DE3861707D1 - Mos-transistoren fuer hohe spannungen. - Google Patents
Mos-transistoren fuer hohe spannungen.Info
- Publication number
- DE3861707D1 DE3861707D1 DE8888106404T DE3861707T DE3861707D1 DE 3861707 D1 DE3861707 D1 DE 3861707D1 DE 8888106404 T DE8888106404 T DE 8888106404T DE 3861707 T DE3861707 T DE 3861707T DE 3861707 D1 DE3861707 D1 DE 3861707D1
- Authority
- DE
- Germany
- Prior art keywords
- high voltage
- mos transistors
- mos
- transistors
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0925—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors comprising an N-well only in the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/107—Substrate region of field-effect devices
- H01L29/1075—Substrate region of field-effect devices of field-effect transistors
- H01L29/1079—Substrate region of field-effect devices of field-effect transistors with insulated gate
- H01L29/1087—Substrate region of field-effect devices of field-effect transistors with insulated gate characterised by the contact structure of the substrate region, e.g. for controlling or preventing bipolar effect
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7835—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1041—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface
- H01L29/1045—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface the doping structure being parallel to the channel length, e.g. DMOS like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/105—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with vertical doping variation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7831—Field effect transistors with field effect produced by an insulated gate with multiple gate structure
- H01L29/7832—Field effect transistors with field effect produced by an insulated gate with multiple gate structure the structure comprising a MOS gate and at least one non-MOS gate, e.g. JFET or MESFET gate
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/041,994 US4811075A (en) | 1987-04-24 | 1987-04-24 | High voltage MOS transistors |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3861707D1 true DE3861707D1 (de) | 1991-03-07 |
Family
ID=21919482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888106404T Expired - Lifetime DE3861707D1 (de) | 1987-04-24 | 1988-04-21 | Mos-transistoren fuer hohe spannungen. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4811075A (de) |
EP (1) | EP0295391B1 (de) |
JP (2) | JP2529717B2 (de) |
DE (1) | DE3861707D1 (de) |
Families Citing this family (93)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5264719A (en) * | 1986-01-07 | 1993-11-23 | Harris Corporation | High voltage lateral semiconductor device |
JPS6480070A (en) * | 1987-09-21 | 1989-03-24 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
US5047820A (en) * | 1988-09-14 | 1991-09-10 | Micrel, Inc. | Semi self-aligned high voltage P channel FET |
EP0468630A3 (en) * | 1990-07-27 | 1993-02-03 | Actel Corporation | Method of increasing the breakdown voltage of a mos transistor without changing the fabrication process |
JPH04107874A (ja) * | 1990-08-27 | 1992-04-09 | Matsushita Electron Corp | 半導体装置の製造方法 |
JPH04107871A (ja) * | 1990-08-27 | 1992-04-09 | Matsushita Electron Corp | 半導体装置およびそれを用いたイグナイタ装置 |
US5072268A (en) * | 1991-03-12 | 1991-12-10 | Power Integrations, Inc. | MOS gated bipolar transistor |
JPH05299649A (ja) * | 1991-03-19 | 1993-11-12 | Nec Corp | 半導体装置 |
US5146298A (en) * | 1991-08-16 | 1992-09-08 | Eklund Klas H | Device which functions as a lateral double-diffused insulated gate field effect transistor or as a bipolar transistor |
US5258636A (en) * | 1991-12-12 | 1993-11-02 | Power Integrations, Inc. | Narrow radius tips for high voltage semiconductor devices with interdigitated source and drain electrodes |
US5304836A (en) * | 1992-05-04 | 1994-04-19 | Xerox Corporation | High voltage field effect transistor having a small ratio of channel width to channel length and method of manufacture |
US5294824A (en) * | 1992-07-31 | 1994-03-15 | Motorola, Inc. | High voltage transistor having reduced on-resistance |
JP3158738B2 (ja) * | 1992-08-17 | 2001-04-23 | 富士電機株式会社 | 高耐圧mis電界効果トランジスタおよび半導体集積回路 |
US5282107A (en) * | 1992-09-01 | 1994-01-25 | Power Integrations, Inc. | Power MOSFET safe operating area current limiting device |
US5274259A (en) * | 1993-02-01 | 1993-12-28 | Power Integrations, Inc. | High voltage transistor |
US5313082A (en) * | 1993-02-16 | 1994-05-17 | Power Integrations, Inc. | High voltage MOS transistor with a low on-resistance |
US5477175A (en) * | 1993-10-25 | 1995-12-19 | Motorola | Off-line bootstrap startup circuit |
JPH07297409A (ja) * | 1994-03-02 | 1995-11-10 | Toyota Motor Corp | 電界効果型半導体装置 |
US5479033A (en) * | 1994-05-27 | 1995-12-26 | Sandia Corporation | Complementary junction heterostructure field-effect transistor |
JP3228093B2 (ja) * | 1995-06-28 | 2001-11-12 | 富士電機株式会社 | 高耐圧ic |
JP2755247B2 (ja) * | 1996-02-28 | 1998-05-20 | 日本電気株式会社 | 半導体装置 |
US6207994B1 (en) * | 1996-11-05 | 2001-03-27 | Power Integrations, Inc. | High-voltage transistor with multi-layer conduction region |
US6639277B2 (en) | 1996-11-05 | 2003-10-28 | Power Integrations, Inc. | High-voltage transistor with multi-layer conduction region |
US6168983B1 (en) | 1996-11-05 | 2001-01-02 | Power Integrations, Inc. | Method of making a high-voltage transistor with multiple lateral conduction layers |
JP3175923B2 (ja) * | 1997-11-05 | 2001-06-11 | 松下電子工業株式会社 | 半導体装置 |
JP3142057B2 (ja) | 1997-11-13 | 2001-03-07 | 日本電気株式会社 | 半導体装置とその製造方法、及び駆動装置 |
DE19828191C1 (de) * | 1998-06-24 | 1999-07-29 | Siemens Ag | Lateral-Hochspannungstransistor |
US6534829B2 (en) | 1998-06-25 | 2003-03-18 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and method for fabricating the same |
KR20000014215A (ko) | 1998-08-18 | 2000-03-06 | 김덕중 | 높은 신뢰도의 횡형 디모스 트랜지스터 및 그제조방법 |
US6084277A (en) * | 1999-02-18 | 2000-07-04 | Power Integrations, Inc. | Lateral power MOSFET with improved gate design |
DE19918028A1 (de) * | 1999-04-21 | 2000-11-02 | Siemens Ag | Halbleiter-Bauelement |
JP2001094094A (ja) | 1999-09-21 | 2001-04-06 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP4534303B2 (ja) * | 2000-04-27 | 2010-09-01 | 富士電機システムズ株式会社 | 横型超接合半導体素子 |
US6259618B1 (en) * | 2000-05-03 | 2001-07-10 | Analog And Power Electronics Corp. | Power chip set for a switching mode power supply having a device for providing a drive signal to a control unit upon startup |
US6525390B2 (en) | 2000-05-18 | 2003-02-25 | Fuji Electric Co., Ltd. | MIS semiconductor device with low on resistance and high breakdown voltage |
US6509220B2 (en) | 2000-11-27 | 2003-01-21 | Power Integrations, Inc. | Method of fabricating a high-voltage transistor |
US6768171B2 (en) | 2000-11-27 | 2004-07-27 | Power Integrations, Inc. | High-voltage transistor with JFET conduction channels |
US6424007B1 (en) * | 2001-01-24 | 2002-07-23 | Power Integrations, Inc. | High-voltage transistor with buried conduction layer |
US6617652B2 (en) | 2001-03-22 | 2003-09-09 | Matsushita Electric Industrial Co., Ltd. | High breakdown voltage semiconductor device |
KR100535062B1 (ko) * | 2001-06-04 | 2005-12-07 | 마츠시타 덴끼 산교 가부시키가이샤 | 고내압 반도체장치 |
US20030001216A1 (en) * | 2001-06-27 | 2003-01-02 | Motorola, Inc. | Semiconductor component and method of manufacturing |
EP1421612B1 (de) * | 2001-08-17 | 2009-04-22 | IHP GmbH-Innovations for High Performance Microelectronics/Institut für innovative Mikroelektronik | LDMOS-Transistor und dessen Herstellungsverfahren |
DE10140628A1 (de) * | 2001-08-17 | 2003-03-06 | Ihp Gmbh | DMOS-Transistor |
US7221011B2 (en) * | 2001-09-07 | 2007-05-22 | Power Integrations, Inc. | High-voltage vertical transistor with a multi-gradient drain doping profile |
US7786533B2 (en) * | 2001-09-07 | 2010-08-31 | Power Integrations, Inc. | High-voltage vertical transistor with edge termination structure |
US6573558B2 (en) * | 2001-09-07 | 2003-06-03 | Power Integrations, Inc. | High-voltage vertical transistor with a multi-layered extended drain structure |
US6635544B2 (en) * | 2001-09-07 | 2003-10-21 | Power Intergrations, Inc. | Method of fabricating a high-voltage transistor with a multi-layered extended drain structure |
US6555873B2 (en) * | 2001-09-07 | 2003-04-29 | Power Integrations, Inc. | High-voltage lateral transistor with a multi-layered extended drain structure |
US6865093B2 (en) * | 2003-05-27 | 2005-03-08 | Power Integrations, Inc. | Electronic circuit control element with tap element |
US6867640B2 (en) * | 2003-07-01 | 2005-03-15 | Ami Semiconductor, Inc. | Double-sided extended drain field effect transistor, and integrated overvoltage and reverse voltage protection circuit that uses the same |
US7049669B2 (en) * | 2003-09-15 | 2006-05-23 | Infineon Technologies Ag | LDMOS transistor |
US6989567B2 (en) * | 2003-10-03 | 2006-01-24 | Infineon Technologies North America Corp. | LDMOS transistor |
US6943069B2 (en) * | 2003-10-14 | 2005-09-13 | Semiconductor Components Industries, L.L.C. | Power system inhibit method and device and structure therefor |
US6903421B1 (en) | 2004-01-16 | 2005-06-07 | System General Corp. | Isolated high-voltage LDMOS transistor having a split well structure |
US7119399B2 (en) * | 2004-02-27 | 2006-10-10 | Infineon Technologies Ag | LDMOS transistor |
US7221034B2 (en) * | 2004-02-27 | 2007-05-22 | Infineon Technologies Ag | Semiconductor structure including vias |
US7002398B2 (en) | 2004-07-08 | 2006-02-21 | Power Integrations, Inc. | Method and apparatus for controlling a circuit with a high voltage sense device |
WO2006054148A1 (en) * | 2004-11-16 | 2006-05-26 | Acco | An integrated ultra-wideband (uwb) pulse generator |
US7365402B2 (en) * | 2005-01-06 | 2008-04-29 | Infineon Technologies Ag | LDMOS transistor |
EP2544241A3 (de) | 2005-10-12 | 2013-03-20 | Acco | Feldeffekttransistor mit isoliertem Gate, der ein Dummy-Gate aufweist |
JP5431663B2 (ja) * | 2006-09-15 | 2014-03-05 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 半導体装置及びその製造方法 |
TW200814320A (en) * | 2006-09-15 | 2008-03-16 | Sanyo Electric Co | Semiconductor device and method for making same |
JP2008124421A (ja) * | 2006-10-17 | 2008-05-29 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
US7595523B2 (en) * | 2007-02-16 | 2009-09-29 | Power Integrations, Inc. | Gate pullback at ends of high-voltage vertical transistor structure |
US7557406B2 (en) * | 2007-02-16 | 2009-07-07 | Power Integrations, Inc. | Segmented pillar layout for a high-voltage vertical transistor |
US7468536B2 (en) | 2007-02-16 | 2008-12-23 | Power Integrations, Inc. | Gate metal routing for transistor with checkerboarded layout |
US8653583B2 (en) * | 2007-02-16 | 2014-02-18 | Power Integrations, Inc. | Sensing FET integrated with a high-voltage transistor |
US7859037B2 (en) | 2007-02-16 | 2010-12-28 | Power Integrations, Inc. | Checkerboarded high-voltage vertical transistor layout |
US7626233B2 (en) * | 2007-04-23 | 2009-12-01 | Infineon Technologies Ag | LDMOS device |
WO2009050465A1 (en) | 2007-10-16 | 2009-04-23 | Xtera Communications Ltd. | Phase shift keyed high speed signaling |
US7863645B2 (en) * | 2008-02-13 | 2011-01-04 | ACCO Semiconductor Inc. | High breakdown voltage double-gate semiconductor device |
US9240402B2 (en) | 2008-02-13 | 2016-01-19 | Acco Semiconductor, Inc. | Electronic circuits including a MOSFET and a dual-gate JFET |
US8928410B2 (en) | 2008-02-13 | 2015-01-06 | Acco Semiconductor, Inc. | Electronic circuits including a MOSFET and a dual-gate JFET |
US7969243B2 (en) * | 2009-04-22 | 2011-06-28 | Acco Semiconductor, Inc. | Electronic circuits including a MOSFET and a dual-gate JFET |
SE533026C2 (sv) * | 2008-04-04 | 2010-06-08 | Klas-Haakan Eklund | Fälteffekttransistor med isolerad gate seriekopplad med en JFET |
JP2009259972A (ja) * | 2008-04-15 | 2009-11-05 | Panasonic Corp | 半導体装置、及び該半導体装置を用いたエネルギー伝達装置 |
JP2009260119A (ja) * | 2008-04-18 | 2009-11-05 | Panasonic Corp | 半導体装置、及び該半導体装置を用いたエネルギー伝達装置 |
JP5150389B2 (ja) * | 2008-07-01 | 2013-02-20 | シャープ株式会社 | 半導体装置 |
JP2010016180A (ja) * | 2008-07-03 | 2010-01-21 | Panasonic Corp | 半導体装置 |
US7851857B2 (en) * | 2008-07-30 | 2010-12-14 | Freescale Semiconductor, Inc. | Dual current path LDMOSFET with graded PBL for ultra high voltage smart power applications |
US7808415B1 (en) * | 2009-03-25 | 2010-10-05 | Acco Semiconductor, Inc. | Sigma-delta modulator including truncation and applications thereof |
US7952431B2 (en) * | 2009-08-28 | 2011-05-31 | Acco Semiconductor, Inc. | Linearization circuits and methods for power amplification |
US9627524B2 (en) * | 2010-03-02 | 2017-04-18 | Richtek Technology Corporation, R.O.C. | High voltage metal oxide semiconductor device and method for making same |
US8532584B2 (en) | 2010-04-30 | 2013-09-10 | Acco Semiconductor, Inc. | RF switches |
US8867245B1 (en) | 2010-09-27 | 2014-10-21 | Champion Microelectronic Corporation | Switching power supply having high-power integrated circuit and monolithic integrated circuit therefor |
CN102544092A (zh) * | 2010-12-16 | 2012-07-04 | 无锡华润上华半导体有限公司 | Cmos器件及其制造方法 |
US9660053B2 (en) | 2013-07-12 | 2017-05-23 | Power Integrations, Inc. | High-voltage field-effect transistor having multiple implanted layers |
US10325988B2 (en) | 2013-12-13 | 2019-06-18 | Power Integrations, Inc. | Vertical transistor device structure with cylindrically-shaped field plates |
US9543396B2 (en) | 2013-12-13 | 2017-01-10 | Power Integrations, Inc. | Vertical transistor device structure with cylindrically-shaped regions |
US9570547B2 (en) | 2014-12-09 | 2017-02-14 | General Electronics Applications, Inc. | Monolithic DMOS transistor in junction isolated process |
US10135357B1 (en) | 2017-09-07 | 2018-11-20 | Power Integrations, Inc. | Threshold detection with tap |
SE542311C2 (en) | 2018-03-16 | 2020-04-07 | Klas Haakan Eklund Med Firma K Eklund Innovation | A semiconductor device comprising a low voltage insulated gate field effect transistor connected in series with a high voltage field effect transistor |
US11031480B2 (en) | 2019-09-13 | 2021-06-08 | K. Eklund Innovation | Semiconductor device, comprising an insulated gate field effect transistor connected in series with a field effect transistor |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5435470B2 (de) * | 1973-05-22 | 1979-11-02 | ||
US4626879A (en) * | 1982-12-21 | 1986-12-02 | North American Philips Corporation | Lateral double-diffused MOS transistor devices suitable for source-follower applications |
DE3370409D1 (en) * | 1982-12-21 | 1987-04-23 | Philips Nv | Lateral dmos transistor devices suitable for sourcefollower applications |
FR2571178B1 (fr) * | 1984-09-28 | 1986-11-21 | Thomson Csf | Structure de circuit integre comportant des transistors cmos a tenue en tension elevee, et son procede de fabrication |
-
1987
- 1987-04-24 US US07/041,994 patent/US4811075A/en not_active Expired - Lifetime
-
1988
- 1988-04-21 EP EP88106404A patent/EP0295391B1/de not_active Expired - Lifetime
- 1988-04-21 DE DE8888106404T patent/DE3861707D1/de not_active Expired - Lifetime
- 1988-04-22 JP JP63100015A patent/JP2529717B2/ja not_active Expired - Lifetime
-
1995
- 1995-06-28 JP JP7196950A patent/JP2804460B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0295391B1 (de) | 1991-01-30 |
JP2804460B2 (ja) | 1998-09-24 |
US4811075A (en) | 1989-03-07 |
JPS63314869A (ja) | 1988-12-22 |
EP0295391A1 (de) | 1988-12-21 |
JP2529717B2 (ja) | 1996-09-04 |
JPH08172184A (ja) | 1996-07-02 |
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