DE3885899D1 - Pumpenstufe für eine Hochvakuumpumpe. - Google Patents
Pumpenstufe für eine Hochvakuumpumpe.Info
- Publication number
- DE3885899D1 DE3885899D1 DE88116749T DE3885899T DE3885899D1 DE 3885899 D1 DE3885899 D1 DE 3885899D1 DE 88116749 T DE88116749 T DE 88116749T DE 3885899 T DE3885899 T DE 3885899T DE 3885899 D1 DE3885899 D1 DE 3885899D1
- Authority
- DE
- Germany
- Prior art keywords
- pump
- high vacuum
- stage
- vacuum pump
- pump stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP88116749A EP0363503B1 (de) | 1988-10-10 | 1988-10-10 | Pumpenstufe für eine Hochvakuumpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3885899D1 true DE3885899D1 (de) | 1994-01-05 |
Family
ID=8199438
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE88116749T Expired - Fee Related DE3885899D1 (de) | 1988-10-10 | 1988-10-10 | Pumpenstufe für eine Hochvakuumpumpe. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4978276A (de) |
EP (1) | EP0363503B1 (de) |
JP (1) | JP3048583B2 (de) |
DE (1) | DE3885899D1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03166251A (ja) * | 1989-11-24 | 1991-07-18 | Sekisui Chem Co Ltd | 繊維強化塩素含有樹脂組成物、該組成物を用いた成形体及びその製造方法 |
JPH0692799B2 (ja) * | 1989-11-24 | 1994-11-16 | ダイキン工業株式会社 | 真空ポンプ |
DE4216237A1 (de) * | 1992-05-16 | 1993-11-18 | Leybold Ag | Gasreibungsvakuumpumpe |
TW504548B (en) * | 1998-06-30 | 2002-10-01 | Ebara Corp | Turbo molecular pump |
GB9927493D0 (en) * | 1999-11-19 | 2000-01-19 | Boc Group Plc | Improved vacuum pumps |
DE10008691B4 (de) * | 2000-02-24 | 2017-10-26 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
JP2002138987A (ja) * | 2000-10-31 | 2002-05-17 | Seiko Instruments Inc | 真空ポンプ |
US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
US6790016B2 (en) * | 2002-02-04 | 2004-09-14 | Ching-Yuan Chiang | Motor and its blade unit |
DE10224604B4 (de) * | 2002-06-04 | 2014-01-30 | Oerlikon Leybold Vacuum Gmbh | Evakuierungseinrichtung |
JP4141199B2 (ja) * | 2002-08-13 | 2008-08-27 | 株式会社大阪真空機器製作所 | 分子ポンプのシール構造 |
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0424199D0 (en) * | 2004-11-01 | 2004-12-01 | Boc Group Plc | Vacuum pump |
GB0503946D0 (en) * | 2005-02-25 | 2005-04-06 | Boc Group Plc | Vacuum pump |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US109926A (en) * | 1870-12-06 | Improvement in turbine water-wheels | ||
FR887499A (fr) * | 1941-11-04 | 1943-11-15 | Brown | Pompe moléculaire |
US2941780A (en) * | 1954-06-17 | 1960-06-21 | Garrett Corp | Elastic fluid turbine and compressor wheels |
US3697190A (en) | 1970-11-03 | 1972-10-10 | Walter D Haentjens | Truncated conical drag pump |
FR2446934A1 (fr) * | 1979-01-19 | 1980-08-14 | Cit Alcatel | Pompe rotative a vide eleve |
NL8303927A (nl) * | 1983-11-16 | 1985-06-17 | Ultra Centrifuge Nederland Nv | Hoog-vacuum moleculair pomp. |
JPS61145394A (ja) * | 1984-12-18 | 1986-07-03 | Tokuda Seisakusho Ltd | 分子ポンプ |
JPS61226597A (ja) * | 1985-03-30 | 1986-10-08 | Shimadzu Corp | タ−ボ分子ポンプ用ロ−タ |
DE3613344A1 (de) * | 1986-04-19 | 1987-10-22 | Pfeiffer Vakuumtechnik | Turbomolekular-vakuumpumpe fuer hoeheren druck |
FR2611818B1 (fr) * | 1987-02-26 | 1991-04-19 | Cit Alcatel | Pompe rotative a vide moleculaire du type a canal de gaede |
-
1988
- 1988-10-10 EP EP88116749A patent/EP0363503B1/de not_active Expired - Lifetime
- 1988-10-10 DE DE88116749T patent/DE3885899D1/de not_active Expired - Fee Related
-
1989
- 1989-10-09 JP JP1262311A patent/JP3048583B2/ja not_active Expired - Fee Related
- 1989-10-10 US US07/419,194 patent/US4978276A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0363503A1 (de) | 1990-04-18 |
EP0363503B1 (de) | 1993-11-24 |
JPH02149798A (ja) | 1990-06-08 |
JP3048583B2 (ja) | 2000-06-05 |
US4978276A (en) | 1990-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |