DE3865615D1 - Startverfahren fuer die serie geschaltete vakuumpumpen und einrichtung zur anwendung des verfahrens. - Google Patents
Startverfahren fuer die serie geschaltete vakuumpumpen und einrichtung zur anwendung des verfahrens.Info
- Publication number
- DE3865615D1 DE3865615D1 DE8888115311T DE3865615T DE3865615D1 DE 3865615 D1 DE3865615 D1 DE 3865615D1 DE 8888115311 T DE8888115311 T DE 8888115311T DE 3865615 T DE3865615 T DE 3865615T DE 3865615 D1 DE3865615 D1 DE 3865615D1
- Authority
- DE
- Germany
- Prior art keywords
- pump
- primary pump
- vacuum pumps
- applying
- starting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/02—Stopping, starting, unloading or idling control
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Control Of Positive-Displacement Air Blowers (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Jet Pumps And Other Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8713267A FR2621141B1 (fr) | 1987-09-25 | 1987-09-25 | Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3865615D1 true DE3865615D1 (de) | 1991-11-21 |
Family
ID=9355219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888115311T Expired - Fee Related DE3865615D1 (de) | 1987-09-25 | 1988-09-19 | Startverfahren fuer die serie geschaltete vakuumpumpen und einrichtung zur anwendung des verfahrens. |
Country Status (8)
Country | Link |
---|---|
US (1) | US4887941A (de) |
EP (1) | EP0308846B1 (de) |
JP (1) | JPH01106980A (de) |
AT (1) | ATE68565T1 (de) |
DE (1) | DE3865615D1 (de) |
ES (1) | ES2026620T3 (de) |
FR (1) | FR2621141B1 (de) |
GR (1) | GR3003251T3 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02102385A (ja) * | 1988-10-08 | 1990-04-13 | Toyo Eng Corp | 排気装置 |
FR2652390B1 (fr) * | 1989-09-27 | 1991-11-29 | Cit Alcatel | Groupe de pompage a vide. |
US5217273A (en) * | 1992-05-14 | 1993-06-08 | H-Square Corporation | Serial pumping for portable handling tool of electronic workpieces |
JP3847357B2 (ja) * | 1994-06-28 | 2006-11-22 | 株式会社荏原製作所 | 真空系の排気装置 |
JP3406834B2 (ja) * | 1998-05-19 | 2003-05-19 | 株式会社東海理化電機製作所 | モータ駆動回路 |
JP3929185B2 (ja) * | 1998-05-20 | 2007-06-13 | 株式会社荏原製作所 | 真空排気装置及び方法 |
US6045331A (en) * | 1998-08-10 | 2000-04-04 | Gehm; William | Fluid pump speed controller |
JP2002541541A (ja) * | 1999-04-07 | 2002-12-03 | アルカテル | 真空チャンバ内の圧力を調整するためのシステム、このシステムを装備した真空ポンピングユニット |
DE10130426B4 (de) * | 2001-06-23 | 2021-03-18 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
DE20214764U1 (de) * | 2002-09-19 | 2002-11-21 | Stöber Antriebstechnik GmbH & Co, 75177 Pforzheim | Schalteinrichtung zur Ansteuerung wenigstens zweier Motoren |
US7033142B2 (en) * | 2003-01-24 | 2006-04-25 | Pfeifer Vacuum Gmbh | Vacuum pump system for light gases |
JP2004324644A (ja) * | 2003-04-10 | 2004-11-18 | Ebara Corp | ドライ真空ポンプ及びその起動方法 |
JP4218756B2 (ja) * | 2003-10-17 | 2009-02-04 | 株式会社荏原製作所 | 真空排気装置 |
US7028491B2 (en) * | 2004-03-29 | 2006-04-18 | Tecumseh Products Company | Method and apparatus for reducing inrush current in a multi-stage compressor |
GB0418771D0 (en) * | 2004-08-20 | 2004-09-22 | Boc Group Plc | Evacuation of a load lock enclosure |
US20070020115A1 (en) * | 2005-07-01 | 2007-01-25 | The Boc Group, Inc. | Integrated pump apparatus for semiconductor processing |
JP4737770B2 (ja) * | 2006-09-12 | 2011-08-03 | アネスト岩田株式会社 | 真空ポンプの運転制御装置および方法 |
US8506259B2 (en) | 2009-12-23 | 2013-08-13 | Solar Turbines Inc. | Fluid compression system |
FR2969721B1 (fr) * | 2010-12-23 | 2013-01-04 | Fontaine Piscines | Dispositif de vidange soufflant et procede de vidange par soufflage |
US10428807B2 (en) * | 2011-12-09 | 2019-10-01 | Applied Materials, Inc. | Pump power consumption enhancement |
JP2018178846A (ja) * | 2017-04-12 | 2018-11-15 | 株式会社荏原製作所 | 真空ポンプ装置の運転制御装置、及び運転制御方法 |
JP7218706B2 (ja) * | 2019-10-18 | 2023-02-07 | 株式会社島津製作所 | 真空排気装置および真空排気装置の起動方法 |
CN111306027B (zh) * | 2020-02-17 | 2022-11-11 | 柳州柳工挖掘机有限公司 | 旋挖钻机主泵功率控制方法及*** |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2246932A (en) * | 1939-09-21 | 1941-06-24 | Chicago Pneumatic Tool Co | Combination single and two stage vacuum pump |
US2295775A (en) * | 1940-10-31 | 1942-09-15 | Westinghouse Air Brake Co | Compressor control apparatus |
US2926835A (en) * | 1955-02-24 | 1960-03-01 | Heraeus Gmbh W C | Vacuum pump control apparatus |
DE2430314C3 (de) * | 1974-06-24 | 1982-11-25 | Siemens AG, 1000 Berlin und 8000 München | Flüssigkeitsring-Vakuumpumpe mit vorgeschaltetem Verdichter |
JPS6010190B2 (ja) * | 1976-04-20 | 1985-03-15 | 松下電器産業株式会社 | 圧縮機 |
DE3208928A1 (de) * | 1982-02-02 | 1983-09-22 | Alfred Dipl.-Ing.(FH) 7257 Ditzingen Wieland | Vakuumanlage fuer kraftfahrzeuge |
US4699570A (en) * | 1986-03-07 | 1987-10-13 | Itt Industries, Inc | Vacuum pump system |
JPH0784871B2 (ja) * | 1986-06-12 | 1995-09-13 | 株式会社日立製作所 | 真空排気装置 |
US4767280A (en) * | 1987-08-26 | 1988-08-30 | Markuson Neil D | Computerized controller with service display panel for an oil well pumping motor |
-
1987
- 1987-09-25 FR FR8713267A patent/FR2621141B1/fr not_active Expired
-
1988
- 1988-09-19 AT AT88115311T patent/ATE68565T1/de not_active IP Right Cessation
- 1988-09-19 EP EP88115311A patent/EP0308846B1/de not_active Expired - Lifetime
- 1988-09-19 DE DE8888115311T patent/DE3865615D1/de not_active Expired - Fee Related
- 1988-09-19 ES ES198888115311T patent/ES2026620T3/es not_active Expired - Lifetime
- 1988-09-21 JP JP63237471A patent/JPH01106980A/ja active Granted
- 1988-09-26 US US07/249,154 patent/US4887941A/en not_active Expired - Fee Related
-
1991
- 1991-12-02 GR GR91401879T patent/GR3003251T3/el unknown
Also Published As
Publication number | Publication date |
---|---|
ES2026620T3 (es) | 1992-05-01 |
JPH01106980A (ja) | 1989-04-24 |
EP0308846B1 (de) | 1991-10-16 |
US4887941A (en) | 1989-12-19 |
ATE68565T1 (de) | 1991-11-15 |
FR2621141B1 (fr) | 1989-12-01 |
EP0308846A1 (de) | 1989-03-29 |
JPH0238796B2 (de) | 1990-08-31 |
FR2621141A1 (fr) | 1989-03-31 |
GR3003251T3 (en) | 1993-02-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8339 | Ceased/non-payment of the annual fee |