DE60225362D1 - Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren - Google Patents

Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Info

Publication number
DE60225362D1
DE60225362D1 DE60225362T DE60225362T DE60225362D1 DE 60225362 D1 DE60225362 D1 DE 60225362D1 DE 60225362 T DE60225362 T DE 60225362T DE 60225362 T DE60225362 T DE 60225362T DE 60225362 D1 DE60225362 D1 DE 60225362D1
Authority
DE
Germany
Prior art keywords
piezoelectric
manufacturing
electrostrictive device
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60225362T
Other languages
English (en)
Other versions
DE60225362T2 (de
Inventor
Koji Ikeda
Kazuyoshi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60225362D1 publication Critical patent/DE60225362D1/de
Publication of DE60225362T2 publication Critical patent/DE60225362T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/54Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
    • G11B5/55Track change, selection or acquisition by displacement of the head
    • G11B5/5521Track change, selection or acquisition by displacement of the head across disk tracks
    • G11B5/5552Track change, selection or acquisition by displacement of the head across disk tracks using fine positioning means for track acquisition separate from the coarse (e.g. track changing) positioning means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/03Assembling devices that include piezoelectric or electrostrictive parts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041Beam type
    • H10N30/2042Cantilevers, i.e. having one fixed end
    • H10N30/2043Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/42Piezoelectric device making
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49126Assembling bases
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49147Assembling terminal to base
    • Y10T29/49151Assembling terminal to base by deforming or shaping

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE2002625362 2001-01-18 2002-01-16 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren Expired - Lifetime DE60225362T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001010622 2001-01-18
JP2001010622 2001-01-18
JP2001076314 2001-03-16
JP2001076314A JP4007767B2 (ja) 2001-01-18 2001-03-16 圧電/電歪デバイスおよびその製造方法

Publications (2)

Publication Number Publication Date
DE60225362D1 true DE60225362D1 (de) 2008-04-17
DE60225362T2 DE60225362T2 (de) 2009-03-26

Family

ID=26607908

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2002625362 Expired - Lifetime DE60225362T2 (de) 2001-01-18 2002-01-16 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren

Country Status (4)

Country Link
US (2) US6798119B2 (de)
EP (1) EP1225644B1 (de)
JP (1) JP4007767B2 (de)
DE (1) DE60225362T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1089357B1 (de) 1999-10-01 2007-08-15 Ngk Insulators, Ltd. Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
JP3965515B2 (ja) * 1999-10-01 2007-08-29 日本碍子株式会社 圧電/電歪デバイス及びその製造方法
JP4058223B2 (ja) * 1999-10-01 2008-03-05 日本碍子株式会社 圧電/電歪デバイス及びその製造方法
JP4566439B2 (ja) * 2001-03-30 2010-10-20 日本碍子株式会社 圧電/電歪デバイスおよびその製造方法
US7345406B2 (en) * 2001-01-18 2008-03-18 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device
JP4033643B2 (ja) * 2001-06-18 2008-01-16 日本碍子株式会社 圧電/電歪デバイスおよびその製造方法
GB2388741B (en) * 2002-05-17 2004-06-30 Morgan Crucible Co Transducer assembly
JP4492349B2 (ja) * 2002-11-12 2010-06-30 セイコーエプソン株式会社 圧電振動体
US7050271B2 (en) * 2002-11-28 2006-05-23 Tdk Corporation Actuator having doped silicon arms and method of making the same
JP2004319712A (ja) * 2003-04-15 2004-11-11 Tamura Seisakusho Co Ltd 圧電トランス装置およびその製造方法
WO2004100135A1 (en) 2003-05-12 2004-11-18 Sae Magnetics (H.K.) Ltd. Method and mechanism of pzt micro-actuator attachment for the hard disk driver arm
WO2005038781A1 (en) 2003-10-16 2005-04-28 Sae Magnetics (H.K.) Ltd. Method and mechanism of the suspension resonance optimization for the hard disk driver
US7333298B2 (en) 2003-12-08 2008-02-19 Shin-Etsu Chemical Co., Ltd. Magnetic head actuator and magnetic disk drive using the same
WO2005104257A1 (en) * 2004-04-23 2005-11-03 Agency For Science, Technology And Research Micro-electromechanical device
KR100747459B1 (ko) * 2005-10-21 2007-08-09 엘지전자 주식회사 모듈의 충돌 방지가 보장되는 멀티태스킹 방법 및 이동단말기
JP2007158276A (ja) * 2005-12-08 2007-06-21 Ngk Insulators Ltd 圧電/電歪デバイス及び圧電/電歪デバイスの駆動方法
JP2007228782A (ja) * 2006-01-24 2007-09-06 Ngk Insulators Ltd 圧電/電歪デバイス
US7269003B1 (en) * 2006-08-09 2007-09-11 D-Link Corporation External box for hard disk drives
US7884526B2 (en) * 2007-03-30 2011-02-08 Pioneer Corporation Driving apparatus
JP4493058B2 (ja) * 2007-03-30 2010-06-30 パイオニア株式会社 駆動装置
US20080247088A1 (en) * 2007-04-05 2008-10-09 Sae Magnetics (H.K.) Ltd. Micro-actuator having at least one segmented flexible side arm, and method of making the same
US8085508B2 (en) 2008-03-28 2011-12-27 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for flexure-integrated microactuator
JP2011061895A (ja) * 2009-09-07 2011-03-24 Olympus Corp 超音波モータ機構
US8310790B1 (en) * 2011-06-11 2012-11-13 Nhk Spring Co., Ltd Remote drive rotary head dual stage actuator
JP5931624B2 (ja) * 2012-07-19 2016-06-08 日本発條株式会社 ディスク装置用サスペンション
JP5931625B2 (ja) * 2012-07-19 2016-06-08 日本発條株式会社 ディスク装置用サスペンション
JP5931623B2 (ja) * 2012-07-19 2016-06-08 日本発條株式会社 ディスク装置用サスペンション
JP5931622B2 (ja) * 2012-07-19 2016-06-08 日本発條株式会社 ディスク装置用サスペンション
WO2015129393A1 (ja) * 2014-02-28 2015-09-03 株式会社Lixil 発電装置および圧電装置
JP6297360B2 (ja) * 2014-02-28 2018-03-20 株式会社Lixil 圧電装置
JP6398771B2 (ja) * 2014-03-31 2018-10-03 Tdk株式会社 圧電組成物および圧電素子
CN111971280A (zh) 2018-02-08 2020-11-20 耶路撒冷希伯来大学伊萨姆研究发展公司 杂芳基化合物、其药物组合物和其治疗用途
US10937452B2 (en) * 2018-04-11 2021-03-02 Magnecomp Corporation Disk drive suspension configured for vertical coupling and windage control
EP3976600A1 (de) 2019-06-03 2022-04-06 Biotheryx, Inc. Nicht-hygroskopische kristalline salze einer pyrazolverbindung sowie pharmazeutische zusammensetzungen und ihre verwendung

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2492393A (en) * 1946-04-12 1949-12-27 Daniel Smilo And Sons Inc Mesh link construction
GB1328931A (en) * 1972-03-23 1973-09-05 Creed Co Ltd Piezoelectric transducer motor arrangement
EP0008788B1 (de) * 1978-09-05 1982-06-23 Deibele GmbH & Co. Vorrichtung zur Wärmedämmung an Gewächshäusern
GB2050671B (en) 1979-06-09 1983-08-17 Sony Corp Rotary transducer head assemblies
JPS5760528A (en) * 1980-09-30 1982-04-12 Sony Corp Head supporting in recorder and reproducer
DE3332949A1 (de) * 1983-09-13 1985-04-04 Finnigan MAT GmbH, 2800 Bremen Vorrichtung zur einstellung von spaltweiten bei spektrometern
JPS6364640A (ja) 1986-09-06 1988-03-23 Olympus Optical Co Ltd アクチユエ−タ
US5166571A (en) * 1987-08-28 1992-11-24 Nec Home Electronics, Ltd. Vibration gyro having an H-shaped vibrator
JPH01180766U (de) * 1988-06-02 1989-12-26
US5049775A (en) * 1988-09-30 1991-09-17 Boston University Integrated micromechanical piezoelectric motor
US5227937A (en) * 1991-03-14 1993-07-13 Ampex Corporation Side-stiffened flexural pantographic mount for positioning a magnetic transducing head assembly
US5745319A (en) * 1992-08-12 1998-04-28 Kabushiki Kaisha Toshiba Recording/reproducing apparatus with coarse and fine head positioning actuators and an elastic head gimbal
US5434731A (en) * 1992-11-12 1995-07-18 Seagate Technology, Inc. Process for making a one-piece flexure for small magnetic heads
US5500777A (en) * 1993-05-19 1996-03-19 Matsushita Electric Industrial Co., Ltd. Magnetic head drive which uses independently controlled piezo-electric elements
US5901014A (en) * 1993-08-10 1999-05-04 Fujitsu Limited Thin film magnetic head and assembly configured to reduce risk of discharge between the coil and the core slider
US5708320A (en) * 1994-10-28 1998-01-13 Alps Electric Co., Ltd Vibratory gyroscope
JP3235099B2 (ja) * 1994-11-07 2001-12-04 松下電器産業株式会社 圧電アクチュエータおよびそれを用いた焦電型赤外線センサ
JP3166530B2 (ja) * 1995-01-30 2001-05-14 ブラザー工業株式会社 インク噴射装置
FR2734051B1 (fr) * 1995-05-10 1997-06-20 France Etat Transducteur a bilames piezolectriques
JP3333367B2 (ja) 1995-12-04 2002-10-15 富士通株式会社 ヘッドアクチュエータ
JPH1021519A (ja) * 1996-07-04 1998-01-23 Sony Corp 磁気ヘッド装置
US5747915A (en) * 1996-08-19 1998-05-05 Sandia Corporation Bent shaft motor
US5877042A (en) * 1996-08-28 1999-03-02 Motorola, Inc. Glass/Metal package and method for producing the same
KR100287567B1 (ko) 1996-10-31 2001-04-16 사토 히로시 판독/기록헤드,판독/기록헤드위치선정기구,및판독/기록시스템
JPH10136665A (ja) 1996-10-31 1998-05-22 Tdk Corp 圧電アクチュエータ
WO1998044488A1 (en) * 1997-03-31 1998-10-08 Seagate Technology, Inc. Flexure microactuator
JPH1126834A (ja) * 1997-07-04 1999-01-29 Toshio Fukuda Pzt薄膜バイモルフ形の平行平板構造体、及びその製造方法
CN1333386C (zh) * 1998-09-16 2007-08-22 松下电器产业株式会社 信息记录/重现设备
US6198606B1 (en) * 1999-07-28 2001-03-06 Seagate Technology Llc Disc drive actuation system having an injection molded magnetic micro-actuator with metal beam inserts and its method of fabrication
US6404109B1 (en) * 1999-10-01 2002-06-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device having increased strength
JP4058223B2 (ja) 1999-10-01 2008-03-05 日本碍子株式会社 圧電/電歪デバイス及びその製造方法
US6525448B1 (en) 1999-10-01 2003-02-25 Ngk Insulators Ltd Piezoelectric/electrostrictive device
EP1139450A4 (de) 1999-10-01 2007-04-04 Ngk Insulators Ltd Piezoelektrisches / elektrostriktives bauelement
JP3436735B2 (ja) * 1999-10-01 2003-08-18 日本碍子株式会社 圧電/電歪デバイス及びその製造方法
EP1089357B1 (de) 1999-10-01 2007-08-15 Ngk Insulators, Ltd. Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
JP2002133803A (ja) 2000-10-31 2002-05-10 Tdk Corp ヘッド素子の微小位置決め用アクチュエータ、該アクチュエータを備えたヘッドジンバルアセンブリ、該ヘッドジンバルアセンブリを備えたディスク装置、該アクチュエータの製造方法及び該ヘッドジンバルアセンブリの製造方法

Also Published As

Publication number Publication date
US20040216289A1 (en) 2004-11-04
DE60225362T2 (de) 2009-03-26
US6798119B2 (en) 2004-09-28
EP1225644A2 (de) 2002-07-24
JP4007767B2 (ja) 2007-11-14
US20020093271A1 (en) 2002-07-18
EP1225644A3 (de) 2005-09-07
JP2002289936A (ja) 2002-10-04
EP1225644B1 (de) 2008-03-05
US7024739B2 (en) 2006-04-11

Similar Documents

Publication Publication Date Title
DE60225362D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE60036993D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE60032699D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE60140343D1 (de) Piezoelektrisches Bauelement und dessen Herstellungsprozess
DE60336567D1 (de) Piezoelektrischer d nnfilmoszillator, piezoelektrisches d nnfilmbauelement und herstellungsverfahren daf r
DE60035009D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE60035244D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE60226297D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
GB2413214B (en) Piezoelectric device and fabrication method thereof
DE60217754D1 (de) Piezoelektrische Vorrichtung
DE602004032088D1 (de) Piezoelektrischer/elektrostriktiver Zellenaktuator und dessen Herstellungsverfahren
DE60311223D1 (de) Aktuator und dessen Herstellungsverfahren
DE60335158D1 (de) Piezoelektrisches/elektrostriktives Bauelement
DE60034642D1 (de) Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE60226549D1 (de) Trapezförmiges piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
DE60327484D1 (de) Piezoelektrisches und elektrostriktives Bauelement
DE60127780D1 (de) Piezoelektrisches/elektrostriktives Bauelement
DE60210535D1 (de) Vibrator und Herstellungsverfahren desselben
DE60224247D1 (de) Oberflächenwellenvorrichtung und Herstellungsverfahren
DE60223118D1 (de) Piezoelektrisches Dünnschichtbauelement und dessen Herstellungsverfahren
DE60326822D1 (de) Mehrschichtiges piezoelektrisches element und herstellungsverfahren dafür
FR2830129B1 (fr) Element piezo-electrique
DE50214244D1 (de) Klauenpolläufer und dessen herstellverfahren
DE50205472D1 (de) Piezoelektrischer antrieb
AU2003267835A8 (en) Piezoelectric vibrator and fabricating method thereof

Legal Events

Date Code Title Description
8364 No opposition during term of opposition