DE3883995D1 - Drucksensor. - Google Patents
Drucksensor.Info
- Publication number
- DE3883995D1 DE3883995D1 DE88901955T DE3883995T DE3883995D1 DE 3883995 D1 DE3883995 D1 DE 3883995D1 DE 88901955 T DE88901955 T DE 88901955T DE 3883995 T DE3883995 T DE 3883995T DE 3883995 D1 DE3883995 D1 DE 3883995D1
- Authority
- DE
- Germany
- Prior art keywords
- pressure sensor
- sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE8700556A SE459887B (sv) | 1987-02-12 | 1987-02-12 | Tryckgivare |
PCT/SE1988/000049 WO1988006281A1 (en) | 1987-02-12 | 1988-02-11 | Pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3883995D1 true DE3883995D1 (de) | 1993-10-14 |
DE3883995T2 DE3883995T2 (de) | 1994-03-24 |
Family
ID=20367493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE88901955T Expired - Fee Related DE3883995T2 (de) | 1987-02-12 | 1988-02-11 | Drucksensor. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4935841A (de) |
EP (1) | EP0409827B1 (de) |
JP (1) | JP2559266B2 (de) |
DE (1) | DE3883995T2 (de) |
SE (1) | SE459887B (de) |
WO (1) | WO1988006281A1 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE461300B (sv) * | 1988-05-17 | 1990-01-29 | Hydrolab Ab | Tryckmaetare |
US5050034A (en) * | 1990-01-22 | 1991-09-17 | Endress U. Hauser Gmbh U. Co. | Pressure sensor and method of manufacturing same |
DE4136995C2 (de) * | 1991-11-11 | 1996-08-08 | Sensycon Ind Sensorsyst | Kapazitiver Drucksensor |
DE69316536T2 (de) * | 1992-11-06 | 1998-06-04 | Texas Instruments Inc | Verfahren zur Herstellung eines kapazitiven Druckwandlers |
SE506558C2 (sv) * | 1994-04-14 | 1998-01-12 | Cecap Ab | Givarelement för tryckgivare |
DE19509250C1 (de) * | 1995-03-15 | 1996-09-12 | Bosch Gmbh Robert | Verfahren zur Herstellung eines Drucksensors |
US5965821A (en) * | 1997-07-03 | 1999-10-12 | Mks Instruments, Inc. | Pressure sensor |
US20040099061A1 (en) * | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
FR2818676B1 (fr) * | 2000-12-27 | 2003-03-07 | Freyssinet Int Stup | Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre |
WO2004016168A1 (en) * | 2002-08-19 | 2004-02-26 | Czarnek & Orkin Laboratories, Inc. | Capacitive uterine contraction sensor |
US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
US7201057B2 (en) * | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
US7137301B2 (en) * | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
US7141447B2 (en) * | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
US7204150B2 (en) | 2005-01-14 | 2007-04-17 | Mks Instruments, Inc. | Turbo sump for use with capacitive pressure sensor |
FI125447B (en) * | 2013-06-04 | 2015-10-15 | Murata Manufacturing Co | Improved pressure sensor |
TWI550261B (zh) * | 2014-03-17 | 2016-09-21 | 立錡科技股份有限公司 | 微機電壓力計以及其製作方法 |
CN104316227B (zh) * | 2014-11-05 | 2016-07-13 | 中国人民解放军总参谋部工程兵科研三所 | 一种双面感压式土压力传感器 |
DE102018101332A1 (de) * | 2018-01-22 | 2019-07-25 | Conbee Gmbh | Getränkeuntersetzer, System mit einem Getränkeuntersetzer sowie Verfahren zur Datenkommunikation in einem System mit einem Getränkeuntersetzer |
DE102018119835A1 (de) | 2018-08-15 | 2020-02-20 | Chemische Fabrik Budenheim Kg | Polymerzusammensetzung mit Phosphonatflammschutzmittel |
US12056994B2 (en) * | 2020-07-15 | 2024-08-06 | Xerox Corporation | Systems and methods for improved object placement sensing for point-of-purchase sales |
US12009159B2 (en) | 2021-04-13 | 2024-06-11 | Xerox Corporation | Membrane switches configured to sense pressure applied from compliant and rigid objects |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4415948A (en) * | 1981-10-13 | 1983-11-15 | United Technologies Corporation | Electrostatic bonded, silicon capacitive pressure transducer |
US4422125A (en) * | 1982-05-21 | 1983-12-20 | The Bendix Corporation | Pressure transducer with an invariable reference capacitor |
DE3404262A1 (de) * | 1983-03-09 | 1984-09-13 | Fuji Electric Co., Ltd., Kawasaki | Kapazitiver messfuehler |
US4562742A (en) * | 1984-08-07 | 1986-01-07 | Bell Microcomponents, Inc. | Capacitive pressure transducer |
FI75426C (fi) * | 1984-10-11 | 1988-06-09 | Vaisala Oy | Absoluttryckgivare. |
US4586109A (en) * | 1985-04-01 | 1986-04-29 | Bourns Instruments, Inc. | Batch-process silicon capacitive pressure sensor |
FI78784C (fi) * | 1988-01-18 | 1989-09-11 | Vaisala Oy | Tryckgivarkonstruktion och foerfarande foer framstaellning daerav. |
-
1987
- 1987-02-12 SE SE8700556A patent/SE459887B/sv not_active IP Right Cessation
-
1988
- 1988-02-11 DE DE88901955T patent/DE3883995T2/de not_active Expired - Fee Related
- 1988-02-11 EP EP88901955A patent/EP0409827B1/de not_active Expired - Lifetime
- 1988-02-11 JP JP63501864A patent/JP2559266B2/ja not_active Expired - Fee Related
- 1988-02-11 WO PCT/SE1988/000049 patent/WO1988006281A1/en active IP Right Grant
-
1989
- 1989-02-11 US US07/411,501 patent/US4935841A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
SE8700556L (sv) | 1988-08-13 |
WO1988006281A1 (en) | 1988-08-25 |
US4935841A (en) | 1990-06-19 |
SE459887B (sv) | 1989-08-14 |
DE3883995T2 (de) | 1994-03-24 |
JP2559266B2 (ja) | 1996-12-04 |
EP0409827B1 (de) | 1993-09-08 |
JPH02502218A (ja) | 1990-07-19 |
EP0409827A1 (de) | 1991-01-30 |
SE8700556D0 (sv) | 1987-02-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: CCM-INSTRUMENTS AB, HAMMARLAND, SE |
|
8339 | Ceased/non-payment of the annual fee |