CN101224551A - Solid state rare earths metal high speed polishing method of diamond film - Google Patents
Solid state rare earths metal high speed polishing method of diamond film Download PDFInfo
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- CN101224551A CN101224551A CNA2008100102813A CN200810010281A CN101224551A CN 101224551 A CN101224551 A CN 101224551A CN A2008100102813 A CNA2008100102813 A CN A2008100102813A CN 200810010281 A CN200810010281 A CN 200810010281A CN 101224551 A CN101224551 A CN 101224551A
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Abstract
The invention provides a high speed polishing method used for the solid rear earth metal of a diamond film. A polishing tool is a solid rare earth metal polishing disc (or polishing abrader); the friction head is generated by the relative motion between the polishing disc (or the polishing abrader) and the diamond film; a thermal chemical reaction environment is formed at the contact interface between the diamond film and the solid rare earth metal polishing disc, thus corroding the convex carbon atoms on the polishing surface of the diamond film and realizing the polishing to the diamond film. The polishing process is generally achieved under atmospheric environment. The invention can realize the polishing of a planar diamond film and a diamond film with discretional curved surfaces; wherein, an enveloping method and a forming method can be adopted by the polishing of the curved surface diamond film; the enveloping method takes a bal head solid rare earth metal polishing rod as the polishing tool; the forming method takes a solid rare metal forming polishing head as the polishing tool. The invention provides the polishing method which is not required to be achieved in a vacuum polishing reaction chamber, has simple structure, good polishing quality, high efficiency and low cost, can be used for the polishing of the planer diamond film and also can be used for polishing the curved surface diamond film.
Description
Technical field
The invention belongs to the superhard material polishing technology, particularly a kind of solid state rare earths metal high speed polishing method of diamond film.
Background technology
Diamond film is the pure diamond polycrystalline film by the chemical vapour deposition technique deposition, has high hardness, wearability, excellent electric insulation, thermal conductivity, light transmission and acoustic characteristic, be regarded as the most rising new material of 21 century, showed good application prospects at numerous high-technology fields and national defence sophisticated technology field, encapsulate the efficiently heat sink of usefulness as High power laser diode array and high power electronic device, the light laser window, infrared thermal imaging device window, the High-Power Microwave window, the X ray window, and be used for diamond film SAW device of communication system etc., the existing flat shape of these diamond film devices has curve form again.Because diamond film itself is a polycrystalline film, crystal grain is thick, rough surface, and also since the inhomogeneities of deposition process, the diamond film surface irregularity.Therefore its commercial Application must be through grinding and polishing processing.Because the diamond film extreme hardness, traditional mechanical lapping finishing method efficient is extremely low.Developmental research at present both at home and abroad some new finishing methods, but all exist many problem and shortage.As: the laser beam flying polishing efficiency is higher, but the polished surface quality is lower, and the easy residual graphite in surface is difficult to diamond membrane with large area is carried out precise polished, can only carry out the roughing of diamond film, and be difficult to the curved surface diamond film is polished; Ion beam etching polished surface quality is higher, but owing to be subjected to the restriction of ion beam and ion chamber size, the size of polishing diamond film can not be too big, and efficient is too low, and cost is too high, is not suitable for suitability for industrialized production, also the polishing of incompatibility curved surface diamond film; Thermo-chemical polishing method polished surface quality is good, efficient is higher, but thermo-chemical polishing adopts high-power resistance silk heating polishing disk to 800---9000 ℃, polishing disk temperature height, thermal deformation are big, polishing must be polished reative cell in vacuum and be carried out, and need high temperature heated filament activation hydrogen formation atom state hydrogen to be set at vacuum polishing reative cell, be diffused into the carbon on polishing disk surface with removing, the thermal deformation that the heat radiation of high temperature heated filament produces polishing disk is more inhomogeneous, though can be used for the polishing of curved surface diamond film, but the equipment complexity, polishing cost height; The rare earth metal etching of exploitation polishing at present utilizes active lean earth metal (as: La, Ce etc.) at liquid state dissolve gold hard rock (carbon) and diamond film is polished in a large number, efficient is higher, but the polished surface quality is lower, liquid rare earth metal produced erosion to the diamond film edge easily, must polish reative cell in vacuum during polishing carries out, therefore this technology is used for the roughing of diamond film and the quick attenuate of diamond film, the polishing of incompatibility curved surface diamond film more.
Summary of the invention
The objective of the invention is liquid rare earth metal etching finishing method at present exploitation can only polish reative cell in vacuum and carry out, liquid rare earth metal produced erosion to the diamond film edge easily, and the problems such as polishing of incompatibility curved surface diamond film, provide a kind of the need to carry out at vacuum polishing reative cell, simple in structure, quality of finish good, efficient is high, cost is low, both can be used for plane diamond film polishing, can be used for the diamond film solid state rare earths metal high speed polishing method of curved surface diamond film polishing again.
The technical scheme that adopts is:
The solid state rare earths metal high speed polishing method of diamond film, polishing disk is solid-state rare earth metal polishing disk (or polishing lap tool), by the frictional heat of polishing disk (or polishing lap tool) with the caused by relative motion of diamond film, form the thermal chemical reaction environment at diamond film and solid-state rare earth metal polishing disk (or polishing lap tool) contact interface, thereby corrosion diamond film polished surface salient point carbon atom is realized the polishing purpose to diamond film.Polishing process carries out under the general atmosphere environment.Specifically comprise following three kinds of methods.
1) polishing flat-type diamond film, during polishing, the solid-state rare earth metal polishing disk of disc is under drive motors drives, with the high rotational speed of 3000r/min-50000r/min, diamond film is fixed by anchor clamps, and by the rotating speed counter-rotation of another drive motors driving with 10r/min-100r/min.Frictional heat by the caused by relative motion of polishing disk and diamond film, form the thermal chemical reaction environment at diamond film and solid-state rare earth metal polishing disk contact interface, thereby corrosion diamond film polished surface salient point carbon atom is realized the polishing purpose to the flat-type diamond film.
2) envelope method polishing arbitrary surface diamond film, polishing is an instrument with the solid-state rare earth metal polishing rod of bulb, solid-state rare earth metal polishing rod clamping is driven by the high-speed numeric control machine tool chief axis, with the high rotational speed of 10000r/min-60000r/min on high-speed numeric control machine tool chief axis head.Diamond film is fixed by anchor clamps, is installed on the numerically controlled machine, realizes the three-dimensional interlock of the relative diamond film of polishing rod in X, Y, Z direction by the coordinate motion of Digit Control Machine Tool.In the polishing process, the frictional heat that produces by the high speed relative motion of polishing rod and diamond film, form the thermal chemical reaction environment at diamond film and the solid-state rare earth metal polishing rod of bulb contact interface, realize of the corrosion of solid-state rare earth metal polishing rod to diamond film polished surface salient point carbon atom, three-dimensional interlock by the relative diamond film of the solid-state rare earth metal polishing rod of bulb realizes the polishing purpose to the arbitrary surface diamond film.
3) method of forming polishing surface of revolution diamond film.Polishing tool is solid-state rare earth metal plastic polishing head, and rubbing head burnishing surface and surface of revolution diamond film polished surface match, and can realize diamond film inner surface, outer surface polishing, or surfaces externally and internally polishes simultaneously.Solid-state rare earth metal plastic polishing head is under drive motors drives, high rotational speed with 3000r/min-30000r/min, caused by relative motion frictional heat by rubbing head and diamond film, simultaneously for improving the center of surface zone because linear velocity is low, frictional heat is little, polishing curved surface non-uniform temperature problem is provided with assisted heating device in diamond film anchor clamps inside.Under the acting in conjunction of frictional heat and auxiliary heating, form the thermal chemical reaction environment at diamond film and solid-state rare earth metal plastic polishing head contact interface, solid-state rare earth metal plastic polishing head produces corrosion to diamond film polished surface salient point carbon atom, thus realize curved surface diamond film appearance and polishing.
Polishing principles of the present invention is:
Make plane polishing dish or surface of revolution polishing lap tool with solid-state rare earth metal, polishing disk (or polishing lap tool) is with height polishing rotational speed, the frictional heat that produces by the relative motion of polishing disk and diamond film, form the thermal chemical reaction environment at diamond film and solid-state rare earth metal polishing disk (or polishing lap tool) contact interface, thereby corrosion diamond film polished surface salient point carbon atom is realized the polishing purpose to diamond film.
The present invention has the polishing efficiency height, quality of finish is good, low cost and other advantages, and owing to thermal chemical reaction environment in the polishing process only forms between diamond film and polishing disk contact surface, the polishing disk bulk temperature is low, and thermal deformation is little, polishing disk can not produce erosion to the diamond film edge, both can be used for plane diamond film polishing, and can be used for the polishing of curved surface diamond film again, polishing process need not polish reative cell in vacuum to carry out, equipment is simple, reliable operation.
Description of drawings
Fig. 1 is the solid-state rare earth metal finishing method of a diamond film of the present invention schematic diagram.
Fig. 2 is the solid-state rare earth metal envelope method polishing of a diamond film of the present invention schematic diagram.
Fig. 3 is the solid-state rare earth metal method of forming polishing of a diamond film of the present invention schematic diagram.
The solid-state rare earth metal polishing disk of 1-; 2,7-diamond film anchor clamps; The 3-diamond film; The solid-state rare earth metal polishing rod of 4-bulb; The solid-state rare earth metal plastic polishing of 5-head; The 6-assisted heating device.
The specific embodiment
As shown in Figure 1, further specify the course of work of the present invention in conjunction with example.
Fig. 1 (a) is the work schematic diagram of polishing flat-type diamond film, and solid-state rare earth metal polishing disk 1 is directly driven by electric main shaft, and electric main shaft is installed on the lathe bed.Solid-state rare earth metal polishing disk 1 is with the high rotational speed of 10000r/min, diamond film 3 is fixing by anchor clamps 2, and by the rotating speed counter-rotation of another drive motors driving with 50r/min, frictional heat by the caused by relative motion of polishing disk and diamond film, form the thermal chemical reaction environment at diamond film and solid-state rare earth metal polishing disk contact interface, thereby corrosion diamond film polished surface salient point carbon atom is realized the polishing purpose to diamond film.
Figure (b) is envelope method polishing arbitrary surface diamond film course of work schematic diagram, polishing is an instrument with the solid-state rare earth metal polishing rod 4 of bulb, solid-state rare earth metal polishing rod 4 clampings are on high-speed numeric control machine tool chief axis head, drive by the high-speed numeric control machine tool chief axis, with the high rotational speed of 30000r/min.Diamond film 3 is fixing by anchor clamps 2, and anchor clamps 2 are installed on the numerically controlled machine, realizes the three-dimensional interlock of the relative diamond film of polishing rod in X, Y, Z direction by the coordinate motion of Digit Control Machine Tool.In the polishing process, the frictional heat that produces by the high speed relative motion of polishing rod and diamond film, form the thermal chemical reaction environment at diamond film and the solid-state rare earth metal polishing rod of bulb contact interface, realize of the corrosion of solid-state rare earth metal polishing rod to diamond film polished surface salient point carbon atom, three-dimensional interlock by the relative diamond film of the solid-state rare earth metal polishing rod of bulb realizes the polishing purpose to the arbitrary surface diamond film.
Figure (c) is the course of work schematic diagram of method of forming polishing surface of revolution diamond film.Burnishing device mainly is made of diamond film anchor clamps, high speed rotary plastic polishing head and assisted heating device.When polishing curved surface diamond film outer surface, diamond film 3 is fixing by anchor clamps 7, solid-state rare metal forming rubbing head 5 of going up is under drive motors drives, high rotational speed with 8000r/min, by the caused by relative motion frictional heat of rubbing head and diamond film, for improving the center of surface zone because linear velocity is low, frictional heat is little simultaneously, polishing curved surface non-uniform temperature problem is provided with assisted heating device 6 in diamond film anchor clamps 7 inside.Under the acting in conjunction of frictional heat and auxiliary heating, form the thermal chemical reaction environment at diamond film and solid-state rare earth metal plastic polishing head contact interface, solid-state rare earth metal plastic polishing head produces corrosion to diamond film polished surface salient point carbon atom, thereby realizes the polishing to curved surface diamond film outer surface.If the inner surface of polishing curved surface diamond film, then need and will 5 be changed to anchor clamps among the figure (c), 7 are changed to solid-state rare earth metal plastic polishing head.If all be changed to solid-state rare earth metal plastic polishing head with 5,7, the opposite high speed relative motion of direction that rotates of two rubbing heads then can be polished curved surface diamond film surfaces externally and internally simultaneously.No matter be the inner surface of polishing curved surface diamond film, still polish curved surface diamond film surfaces externally and internally simultaneously, all assisted heating device need be set, to improve the temperature in polishing center of surface zone, form thermal chemical reaction environment comparatively uniformly at diamond film and solid-state rare earth metal plastic polishing head contact interface, guarantee the uniformity of polishing.
Claims (1)
1. the solid state rare earths metal high speed polishing method of diamond film, it is characterized in that: polishing disk is solid-state rare earth metal polishing disk or polishing lap tool, frictional heat by the caused by relative motion of polishing disk or polishing lap tool and diamond film, at diamond film and solid-state rare earth metal polishing disk or polishing lap tool contact interface formation thermal chemical reaction environment, thereby corrosion diamond film polished surface salient point carbon atom is realized the polishing purpose to diamond film; Polishing process carries out under the general atmosphere environment; Specifically comprise following three kinds of methods:
1) polishing flat-type diamond film, during polishing, the solid-state rare earth metal polishing disk of disc is under drive motors drives, with the high rotational speed of 3000r/min-50000r/min, diamond film is fixed by anchor clamps, and by the rotating speed counter-rotation of another drive motors driving with 10r/min-100r/min; Frictional heat by the caused by relative motion of polishing disk and diamond film, form the thermal chemical reaction environment at diamond film and solid-state rare earth metal polishing disk contact interface, thereby corrosion diamond film polished surface salient point carbon atom is realized the polishing purpose to the flat-type diamond film;
2) envelope method polishing arbitrary surface diamond film, polishing is an instrument with the solid-state rare earth metal polishing rod of bulb, solid-state rare earth metal polishing rod clamping is driven by the high-speed numeric control machine tool chief axis, with the high rotational speed of 10000r/min-60000r/min on high-speed numeric control machine tool chief axis head; Diamond film is fixed by anchor clamps, is installed on the numerically controlled machine, realizes the three-dimensional interlock of the relative diamond film of polishing rod in X, Y, Z direction by the coordinate motion of Digit Control Machine Tool; In the polishing process, the frictional heat that produces by the high speed relative motion of polishing rod and diamond film, form the thermal chemical reaction environment at diamond film and the solid-state rare earth metal polishing rod of bulb contact interface, realize of the corrosion of solid-state rare earth metal polishing rod to diamond film polished surface salient point carbon atom, three-dimensional interlock by the relative diamond film of the solid-state rare earth metal polishing rod of bulb realizes the polishing purpose to the arbitrary surface diamond film;
3) method of forming polishing surface of revolution diamond film; Polishing tool is solid-state rare earth metal plastic polishing head, and rubbing head burnishing surface and surface of revolution diamond film polished surface match, and can realize diamond film inner surface, outer surface polishing, or surfaces externally and internally polishes simultaneously; Solid-state rare earth metal plastic polishing head is under drive motors drives, high rotational speed with 3000r/min-30000r/min, caused by relative motion frictional heat by rubbing head and diamond film, simultaneously for improving the center of surface zone because linear velocity is low, frictional heat is little, polishing curved surface non-uniform temperature problem is provided with assisted heating device in diamond film anchor clamps inside; Under the acting in conjunction of frictional heat and auxiliary heating, form the thermal chemical reaction environment at diamond film and solid-state rare earth metal plastic polishing head contact interface, solid-state rare earth metal plastic polishing head produces corrosion to diamond film polished surface salient point carbon atom, thereby realizes the polishing to curved surface diamond film outer surface.
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| CNA2008100102813A CN101224551A (en) | 2008-01-30 | 2008-01-30 | Solid state rare earths metal high speed polishing method of diamond film |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101935825A (en) * | 2010-09-07 | 2011-01-05 | 天津理工大学 | Process for flattening diamond film by utilizing compound diamond-like carbon (DLC) film |
| CN106663618A (en) * | 2014-05-30 | 2017-05-10 | 元钟洙 | High-strength alloy-containing polishing head of cmp apparatus |
| US11697154B2 (en) | 2018-01-11 | 2023-07-11 | University Of Science And Technology Beijing | Polishing method for inner wall of hollow metal part |
-
2008
- 2008-01-30 CN CNA2008100102813A patent/CN101224551A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101935825A (en) * | 2010-09-07 | 2011-01-05 | 天津理工大学 | Process for flattening diamond film by utilizing compound diamond-like carbon (DLC) film |
| CN106663618A (en) * | 2014-05-30 | 2017-05-10 | 元钟洙 | High-strength alloy-containing polishing head of cmp apparatus |
| US11697154B2 (en) | 2018-01-11 | 2023-07-11 | University Of Science And Technology Beijing | Polishing method for inner wall of hollow metal part |
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Open date: 20080723 |