CN2434311Y - Magnetic controlled spurting foam nickel winding film coater - Google Patents
Magnetic controlled spurting foam nickel winding film coater Download PDFInfo
- Publication number
- CN2434311Y CN2434311Y CN 00246953 CN00246953U CN2434311Y CN 2434311 Y CN2434311 Y CN 2434311Y CN 00246953 CN00246953 CN 00246953 CN 00246953 U CN00246953 U CN 00246953U CN 2434311 Y CN2434311 Y CN 2434311Y
- Authority
- CN
- China
- Prior art keywords
- target
- vacuum chamber
- roll
- roller
- magnetic controlling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model discloses a magnetic control spurting foam nickel winding film coating machine which comprises a single chamber type vacuum chamber, a driving vehicle, a pair of unwinding roller and winding roller and a plurality of pairs of magnetic control targets, wherein the shape of the vacuum chamber is circular or quadrate; the driving vehicle, the unwinding roller, the winding roller and the magnetic control targets are arranged in the vacuum chamber. Coated base materials are wound on the unwinding roller and the winding roller, and a driving chain or a driving belt and a plurality of guide rollers are arranged among the base materials between the unwinding roller and the winding roller. In the vacuum chamber, the coated base materials are continuously transferred to the winding roller by that the unwinding roller passes through the middle position of each pair of targets at a uniform speed. Metal materials sputtered by the targets are deposited on the base materials to form film of nickel or other metals with firm attachment and uniform thickness.
Description
The utility model relates to the equipment of on flexible parent metal successive sedimentation nickel or other metallic films, specifically a kind of magnetron sputtering nickel foam winding film coating machine.
At present, domestic this processing step that carries out is with the method for chemistry, is referred to as wet method, and its use equipment is more, and the use of some equipment is unfavorable for environment protection, and labor condition is also bad.
The purpose of this utility model provides the equipment that a kind of vacuum sputtering method that adopts physical vapor deposition is carried out metal-coated membrane on flexible parent metal, the metallic membrane compactness that it is coated with is good, and thickness is even, in conjunction with firm, adopt this equipment not produce the three wastes, labor condition is good.
The concrete technical scheme that realizes the utility model purpose is: magnetron sputtering nickel foam winding film coating machine comprises: one is shaped as circle or quadrate single chamber type vacuum chamber; A driving car that is located in the vacuum chamber; A pair of putting in the vacuum chamber, the wind-up roll of being located at; Several to being located at the magnetic controlling target in the vacuum chamber; Be wound with on let off roll and the wind-up roll by plating base material porous plastics, be provided with driving chain or band and a plurality of deflector roll between the porous plastics between let off roll and wind-up roll; Magnetic controlling target occurs in pairs, level or vertical the setting, and target or interior target are installed in and drive on the car on it, and following target or external target are installed on the chamber body of vacuum chamber, and the magnetic controlling target both sides are provided with loading line; Magnetic controlling target adopts electromagnetism target or permanent magnetism target.
Compared with prior art, the utility model has following advantage:
1, the metallic film compactness that is coated with on flexible parent metal is good, and thickness is even, in conjunction with firm, and does not produce pollution, and labor condition is good.
2, simple in structure, magnetic controlling target is installed in respectively and drives on car and the vacuum chamber body, and the replacing of target and quilt plate the easy to loading and unloading of base material.
3, be applicable to the suitability for industrialized production of large-area coating film, the mounting means of target makes by the outside surface of plating base material and the plated film of internal surface of hole and once finishes.
Fig. 1 is circular vacuum chamber of the utility model and the structural representation that is horizontally disposed with magnetic controlling target
Fig. 2 is square vacuum chamber of the utility model and the structural representation that magnetic controlling target vertically is set
Among the figure: 1-driving chain or band 2-vacuum chamber 3-let off roll 4-wind-up roll 5-drive car 6-porous plastics 7-deflector roll 8-loading line 9-magnetic controlling target
Below in conjunction with accompanying drawing the utility model is described in detail:
Consult accompanying drawing, the vacuum chamber 2 in the utility model can be square chamber body, also can be the circular cell body, and magnetic controlling target 9 can be horizontally disposed with, and the sputter of target and be to carry out in same vacuum chamber by plating the unreeling of base material, rolling etc. also can vertically be set.Magnetic controlling target 9 is installed in respectively and drives on car 5 and the vacuum chamber 2 Room bodies, and loading line 8 is located at the both sides of magnetic controlling target 9 and near being plated base material, each deflector roll 7 usefulness driving chain or band carry out synchrodrive.Concrete working process: in vacuum chamber 2, being plated the mid-way of base material one porous plastics 6 from the let off roll 3 a plurality of deflector rolls 7 of process and every pair of magnetic controlling target 9 is sent on the wind-up roll 4 continuously equably, by magnetic controlling target 9 time, the target metallic nickel of magnetic controlling target 9 is inflated the argon ion sputtering that produces after the argon gas ionization that pipeline 8 charges into and comes out, be deposited on the porous plastics 6 and obtain thin nickel metal film, finish the sputter coating process.
Claims (4)
1, a kind of magnetron sputtering nickel foam winding film coating machine is characterized in that it comprises: one is shaped as circle or quadrate single chamber type vacuum chamber (2); A driving car (5) that is located in the vacuum chamber (2); A pair of putting in the vacuum chamber (2), wind-up roll (3), (4) of being located at; Several to being located at the magnetic controlling target (9) in the vacuum chamber (2).
2, coating equipment according to claim 1, it is characterized in that being wound with on described let off roll (3) and the wind-up roll (4), be provided with driving chain or band (1) and a plurality of deflector roll (7) between the porous plastics (6) between let off roll (3) and wind-up roll (4) by plating base material porous plastics (6).
3, coating equipment according to claim 1, it is characterized in that described magnetic controlling target (9) occurs in pairs, level or vertical the setting, target or interior target are installed in and drive on the car (5) on it, following target or external target are installed on the chamber body of vacuum chamber (2), and magnetic controlling target (9) both sides are provided with loading line (8).
4, coating equipment according to claim 1 is characterized in that described magnetic controlling target (9) adopts electromagnetism target or permanent magnetism target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00246953 CN2434311Y (en) | 2000-08-08 | 2000-08-08 | Magnetic controlled spurting foam nickel winding film coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00246953 CN2434311Y (en) | 2000-08-08 | 2000-08-08 | Magnetic controlled spurting foam nickel winding film coater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2434311Y true CN2434311Y (en) | 2001-06-13 |
Family
ID=33606069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 00246953 Expired - Fee Related CN2434311Y (en) | 2000-08-08 | 2000-08-08 | Magnetic controlled spurting foam nickel winding film coater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2434311Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102066607A (en) * | 2008-06-20 | 2011-05-18 | Sakti3有限公司 | High volume manufacture of electrochecmicals cells using physical vapor deposition |
| CN102212791A (en) * | 2011-06-02 | 2011-10-12 | 爱蓝天高新技术材料(大连)有限公司 | Equipment and method for performing magnetron-controlled sputter coating on polyester type polyurethane foam matrix |
| CN102465266A (en) * | 2010-11-15 | 2012-05-23 | 财团法人工业技术研究院 | Continuous sputtering equipment and manufacturing method of solar selective absorption film |
| CN104711521A (en) * | 2015-03-26 | 2015-06-17 | 青州市宝丰镀膜科技有限公司 | Induction heating coating machine with square vacuum chamber |
-
2000
- 2000-08-08 CN CN 00246953 patent/CN2434311Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102066607A (en) * | 2008-06-20 | 2011-05-18 | Sakti3有限公司 | High volume manufacture of electrochecmicals cells using physical vapor deposition |
| CN105755446A (en) * | 2008-06-20 | 2016-07-13 | Sakti3有限公司 | Method For High Volume Manufacture Of Electrochemical Cells Using Physical Vapor Deposition |
| CN102465266A (en) * | 2010-11-15 | 2012-05-23 | 财团法人工业技术研究院 | Continuous sputtering equipment and manufacturing method of solar selective absorption film |
| CN102212791A (en) * | 2011-06-02 | 2011-10-12 | 爱蓝天高新技术材料(大连)有限公司 | Equipment and method for performing magnetron-controlled sputter coating on polyester type polyurethane foam matrix |
| CN104711521A (en) * | 2015-03-26 | 2015-06-17 | 青州市宝丰镀膜科技有限公司 | Induction heating coating machine with square vacuum chamber |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |