DE3885153T2 - Methode zur Herstellung einer supraleitenden Dünnschicht. - Google Patents
Methode zur Herstellung einer supraleitenden Dünnschicht.Info
- Publication number
- DE3885153T2 DE3885153T2 DE3885153T DE3885153T DE3885153T2 DE 3885153 T2 DE3885153 T2 DE 3885153T2 DE 3885153 T DE3885153 T DE 3885153T DE 3885153 T DE3885153 T DE 3885153T DE 3885153 T2 DE3885153 T2 DE 3885153T2
- Authority
- DE
- Germany
- Prior art keywords
- making
- thin film
- superconducting thin
- superconducting
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
- C30B29/225—Complex oxides based on rare earth copper oxides, e.g. high T-superconductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13693887 | 1987-05-31 | ||
JP14061087 | 1987-06-04 | ||
JP14061287 | 1987-06-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3885153D1 DE3885153D1 (de) | 1993-12-02 |
DE3885153T2 true DE3885153T2 (de) | 1994-05-19 |
Family
ID=27317367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3885153T Expired - Fee Related DE3885153T2 (de) | 1987-05-31 | 1988-05-31 | Methode zur Herstellung einer supraleitenden Dünnschicht. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0293836B1 (de) |
JP (1) | JP2501620B2 (de) |
DE (1) | DE3885153T2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2564562B2 (ja) * | 1987-08-31 | 1996-12-18 | 株式会社半導体エネルギー研究所 | 超電導材料の作製方法 |
JP2726750B2 (ja) * | 1990-11-05 | 1998-03-11 | 財団法人 国際超電導産業技術研究センター | 酸化物超電導薄膜 |
SG46182A1 (en) * | 1991-01-07 | 1998-02-20 | Ibm | Superconducting field-effect transistors with inverted misfet structure and method for making the same |
JPH04317408A (ja) * | 1991-04-01 | 1992-11-09 | Semiconductor Energy Lab Co Ltd | 酸化物超伝導材料 |
JPH0817250B2 (ja) * | 1993-07-30 | 1996-02-21 | 工業技術院長 | 異方性超伝導素子とその作製方法及びこれを用いたフラクソンデバイス |
JP4720803B2 (ja) * | 2007-08-20 | 2011-07-13 | マックス株式会社 | 浴室空調装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6414814A (en) * | 1987-03-19 | 1989-01-19 | Nippon Telegraph & Telephone | Manufacture of oxide superconductive thin film |
-
1988
- 1988-05-31 EP EP88108699A patent/EP0293836B1/de not_active Expired - Lifetime
- 1988-05-31 DE DE3885153T patent/DE3885153T2/de not_active Expired - Fee Related
- 1988-05-31 JP JP63135025A patent/JP2501620B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0293836B1 (de) | 1993-10-27 |
DE3885153D1 (de) | 1993-12-02 |
EP0293836A1 (de) | 1988-12-07 |
JP2501620B2 (ja) | 1996-05-29 |
JPH01100022A (ja) | 1989-04-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE68918135T2 (de) | Methode zur Erzeugung einer halbleitenden Dünnschicht. | |
ATE70271T1 (de) | Verfahren zur herstellung einer thiazepinverbindung. | |
DE3887478T2 (de) | Methode zur Herstellung eines Oxid-Supraleiters. | |
DE3773073D1 (de) | Methode zur herstellung einer aus mehreren schichten bestehenden analyseneinheit. | |
DE3850285T2 (de) | Verfahren zur Herstellung von dünnen supraleitenden Schichten. | |
DE3850609D1 (de) | Methode zur Herstellung einer supraleitenden Schaltung. | |
DE68916653T2 (de) | Methode zur herstellung von lichtwellenleiterreihen. | |
DE68922965D1 (de) | Methode zur Herstellung supraleitender keramischer Drähte. | |
DE3851248T2 (de) | Verfahren zur Herstellung einer supraleitenden Schaltung. | |
DE69125431D1 (de) | Methode zur Herstellung einer Verbindung zwischen supraleitenden Bändern | |
DE3852198T2 (de) | Zusammensetzung zur Herstellung einer Dauerwelle. | |
DE69015721D1 (de) | Verfahren zur Herstellung einer supraleitenden Schaltung. | |
DE68924327D1 (de) | Methode zur Herstellung einer Silberhalogenidemulsion. | |
DE3885153D1 (de) | Methode zur Herstellung einer supraleitenden Dünnschicht. | |
DE69022890T2 (de) | Verfahren zur Herstellung einer heteroepitaxialen Struktur. | |
DE3854493D1 (de) | Verfahren zur Herstellung eines Dünnschichtsupraleiters. | |
DE68901090D1 (de) | Methode zur herstellung einer photographischen beschichtungszusammensetzung. | |
DE68928256D1 (de) | Verfahren zur Herstellung einer supraleitenden Dünnenschicht des Perovskit-Typs | |
DE3886063T2 (de) | Methode zur Herstellung einer Cycloalkylsilan-Verbindung. | |
DE69012422T2 (de) | Methode zur Herstellung eines Oxydsupraleiterfilms. | |
DE3888594T2 (de) | Methode zur Herstellung einer photographischen Silberhalogenidemulsion. | |
DE68914921T2 (de) | Prozess zur Herstellung thalliumartiger supraleitender Dünnfilme. | |
DE69011582D1 (de) | Methode zur Herstellung supraleitender Artikel. | |
DE3889015T2 (de) | Verfahren zur Herstellung einer supraleitenden Schaltung. | |
DE3882842T2 (de) | Methode zur Herstellung von Cineolen. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |