CN2719494Y - Diamond film high-speed precision polishing device - Google Patents
Diamond film high-speed precision polishing device Download PDFInfo
- Publication number
- CN2719494Y CN2719494Y CN 200420070516 CN200420070516U CN2719494Y CN 2719494 Y CN2719494 Y CN 2719494Y CN 200420070516 CN200420070516 CN 200420070516 CN 200420070516 U CN200420070516 U CN 200420070516U CN 2719494 Y CN2719494 Y CN 2719494Y
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- polishing
- diamond film
- fixed
- vacuum
- outer cover
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- Expired - Lifetime
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Abstract
The utility model relates to a diamond film high-speed precision polishing device which comprises a bed piece, a drive set of a polishing disk, a drive set of diamond film, an outer cover of a vacuum polishing chamber and a heater, wherein, the drive set of a polishing disk is arranged in the outer cover of a vacuum polishing chamber, the drive set of a polishing disk and the outer cover of a vacuum polishing chamber are fixed on the bed piece, the drive set of diamond film is fixed on the outer cover of a vacuum polishing chamber, the heater is arranged on an upper supporting frame, and the diamond film is clamped on a polishing head. The polishing disk and the diamond film move relatively with high speed and generate friction heat, and the bottom surface of the polishing disk is heated with low temperature. Then, the temperature of a polishing surface of the diamond film is caused to reach diffusion temperature rapidly, and salient point carbon atoms on the surface of the diamond film are caused to be carried out diffusive wear towards the polishing disk which is made of metal like iron, nickel, etc. Thus, the purpose of polishing is achieved. The utility model has the advantages of simple structure, good polishing quality, high polishing efficiency, low manufacture cost, etc., and solves the problem that a polishing disk is caused to be warped and distorted badly with poor polishing planeness because heating-up temperature and the gradient of temperature distribution are too big when a hot iron sheet is polished, etc.
Description
Technical field
The utility model belongs to the superhard material polishing technology, particularly a kind of diamond film high speed and precision polishing assembling device.
Background technology
Diamond film is the pure diamond polycrystalline film by the chemical vapour deposition technique deposition, not only have high hardness and wearability, and have excellent electric insulation, thermal conductivity, light transmission and an acoustic characteristic, be regarded as the most rising new material of 21 century, all be widely used at high-technology field and national defence sophisticated technology field.Because diamond film is a polycrystalline film, the diamond film rough surface of vapour deposition, lack of homogeneity, so must be when commercial Application through grinding and polishing processing, particularly when high-technology field is used, not only require diamond film to have minimum surface roughness, and require to have high flatness.Because the diamond film extreme hardness, traditional mechanical lapping finishing method efficient is extremely low, and is difficult to reach specification requirement.Also exist a lot of problem and shortage at present in diamond film polishing processing, for example laser beam flying polishing and rare earth metal etching polishing efficiency are higher, but the polished surface quality is lower; The ion beam etching machined surface quality is higher, but working (machining) efficiency is low, cost is high, is difficult to the bigger diamond film of working (finishing) area; Though the thermo-chemical polishing technology has polished surface quality good (Ra can reach 0.0055 μ m), efficient advantages of higher, but the thermo-chemical polishing technology is to adopt high-power resistance silk heating polishing disk to 800～900 ℃, because the high thermal deformation of polishing disk temperature is big, therefore be difficult to the flatness of guarantee fund's diamond film processing, and power consumption is big, the processing cost height.
The utility model content
The purpose of this utility model is during at existing diamond film surface finish, there are technical problems such as thermograde is big between polishing disk heating-up temperature height, upper and lower surface, the polishing disk buckling deformation is big, quality of finish difference, provide a kind of diamond film high-speed low temperature simple in structure, that quality of finish good, polishing efficiency is high, production cost is low to heat precise polished device.
Polishing principles of the present utility model is: polishing disk is with high rotational speed, simultaneously polishing disk is carried out low-temperature heat in the polishing disk bottom surface, by polishing disk and the frictional heat of the high speed caused by relative motion of diamond film and the method that the low-temperature heat of polishing disk bottom surface is combined, make diamond film polished surface temperature reach the thermal diffusion temperature rapidly, utilize diamond film surface salient point carbon atom at high temperature to metal diffusion principle such as iron, nickel, the diamond film surface is polished.
The utility model comprises lathe bed, the polishing disk drive unit, the diamond film drive unit, vacuum polishing room outer cover and heater, vacuum polishing room outer cover is provided with vacuum adapter and cooling tube, the active gases air inlet pipe be connected support be arranged on vacuum polishing room outer cover above, connect support and be provided with heater strip, the polishing disk drive unit is arranged in the vacuum polishing room outer cover, and all be separately fixed on the lathe bed, described polishing disk drive unit comprises polishing disk, ring flange, supporting mass, buff spindle, fixed disk, buncher, polishing disk is arranged on the buff spindle, buff spindle is arranged in the supporting mass by bearing, supporting mass is fixed in the bearing by ring flange and fixed disk, ring flange and fixed disk are fixed on the bearing by screw respectively, upper bracket is arranged on the bearing, bearing is fixed on the lathe bed by screw, buncher is fixed on the fixed disk, and is connected with buff spindle by driving key; Heater is arranged between upper bracket and the polishing disk, and the diamond film drive unit is arranged on above the vacuum polishing room outer cover; Described diamond film drive unit comprises rubbing head, the rubbing head axle, spring, driving shaft and motor, rubbing head is fixed on the rubbing head axle, the rubbing head axle is by being set in the driving shaft, and fix by adjusting screw, the upper end of rubbing head axle is provided with spring, driving shaft is arranged in the splicing sleeve by bearing, splicing sleeve is fixed on the vacuum polishing room outer cover by end cap up and down, end cap is fixed on the upper and lower end face of vacuum polishing room outer cover by screw respectively up and down, motor is fixed on the upper end cover, and be connected with driving shaft by driving key, described heater is fixed on the upper bracket by screw, and described heater is the electromagnetism heating plate.
The utlity model has advantages such as simple in structure, that quality of finish good, polishing efficiency is high, production cost is low, it is big because of heating-up temperature height and the excessive polishing disk buckling deformation that causes of Temperature Distribution gradient to have solved thermo-chemical polishing, and diamond film surface polishing degree can't guarantee and problems such as cost height.
Description of drawings
Fig. 1 is the structural representation of the utility model diamond film high accuracy burnishing device;
Among the figure: 1 lathe bed, 2 bearings, 3 vacuum polishing room outer covers, 4 upper brackets, 5 heaters, 6 polishing disks, 7 vacuum adapters, 8 cooling tubes, 9 splicing sleeves, 10 diamond films, 11 rubbing heads, 12 rubbing head axles, 13 springs, 14 driving shafts, 15 motors, 16 active gases air inlet pipe, 17 connect support, 18 heater strips, 19 ring flanges, 20 supporting masses, 21 buff spindles, 22 fixed disks, 23 bunchers, 24 bottom end covers, 25 upper end covers.
The specific embodiment
As shown in the figure, further specify the organization plan of the present utility model and the course of work in conjunction with example.
A kind of diamond film high speed and precision burnishing device, comprise lathe bed 1, polishing disk drive unit, diamond film drive unit, vacuum polishing room outer cover 3 and heater 5, the polishing disk drive unit is arranged in the vacuum polishing room outer cover 3, and all is separately fixed on the lathe bed 1 by bolt.Vacuum polishing room outer cover 3 is arranged on the lathe bed 1, the diamond film drive unit by be bolted to vacuum polishing room outer cover 3 above, electromagnetic heater 5 is arranged on the upper bracket 4 of polishing disk drive unit; The polishing disk drive unit comprises polishing disk 6, ring flange 19, supporting mass 20, buff spindle 21, fixed disk 22, buncher 23, polishing disk 6 is screwed on buff spindle 21 by pressing plate, buff spindle 21 is arranged in the supporting mass 20 by bearing, supporting mass 20 is contained in the bearing 2, and it is fixing by ring flange 19 and fixed disk 22, ring flange 19 and fixed disk 22 are separately fixed on the upper and lower end face of bearing 2 by screw, buncher 23 is fixed on the fixed disk 22, is connected with buff spindle 21 by driving key.The diamond film drive unit comprises rubbing head 11, rubbing head axle 12, spring 13, driving shaft 14 and motor 15, rubbing head 11 is fixed on the rubbing head axle 12 by key, rubbing head axle 12 is by being sleeved in the driving shaft 14, and fix by adjustment screw, rubbing head axle 12 with the cover between be connected with key, rubbing head axle 12 can slide up and down in cover, can regulate distance between rubbing head 11 and the polishing disk 6 by adjustment screw.Spring 13 is housed in the cover of rubbing head axle 12 upper ends, is fixed on the buff spindle 12 with hold-down screw by pressing plate.Can adjust pressure size between diamond film 10 and the polishing disk 6 by changing spring force.Driving shaft 14 is arranged in the splicing sleeve 9 by bearing, splicing sleeve 9 by end cap 25 and 24 up and down be fixed on vacuum polishing room outer cover 3 above, end cap 25 and 24 is separately fixed on the upper and lower end face of vacuum polishing room outer cover 3 by screw up and down.Motor 15 is fixed on the upper end cover 25 by screw, and is connected with driving shaft 14 by driving key, and its rotating speed is 50～300r/min.Vacuum polishing room outer cover 3 is provided with vacuum adapter 7 and cooling tube 8, active gases air inlet pipe 16 be connected support 17 be fixed on vacuum polishing room outer cover 3 above, connect support 17 and be provided with heater strip 18.Because polishing disk rotates at a high speed, and carries out low-temperature heat to its bottom surface, bulk temperature is low, and thermograde is little between upper and lower surface, and the polishing disk buckling deformation is minimum, therefore makes diamond film surface polishing degree height, quality good.
The course of work of diamond film high speed and precision polishing is: earlier diamond film 10 is installed on the rubbing head 11, rubbing head 11 is done rotation counterclockwise, and rotating speed is 180r/min; Polishing disk 6 is done the clockwise direction rotation, and rotating speed is 4500r/min; The heating-up temperature of polishing disk bottom surface heater is 95～105 ℃; By vacuumizing in 7 pairs of vacuum polishing room of vacuum adapter outer cover 3, vacuum is 10
-1Pa; In vacuum polishing room outer cover 3, feed active gases by active gases air inlet pipe 16, decompose activation back active atomic that produces and the carbon reaction formation gaseous state that is diffused into above the polishing disk by electrical heating wire and get rid of, guarantee diffusion rate; In the time of 750～800 ℃, diamond film surface salient point carbon atom is to polishing disk diffusion and metal generation thermal chemical reaction generation diffusive wears such as iron, nickel, to reach the specification requirement of polishing.In the polishing process, cool off by cooling tube 8.
Claims (3)
1, a kind of diamond film high speed and precision burnishing device, comprise lathe bed, the polishing disk drive unit, the diamond film drive unit, vacuum polishing room outer cover and heater, vacuum polishing room outer cover is provided with vacuum adapter and cooling tube, also have the active gases air inlet pipe and have heater strip and be connected support, the polishing disk drive unit is arranged in the vacuum polishing room outer cover, and all be separately fixed on the lathe bed, polishing disk is fixed on the buff spindle, buff spindle is arranged in the supporting mass by bearing, supporting mass is fixed in the bearing by ring flange and fixed disk, buncher is contained on the fixed disk, and is connected with buff spindle; It is characterized in that, heater is arranged between upper bracket and the polishing disk, the diamond film drive unit is arranged on above the vacuum polishing room outer cover, described diamond film drive unit comprises rubbing head, the rubbing head axle, driving shaft and motor, rubbing head is fixed on the rubbing head axle, the rubbing head axle is by being set in the driving shaft, and fix by adjusting screw, the upper end of rubbing head axle is provided with spring, driving shaft is arranged in the splicing sleeve by bearing, splicing sleeve is fixed on the vacuum polishing room outer cover by end cap up and down, end cap is fixed on the upper and lower end face of vacuum polishing room outer cover by screw respectively up and down, motor is fixed on the upper end cover, and is connected with driving shaft by driving key.
2, diamond film high speed and precision burnishing device as claimed in claim 1 is characterized in that described heater is fixed on the upper bracket by screw.
3, diamond film high speed and precision burnishing device as claimed in claim 1, it is characterized in that: described heater is the electromagnetism heating plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420070516 CN2719494Y (en) | 2004-09-03 | 2004-09-03 | Diamond film high-speed precision polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420070516 CN2719494Y (en) | 2004-09-03 | 2004-09-03 | Diamond film high-speed precision polishing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2719494Y true CN2719494Y (en) | 2005-08-24 |
Family
ID=35008460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420070516 Expired - Lifetime CN2719494Y (en) | 2004-09-03 | 2004-09-03 | Diamond film high-speed precision polishing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2719494Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1313244C (en) * | 2004-09-03 | 2007-05-02 | 沈阳理工大学 | High speed percision polishing device and polishing method with diamond film |
| CN102380822A (en) * | 2010-09-01 | 2012-03-21 | 沈阳理工大学 | Ultra high-speed compound polishing disc of diamond film |
| CN101596693B (en) * | 2009-07-10 | 2012-04-25 | 兰州瑞德实业集团有限公司 | Numerically-controlled precise grinding polisher |
| CN102513924A (en) * | 2011-12-27 | 2012-06-27 | 北京迪蒙吉意超硬材料技术有限公司 | Polishing machine of surfaces of polycrystalline diamond compact sheets |
-
2004
- 2004-09-03 CN CN 200420070516 patent/CN2719494Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1313244C (en) * | 2004-09-03 | 2007-05-02 | 沈阳理工大学 | High speed percision polishing device and polishing method with diamond film |
| CN101596693B (en) * | 2009-07-10 | 2012-04-25 | 兰州瑞德实业集团有限公司 | Numerically-controlled precise grinding polisher |
| CN102380822A (en) * | 2010-09-01 | 2012-03-21 | 沈阳理工大学 | Ultra high-speed compound polishing disc of diamond film |
| CN102513924A (en) * | 2011-12-27 | 2012-06-27 | 北京迪蒙吉意超硬材料技术有限公司 | Polishing machine of surfaces of polycrystalline diamond compact sheets |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20040903 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |