DE3877795D1 - Stroemungssensor. - Google Patents
Stroemungssensor.Info
- Publication number
- DE3877795D1 DE3877795D1 DE8888302969T DE3877795T DE3877795D1 DE 3877795 D1 DE3877795 D1 DE 3877795D1 DE 8888302969 T DE8888302969 T DE 8888302969T DE 3877795 T DE3877795 T DE 3877795T DE 3877795 D1 DE3877795 D1 DE 3877795D1
- Authority
- DE
- Germany
- Prior art keywords
- flow sensor
- sensor
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
- G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Measuring Volume Flow (AREA)
- Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62079244A JPH0810231B2 (ja) | 1987-03-31 | 1987-03-31 | フローセンサ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3877795D1 true DE3877795D1 (de) | 1993-03-11 |
DE3877795T2 DE3877795T2 (de) | 1993-05-27 |
Family
ID=13684443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888302969T Expired - Fee Related DE3877795T2 (de) | 1987-03-31 | 1988-03-31 | Stroemungssensor. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4885937A (de) |
EP (1) | EP0285451B1 (de) |
JP (1) | JPH0810231B2 (de) |
DE (1) | DE3877795T2 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5231877A (en) * | 1990-12-12 | 1993-08-03 | University Of Cincinnati | Solid state microanemometer |
JPH04240566A (ja) * | 1991-01-24 | 1992-08-27 | Anritsu Corp | 流量方向センサ |
JPH04295768A (ja) * | 1991-03-25 | 1992-10-20 | Yamatake Honeywell Co Ltd | 流体検出装置 |
ITGE940008A1 (it) * | 1994-01-19 | 1995-07-19 | Vincenzo Arrichiello | Dispositivo per la misurazione della velocita' di un flusso di fluido. |
US5461910A (en) * | 1994-06-16 | 1995-10-31 | Alnor Instrument Company | Fluid flow direction and velocity monitor |
NL9401051A (nl) * | 1994-06-24 | 1996-02-01 | Stichting Tech Wetenschapp | Microfoon op basis van fluidum-stroommeting en akoestische generator gebaseerd daarop. |
DE19605180A1 (de) * | 1996-02-13 | 1997-08-14 | Daimler Benz Ag | Anemometer |
JP3981907B2 (ja) | 1998-10-21 | 2007-09-26 | 株式会社デンソー | 流量測定装置 |
JP3513041B2 (ja) * | 1999-01-25 | 2004-03-31 | 三菱電機株式会社 | 流量センサ |
JP2007101561A (ja) * | 1999-06-14 | 2007-04-19 | Yamatake Corp | 流速検出器 |
US6502459B1 (en) * | 2000-09-01 | 2003-01-07 | Honeywell International Inc. | Microsensor for measuring velocity and angular direction of an incoming air stream |
JP4474771B2 (ja) | 2000-12-20 | 2010-06-09 | 株式会社デンソー | 流量測定装置 |
US6631638B2 (en) * | 2001-01-30 | 2003-10-14 | Rosemount Aerospace Inc. | Fluid flow sensor |
DE10146321B4 (de) * | 2001-09-20 | 2008-08-14 | Robert Bosch Gmbh | Sensorbaustein mit einem Sensorelement, das von einem Heizelement umgeben ist |
US20030130624A1 (en) * | 2002-01-07 | 2003-07-10 | Kowalik Francis C. | Medical infusion system with integrated power supply and pump therefor |
DE10322012A1 (de) * | 2003-05-16 | 2004-12-02 | Robert Bosch Gmbh | Durchflusssensor mit verbessertem Betriebsverhalten |
IL157354A0 (en) * | 2003-08-12 | 2004-02-19 | Apparatus for determining the amount of milk breast-fed to a baby | |
DE102005051672A1 (de) * | 2005-10-28 | 2007-05-03 | Hydac Electronic Gmbh | Mehrdimensionaler Fluidströmungssensor |
DE102005061703A1 (de) * | 2005-12-21 | 2007-07-05 | Innovative Sensor Technology Ist Ag | Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgrösse und Verfahren zur Herstellung einer entsprechenden Sensoreinheit |
ATE553361T1 (de) * | 2006-10-23 | 2012-04-15 | Ust Umweltsensortechnik Gmbh | Hochtemperatursensor und verfahren zu dessen überprüfung |
DE102007023824B4 (de) * | 2007-05-21 | 2010-01-07 | Abb Ag | Thermischer Massendurchflussmesser |
US7500392B1 (en) | 2007-10-11 | 2009-03-10 | Memsys, Inc. | Solid state microanemometer device and method of fabrication |
JP2012189571A (ja) * | 2011-02-24 | 2012-10-04 | Renesas Electronics Corp | 半導体装置及びその製造方法 |
JP5696605B2 (ja) * | 2011-07-01 | 2015-04-08 | 東京エレクトロン株式会社 | 基板処理装置のデータ取得方法及び基板処理装置 |
JP5704129B2 (ja) * | 2012-06-22 | 2015-04-22 | 東京エレクトロン株式会社 | 基板処理装置のデータ取得方法及びセンサ用基板 |
CN103217550B (zh) * | 2013-03-29 | 2015-04-22 | 北京遥测技术研究所 | 铂热栅式风速风向传感器 |
JP6669957B2 (ja) | 2015-09-30 | 2020-03-18 | ミツミ電機株式会社 | 流量センサ |
CN108351243B (zh) * | 2015-11-24 | 2020-04-10 | Ifm电子股份有限公司 | 热流量计及操作流量计的方法 |
US10168349B2 (en) * | 2016-09-08 | 2019-01-01 | Robert Bosch Gmbh | Bolometer fluid flow sensor |
JP7235218B2 (ja) * | 2019-03-04 | 2023-03-08 | ミネベアミツミ株式会社 | 流体センサ |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3677085A (en) * | 1970-04-08 | 1972-07-18 | Yugen Kaisha Tsukasa Sokken | Tandem-type hot-wire velocity meter probe |
US3995481A (en) * | 1973-02-07 | 1976-12-07 | Environmental Instruments, Inc. | Directional fluid flow transducer |
US4024761A (en) * | 1976-06-11 | 1977-05-24 | Kyma Corporation | Directional hot film anemometer transducer |
US4135396A (en) * | 1978-04-24 | 1979-01-23 | The Trane Company | Temperature compensating fluid velocity sensing apparatus |
DE2925975A1 (de) * | 1979-06-27 | 1981-01-15 | Siemens Ag | Mengendurchflussmesser |
JPS56162014A (en) * | 1980-05-16 | 1981-12-12 | Nippon Denso Co Ltd | Measuring device for flow rate of gas |
DE3024417A1 (de) * | 1980-06-28 | 1982-01-21 | William Buchanan Falmouth Mass. Kerfoot | Verfahren und vorrichtung zur messung einer stroemungscharakteristik |
US4478076A (en) * | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
JPS604815A (ja) * | 1983-06-23 | 1985-01-11 | Nippon Soken Inc | 流量測定装置 |
US4637253A (en) * | 1984-05-22 | 1987-01-20 | Kabushiki Kaisha Toshiba | Semiconductor flow detector for detecting the flow rate and flowing direction of fluid |
US4576050A (en) * | 1984-08-29 | 1986-03-18 | General Motors Corporation | Thermal diffusion fluid flow sensor |
JPS61133866A (ja) * | 1984-12-03 | 1986-06-21 | Toyota Central Res & Dev Lab Inc | 流動状態検出センサ |
JPS61194317A (ja) * | 1985-02-25 | 1986-08-28 | Nippon Soken Inc | 直熱型流量センサ |
-
1987
- 1987-03-31 JP JP62079244A patent/JPH0810231B2/ja not_active Expired - Fee Related
-
1988
- 1988-03-31 DE DE8888302969T patent/DE3877795T2/de not_active Expired - Fee Related
- 1988-03-31 EP EP88302969A patent/EP0285451B1/de not_active Expired - Lifetime
- 1988-03-31 US US07/175,561 patent/US4885937A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0285451A1 (de) | 1988-10-05 |
JPH0810231B2 (ja) | 1996-01-31 |
US4885937A (en) | 1989-12-12 |
EP0285451B1 (de) | 1993-01-27 |
JPS63243885A (ja) | 1988-10-11 |
DE3877795T2 (de) | 1993-05-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |