DE60212301D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE60212301D1
DE60212301D1 DE60212301T DE60212301T DE60212301D1 DE 60212301 D1 DE60212301 D1 DE 60212301D1 DE 60212301 T DE60212301 T DE 60212301T DE 60212301 T DE60212301 T DE 60212301T DE 60212301 D1 DE60212301 D1 DE 60212301D1
Authority
DE
Germany
Prior art keywords
rotor
pump case
blades
vacuum pump
outer circumferential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60212301T
Other languages
English (en)
Other versions
DE60212301T2 (de
Inventor
Masayoshi Takaminie
Yasushi Maejima
Shinji Kawanishi
Yoshiyuki Sakaguchi
Satoshi Okudera
Kenji Kabata
Yutaka Inayoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Japan Ltd filed Critical BOC Edwards Japan Ltd
Application granted granted Critical
Publication of DE60212301D1 publication Critical patent/DE60212301D1/de
Publication of DE60212301T2 publication Critical patent/DE60212301T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/04—Shafts or bearings, or assemblies thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/50—Building or constructing in particular ways
    • F05D2230/53—Building or constructing in particular ways by integrally manufacturing a component, e.g. by milling from a billet or one piece construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/95—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/171—Steel alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/20—Oxide or non-oxide ceramics
    • F05D2300/21—Oxide ceramics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S416/00—Fluid reaction surfaces, i.e. impellers
    • Y10S416/50—Vibration damping features

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
DE60212301T 2001-11-16 2002-11-05 Vakuumpumpe Expired - Lifetime DE60212301T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001352256A JP3974772B2 (ja) 2001-11-16 2001-11-16 真空ポンプ
JP2001352256 2001-11-16

Publications (2)

Publication Number Publication Date
DE60212301D1 true DE60212301D1 (de) 2006-07-27
DE60212301T2 DE60212301T2 (de) 2006-11-02

Family

ID=19164462

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60212301T Expired - Lifetime DE60212301T2 (de) 2001-11-16 2002-11-05 Vakuumpumpe

Country Status (6)

Country Link
US (1) US6890145B2 (de)
EP (1) EP1314891B1 (de)
JP (1) JP3974772B2 (de)
KR (1) KR100880504B1 (de)
AT (1) ATE330128T1 (de)
DE (1) DE60212301T2 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10163171A1 (de) * 2001-12-21 2003-07-03 Solvay Fluor & Derivate Neue Verwendung für Legierungen
CA2413808A1 (en) * 2002-12-05 2004-06-05 Claude Fournier Method and system for protection against unauthorized distribution of copyrighted computer files over peer-to-peer networks
JP2005320905A (ja) * 2004-05-10 2005-11-17 Boc Edwards Kk 真空ポンプ
JP4336295B2 (ja) * 2004-11-19 2009-09-30 日本ピラー工業株式会社 静圧形ノンコンタクトガスシール
US20060065288A1 (en) * 2004-09-30 2006-03-30 Darko Babic Supercritical fluid processing system having a coating on internal members and a method of using
JP4934089B2 (ja) * 2008-04-09 2012-05-16 株式会社荏原製作所 ターボ分子ポンプ
JP5157842B2 (ja) * 2008-11-19 2013-03-06 株式会社島津製作所 ターボ分子ポンプおよび回転体の重心位置調整方法
HUE028059T2 (en) * 2011-10-12 2016-11-28 Ebm Papst Mulfingen Gmbh & Co Kg Balancing weight for blower wheel
EP2775148B1 (de) * 2011-10-31 2019-03-27 Edwards Japan Limited Stationäres element und vakuumpumpe
TWI586893B (zh) * 2011-11-30 2017-06-11 Edwards Japan Ltd Vacuum pump
JP6190580B2 (ja) * 2012-09-13 2017-08-30 エドワーズ株式会社 真空ポンプの回転部及び真空ポンプ
KR102106658B1 (ko) * 2012-09-26 2020-05-04 에드워즈 가부시키가이샤 로터, 및, 이 로터를 구비한 진공 펌프
DE102012110029A1 (de) * 2012-10-19 2014-04-24 Atlas Copco Energas Gmbh Turbomaschine zur Verdichtung eines gas- oder dampfförmigen Fluids
DE102013113400A1 (de) * 2013-12-03 2015-06-03 Pfeiffer Vacuum Gmbh Pumpe und Verfahren zum Wuchten eines Rotors
JP2018035684A (ja) 2016-08-29 2018-03-08 株式会社島津製作所 真空ポンプ
JP7108377B2 (ja) 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
JP6992569B2 (ja) * 2018-02-14 2022-01-13 株式会社島津製作所 真空ポンプおよびバランス調整方法
JP6973348B2 (ja) * 2018-10-15 2021-11-24 株式会社島津製作所 真空ポンプ
JP7347964B2 (ja) * 2019-05-30 2023-09-20 エドワーズ株式会社 真空ポンプ及び該真空ポンプに備えられた保護部
JP7371852B2 (ja) * 2019-07-17 2023-10-31 エドワーズ株式会社 真空ポンプ
JP2022111724A (ja) 2021-01-20 2022-08-01 エドワーズ株式会社 真空ポンプ、回転体、カバー部および回転体の製造方法
TW202346719A (zh) * 2022-04-01 2023-12-01 日商埃地沃茲日本有限公司 真空泵、真空泵用旋轉體、及真空泵用平衡修正元件

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873325U (ja) * 1981-11-06 1983-05-18 株式会社東芝 遠心分離機用回転体
JPS61226597A (ja) * 1985-03-30 1986-10-08 Shimadzu Corp タ−ボ分子ポンプ用ロ−タ
FR2612106B1 (fr) * 1987-03-09 1989-05-19 Alsthom Procede de pose d'un revetement protecteur sur une aube en alliage de titane et aube ainsi revetue
JPS63230989A (ja) * 1987-03-20 1988-09-27 Hitachi Ltd 真空ポンプ
JPH0166495U (de) * 1987-10-21 1989-04-27
JPH0195595U (de) * 1987-12-16 1989-06-23
JPH0515121A (ja) * 1991-06-28 1993-01-22 Sankyo Seiki Mfg Co Ltd 回転体のバランス調整法
DE4239391C2 (de) * 1991-11-27 1996-11-21 Electro Chem Eng Gmbh Gegenstände aus Aluminium, Magnesium oder Titan mit einer mit Fluorpolymeren gefüllten Oxidkeramikschicht und Verfahren zu ihrer Herstellung
JPH05321879A (ja) * 1992-05-22 1993-12-07 Hitachi Ltd 真空ポンプ
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ
JPH0783189A (ja) * 1993-09-17 1995-03-28 Hitachi Ltd ターボ真空ポンプ
KR970001491A (ko) * 1995-06-21 1997-01-24 한영재 내열 피막 조성물
KR970010510A (ko) * 1995-08-30 1997-03-27 김태구 겹판스프링 운반장치
JPH09169831A (ja) * 1995-12-19 1997-06-30 Yuka Shell Epoxy Kk エポキシ樹脂組成物
IT1296155B1 (it) * 1996-04-05 1999-06-09 Varian Spa Rotore di pompa turbomolecolare
US5938406A (en) * 1997-04-18 1999-08-17 Varian, Inc. Rotor for turbomolecular pump
CN1117216C (zh) * 1998-02-13 2003-08-06 株式会社荏原制作所 用于真空泵的中空转子及其制造方法以及一种真空泵
JP3831110B2 (ja) * 1998-03-25 2006-10-11 大晃機械工業株式会社 真空ポンプのスクリューロータ
JP2000161291A (ja) * 1998-11-30 2000-06-13 Hitachi Ltd 電動送風機のバランス修正装置

Also Published As

Publication number Publication date
DE60212301T2 (de) 2006-11-02
EP1314891B1 (de) 2006-06-14
KR20030040181A (ko) 2003-05-22
EP1314891A3 (de) 2003-10-22
US6890145B2 (en) 2005-05-10
US20030095860A1 (en) 2003-05-22
JP3974772B2 (ja) 2007-09-12
ATE330128T1 (de) 2006-07-15
EP1314891A1 (de) 2003-05-28
KR100880504B1 (ko) 2009-01-28
EP1314891A8 (de) 2003-10-15
JP2003148389A (ja) 2003-05-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., TOKIO, JP

8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., YACHIYO, CHIBA, JP