CN1751848A - High-precision mechanical sharpening method for diamond cutter with high-efficiency and low-cost - Google Patents
High-precision mechanical sharpening method for diamond cutter with high-efficiency and low-cost Download PDFInfo
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- CN1751848A CN1751848A CN200510010404.XA CN200510010404A CN1751848A CN 1751848 A CN1751848 A CN 1751848A CN 200510010404 A CN200510010404 A CN 200510010404A CN 1751848 A CN1751848 A CN 1751848A
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Abstract
A high-precision, efficient and cheap method for mechanically sharpening the diamond cutting tool includes such steps as regulating the static balance of grinding machine, turning the grinding disc, polishing it, adhering the grinding diamond particles on the surface of grinding disc, regulating the dynamic balance of the mainshaft system of grinding machine, fixing the diamond cutting tool, regulating the level degree of fixture, opening air source, turning on the grinding machine, regulating rotation speed, grinding pressure and front angle of cutting tool, and grinding.
Description
Technical field
The invention belongs to the ultra precision cutting processing technique field.
Background technology
Along with the application and the popularization of Ultraprecision Machining, in the time of decades, machining accuracy has been enhanced 1～3 order of magnitude, and the more high-precision nano-precision development of forward.The ultra precision cutting process technology is as the important component part of Ultraprecision Machining, being to need at modernized high-tech specially twentieth century sixties and the advanced manufacturing technology that grows up, is a kind of machining new technology that is difficult for the high accuracy limit challenge that breaks through to traditional diamond-making technique.The cutting edge technology in fields such as electronics, sensing, optics, control and measurement that the ultra precision cutting process technology is integrated, it is the basic technology of high-tech area, the key technology that its still inaccurate product for civilian use is made, the core technology that most advanced and sophisticated especially military supplies weapon is made, it is bringing into play important effect in the development and production of national defence weapon model.
Aspect civilian, require ultra precision cutting processing to satisfy 0.2 μ m axial shape precision simultaneously as plunderring the aluminium base substrate of penetrating minute surface in the x-ray telescope, 2 μ m/1.5m are arc accuracy and 5nm surface roughness RMS radially; Oxygen-free high conductivity type copper elliptic cylinder in the synchrotron radiation X linear light lithography, in hundreds of millimeter axial length range, the machining precision need reach form accuracy and the 0.043 μ m surface roughness RMS of 0.13 μ m; The aluminium disc of hard disc of computer memory and for example, the surface roughness quality of its ultra precision cutting processing has not only determined memory capacity, also is simultaneously the key factor that the restriction magnetic head reads to coil speed; In addition, CCD, digital camera, laser printer and duplicator etc. are equipped with the instrument and equipment of optical system, and the machining accuracy on its plane, sphere and aspheric speculum and lens, Fresnel lens and other optical element surfaces can directly influence light reflectance, transmissivity and image error; Diamond slicer in the Bioexperiment for another example, its cutting edge sharpness must could guarantee that intact essence cuts effect less than 50nm.
For the ultra precision cutting processing technology, obtain the high accuracy of part shape size and the ultra-smooth of finished surface, except must having ultraprecise lathe, high-resolution detecting instrument and overstable processing environment condition, also must possess the high-precision diamond cutter that carries out machining, especially high-precision arc-blade diamond cutter.Because the each point on the arc-blade diamond knife tool arc cutting edge all can participate in cutting, and the curvature of each cutting point remains unchanged, this is most important for machining high-precision sphere or aspheric curve part.
Bibliographical information according to the external relevant ultra precision cutting limit, in 1986, Osaka, Japan university cooperates to carry out the minimum thickness of cut research that the non-ferrous metal ultra precision cutting is processed with U.S. LLL (Lawrence Livermore National Laboratory) laboratory, realized that on the ultra precision cutting lathe thickness of cutting is the single-crystal diamond cutting of 1nm, and calculate by theory and to point out, realize that thickness of cutting is the continuous cutting of 1nm, the blunt radius of circle of the cutting edge of diamond cutter must remain on 3～5nm.The research of this ultra precision cutting limit has not only been pushed the level of processing of ultra precision cutting to the limit, has also fully demonstrated simultaneously abroad the level that has been in clear ahead at the high-precision diamond cutter aspect preparing.
Present existing diamond cutter tool dresser process comprises: mechanical sharpening method, ion beam sputter method, thermo-chemical polishing method, not damaged chemical mechanical polishing method, vacuum plasma chemical polishing, the polishing of chemical Aided Machine and polishing method and laser ablation method etc.
1) mechanical grinding method is traditional process, and its essence is exactly diamond and adamantine to grinding.From the commercial Application angle, mechanical grinding method technology is the simplest, and equipment is also cheaper.Diamond cutter in traditional mechanical sharpening process, the lap speed height, so grinding pressure and to grind the frictional force of contact-making surface big is tool sharpening efficient height.But because this grinding method has discontinuous percussion, it is relatively more difficult less than the diamond cutter of 70～80nm to obtain the blunt radius of circle of cutting edge.Generally all adopt the method to carry out the roughing of diamond cutter abroad.
2) ion beam sputter method is to adopt the carbon atom on high-energy argon ion bombardment diamond cutter surface, utilizes the effect of impact of energetic ion to reach the fine machining method that the cutter carbon atom is removed one by one.Ion beam sputter method is applicable to processing microminiature diamond cutter, and the blunt radius of circle of resulting diamond cutter cutting edge is 20～30nm.But this process needs expensive equipment, and working (machining) efficiency is lower.
3) the thermo-chemical polishing method generally adopts at flowing hydrogen or 4%H
2In+96%Ar mist the atmosphere and under 750～1050 ℃ of high temperature, the diamond cutter surface directly contacts and relative slippage with mild steel (or pure iron) abrasive disk, activation takes place and produces the activated carbon atom in diamond cutter surface carbon atomic layer, and the activated carbon atom is diffused in mild steel (or pure iron) abrasive disk and reaches the removal of cutter material.The carbon atom that is diffused in the mild steel (or pure iron) is discharged from ambient hydrogen solid/liquid/gas reactions generation methane and with air-flow again.Thermo-chemical polishing efficient depends on the diffusion rate of carbon atom, and influence factor has temperature, grinding pressure, speed of grinding plate etc.This method complex process needs peripheral auxiliary equipment, and working (machining) efficiency is also general.
4) the not damaged chemical mechanical polishing method adopts and adds an amount of fine diamond abrasive particle and thinner silica flour in the NaOH solution, by strong electrostatic interaction silica flour is adsorbed on the diamond abrasive grain, they is coated on the porous system cast iron abrasive disk then diamond cutter is ground then.Its essence is fine silica flour and diamond cutter surface carbon atom generation chemical reaction, by little ablation of silicon powder conversion zone is wiped off then.The working (machining) efficiency of this method is extremely low, atomic layer of about per minute.
5) in vacuum plasma chemical polishing technology, the abrasive disk of rotation is divided into two parts by the high vacuum region of centre, a part is the settling zone, its surface is to adopt vacuum plasma physical vapour deposition (PVD) (PhysicalVapor Deposition, abbreviation PVD) the silica coating that method makes, another part is diamond cutter sharpening district.The removal process of cutter material be exactly diamond cutter surface active carbon atom in the oxidized silicaization of milling zone, generate CO or CO
2The back is extracted out by vavuum pump.The diamond cutter cutting edge quality that this method sharpening obtains is very high, and the general blunt radius of circle of cutting edge is better than 50nm, but the cutter sharpening efficiency is lower, is about 0.25～750 atomic layer of per second.
6) chemical Aided Machine polishing adopts traditional mechanical sharpening method that diamond cutter is roughly ground earlier with the polishing method, obtains again it being carried out chemical polishing and polishing behind the not too high cutter original shape of surface ratio more coarse (Ra＜1 μ m) and dimensional accuracy.The diamond cutter that this process can obtain being of high quality, but equipment needed thereby costliness, and complex process.
7) laser ablation method adopts the single bundle of 1～100Hz or multi beam Nd-YAG laser irradiation diamond cutter surface that irradiating surface is ablated under localized hyperthermia's effect.The crystal boundary of considering the polycrystalline diamond crystal is influential to machining accuracy, so this method is only suitable roughing is carried out on monocrystal diamond cutter surface, and the diamond surface roughness value Ra after the process ablation is also than higher.But because this method working (machining) efficiency is higher, the diamond crystal blank after each diamond cutter manufacturer substantially adopts the method to orientation at present cuts the roughing with the knife tool arc blank.
In sum, diamond crystal makes that with characteristics such as the high rigidity of himself, wear-resistant, difficult welding the preparation of diamond cutter is relatively more difficult.Just at present China also not have under arc-blade diamond tool sharpening apparatus that is shaped and the situation of being correlated with the cutting edge checkout equipment, can only rest on more superficial level to the research of arc-blade diamond tool sharpening technology and sharpening mechanism.And improving constantly along with product for civilian use serviceability and national defence weapon model precision, reliability, hit rate and index in service life, the used arc-blade diamond cutter of ultra precision cutting manufacture field that China is badly in need of these the army and the people all satisfies the demands by external import, import cutter not only price is very expensive, and the tool sharpening quality does not reach highest level.For the high-precision arc-blade diamond tool sharpening technology of the blunt radius of circle of cutting edge less than 100nm, embargo always abroad.Especially aspect the finishing of knife tool arc, refacing, China also relies on external grinding technology basically, and the recycling rate of waterused of cutter is lower.Therefore, rely on the efficient cheap high-precision arc-blade diamond tool sharpening technology of self technical force exploitation, study its sharpening mechanism and relevant Tool Design standard, detection means, for the integral level that improves China's ultra precision cutting processing with satisfy domestic military, civilian product ultra precision cutting processing and have important significance for theories and practical value with the market demand of high-precision arc-blade diamond cutter.
Summary of the invention
The purpose of this invention is to provide a kind of efficient cheap high-precision diamond tool mechanical sharpening processing method, it can solve the problem that the diamond cutter preparation is relatively more difficult, be difficult to satisfy required precision.Diamond cutter machinery sharpening processing method of the present invention is carried out according to following step: one, air vibration isolator inflation back is adjusted the cutter grinding machine poised state and is made its maintenance level; Two, the abrasive disk working surface carries out meticulous polishing after being shaped through finish turning, and control abrasive disk working surface fineness≤0.8 applies the diamond abrasive grain that maximum gauge is 0.1 μ m then; Three, adopt the high accuracy dynamic balance instrument that the lapping machine axis system under the 2800r/min rotating speed is carried out fine dynamic balance, radially rotating accuracy is less than 0.05 μ m under the 2800r/min working speed for the control main shaft, and axially rotating accuracy is less than 0.1 μ m; Four, abrasive disk is done beforehand research work earlier after applying the diamond abrasive grain that maximum gauge is 0.1 μ m, begins the sharpening diamond cutter then, and the concrete operations step is: the diamond cutter that is installed, cutter hub jig level-off; Open source of the gas, open diamond cutter cutter grinding machine power supply, regulate machine spindle speed; Adjusting rake face sharpening direction is easily to grind direction, and regulates tool orthogonal rake; At the main shaft working speed is that 1800～2500r/min, grinding pressure are the diamond cutter sharpening cutter under the condition of system deadweight that is installed, control cutting edge sharpness≤60nm.
Grinding pressure must adopt cutter be installed system deadweight and can not add hand-held pressure, this is to have uniformity preferably for the sharpness that makes whole cutting edge roundness as far as possible, simultaneously guarantee fund's diamond cutter skin-material is removed in the plastic deformation mode.The contacting points position of diamond cutter and abrasive disk should drop on the whole operation interval of abrasive disk middle part by lining one side.
On the basis of satisfying above-mentioned technological parameter requirement, when the speed of mainshaft adopts the 2500r/min that optimizes, R (100) F (100) but the diamond cutter sharpening of directed combination obtains the cutting edge sharpness of 30～4nm, R (110) F (100) but the diamond cutter sharpening of directed combination obtains the cutting edge sharpness of 35～50nm, R (110) F (110) but the diamond cutter sharpening of directed combination obtains the cutting edge sharpness of 35～55nm.
The present invention has the advantages that sharpening technology is simple, cost is low, efficient is high, but sharpening goes out to be better than the high-precision diamond cutter of 50nm cutting edge sharpness.
Description of drawings
Fig. 1 is the overall structure schematic diagram of high-precision diamond tool sharpening lathe; Fig. 2 is a static air pressure main axle structure cutaway view; Fig. 3 is a cutter grinding machine lathe bed horizontal adjusting schematic diagram; Fig. 4 is axis system dynamic balance accuracy measurement mechanism figure; Fig. 5 is the directed schematic diagram of the cutter of R (100) F (100) combination, wherein → and represent rake face easily to grind direction,
Represent the difficult mill of rake face direction,
Represent the difficult mill of back knife face direction; Fig. 6 is the directed schematic diagram of the cutter of R (110) F (100) combination, wherein → and represent rake face easily to grind direction,
Represent the difficult mill of rake face direction,
Represent the difficult mill of back knife face direction; Fig. 7 is the directed schematic diagram of the cutter of R (110) F (110) combination, wherein → and represent rake face easily to grind direction,
Represent the difficult mill of rake face direction,
Represent the difficult mill of back knife face direction; Fig. 8 is that the AFM of diamond cutter cutting edge detects schematic diagram, and wherein 1 is atomic-force microscope needle-tip, and 2 is diamond cutter, and 3 is laser beam.
The specific embodiment
The specific embodiment one: present embodiment is processed diamond cutter according to following step: one, air vibration isolator inflation back is adjusted the cutter grinding machine poised state and is made its maintenance level; Two, the abrasive disk working surface carries out meticulous polishing after being shaped through finish turning, and control abrasive disk working surface fineness≤0.8 applies the diamond abrasive grain that maximum gauge is 0.1 μ m then; Three, adopt the high accuracy dynamic balance instrument that the lapping machine axis system under the 2800r/min rotating speed is carried out fine dynamic balance, radially rotating accuracy is less than 0.05 μ m under the 2800r/min working speed for the control main shaft, and axially rotating accuracy is less than 0.1 μ m; Four, abrasive disk is done beforehand research work earlier after applying the diamond abrasive grain that maximum gauge is 0.1 μ m, begins the sharpening diamond cutter then, and the concrete operations step is: the diamond cutter that is installed, cutter hub jig level-off; Open source of the gas, open diamond cutter cutter grinding machine power supply, regulate machine spindle speed; Adjusting rake face sharpening direction is easily to grind direction, and regulates tool orthogonal rake; At the main shaft working speed is that 1800～2500r/min, grinding pressure are the diamond cutter sharpening cutter under the condition of system deadweight that is installed, control cutting edge sharpness≤60nm.
Shown in Fig. 1～2, diamond cutter machinery sharpening system in the present embodiment is by air vibration isolator 1, cast iron lathe bed 2, printed motor 3, static air pressure main shaft 4, the cutter system 5 that is installed, counterweight 6 and high-phosphorous iron abrasive disk 8 are formed, air vibration isolator 1 is distributed in cast iron lathe bed 2 bottoms, the lower seat of static air pressure main shaft 4 is in cast iron lathe bed 2 inside, the upper end of static air pressure main shaft 4 is connected with abrasive disk 8, the lower end of static air pressure main shaft 4 is connected with the output shaft of printed motor 3, the top of abrasive disk 8 is equipped with the cutter system 5 that is installed, and cutter is installed and is placed with counterweight 6 above the system 5.Described static air pressure main shaft 4 is by last shaft coupling 4-1, last thrust plate 4-2, support plate 4-3, pedestal 4-4, air-floating main shaft 4-5, air supporting axle sleeve 4-6, lower thrust plate 4-7 and following shaft coupling 4-9 form, last thrust plate 4-2, air-floating main shaft 4-5 and lower thrust plate 4-7 fuse by screw successively, the upper surface of last thrust plate 4-2 is connected with abrasive disk 8, abrasive disk 8 is connected with the upper end of air-floating main shaft 4-5 by last shaft coupling 4-1, the outside of air-floating main shaft 4-5 is with air supporting axle sleeve 4-6, the outer face of air supporting axle sleeve 4-6 is connected with the inner face of gripper shoe 4-3, the lower surface of gripper shoe 4-3 is connected with cast iron lathe bed 2 by pedestal 4-4, the bottom of air supporting axle sleeve 4-6 is connected with motor cover 9, motor cover 9 is connected with lower thrust plate 4-7 by adjustment screw 4-8, the lower end of motor cover 9 is connected with printed motor 3, and shaft coupling 4-9 was connected with the lower end of air-floating main shaft 4-5 under printed motor 3 passed through.
The specific embodiment two: present embodiment describes in detail in conjunction with the processing method of Fig. 1～8 pair diamond cutter:
One, as shown in Figure 1, diamond cutter machinery sharpening system in the present embodiment is by air vibration isolator 1, cast iron lathe bed 2, printed motor 3, static air pressure main shaft 4, the cutter system 5 that is installed, counterweight 6 and high-phosphorous iron abrasive disk 8 are formed, air vibration isolator 1 is distributed in cast iron lathe bed 2 bottoms, the lower seat of static air pressure main shaft 4 is in cast iron lathe bed 2 inside, the upper end of static air pressure main shaft 4 is connected with abrasive disk 8, the end of static air pressure main shaft 4 is connected with the output shaft of printed motor 3, the top of abrasive disk 8 is equipped with the cutter system 5 that is installed, and cutter is installed and is placed with counterweight 6 above the system 5.In the present embodiment, air vibration isolator 1 directly contacts with ground, is mainly used in to absorb the self-excited vibration and the influence of isolated outside vibration source to lathe that 4 revolutions of static air pressure main shaft produce.Whole cast iron lathe bed 2 drops on four air vibration isolators, and abrasive disk 8 is connected in and drops on the cast iron lathe bed 2 after forming a whole on the static air pressure main shaft 4.System dynamic is provided by printed motor 3, drives abrasive disk 8 by static air pressure main shaft 4 and makes high speed rotary motion.Static air pressure main shaft 4 and high-phosphorous iron abrasive disk 8 are cores of cutter grinding machine, and its operating accuracy directly influences the grinding quality of diamond cutter.Static air pressure main shaft 4 axial rotating accuracies after the installation reach 0.15 μ m, and radially rotating accuracy reaches 0.3 μ m.Diamond cutter 7 is installed on cutter and is installed in the system 5, and the cutter system 5 that is installed is used to adjust tool sharpening direction and tool orthogonal rake, and 6 of counterweights are used to adjust grinding pressure.
Two, as shown in Figure 2, static air pressure main shaft 4 in the present embodiment is by last shaft coupling 4-1, last thrust plate 4-2, support plate 4-3, pedestal 44, air-floating main shaft 4-5, air supporting axle sleeve 4-6, lower thrust plate 4-7 and following shaft coupling 4-9 form, last thrust plate 4-2, air-floating main shaft 4-5 and lower thrust plate 4-7 fuse by screw successively, the upper surface of last thrust plate 4-2 is connected with abrasive disk 8, abrasive disk 8 is connected with the upper end of air-floating main shaft 4-5 by last shaft coupling 4-1, the outside of air-floating main shaft 4-5 is with air supporting axle sleeve 4-6, the outer face of air supporting axle sleeve 4-6 is connected with the inner face of gripper shoe 4-3, the lower surface of gripper shoe 4-3 is connected with cast iron lathe bed 2 by pedestal 4-4, the bottom of air supporting axle sleeve 4-6 is connected with motor cover 9, motor cover 9 is connected with lower thrust plate 4-7 by adjustment screw 4-8, the lower end of motor cover 9 is connected with printed motor 3, and shaft coupling 4-9 was connected with the lower end of air-floating main shaft 4-5 under printed motor 3 passed through.
In the present embodiment, be evenly equipped with 12 adjusted screws 10 on the abrasive disk 8, adjusted screw 10 and following adjustment screw 4-8 mainly are used as little mass, are used for main shaft-abrasive disk system is carried out dynamic balancing.Gripper shoe 4-3 is mainly used in the whole main shaft of support and the abrasive disk system steadily drops on the cast iron lathe bed it.Air supporting axle sleeve 4-6 is connected on the gripper shoe 4-3 by soket head cap screw, is mainly used in the layout gas circuit, and 4-5 provides operating air pressure to air-floating main shaft.On air supporting axle sleeve 4-6, and 3 of printed motors are connected by screw and motor cover 9 by screw attachment for motor cover 9.Printed motor 3 is power sources of system, and its working speed is adjustable, mobility scale 300～2800r/min.Last thrust plate 4-2, air-floating main shaft 4-5 and lower thrust plate 4-7 join together by screw, during work at the gas pressure low suspension at air supporting axle sleeve 4-6 center, 8 of high-phosphorous iron abrasive disks by screw attachment on last thrust plate 4-2.The gyration that printed motor 3 provides is transferred to the revolving body of being made up of last thrust plate 4-2, air-floating main shaft 4-5, lower thrust plate 4-7 and high-phosphorous iron abrasive disk 8 by following shaft coupling 4-9, by the gyration that abrasive disk produces diamond cutter is carried out sharpening processing.
Operation principle: high pressure (general 4～6 atmospheric pressure) air flow in the air duct of air supporting axle sleeve 4-6 by air admission hole, flow among the gap between air-floating main shaft 4-5 and the air supporting axle sleeve 4-6 via throttle orifice again, flow through axle surface, disappointing groove then, discharge by bleeder port.Because the gap between air-floating main shaft 4-5 and the air supporting axle sleeve 4-6 is very little, between them, formed the air film of one deck high pressure.Air-floating main shaft 4-5 presses air film to float in the air supporting axle sleeve 4-6 (bearing shell) by this floor height, and the center of air-floating main shaft 4-5 is kept by relative static air pressure pressure differential.The rotor gyration of brushless direct-current drive motors is delivered directly on the air-floating main shaft 4-5 by following shaft coupling 4-9, by last thrust plate 4-2 gyration is transferred to high-phosphorous iron abrasive disk 8 then.The stator of motor is fixed on the cast iron lathe bed by motor cover 9, air supporting axle sleeve 4-6 and support plate 4-3.
Three, cutter grinding machine applies the original design that the air vibration isolator is this sharpening system.Must guarantee the vibrating isolation system operate as normal earlier to cast iron lathe bed level-off after the inflation of air vibration isolator, realize cast iron lathe bed absorbing and air vibration isolator vibration isolation double effects.Concrete regulating step is as follows:
1, gives four air vibration isolator inflations earlier, whole lathe is floated;
2, open source of the gas and make main shaft and abrasive disk system suspension;
3, the working face with abrasive disk is a benchmark, and high level of accuracy instrument 11 is put thereon, and selected four different positions are carried out horizontal survey respectively, and a-b-c-d ordering among measuring sequence such as Fig. 3 is at last according to level measurement data fine setting air vibration isolator air pressure.
4, close source of the gas.
Four, in order to guarantee that abrasive disk has good flatness, the abrasive disk working surface also need pass through meticulous polishing after being shaped through finish turning, and the surface smoothness requirement reaches the diamond abrasive grain that could apply W0.1 (the abrasive particle maximum gauge is 0.1 μ m) behind 0.8 (or following).The concrete requirement on machining accuracy of abrasive disk is as follows:
(1) datum level A is the mating surface of abrasive disk and air-floating main shaft, and datum level B is a working surface;
(2) surface figure accuracy of datum level B reaches 0.005, and fineness requires to be better than 0.8;
(3) surface figure accuracy of abrasive disk bottom surface require to reach 0.005 and the perpendicularity of datum level A reach 0.02 and the depth of parallelism of datum level B require to reach 0.02.
Five, because there is the inconsistency of certain mismachining tolerance and alignment error and the interior tissue of dish own in abrasive disk, abrasive disk axis system after the installation deviation of gravity center axle center might occur and produce revolution off-centre, need the lapping machine axis system under the 2800r/min rotating speed to be carried out fine dynamic balance before beginning to finish grind cutter with the high accuracy dynamic balance instrument, to improve spindle rotation accuracy, reduce the eccentric abrasive disk end face run-out amount that produces of main shaft gyration.Through fine dynamic balance, require main shaft under the 2800r/min working speed radially rotating accuracy be better than 0.05 μ m, axially rotating accuracy is better than 0.1 μ m.The measurement mechanism of axis system dynamic balance accuracy as shown in Figure 4, its concrete measuring process is as follows:
1) opens source of the gas, power supply, the speed of mainshaft is adjusted to 2800r/min;
2) initial measurement: the initial vibration vector of measuring abrasive disk;
3) trial measurement: by on correcting plane, applying certain but optional test mass piece, breaking the original dynamic balancing of main shaft changes its vibrational state, measure the vibration vector of main shaft behind the additional testing character gauge block then, the difference between test vibration vector and initial vibration vector is the uneven vibration vector that causes of test;
4) calculate fine setting quality and installation site: import the mass quality of being installed, can try to achieve mass quality and corresponding installation site (12 screw holes that the fine setting mass is installed are arranged on the abrasive disk) of required fine setting;
5) detect measurement: the tentative mass that takes out step 3), according to 4) the fine setting quality that calculates and position install the fine setting mass, when the fine setting mass is installed, notice guaranteeing that the abrasive disk direction of rotation is consistent with dynamic balance instrument pointer direction of rotation, install fine setting and spindle rotation accuracy is measured behind the mass, obtain the uneven surplus after the balance;
6) the little initial vibration vector of residual vibration vector that records with step 5), repeating step 2)～5), make main shaft diameter be better than 0.05 μ m at last to rotating accuracy, axially rotating accuracy is better than 0.1 μ m;
7, turn off source of the gas behind the powered-down.
Six, need do the beforehand research work of a period of time behind the diamond abrasive of abrasive disk coating W0.1, this is that to inlay ground after the abrasive particle rust on abrasive disk more compact more smooth in order to allow, can get rid of simultaneously free abrasive, reduce the impact of free abrasive cutting edge roundness attached to the card top layer.Formally begin in the sharpening cutter process, the cutter hub jig should add reciprocating motion, but reciprocating stroke should be less than 5mm, and the sharpening direction should be easy mill direction.The concrete operations step of sharpening work is as follows:
1, the cutter that is installed, cutter hub jig level-off;
2, open source of the gas, unlatching lathe power supply, regulate machine spindle speed;
3, adjusting rake face sharpening direction is easily to grind direction, and adjusting tool orthogonal rake, the sharpening direction chose as Fig. 5～shown in Figure 7 when different cutters were directed, wherein " R " represents rake face, " F " represents the back knife face, " (100) " represent (100) crystal face of diamond crystal, and " (110) " represent (110) crystal face of diamond crystal;
4, adopt preferred technological parameter sharpening cutter: at the main shaft working speed is 1800～2500r/min, grinding pressure is the diamond cutter sharpening cutter under the condition of system deadweight that is installed, control cutting edge sharpness≤60nm, grinding pressure must adopt cutter to be installed system's deadweight and can not add hand-held pressure, this is to have uniformity preferably for the sharpness that makes whole cutting edge roundness as far as possible, guarantee fund's diamond cutter skin-material is removed in the plastic deformation mode simultaneously, and the contacting points position of diamond cutter and abrasive disk should drop on the whole operation interval of abrasive disk middle part by lining one side;
5, close the lathe power supply, close source of the gas;
6, cutting edge detects.
Seven, the diamond cutter that sharpening is good cleans up with acetone, and on the workbench on the 45 ° of inclined-planes that are installed, directly adopts AFM that cutting edge roundness is detected then, and its measuring principle as shown in Figure 8.Because the sharpness on the whole cutting edge roundness can not be in full accord, so need measure a plurality of data points when the grinding quality of cutting edge roundness estimated, generally on cutting edge, choose five equably, get the grinding quality of its maximum changing range as cutter.
Eight, on the basis of satisfying above-mentioned technological parameter requirement, when the speed of mainshaft adopts the 2500r/min that optimizes, R (100) F (100) but the diamond cutter sharpening of directed combination obtains the cutting edge sharpness of 30～40nm, R (110) F (100) but the diamond cutter sharpening of directed combination obtains the cutting edge sharpness of 35～50nm, R (110) F (110) but the diamond cutter sharpening of directed combination obtains the cutting edge sharpness of 35～55nm.
Nine, on the basis of satisfying above-mentioned technological parameter requirement, during 1900r/min that the speed of mainshaft adopt to be optimized, R (110) F (100) but the diamond cutter sharpening of directed combination obtains the cutting edge sharpness of 20～30nm.
Claims (9)
1, efficient cheap high-precision diamond tool mechanical sharpening processing method, it is characterized in that described diamond cutter machinery sharpening processing method carries out according to following step: one, air vibration isolator inflation back is adjusted the cutter grinding machine poised state and is made its maintenance level; Two, the abrasive disk working surface carries out meticulous polishing after being shaped through finish turning, control abrasive disk working surface fineness≤0.8, and the coated grits maximum gauge is the diamond abrasive grain of 0.1 μ m then; Three, adopt the high accuracy dynamic balance instrument that the lapping machine axis system the 2800r/min rotating speed is under carried out fine dynamic balance, the control main shaft under the 2800r/min working speed radially rotating accuracy be better than 0.05 μ m, axial rotating accuracy is better than 0.1 μ m; Four, abrasive disk is done beforehand research work earlier after applying the diamond abrasive grain that maximum gauge is 0.1 μ m, begin the sharpening diamond cutter then, the concrete operations step is: diamond cutter is installed, cutter hub jig level-off, open source of the gas, open diamond cutter cutter grinding machine power supply, regulate machine spindle speed; Adjusting rake face sharpening direction is easily to grind direction, and regulates tool orthogonal rake; At the main shaft working speed is that 1800～2500r/min, grinding pressure are the cutter sharpening cutter under the condition of system deadweight that is installed, control cutting edge sharpness≤60nm.
2, efficient cheap high-precision diamond tool mechanical sharpening processing method according to claim 1, it is characterized in that described cutter grinding machine is by air vibration isolator (1), cast iron lathe bed (2), printed motor (3), static air pressure main shaft (4), the cutter system (5) that is installed, counterweight (6) and high-phosphorous iron abrasive disk (8) are formed, air vibration isolator (1) is distributed in cast iron lathe bed (2) bottom, the lower seat of static air pressure main shaft (4) is in cast iron lathe bed (2) inside, the upper end of static air pressure main shaft (4) is connected with abrasive disk (8), the lower end of static air pressure main shaft (4) is connected with the output shaft of printed motor (3), the top of abrasive disk (8) is equipped with the cutter system (5) that is installed, and cutter is installed and is placed with counterweight (6) above the system (5).
3, efficient cheap high-precision diamond tool mechanical sharpening processing method according to claim 1 is characterized in that the concrete operations step of regulating the cutter grinding machine balance is: the inflation of air vibration isolator, whole lathe is floated, to cast iron lathe bed level-off; Opening source of the gas suspends static air pressure main shaft and abrasive disk; Working face with abrasive disk is a benchmark, and the high level of accuracy instrument is put thereon, and selected four different positions are carried out horizontal survey respectively, according to level measurement data fine setting air vibration isolator air pressure, closes source of the gas at last.
4, efficient cheap high-precision diamond tool mechanical sharpening processing method according to claim 1 is characterized in that described reciprocating stroke is less than 5mm.
5, efficient cheap high-precision diamond tool mechanical sharpening processing method according to claim 1, it is characterized in that obtaining for the diamond cutter sharpening that makes the directed combination of R (100) F (100) the cutting edge sharpness of 30～40nm, the control speed of mainshaft is 2500r/min.
6, efficient cheap high-precision diamond tool mechanical sharpening processing method according to claim 1, it is characterized in that obtaining for the diamond cutter sharpening that makes the directed combination of R (110) F (100) the cutting edge sharpness of 35～50nm, the control speed of mainshaft is 2500r/min.
7, efficient cheap high-precision diamond tool mechanical sharpening processing method according to claim 1, it is characterized in that obtaining for the diamond cutter sharpening that makes the directed combination of R (110) F (110) the cutting edge sharpness of 35～55nm, the control speed of mainshaft is 2500r/min.
8, efficient cheap high-precision diamond tool mechanical sharpening processing method according to claim 1, it is characterized in that obtaining for the diamond cutter sharpening that makes the directed combination of R (110) F (100) the cutting edge sharpness of 20～30nm, the control speed of mainshaft is 1900r/min.
9, efficient cheap high-precision diamond tool mechanical sharpening processing method according to claim 1, the concrete requirement on machining accuracy that it is characterized in that abrasive disk is as follows: 1. datum level A is the mating surface of abrasive disk and air-floating main shaft, and datum level B is a working surface; 2. the surface figure accuracy of datum level B reaches 0.005, and fineness requires to be better than 0.8; 3. the surface figure accuracy of abrasive disk bottom surface require to reach 0.005 and the perpendicularity of datum level A reach 0.02 and the depth of parallelism of datum level B require to reach 0.02.
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