DE3381156D1 - Verfahren zum herstellen eines kondensators auf einem substrat. - Google Patents

Verfahren zum herstellen eines kondensators auf einem substrat.

Info

Publication number
DE3381156D1
DE3381156D1 DE8383111406T DE3381156T DE3381156D1 DE 3381156 D1 DE3381156 D1 DE 3381156D1 DE 8383111406 T DE8383111406 T DE 8383111406T DE 3381156 T DE3381156 T DE 3381156T DE 3381156 D1 DE3381156 D1 DE 3381156D1
Authority
DE
Germany
Prior art keywords
condenser
producing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8383111406T
Other languages
English (en)
Inventor
James Kent Howard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3381156D1 publication Critical patent/DE3381156D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/20—Dielectrics using combinations of dielectrics from more than one of groups H01G4/02 - H01G4/06
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
DE8383111406T 1982-12-17 1983-11-15 Verfahren zum herstellen eines kondensators auf einem substrat. Expired - Fee Related DE3381156D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/450,629 US4437139A (en) 1982-12-17 1982-12-17 Laser annealed dielectric for dual dielectric capacitor

Publications (1)

Publication Number Publication Date
DE3381156D1 true DE3381156D1 (de) 1990-03-01

Family

ID=23788871

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383111406T Expired - Fee Related DE3381156D1 (de) 1982-12-17 1983-11-15 Verfahren zum herstellen eines kondensators auf einem substrat.

Country Status (4)

Country Link
US (1) US4437139A (de)
EP (1) EP0114228B1 (de)
JP (1) JPS59115511A (de)
DE (1) DE3381156D1 (de)

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US5978207A (en) * 1996-10-30 1999-11-02 The Research Foundation Of The State University Of New York Thin film capacitor
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US5742471A (en) * 1996-11-25 1998-04-21 The Regents Of The University Of California Nanostructure multilayer dielectric materials for capacitors and insulators
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JP4513172B2 (ja) * 2000-05-26 2010-07-28 宇部興産株式会社 Ｐｚｔ系結晶膜素子およびその製造方法
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KR20220057356A (ko) * 2020-10-29 2022-05-09 삼성전자주식회사 커패시터 및 이를 포함하는 반도체 장치
CN113054105A (zh) * 2021-03-09 2021-06-29 长鑫存储技术有限公司 半导体结构及其制作方法
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Also Published As

Publication number Publication date
JPS59115511A (ja) 1984-07-04
US4437139A (en) 1984-03-13
EP0114228A2 (de) 1984-08-01
JPH026205B2 (de) 1990-02-08
EP0114228B1 (de) 1990-01-24
EP0114228A3 (en) 1987-03-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee