IT1296155B1 - Rotore di pompa turbomolecolare - Google Patents

Rotore di pompa turbomolecolare

Info

Publication number
IT1296155B1
IT1296155B1 IT96TO000265A ITTO960265A IT1296155B1 IT 1296155 B1 IT1296155 B1 IT 1296155B1 IT 96TO000265 A IT96TO000265 A IT 96TO000265A IT TO960265 A ITTO960265 A IT TO960265A IT 1296155 B1 IT1296155 B1 IT 1296155B1
Authority
IT
Italy
Prior art keywords
pump rotor
turbomolecular pump
turbomolecular
rotor
pump
Prior art date
Application number
IT96TO000265A
Other languages
English (en)
Inventor
Roberto Cerruti
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT96TO000265A priority Critical patent/IT1296155B1/it
Publication of ITTO960265A0 publication Critical patent/ITTO960265A0/it
Priority to DE1996625893 priority patent/DE69625893T2/de
Priority to EP96202468A priority patent/EP0799999B1/en
Priority to US08/844,505 priority patent/US5904469A/en
Priority to JP9118649A priority patent/JPH10299687A/ja
Publication of ITTO960265A1 publication Critical patent/ITTO960265A1/it
Application granted granted Critical
Publication of IT1296155B1 publication Critical patent/IT1296155B1/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/40—Heat treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/90—Coating; Surface treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/95—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/611—Coating

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
IT96TO000265A 1996-04-05 1996-04-05 Rotore di pompa turbomolecolare IT1296155B1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT96TO000265A IT1296155B1 (it) 1996-04-05 1996-04-05 Rotore di pompa turbomolecolare
DE1996625893 DE69625893T2 (de) 1996-04-05 1996-09-05 Rotor für Turbomolekularpumpe
EP96202468A EP0799999B1 (en) 1996-04-05 1996-09-05 A rotor for turbomolecular pump
US08/844,505 US5904469A (en) 1996-04-05 1997-04-18 Rotor for turbomolecular pump
JP9118649A JPH10299687A (ja) 1996-04-05 1997-04-23 ターボ分子ポンプ用のローター

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IT96TO000265A IT1296155B1 (it) 1996-04-05 1996-04-05 Rotore di pompa turbomolecolare
US08/844,505 US5904469A (en) 1996-04-05 1997-04-18 Rotor for turbomolecular pump
JP9118649A JPH10299687A (ja) 1996-04-05 1997-04-23 ターボ分子ポンプ用のローター

Publications (3)

Publication Number Publication Date
ITTO960265A0 ITTO960265A0 (it) 1996-04-05
ITTO960265A1 ITTO960265A1 (it) 1997-10-05
IT1296155B1 true IT1296155B1 (it) 1999-06-09

Family

ID=27274184

Family Applications (1)

Application Number Title Priority Date Filing Date
IT96TO000265A IT1296155B1 (it) 1996-04-05 1996-04-05 Rotore di pompa turbomolecolare

Country Status (4)

Country Link
US (1) US5904469A (it)
EP (1) EP0799999B1 (it)
JP (1) JPH10299687A (it)
IT (1) IT1296155B1 (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6596123B1 (en) * 2000-01-28 2003-07-22 Applied Materials, Inc. Method and apparatus for cleaning a semiconductor wafer processing system
JP4657463B2 (ja) * 2001-02-01 2011-03-23 エドワーズ株式会社 真空ポンプ
DE10113329A1 (de) * 2001-03-20 2002-09-26 Leybold Vakuum Gmbh Turbomolekularpumpe
JP2003021092A (ja) * 2001-07-03 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
JP2003021093A (ja) * 2001-07-05 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
JP3974772B2 (ja) 2001-11-16 2007-09-12 Ｂｏｃエドワーズ株式会社 真空ポンプ
DE102005040648A1 (de) * 2005-08-27 2007-03-01 Leybold Vacuum Gmbh Beschichtete Gegenstände
CN102428281A (zh) * 2009-05-20 2012-04-25 爱德华兹有限公司 带轴向气体轴承的侧沟槽泵
GB2498816A (en) * 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102013207059A1 (de) 2013-04-18 2014-10-23 Agilent Technologies, Inc. - A Delaware Corporation - Turbomolekularpumpe mit Stator- und/oder Rotorelementen mit Metalloxid-Oberfläche mit hohem Strahlungsvermögen
JP6124688B2 (ja) * 2013-05-31 2017-05-10 株式会社荏原製作所 モータ、ポンプ
DE102014203172A1 (de) 2014-02-21 2015-08-27 Oerlikon Leybold Vacuum Gmbh Beschichtete CFK Oberflächen von Turbomolekularpumpen
GB2557679A (en) * 2016-12-15 2018-06-27 Edwards Ltd Stator blade unit for a turbomolecular pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054112B2 (ja) * 1982-02-03 1985-11-28 工業技術院長 滴状凝縮面の形成方法
JPS5941699A (ja) * 1982-08-31 1984-03-07 Shimadzu Corp 改良されたタ−ボ式真空ポンプ
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
US5154978A (en) * 1989-03-22 1992-10-13 Tdk Corporation Highly corrosion-resistant rare-earth-iron magnets
DE4239391C2 (de) * 1991-11-27 1996-11-21 Electro Chem Eng Gmbh Gegenstände aus Aluminium, Magnesium oder Titan mit einer mit Fluorpolymeren gefüllten Oxidkeramikschicht und Verfahren zu ihrer Herstellung
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ
US5395221A (en) * 1993-03-18 1995-03-07 Praxair S.T. Technology, Inc. Carbide or boride coated rotor for a positive displacement motor or pump
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
JP3430686B2 (ja) * 1994-12-15 2003-07-28 住友特殊金属株式会社 高耐食性ボンド磁石用コンパウンド及びボンド磁石とそれらの製造方法

Also Published As

Publication number Publication date
JPH10299687A (ja) 1998-11-10
EP0799999B1 (en) 2003-01-22
EP0799999A3 (en) 1998-04-22
US5904469A (en) 1999-05-18
EP0799999A2 (en) 1997-10-08
ITTO960265A0 (it) 1996-04-05
ITTO960265A1 (it) 1997-10-05

Similar Documents

Publication Publication Date Title
DE19781894T1 (de) Selbstansaugende Kreiselpumpe
DE59712162D1 (de) Zentrifugalpumpe
EE9800324A (et) Pumbarootor
DE69827553D1 (de) Turbomolekularpumpe
IT1281025B1 (it) Pompa turbomolecolare.
IT9067113A0 (it) Statore per pompa turbomolecolare.
DK1073847T3 (da) Halvaksial centrifugalpumpe
IT1293407B1 (it) Pompa
EE9800325A (et) Pumbarootor
IT1275286B (it) Pompa centrifuga
IT1296155B1 (it) Rotore di pompa turbomolecolare
DE69822730D1 (de) Turbomolekularpumpe
DE69734030T2 (de) Saugrotor
DE69508163T2 (de) Turbomolekular-Vakuumpumpe
DE59708643D1 (de) Absaugpumpe
DE69823933D1 (de) Turbomolekularpumpe
FR2776029B1 (fr) Pompe turbomoleculaire
DE69823932D1 (de) Turbomolekularpumpe
ITPR960017A1 (it) Pompa epitrocoidale
DE59812247D1 (de) Mehrstufige Zentrifugalpumpe
DE29722288U1 (de) Mehrstufige Unterwasserpumpe
IT1298741B1 (it) Pompa ad aspirazione ridotta
DE29608236U1 (de) Kreiselpumpe
KR970049854U (ko) 수중펌프용 임펠러유니트
DE29815163U1 (de) Kreiselpumpe

Legal Events

Date Code Title Description
0001 Granted