DE60225362D1 - Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren - Google Patents
Piezoelektrisches/elektrostriktives Bauelement und dessen HerstellungsverfahrenInfo
- Publication number
- DE60225362D1 DE60225362D1 DE60225362T DE60225362T DE60225362D1 DE 60225362 D1 DE60225362 D1 DE 60225362D1 DE 60225362 T DE60225362 T DE 60225362T DE 60225362 T DE60225362 T DE 60225362T DE 60225362 D1 DE60225362 D1 DE 60225362D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- manufacturing
- electrostrictive device
- electrostrictive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/54—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
- G11B5/55—Track change, selection or acquisition by displacement of the head
- G11B5/5521—Track change, selection or acquisition by displacement of the head across disk tracks
- G11B5/5552—Track change, selection or acquisition by displacement of the head across disk tracks using fine positioning means for track acquisition separate from the coarse (e.g. track changing) positioning means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49126—Assembling bases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49147—Assembling terminal to base
- Y10T29/49151—Assembling terminal to base by deforming or shaping
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001010622 | 2001-01-18 | ||
JP2001010622 | 2001-01-18 | ||
JP2001076314 | 2001-03-16 | ||
JP2001076314A JP4007767B2 (ja) | 2001-01-18 | 2001-03-16 | 圧電/電歪デバイスおよびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60225362D1 true DE60225362D1 (de) | 2008-04-17 |
DE60225362T2 DE60225362T2 (de) | 2009-03-26 |
Family
ID=26607908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2002625362 Expired - Lifetime DE60225362T2 (de) | 2001-01-18 | 2002-01-16 | Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren |
Country Status (4)
Country | Link |
---|---|
US (2) | US6798119B2 (de) |
EP (1) | EP1225644B1 (de) |
JP (1) | JP4007767B2 (de) |
DE (1) | DE60225362T2 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1089357B1 (de) | 1999-10-01 | 2007-08-15 | Ngk Insulators, Ltd. | Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren |
JP3965515B2 (ja) * | 1999-10-01 | 2007-08-29 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
JP4058223B2 (ja) * | 1999-10-01 | 2008-03-05 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
JP4566439B2 (ja) * | 2001-03-30 | 2010-10-20 | 日本碍子株式会社 | 圧電/電歪デバイスおよびその製造方法 |
US7345406B2 (en) * | 2001-01-18 | 2008-03-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device |
JP4033643B2 (ja) * | 2001-06-18 | 2008-01-16 | 日本碍子株式会社 | 圧電/電歪デバイスおよびその製造方法 |
GB2388741B (en) * | 2002-05-17 | 2004-06-30 | Morgan Crucible Co | Transducer assembly |
JP4492349B2 (ja) * | 2002-11-12 | 2010-06-30 | セイコーエプソン株式会社 | 圧電振動体 |
US7050271B2 (en) * | 2002-11-28 | 2006-05-23 | Tdk Corporation | Actuator having doped silicon arms and method of making the same |
JP2004319712A (ja) * | 2003-04-15 | 2004-11-11 | Tamura Seisakusho Co Ltd | 圧電トランス装置およびその製造方法 |
WO2004100135A1 (en) | 2003-05-12 | 2004-11-18 | Sae Magnetics (H.K.) Ltd. | Method and mechanism of pzt micro-actuator attachment for the hard disk driver arm |
WO2005038781A1 (en) | 2003-10-16 | 2005-04-28 | Sae Magnetics (H.K.) Ltd. | Method and mechanism of the suspension resonance optimization for the hard disk driver |
US7333298B2 (en) | 2003-12-08 | 2008-02-19 | Shin-Etsu Chemical Co., Ltd. | Magnetic head actuator and magnetic disk drive using the same |
WO2005104257A1 (en) * | 2004-04-23 | 2005-11-03 | Agency For Science, Technology And Research | Micro-electromechanical device |
KR100747459B1 (ko) * | 2005-10-21 | 2007-08-09 | 엘지전자 주식회사 | 모듈의 충돌 방지가 보장되는 멀티태스킹 방법 및 이동단말기 |
JP2007158276A (ja) * | 2005-12-08 | 2007-06-21 | Ngk Insulators Ltd | 圧電/電歪デバイス及び圧電/電歪デバイスの駆動方法 |
JP2007228782A (ja) * | 2006-01-24 | 2007-09-06 | Ngk Insulators Ltd | 圧電/電歪デバイス |
US7269003B1 (en) * | 2006-08-09 | 2007-09-11 | D-Link Corporation | External box for hard disk drives |
US7884526B2 (en) * | 2007-03-30 | 2011-02-08 | Pioneer Corporation | Driving apparatus |
JP4493058B2 (ja) * | 2007-03-30 | 2010-06-30 | パイオニア株式会社 | 駆動装置 |
US20080247088A1 (en) * | 2007-04-05 | 2008-10-09 | Sae Magnetics (H.K.) Ltd. | Micro-actuator having at least one segmented flexible side arm, and method of making the same |
US8085508B2 (en) | 2008-03-28 | 2011-12-27 | Hitachi Global Storage Technologies Netherlands B.V. | System, method and apparatus for flexure-integrated microactuator |
JP2011061895A (ja) * | 2009-09-07 | 2011-03-24 | Olympus Corp | 超音波モータ機構 |
US8310790B1 (en) * | 2011-06-11 | 2012-11-13 | Nhk Spring Co., Ltd | Remote drive rotary head dual stage actuator |
JP5931624B2 (ja) * | 2012-07-19 | 2016-06-08 | 日本発條株式会社 | ディスク装置用サスペンション |
JP5931625B2 (ja) * | 2012-07-19 | 2016-06-08 | 日本発條株式会社 | ディスク装置用サスペンション |
JP5931623B2 (ja) * | 2012-07-19 | 2016-06-08 | 日本発條株式会社 | ディスク装置用サスペンション |
JP5931622B2 (ja) * | 2012-07-19 | 2016-06-08 | 日本発條株式会社 | ディスク装置用サスペンション |
WO2015129393A1 (ja) * | 2014-02-28 | 2015-09-03 | 株式会社Lixil | 発電装置および圧電装置 |
JP6297360B2 (ja) * | 2014-02-28 | 2018-03-20 | 株式会社Lixil | 圧電装置 |
JP6398771B2 (ja) * | 2014-03-31 | 2018-10-03 | Tdk株式会社 | 圧電組成物および圧電素子 |
CN111971280A (zh) | 2018-02-08 | 2020-11-20 | 耶路撒冷希伯来大学伊萨姆研究发展公司 | 杂芳基化合物、其药物组合物和其治疗用途 |
US10937452B2 (en) * | 2018-04-11 | 2021-03-02 | Magnecomp Corporation | Disk drive suspension configured for vertical coupling and windage control |
EP3976600A1 (de) | 2019-06-03 | 2022-04-06 | Biotheryx, Inc. | Nicht-hygroskopische kristalline salze einer pyrazolverbindung sowie pharmazeutische zusammensetzungen und ihre verwendung |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2492393A (en) * | 1946-04-12 | 1949-12-27 | Daniel Smilo And Sons Inc | Mesh link construction |
GB1328931A (en) * | 1972-03-23 | 1973-09-05 | Creed Co Ltd | Piezoelectric transducer motor arrangement |
EP0008788B1 (de) * | 1978-09-05 | 1982-06-23 | Deibele GmbH & Co. | Vorrichtung zur Wärmedämmung an Gewächshäusern |
GB2050671B (en) | 1979-06-09 | 1983-08-17 | Sony Corp | Rotary transducer head assemblies |
JPS5760528A (en) * | 1980-09-30 | 1982-04-12 | Sony Corp | Head supporting in recorder and reproducer |
DE3332949A1 (de) * | 1983-09-13 | 1985-04-04 | Finnigan MAT GmbH, 2800 Bremen | Vorrichtung zur einstellung von spaltweiten bei spektrometern |
JPS6364640A (ja) | 1986-09-06 | 1988-03-23 | Olympus Optical Co Ltd | アクチユエ−タ |
US5166571A (en) * | 1987-08-28 | 1992-11-24 | Nec Home Electronics, Ltd. | Vibration gyro having an H-shaped vibrator |
JPH01180766U (de) * | 1988-06-02 | 1989-12-26 | ||
US5049775A (en) * | 1988-09-30 | 1991-09-17 | Boston University | Integrated micromechanical piezoelectric motor |
US5227937A (en) * | 1991-03-14 | 1993-07-13 | Ampex Corporation | Side-stiffened flexural pantographic mount for positioning a magnetic transducing head assembly |
US5745319A (en) * | 1992-08-12 | 1998-04-28 | Kabushiki Kaisha Toshiba | Recording/reproducing apparatus with coarse and fine head positioning actuators and an elastic head gimbal |
US5434731A (en) * | 1992-11-12 | 1995-07-18 | Seagate Technology, Inc. | Process for making a one-piece flexure for small magnetic heads |
US5500777A (en) * | 1993-05-19 | 1996-03-19 | Matsushita Electric Industrial Co., Ltd. | Magnetic head drive which uses independently controlled piezo-electric elements |
US5901014A (en) * | 1993-08-10 | 1999-05-04 | Fujitsu Limited | Thin film magnetic head and assembly configured to reduce risk of discharge between the coil and the core slider |
US5708320A (en) * | 1994-10-28 | 1998-01-13 | Alps Electric Co., Ltd | Vibratory gyroscope |
JP3235099B2 (ja) * | 1994-11-07 | 2001-12-04 | 松下電器産業株式会社 | 圧電アクチュエータおよびそれを用いた焦電型赤外線センサ |
JP3166530B2 (ja) * | 1995-01-30 | 2001-05-14 | ブラザー工業株式会社 | インク噴射装置 |
FR2734051B1 (fr) * | 1995-05-10 | 1997-06-20 | France Etat | Transducteur a bilames piezolectriques |
JP3333367B2 (ja) | 1995-12-04 | 2002-10-15 | 富士通株式会社 | ヘッドアクチュエータ |
JPH1021519A (ja) * | 1996-07-04 | 1998-01-23 | Sony Corp | 磁気ヘッド装置 |
US5747915A (en) * | 1996-08-19 | 1998-05-05 | Sandia Corporation | Bent shaft motor |
US5877042A (en) * | 1996-08-28 | 1999-03-02 | Motorola, Inc. | Glass/Metal package and method for producing the same |
KR100287567B1 (ko) | 1996-10-31 | 2001-04-16 | 사토 히로시 | 판독/기록헤드,판독/기록헤드위치선정기구,및판독/기록시스템 |
JPH10136665A (ja) | 1996-10-31 | 1998-05-22 | Tdk Corp | 圧電アクチュエータ |
WO1998044488A1 (en) * | 1997-03-31 | 1998-10-08 | Seagate Technology, Inc. | Flexure microactuator |
JPH1126834A (ja) * | 1997-07-04 | 1999-01-29 | Toshio Fukuda | Pzt薄膜バイモルフ形の平行平板構造体、及びその製造方法 |
CN1333386C (zh) * | 1998-09-16 | 2007-08-22 | 松下电器产业株式会社 | 信息记录/重现设备 |
US6198606B1 (en) * | 1999-07-28 | 2001-03-06 | Seagate Technology Llc | Disc drive actuation system having an injection molded magnetic micro-actuator with metal beam inserts and its method of fabrication |
US6404109B1 (en) * | 1999-10-01 | 2002-06-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device having increased strength |
JP4058223B2 (ja) | 1999-10-01 | 2008-03-05 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
US6525448B1 (en) | 1999-10-01 | 2003-02-25 | Ngk Insulators Ltd | Piezoelectric/electrostrictive device |
EP1139450A4 (de) | 1999-10-01 | 2007-04-04 | Ngk Insulators Ltd | Piezoelektrisches / elektrostriktives bauelement |
JP3436735B2 (ja) * | 1999-10-01 | 2003-08-18 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
EP1089357B1 (de) | 1999-10-01 | 2007-08-15 | Ngk Insulators, Ltd. | Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren |
JP2002133803A (ja) | 2000-10-31 | 2002-05-10 | Tdk Corp | ヘッド素子の微小位置決め用アクチュエータ、該アクチュエータを備えたヘッドジンバルアセンブリ、該ヘッドジンバルアセンブリを備えたディスク装置、該アクチュエータの製造方法及び該ヘッドジンバルアセンブリの製造方法 |
-
2001
- 2001-03-16 JP JP2001076314A patent/JP4007767B2/ja not_active Expired - Fee Related
-
2002
- 2002-01-14 US US10/046,331 patent/US6798119B2/en not_active Expired - Fee Related
- 2002-01-16 EP EP20020250298 patent/EP1225644B1/de not_active Expired - Lifetime
- 2002-01-16 DE DE2002625362 patent/DE60225362T2/de not_active Expired - Lifetime
-
2004
- 2004-06-07 US US10/862,845 patent/US7024739B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20040216289A1 (en) | 2004-11-04 |
DE60225362T2 (de) | 2009-03-26 |
US6798119B2 (en) | 2004-09-28 |
EP1225644A2 (de) | 2002-07-24 |
JP4007767B2 (ja) | 2007-11-14 |
US20020093271A1 (en) | 2002-07-18 |
EP1225644A3 (de) | 2005-09-07 |
JP2002289936A (ja) | 2002-10-04 |
EP1225644B1 (de) | 2008-03-05 |
US7024739B2 (en) | 2006-04-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |