DE3877795D1 - Stroemungssensor. - Google Patents

Stroemungssensor.

Info

Publication number
DE3877795D1
DE3877795D1 DE8888302969T DE3877795T DE3877795D1 DE 3877795 D1 DE3877795 D1 DE 3877795D1 DE 8888302969 T DE8888302969 T DE 8888302969T DE 3877795 T DE3877795 T DE 3877795T DE 3877795 D1 DE3877795 D1 DE 3877795D1
Authority
DE
Germany
Prior art keywords
flow sensor
sensor
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888302969T
Other languages
English (en)
Other versions
DE3877795T2 (de
Inventor
Nobuyuki - Takanoharaek Tanaka
Yasuhiko Green Park Nara Inami
Masaya Hijikigawa
Shoei Kataoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of DE3877795D1 publication Critical patent/DE3877795D1/de
Application granted granted Critical
Publication of DE3877795T2 publication Critical patent/DE3877795T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Measuring Volume Flow (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
DE8888302969T 1987-03-31 1988-03-31 Stroemungssensor. Expired - Fee Related DE3877795T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62079244A JPH0810231B2 (ja) 1987-03-31 1987-03-31 フローセンサ

Publications (2)

Publication Number Publication Date
DE3877795D1 true DE3877795D1 (de) 1993-03-11
DE3877795T2 DE3877795T2 (de) 1993-05-27

Family

ID=13684443

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888302969T Expired - Fee Related DE3877795T2 (de) 1987-03-31 1988-03-31 Stroemungssensor.

Country Status (4)

Country Link
US (1) US4885937A (de)
EP (1) EP0285451B1 (de)
JP (1) JPH0810231B2 (de)
DE (1) DE3877795T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5231877A (en) * 1990-12-12 1993-08-03 University Of Cincinnati Solid state microanemometer
JPH04240566A (ja) * 1991-01-24 1992-08-27 Anritsu Corp 流量方向センサ
JPH04295768A (ja) * 1991-03-25 1992-10-20 Yamatake Honeywell Co Ltd 流体検出装置
ITGE940008A1 (it) * 1994-01-19 1995-07-19 Vincenzo Arrichiello Dispositivo per la misurazione della velocita' di un flusso di fluido.
US5461910A (en) * 1994-06-16 1995-10-31 Alnor Instrument Company Fluid flow direction and velocity monitor
NL9401051A (nl) * 1994-06-24 1996-02-01 Stichting Tech Wetenschapp Microfoon op basis van fluidum-stroommeting en akoestische generator gebaseerd daarop.
DE19605180A1 (de) * 1996-02-13 1997-08-14 Daimler Benz Ag Anemometer
JP3981907B2 (ja) 1998-10-21 2007-09-26 株式会社デンソー 流量測定装置
JP3513041B2 (ja) * 1999-01-25 2004-03-31 三菱電機株式会社 流量センサ
JP2007101561A (ja) * 1999-06-14 2007-04-19 Yamatake Corp 流速検出器
US6502459B1 (en) * 2000-09-01 2003-01-07 Honeywell International Inc. Microsensor for measuring velocity and angular direction of an incoming air stream
JP4474771B2 (ja) 2000-12-20 2010-06-09 株式会社デンソー 流量測定装置
US6631638B2 (en) * 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
DE10146321B4 (de) * 2001-09-20 2008-08-14 Robert Bosch Gmbh Sensorbaustein mit einem Sensorelement, das von einem Heizelement umgeben ist
US20030130624A1 (en) * 2002-01-07 2003-07-10 Kowalik Francis C. Medical infusion system with integrated power supply and pump therefor
DE10322012A1 (de) * 2003-05-16 2004-12-02 Robert Bosch Gmbh Durchflusssensor mit verbessertem Betriebsverhalten
IL157354A0 (en) * 2003-08-12 2004-02-19 Apparatus for determining the amount of milk breast-fed to a baby
DE102005051672A1 (de) * 2005-10-28 2007-05-03 Hydac Electronic Gmbh Mehrdimensionaler Fluidströmungssensor
DE102005061703A1 (de) * 2005-12-21 2007-07-05 Innovative Sensor Technology Ist Ag Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgrösse und Verfahren zur Herstellung einer entsprechenden Sensoreinheit
ATE553361T1 (de) * 2006-10-23 2012-04-15 Ust Umweltsensortechnik Gmbh Hochtemperatursensor und verfahren zu dessen überprüfung
DE102007023824B4 (de) * 2007-05-21 2010-01-07 Abb Ag Thermischer Massendurchflussmesser
US7500392B1 (en) 2007-10-11 2009-03-10 Memsys, Inc. Solid state microanemometer device and method of fabrication
JP2012189571A (ja) * 2011-02-24 2012-10-04 Renesas Electronics Corp 半導体装置及びその製造方法
JP5696605B2 (ja) * 2011-07-01 2015-04-08 東京エレクトロン株式会社 基板処理装置のデータ取得方法及び基板処理装置
JP5704129B2 (ja) * 2012-06-22 2015-04-22 東京エレクトロン株式会社 基板処理装置のデータ取得方法及びセンサ用基板
CN103217550B (zh) * 2013-03-29 2015-04-22 北京遥测技术研究所 铂热栅式风速风向传感器
JP6669957B2 (ja) 2015-09-30 2020-03-18 ミツミ電機株式会社 流量センサ
CN108351243B (zh) * 2015-11-24 2020-04-10 Ifm电子股份有限公司 热流量计及操作流量计的方法
US10168349B2 (en) * 2016-09-08 2019-01-01 Robert Bosch Gmbh Bolometer fluid flow sensor
JP7235218B2 (ja) * 2019-03-04 2023-03-08 ミネベアミツミ株式会社 流体センサ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3677085A (en) * 1970-04-08 1972-07-18 Yugen Kaisha Tsukasa Sokken Tandem-type hot-wire velocity meter probe
US3995481A (en) * 1973-02-07 1976-12-07 Environmental Instruments, Inc. Directional fluid flow transducer
US4024761A (en) * 1976-06-11 1977-05-24 Kyma Corporation Directional hot film anemometer transducer
US4135396A (en) * 1978-04-24 1979-01-23 The Trane Company Temperature compensating fluid velocity sensing apparatus
DE2925975A1 (de) * 1979-06-27 1981-01-15 Siemens Ag Mengendurchflussmesser
JPS56162014A (en) * 1980-05-16 1981-12-12 Nippon Denso Co Ltd Measuring device for flow rate of gas
DE3024417A1 (de) * 1980-06-28 1982-01-21 William Buchanan Falmouth Mass. Kerfoot Verfahren und vorrichtung zur messung einer stroemungscharakteristik
US4478076A (en) * 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
JPS604815A (ja) * 1983-06-23 1985-01-11 Nippon Soken Inc 流量測定装置
US4637253A (en) * 1984-05-22 1987-01-20 Kabushiki Kaisha Toshiba Semiconductor flow detector for detecting the flow rate and flowing direction of fluid
US4576050A (en) * 1984-08-29 1986-03-18 General Motors Corporation Thermal diffusion fluid flow sensor
JPS61133866A (ja) * 1984-12-03 1986-06-21 Toyota Central Res & Dev Lab Inc 流動状態検出センサ
JPS61194317A (ja) * 1985-02-25 1986-08-28 Nippon Soken Inc 直熱型流量センサ

Also Published As

Publication number Publication date
EP0285451A1 (de) 1988-10-05
JPH0810231B2 (ja) 1996-01-31
US4885937A (en) 1989-12-12
EP0285451B1 (de) 1993-01-27
JPS63243885A (ja) 1988-10-11
DE3877795T2 (de) 1993-05-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee