DE3381622D1 - Halbleiter-speicheranordnung. - Google Patents
Halbleiter-speicheranordnung.Info
- Publication number
- DE3381622D1 DE3381622D1 DE8383303762T DE3381622T DE3381622D1 DE 3381622 D1 DE3381622 D1 DE 3381622D1 DE 8383303762 T DE8383303762 T DE 8383303762T DE 3381622 T DE3381622 T DE 3381622T DE 3381622 D1 DE3381622 D1 DE 3381622D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor memory
- memory arrangement
- arrangement
- semiconductor
- memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
- H01L23/556—Protection against radiation, e.g. light or electromagnetic waves against alpha rays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Toxicology (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Element Separation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57113239A JPS602782B2 (ja) | 1982-06-30 | 1982-06-30 | 半導体記憶装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3381622D1 true DE3381622D1 (de) | 1990-07-05 |
Family
ID=14607089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383303762T Expired - Fee Related DE3381622D1 (de) | 1982-06-30 | 1983-06-29 | Halbleiter-speicheranordnung. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4635085A (de) |
EP (1) | EP0098165B1 (de) |
JP (1) | JPS602782B2 (de) |
DE (1) | DE3381622D1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0618257B2 (ja) * | 1984-04-28 | 1994-03-09 | 富士通株式会社 | 半導体記憶装置の製造方法 |
EP0194682B1 (de) * | 1985-03-13 | 1991-01-23 | Kabushiki Kaisha Toshiba | Halbleiterspeichervorrichtung |
US4884238A (en) * | 1988-03-09 | 1989-11-28 | Honeywell Inc. | Read-only memory |
US5670816A (en) * | 1989-04-07 | 1997-09-23 | Kabushiki Kaisha Toshiba | Semiconductor device |
JPH079932B2 (ja) * | 1989-04-07 | 1995-02-01 | 株式会社東芝 | 半導体装置 |
KR920009748B1 (ko) * | 1990-05-31 | 1992-10-22 | 삼성전자 주식회사 | 적층형 캐패시터셀의 구조 및 제조방법 |
JP3212150B2 (ja) * | 1992-08-07 | 2001-09-25 | 株式会社日立製作所 | 半導体装置 |
US5684314A (en) * | 1996-03-18 | 1997-11-04 | Kenney; Donald M. | Trench capacitor precharge structure and leakage shield |
JPH10223853A (ja) * | 1997-02-04 | 1998-08-21 | Mitsubishi Electric Corp | 半導体装置 |
US5877051A (en) * | 1997-08-22 | 1999-03-02 | Micron Technology, Inc. | Methods of reducing alpha particle inflicted damage to SRAM cells, methods of forming integrated circuitry, and methods of forming SRAM cells |
KR100290787B1 (ko) | 1998-12-26 | 2001-07-12 | 박종섭 | 반도체 메모리 소자의 제조방법 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3387286A (en) * | 1967-07-14 | 1968-06-04 | Ibm | Field-effect transistor memory |
US3573509A (en) * | 1968-09-09 | 1971-04-06 | Texas Instruments Inc | Device for reducing bipolar effects in mos integrated circuits |
JPS5279787A (en) * | 1975-12-26 | 1977-07-05 | Toshiba Corp | Integrated circuit device |
JPS55146956A (en) * | 1979-05-02 | 1980-11-15 | Fujitsu Ltd | Semiconductor element having function for avoiding generation of soft error due to alpha ray |
JPS55156358A (en) * | 1979-05-25 | 1980-12-05 | Hitachi Ltd | Semiconductor memory device |
JPS5623771A (en) * | 1979-08-01 | 1981-03-06 | Hitachi Ltd | Semiconductor memory |
JPS5643753A (en) * | 1979-09-18 | 1981-04-22 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor memory storage |
DE3173413D1 (en) * | 1980-01-25 | 1986-02-20 | Toshiba Kk | Semiconductor memory device |
US4353086A (en) * | 1980-05-07 | 1982-10-05 | Bell Telephone Laboratories, Incorporated | Silicon integrated circuits |
JPS5832789B2 (ja) * | 1980-07-18 | 1983-07-15 | 富士通株式会社 | 半導体メモリ |
US4424526A (en) * | 1981-05-29 | 1984-01-03 | International Business Machines Corporation | Structure for collection of ionization-induced excess minority carriers in a semiconductor substrate and method for the fabrication thereof |
-
1982
- 1982-06-30 JP JP57113239A patent/JPS602782B2/ja not_active Expired
-
1983
- 1983-06-28 US US06/508,501 patent/US4635085A/en not_active Expired - Fee Related
- 1983-06-29 DE DE8383303762T patent/DE3381622D1/de not_active Expired - Fee Related
- 1983-06-29 EP EP83303762A patent/EP0098165B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS594156A (ja) | 1984-01-10 |
JPS602782B2 (ja) | 1985-01-23 |
US4635085A (en) | 1987-01-06 |
EP0098165A3 (en) | 1986-10-08 |
EP0098165B1 (de) | 1990-05-30 |
EP0098165A2 (de) | 1984-01-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |