DE69634201D1 - Dampfdrucksensor und verfahren - Google Patents

Dampfdrucksensor und verfahren

Info

Publication number
DE69634201D1
DE69634201D1 DE69634201T DE69634201T DE69634201D1 DE 69634201 D1 DE69634201 D1 DE 69634201D1 DE 69634201 T DE69634201 T DE 69634201T DE 69634201 T DE69634201 T DE 69634201T DE 69634201 D1 DE69634201 D1 DE 69634201D1
Authority
DE
Germany
Prior art keywords
vapor
coating
hole
pressure sensor
vapor adsorbing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69634201T
Other languages
English (en)
Other versions
DE69634201T2 (de
Inventor
Ralph L Fenner
Robert C Quinn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE69634201D1 publication Critical patent/DE69634201D1/de
Application granted granted Critical
Publication of DE69634201T2 publication Critical patent/DE69634201T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00—Investigating materials by mechanical methods
    • G01N19/10—Measuring moisture content, e.g. by measuring change in length of hygroscopic filament; Hygrometers

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Examining Or Testing Airtightness (AREA)
DE69634201T 1995-06-07 1996-06-03 Dampfdrucksensor und verfahren Expired - Fee Related DE69634201T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/474,241 US5563341A (en) 1995-06-07 1995-06-07 Vapor pressure sensor and method
US474241 1995-06-07
PCT/US1996/008716 WO1996041147A1 (en) 1995-06-07 1996-06-03 Vapor pressure sensor and method

Publications (2)

Publication Number Publication Date
DE69634201D1 true DE69634201D1 (de) 2005-02-24
DE69634201T2 DE69634201T2 (de) 2006-01-05

Family

ID=23882741

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69634201T Expired - Fee Related DE69634201T2 (de) 1995-06-07 1996-06-03 Dampfdrucksensor und verfahren

Country Status (7)

Country Link
US (1) US5563341A (de)
EP (1) EP0832424B1 (de)
JP (1) JPH11506835A (de)
AT (1) ATE287531T1 (de)
AU (1) AU5978996A (de)
DE (1) DE69634201T2 (de)
WO (1) WO1996041147A1 (de)

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US5804721A (en) * 1997-02-14 1998-09-08 Yankielun; Norbert E. Capacitor for water leak detection in roofing structures
US6016686A (en) * 1998-03-16 2000-01-25 Lockheed Martin Energy Research Corporation Micromechanical potentiometric sensors
US6126311A (en) * 1998-11-02 2000-10-03 Claud S. Gordon Company Dew point sensor using mems
US6338369B1 (en) 1998-11-09 2002-01-15 Marconi Commerce Systems Inc. Hydrocarbon vapor sensing
DE19853732C1 (de) * 1998-11-23 2000-07-06 Univ Dresden Tech Sensor zur Messung der Konzentration eines oder mehrerer Gase bzw. der Luftfeuchte
AU4164700A (en) * 1998-12-28 2000-07-31 Raytheon Company Sensor for detecting small concentrations of a target matter
WO2001014823A1 (en) * 1999-08-19 2001-03-01 The Regents Of The University Of California Apparatus and method for visually identifying micro-forces with a palette of cantilever array blocks
US6622757B2 (en) 1999-11-30 2003-09-23 Veeder-Root Company Fueling system vapor recovery and containment performance monitor and method of operation thereof
US6901786B2 (en) * 1999-11-30 2005-06-07 Veeder-Root Company Fueling system vapor recovery and containment leak detection system and method
US6881585B1 (en) * 2000-03-06 2005-04-19 General Electric Company Method and apparatus for rapid screening of volatiles
GB2369436A (en) * 2000-07-28 2002-05-29 Marconi Applied Techn Ltd Chemical sensing micro-mechanical cantilever
US6357493B1 (en) 2000-10-23 2002-03-19 Marconi Commerce Systems Inc. Vapor recovery system for a fuel dispenser
US6347649B1 (en) 2000-11-16 2002-02-19 Marconi Commerce Systems Inc. Pressure sensor for a vapor recovery system
KR100393188B1 (ko) * 2000-12-29 2003-07-31 삼성전자주식회사 다초점 렌즈를 이용한 위상공액 홀로그래픽 정보 저장장치 및 정보 저장 방법
DE10129987C2 (de) * 2001-06-12 2003-06-12 Univ Dresden Tech Sensor zur Messung der Anwesenheit und Konzentration von Komponenten in einer Flüssigkeit
DE10129986C2 (de) * 2001-06-12 2003-06-12 Univ Dresden Tech Sensor zur Messung der Anwesenheit und der Konzentration von Komponenten in einer Flüssigkeit
DE10129985C2 (de) * 2001-06-12 2003-06-12 Univ Dresden Tech Sensor zur Messung der Anwesenheit und der Konzentration von Komponenten in einer Flüssigkeit
US6908561B1 (en) * 2001-11-06 2005-06-21 Lockhead Martin Corporation Polymide-to-substrate adhesion promotion in HDI
US6866819B1 (en) * 2001-11-13 2005-03-15 Raytheon Company Sensor for detecting small concentrations of a target matter
US6671631B2 (en) 2002-01-04 2003-12-30 General Electric Company Systems and methods for analyzing viscoelastic properties of combinatorial libraries of materials
US20030154149A1 (en) * 2002-02-13 2003-08-14 Dilip Gajendragadkar System and method of creating and executing a restricted stock sale plan
DE60316729T2 (de) * 2002-12-27 2008-07-24 Nanonord A/S Kragträgersensor sowohl mit longitudinal- als auch transversal-piezoresistenzkoeffizienten
ATE468421T1 (de) * 2003-06-27 2010-06-15 Sundew Technologies Llc Vorrichtung und verfahren zur steuerung des dampfdrucks einer chemikalienquelle
DE10352257B4 (de) * 2003-11-08 2006-02-23 Danfoss A/S Taupunktfühler
US7551058B1 (en) 2003-12-10 2009-06-23 Advanced Design Consulting Usa, Inc. Sensor for monitoring environmental parameters in concrete
US7373819B2 (en) * 2005-09-30 2008-05-20 Honeywell International Inc. Stress sensitive humidity sensor based on a MEMS structure
CN100586253C (zh) * 2005-11-09 2010-01-27 皇家飞利浦电子股份有限公司 包装、包装载体及其制造方法、诊断设备及其制造方法
TWI279536B (en) * 2006-02-24 2007-04-21 Ind Tech Res Inst Cantilever resistive humidity detection structure and method for manufacturing the same
US7909069B2 (en) 2006-05-04 2011-03-22 Veeder-Root Company System and method for automatically adjusting an ORVR compatible stage II vapor recovery system to maintain a desired air-to-liquid (A/L) ratio
DE102006026668B4 (de) * 2006-06-08 2008-07-10 Technische Universität Dresden Sensor und Verfahren zur Messung der Konzentration von Komponenten in einer Flüssigkeit
TWI319479B (en) * 2006-10-18 2010-01-11 Ind Tech Res Inst A resistive-type humidity sensing structure with micro-bridge format and a method therefor
EP2222948B1 (de) * 2007-11-19 2014-06-11 Robert Bosch GmbH Drucksensor für brennstoffflüssigkeit und -dampf
JP5008201B2 (ja) * 2008-05-21 2012-08-22 三智商事株式会社 無線ｉｃタグ
US8514060B2 (en) 2008-05-21 2013-08-20 Mitomo Corporation Wireless identification tag
US8402817B2 (en) * 2008-05-28 2013-03-26 Franklin Fueling Systems, Inc. Method and apparatus for monitoring for leaks in a stage II fuel vapor recovery system
RU2010147889A (ru) 2008-05-28 2012-07-10 Франклин Фьюэлинг Системс, Инк. (US) Способ и устройство для проверки на наличие засорений в системе управления паров топлива stage ii
KR101094870B1 (ko) * 2008-12-17 2011-12-15 한국전자통신연구원 습도 센서 및 이의 제조 방법
CN102292625B (zh) 2009-05-18 2015-03-25 富兰克林加油***公司 用于检测燃料输送***中的泄漏的方法和设备
US9103705B2 (en) 2012-02-27 2015-08-11 Freescale Semiconductor, Inc. Combined environmental parameter sensor
GB2516247A (en) * 2013-07-16 2015-01-21 Nokia Corp An apparatus and associated methods
US10866203B2 (en) * 2016-03-31 2020-12-15 Kyocera Corporation Stress sensor
JP6691414B2 (ja) * 2016-03-31 2020-04-28 京セラ株式会社 応力センサ
JP6826732B2 (ja) * 2018-03-20 2021-02-10 国立大学法人東北大学 光音響計測装置

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US2461310A (en) * 1947-05-21 1949-02-08 Foxboro Co Apparatus for measuring humidity
US3077774A (en) * 1957-02-18 1963-02-19 Energy Kontrols Inc Humidity indicating device
US3301057A (en) * 1964-05-12 1967-01-31 Johnson Service Co Humidity sensing element
JPS54158289A (en) * 1978-06-05 1979-12-13 Hitachi Ltd Humidity detector
JPS60247147A (ja) * 1984-05-23 1985-12-06 Matsushita Electric Ind Co Ltd 湿度センサ
JPS60247148A (ja) * 1984-05-23 1985-12-06 Matsushita Electric Ind Co Ltd 湿度センサ
JPS63100352A (ja) * 1986-10-16 1988-05-02 Sanyo Electric Co Ltd 湿度センサ
JPH06100529B2 (ja) * 1986-11-10 1994-12-12 三洋電機株式会社 湿度検出装置
EP0376721B1 (de) * 1988-12-29 1998-07-15 Sharp Kabushiki Kaisha Détecteur d'humidité
US4969359A (en) * 1989-04-06 1990-11-13 Ford Motor Company Silicon accelerometer responsive to three orthogonal force components and method for fabricating
JPH03226649A (ja) * 1990-01-31 1991-10-07 Sanyo Electric Co Ltd 感湿素子
WO1994028372A1 (en) * 1993-05-25 1994-12-08 Rosemount Inc. Organic chemical sensor

Also Published As

Publication number Publication date
EP0832424A1 (de) 1998-04-01
WO1996041147A1 (en) 1996-12-19
AU5978996A (en) 1996-12-30
JPH11506835A (ja) 1999-06-15
EP0832424A4 (de) 1999-09-15
DE69634201T2 (de) 2006-01-05
US5563341A (en) 1996-10-08
ATE287531T1 (de) 2005-02-15
EP0832424B1 (de) 2005-01-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee