-01 2015-05-07 Carestream Health, Inc. Strain gauge
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CN105974104B (zh) * 2016-05-12 2017-12-15 南京信息工程大学 基于巨压阻结构的悬臂梁生化传感器及悬臂梁制作方法
CN107478148B (zh) * 2017-07-13 2020-03-17 中国科学院深圳先进技术研究院 一种柔性可穿戴式电子应变传感器及其制备方法
WO2019059326A1 (ja) * 2017-09-20 2019-03-28 旭化成株式会社 表面応力センサ、中空構造素子及びそれらの製造方法
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DE102021107255B4 (de) 2021-03-23 2024-06-27 digid GmbH Digitaler Sensor mit Referenzkantilever zur Umwandlung chemischer und/oder biochemischer Information
DE102021107254B4 (de) 2021-03-23 2024-06-27 digid GmbH Digitale Sensorvorrichtung zur Detektion eines Analyten in einer Probe
CN113520617B (zh) * 2021-07-21 2023-10-20 天津大学 一种无源式三维力传感测头及光学式力传感器
CN115178313A (zh) * 2022-08-05 2022-10-14 天津工业大学 一种用于生化分子检测的中空微纳复合梁的设计方法
DE102022121185B3 (de) 2022-08-22 2024-01-18 digid GmbH Vorrichtung zur Detektion mindestens eines Analyten in einer Probe
DE102022005110B4 (de) 2022-08-22 2024-06-27 digid GmbH Digitale Sensorvorrichtung zur Detektion von Analyten in einer Probe
DE102022121187B3 (de) 2022-08-22 2024-01-18 digid GmbH Digitale Sensorvorrichtung zur Detektion von Analyten in einer Probe

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Also Published As

Publication number Publication date
DE60215962T2 (de) 2007-09-13
EP1429992A1 (de) 2004-06-23
WO2003022731A1 (en) 2003-03-20
US20030089182A1 (en) 2003-05-15
ATE344783T1 (de) 2006-11-15
DK1429992T3 (da) 2007-03-19
EP1429992B1 (de) 2006-11-08
US20030062193A1 (en) 2003-04-03

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Legal Events

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