DE3885899D1 - Pumpenstufe für eine Hochvakuumpumpe. - Google Patents

Pumpenstufe für eine Hochvakuumpumpe.

Info

Publication number
DE3885899D1
DE3885899D1 DE88116749T DE3885899T DE3885899D1 DE 3885899 D1 DE3885899 D1 DE 3885899D1 DE 88116749 T DE88116749 T DE 88116749T DE 3885899 T DE3885899 T DE 3885899T DE 3885899 D1 DE3885899 D1 DE 3885899D1
Authority
DE
Germany
Prior art keywords
pump
high vacuum
stage
vacuum pump
pump stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE88116749T
Other languages
English (en)
Inventor
Hans-Peter Dr Kabelitz
Winfried Kaiser
Hans-Guenter Dr Stueber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE3885899D1 publication Critical patent/DE3885899D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE88116749T 1988-10-10 1988-10-10 Pumpenstufe für eine Hochvakuumpumpe. Expired - Fee Related DE3885899D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88116749A EP0363503B1 (de) 1988-10-10 1988-10-10 Pumpenstufe für eine Hochvakuumpumpe

Publications (1)

Publication Number Publication Date
DE3885899D1 true DE3885899D1 (de) 1994-01-05

Family

ID=8199438

Family Applications (1)

Application Number Title Priority Date Filing Date
DE88116749T Expired - Fee Related DE3885899D1 (de) 1988-10-10 1988-10-10 Pumpenstufe für eine Hochvakuumpumpe.

Country Status (4)

Country Link
US (1) US4978276A (de)
EP (1) EP0363503B1 (de)
JP (1) JP3048583B2 (de)
DE (1) DE3885899D1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03166251A (ja) * 1989-11-24 1991-07-18 Sekisui Chem Co Ltd 繊維強化塩素含有樹脂組成物、該組成物を用いた成形体及びその製造方法
JPH0692799B2 (ja) * 1989-11-24 1994-11-16 ダイキン工業株式会社 真空ポンプ
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
US6790016B2 (en) * 2002-02-04 2004-09-14 Ching-Yuan Chiang Motor and its blade unit
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung
JP4141199B2 (ja) * 2002-08-13 2008-08-27 株式会社大阪真空機器製作所 分子ポンプのシール構造
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0424199D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump
GB0503946D0 (en) * 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US109926A (en) * 1870-12-06 Improvement in turbine water-wheels
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
US2941780A (en) * 1954-06-17 1960-06-21 Garrett Corp Elastic fluid turbine and compressor wheels
US3697190A (en) 1970-11-03 1972-10-10 Walter D Haentjens Truncated conical drag pump
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ
JPS61226597A (ja) * 1985-03-30 1986-10-08 Shimadzu Corp タ−ボ分子ポンプ用ロ−タ
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
FR2611818B1 (fr) * 1987-02-26 1991-04-19 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede

Also Published As

Publication number Publication date
EP0363503A1 (de) 1990-04-18
EP0363503B1 (de) 1993-11-24
JPH02149798A (ja) 1990-06-08
JP3048583B2 (ja) 2000-06-05
US4978276A (en) 1990-12-18

Similar Documents

Publication Publication Date Title
DE59007218D1 (de) Magnetgelagerte Vakuumpumpe.
DE68914320D1 (de) Zusammengestellte Vakuumpumpe.
DE68924359D1 (de) Ätzgerät.
DE69017037D1 (de) Rotorzusammenbau für einen kompressor.
DE3880873D1 (de) Rotor-zusammenbau fuer eine turbomaschine.
DE3787873D1 (de) Vakuumpinzette.
IT1213344B (it) Architettura di calcolatore a tolleranza di guasto.
FI894271A0 (fi) Turbomolekular vakuumpump.
NO873878D0 (no) Utmatningspumpe.
DE3868397D1 (de) Kompressor.
DE68903355D1 (de) Vakuumpumpen.
DE69004566D1 (de) Vakuumpumpeneinheit.
DE68921249D1 (de) Mikroskop-Spektralgerät.
DE3885899D1 (de) Pumpenstufe für eine Hochvakuumpumpe.
DE3770367D1 (de) Turbomolekularpumpe.
DE68903862D1 (de) Vakuumpumpenanlagen.
DE3768593D1 (de) Hochvakuumpumpe.
IT8821185A0 (it) Turbopompa molecolare.
ES2016069A4 (es) Nuevas somatotropinas.
FR2652459B1 (fr) Turbomachine magnetohydrodynamique.
DE68906929D1 (de) Turbomolekularpumpe.
DE58907121D1 (de) Zwei- oder mehrstufige Hochvakuumpumpe.
DE69017284D1 (de) Vakuumsystem.
DE59003752D1 (de) Kryostat.
DE3862650D1 (de) Radialverdichter.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee