CN214010595U - Pressure sensor - Google Patents

Pressure sensor Download PDF

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Publication number
CN214010595U
CN214010595U CN202022769909.7U CN202022769909U CN214010595U CN 214010595 U CN214010595 U CN 214010595U CN 202022769909 U CN202022769909 U CN 202022769909U CN 214010595 U CN214010595 U CN 214010595U
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China
Prior art keywords
pressure
cavity
sensing structure
pressure sensor
chip
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CN202022769909.7U
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Chinese (zh)
Inventor
王小平
曹万
王红明
李凡亮
施涛
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Wuhan Finemems Inc
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Wuhan Finemems Inc
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Priority to CN202022769909.7U priority Critical patent/CN214010595U/en
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Abstract

The utility model provides a pressure sensor, this pressure sensor include casing, metalwork, pressure chip, pressure joint and pressure sensing structure, and the casing has the installation cavity, and the metalwork is installed the installation cavity just has along first opposite direction's first face and second face, the metalwork runs through along the first direction and is equipped with the pressure hole, and pressure chip installs first face and with the pressure hole sets up relatively, and pressure joint installs the second face, and with the metalwork encloses jointly and establishes a formation cavity, and pressure sensing structure locates the metalwork with between the pressure joint, with will epicoele and the lower chamber that are used for filling the transmission medium are separated into to the cavity.

Description

Pressure sensor
Technical Field
The embodiment of the utility model provides a relate to pressure sensor technical field, in particular to pressure sensor.
Background
The pressure sensor, such as a urea pressure sensor, is a sensor of the SCR urea injection system for engine aftertreatment, and performs urea pressure monitoring to determine the urea injection amount. Pressure sensor among the prior art (other liquid or gaseous the same circumstances also exist outside the test urea, the utility model discloses use urea pressure sensor TO explain as an example), the casing passes through metal base and seals, forms the oil charge chamber between metal base and the pressure sensing structure, and pressure chip installs on metal base (TO base promptly) and is located the oil charge intracavity, so pressure transmits TO the pressure sensing structure after, and the pressure sensing structure transmits pressure for the medium (taking silicon oil as an example) of oil charge intracavity, and the pressure of silicon oil is experienced in pressure chip's front TO measure urea pressure.
However, the pressure chip, and the bonding of the pressure chip and other components by gold wires and the like increase the height of the oil-filled cavity, so that the volume in the oil-filled cavity is increased, and the oil amount in the oil-filled cavity is increased. When the temperature is higher, the silicone oil in the oil filling cavity expands to apply pressure to the pressure chip, and the more the silicone oil is, the larger the generated thermal expansion volume is, the larger the pressure applied to the pressure chip by the silicone oil in the oil filling cavity is, the output of the pressure chip is influenced, and the temperature drift is generated;
further, the TO base is high in cost, glass is needed for sealing, high-temperature leakage risks exist due TO the influence of a glass sintering process, and high-temperature resistance is poor.
SUMMERY OF THE UTILITY MODEL
An object of the embodiment of the utility model is to provide a pressure sensor aims at solving above-mentioned pressure sensor and produces the temperature easily and float, with high costs, leak the high problem of risk.
In order to solve the above technical problem, an embodiment of the present invention provides a pressure sensor, including:
a housing having a mounting cavity;
the metal piece is arranged in the mounting cavity and provided with a first surface and a second surface which are opposite along a first direction, and a pressure hole penetrates through the metal piece along the first direction;
the pressure chip is arranged on the first surface and is opposite to the pressure hole;
the pressure joint is arranged on the second surface and forms a cavity together with the metal piece in an enclosing manner; and the number of the first and second groups,
and the pressure sensing structure is arranged between the metal piece and the pressure joint so as to divide the cavity into an upper cavity and a lower cavity which are used for filling a transmission medium.
The utility model discloses a set up the metalwork
Preferably, the pressure sensing structure is mounted on the second face and completely covers the pressure hole;
the inner wall of the pressure port defines the upper chamber.
Preferably, the pressure sensing structure is clamped and mounted between the metal piece and the pressure joint;
the middle part of the second surface is sunken towards the first surface to form an accommodating cavity, and the accommodating cavity and the pressure hole jointly define an upper cavity.
Preferably, the pressure sensing structure is clamped between the metal piece and the pressure fitting and then welded together.
Preferably, the pressure-sensitive structure is a corrugated sheet.
Preferably, the pressure chip has a sensing surface and a mounting surface opposite to the sensing surface, and the mounting surface is disposed opposite to the first surface.
Preferably, the electronic device further comprises a circuit board, wherein the circuit board is mounted on the first face.
Preferably, the circuit board is provided with a mounting groove, and the pressure chip is located in the mounting groove.
Preferably, the pressure joint is provided with a through hole along a first direction, and the through hole and the pressure sensing structure define a lower cavity therebetween.
Preferably, the through hole is filled with an anti-freezing piece.
The utility model discloses a the metalwork has a pressure port along the first direction through, pressure chip installs first face and with the pressure port sets up relatively, pressure joint installs in the second face, and with the metalwork encloses jointly and establishes and form a cavity, pressure sensing structure locates the metalwork with between the pressure joint, in order to separate into upper chamber and cavity of resorption with the cavity, pack the transmission medium in the upper chamber, get into urea (also can be other liquid or gas) in the cavity of resorption, after pressure sensing structure experienced pressure, transmit pressure to the transmission medium in the upper chamber, transmission medium transmits pressure to pressure chip, because pressure chip deviates from the cavity setting, the height of upper chamber is not restricted by pressure chip etc. the volume of upper chamber can be done little (the size of upper chamber can only be the volume size in the pressure port even), thereby control the oil filling volume, the temperature drift is reduced;
further, the utility model discloses a first face of metalwork is located with pressure chip TO ordinary metalwork, and pressure joint installs at the second face, and pressure sensing structure locates the metalwork with between the pressure joint, in order TO incite somebody TO action epicoele and cavity of resorption are separated into TO the cavity, pack the transmission medium in the epicoele, so, avoid pressure chip TO set up at the epicoele, can reduce the volume of pouring the transmission medium into (be silicon oil usually), improve the product precision, compare and adopt TO seat or sintering seat, can be adapted TO higher temperature range.
Drawings
One or more embodiments are illustrated by way of example in the accompanying drawings, which correspond to the figures in which like reference numerals refer to similar elements and which are not to scale unless otherwise specified.
Fig. 1 is a schematic perspective view of an embodiment of a pressure sensor provided by the present invention;
FIG. 2 is a cross-sectional view of one embodiment of FIG. 1;
FIG. 3 is a schematic view of FIG. 2 from another perspective;
fig. 4 is a partial schematic view of the metal part of fig. 2.
The utility model discloses the drawing reference number explains:
reference numerals Name (R) Reference numerals Name (R)
100 Pressure sensor 4 Pressure joint
1 Shell body 41 Through hole
2 Metal part 5 Pressure sensing structure
21 First side 6 Cavity body
22 Second surface 61 Upper chamber
23 Pressure hole 62 Lower cavity
24 Containing cavity 7 Circuit board
3 Pressure chip 71 Mounting groove
31 Induction surface 8 Anti-freezing part
32 Mounting surface 9 Dust-proof cap
The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, if directional indications (such as upper, lower, left, right, front and rear … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
The utility model provides a pressure sensor, please refer to fig. 1 to 4, the pressure sensor 100 comprises a housing 1, a metal member 2, a pressure chip 3, a pressure connector 4 and a pressure sensing structure 5, the housing 1 has a mounting cavity, the metal member 2 is mounted in the mounting cavity and has a first surface 21 and a second surface 22 opposite to each other along a first direction, the metal member 2 is provided with a pressure hole 23 penetrating along a first direction (in this embodiment, the first direction is a vertical direction), the pressure chip 3 is mounted on the first surface 21 and is arranged opposite to the pressure hole 23, the pressure joint 4 is mounted on the second surface 22, and forms a cavity 6 with the metal piece 2, the pressure sensing structure 5 is arranged between the metal piece 2 and the pressure joint 4, to divide the chamber 6 into an upper chamber 61 and a lower chamber 62 for filling with a transmission medium (in this embodiment, the transmission medium is silicone oil).
In the pressure sensor (taking a urea pressure sensor as an example) in the prior art, a shell is sealed by a metal base, an oil filling cavity is formed between the metal base and a pressure sensing structure, a pressure chip is installed on the metal base (namely, a TO base) and is located in the oil filling cavity, after the pressure is transmitted TO the pressure sensing structure 5, the pressure sensing structure transmits the pressure TO a medium (taking silicon oil as an example) in the oil filling cavity, and the front surface of the pressure chip senses the pressure of the silicon oil TO measure the urea pressure. However, the pressure chip, and the bonding of the pressure chip and other components by gold wires and the like increase the height of the oil-filled cavity, so that the volume in the oil-filled cavity is increased, and the oil amount in the oil-filled cavity is increased. When the temperature is higher, the silicone oil in the oil filling cavity expands to apply pressure to the pressure chip, the more the silicone oil is, the larger the thermal expansion volume is, and the more the silicone oil in the oil filling cavity applies pressure to the pressure chip, the more the output of the pressure chip is influenced, and the temperature drift is generated.
Referring to fig. 2 and 3, the metal member 2 of the present invention is provided with a pressure hole 23 extending along a first direction, a pressure chip 3 is installed on the first surface 21 and opposite to the pressure hole 23, a pressure joint 4 is installed on the second surface 22 and encloses with the metal member 2 to form a cavity 6, a pressure sensing structure 5 is installed between the metal member 2 and the pressure joint 4 to divide the cavity 6 into an upper cavity 61 and a lower cavity 62, the upper cavity 61 is filled with a transmission medium, the lower cavity 62 is filled with urea, the pressure sensing structure 5 senses pressure and transmits the pressure to the transmission medium in the upper cavity 61, the transmission medium transmits the pressure to the pressure chip 3, the pressure chip 3 is disposed apart from the cavity 6, the height of the upper cavity 61 is not limited by the pressure chip 3, etc., the volume of the upper cavity 61 can be small (the size of the upper cavity 61 can even be only the volume size in the pressure hole 23), thereby controlling the oil filling amount and reducing the temperature drift.
The pressure sensing structure 5 (in this embodiment, the pressure sensing structure 5 is a corrugated sheet, the corrugated sheet may be made of stainless steel, or may be a noble metal diaphragm, and no specific limitation is made herein), and there may be a plurality of installation forms, where the pressure sensing structure 5 is installed on the second surface 22, and completely covers the pressure hole 23, so that the inner wall of the pressure hole 23 defines the upper cavity 61, and thus, the size of the upper cavity 61 is only the volume size in the pressure hole 23, that is, the oil filling amount is small, the thermal expansion of the silicone oil is smaller, and during specific installation, since the pressure sensing structure 5 is usually a metal corrugated sheet, during installation, the pressure sensing structure 5 is usually welded to the second surface 22; referring to fig. 3, the pressure sensing structure 5 may be clamped and installed between the metal member 2 and the pressure connector 4, a middle portion of the second surface 22 is recessed toward the first surface 21 to form a receiving cavity 24, and the receiving cavity 24 and the pressure hole 23 together define an upper cavity 61. Because the accommodating cavity 24 is not influenced by the heights of the pressure chip 3 and the like, the size of the accommodating cavity 24 can be controlled according to actual needs, and the oil filling amount is reduced. Specifically, the pressure sensing structure 5 is clamped between the metal piece 2 and the pressure joint 4 and then welded together, the pressure sensing structure 5 is easy to weld and low in requirement on welding equipment, the diameter of the pressure sensing structure 5 can be larger in such a way, when the pressure sensing structure 5 is smaller, the heat affected zone of the pressure sensing structure 5 is closer to the sensing zone, the performance of the pressure sensing structure 5 is reduced, the pressure sensed by a chip and transmitted by a pressure sensing element is deviated from the actual pressure, a small-range chip is sensitive, the pressure and the actual pressure difference measured by the chip are larger, the measurement accuracy is reduced, the diameter of the pressure sensing structure 5 can be increased, the temperature drift is reduced, the measurement accuracy is improved, and the overall height of the pressure sensor 100 cannot be increased.
Specifically, the pressure chip 3 has a sensing surface 31 and a mounting surface 32 opposite to the sensing surface 31, and the mounting surface 32 is disposed opposite to the first surface 21. That is, the utility model discloses pressure chip 3 adopts the back pressure sensing, sets up pressure chip 3 in the oil charge chamber outside, compares positive pressure sensing (positive pressure sensing needs to set up pressure chip 3 in the oil charge intracavity), has avoided the volume in oil charge chamber (the utility model discloses an epicoele 61) to receive the requirement of the equidimension such as pressure chip 3 and too big.
In addition, the circuit board 7 is further included, and the circuit board 7 is mounted on the first face 21. In order to reduce the overall height, the circuit board 7 is provided with a mounting groove 71, and the pressure chip 3 is located in the mounting groove 71. The pressure joint 4 is provided with a through hole 41 along a first direction, and the through hole 41 and the pressure sensing structure 5 define a lower cavity 62 therebetween. The through hole 41 is filled with the anti-freezing piece 8, and in the embodiment, the anti-freezing piece 8 is a silica gel foaming tube, so that anti-freezing can be effectively performed. It should be noted that the pressure sensor further includes a dust cap 9, a waterproof and breathable film, etc., which may be conventional technologies and are not described herein again.
The above is only the preferred embodiment of the present invention, not so limiting the patent scope of the present invention, all of which are in the utility model discloses a conceive, utilize the equivalent structure transform that the content of the specification and the attached drawings did, or directly/indirectly use all to include in other relevant technical fields the patent protection scope of the present invention.

Claims (10)

1. A pressure sensor, comprising:
a housing having a mounting cavity;
the metal piece is arranged in the mounting cavity and provided with a first surface and a second surface which are opposite along a first direction, and a pressure hole penetrates through the metal piece along the first direction;
the pressure chip is arranged on the first surface and is opposite to the pressure hole;
the pressure joint is arranged on the second surface and forms a cavity together with the metal piece in an enclosing manner; and the number of the first and second groups,
and the pressure sensing structure is arranged between the metal piece and the pressure joint so as to divide the cavity into an upper cavity and a lower cavity which are used for filling a transmission medium.
2. The pressure sensor of claim 1, wherein the pressure sensing structure is mounted on the second face and completely covers the pressure aperture;
the inner wall of the pressure port defines the upper chamber.
3. The pressure sensor of claim 1, wherein said pressure sensing structure is sandwiched and mounted between said metal member and said pressure fitting;
the middle part of the second surface is sunken towards the first surface to form an accommodating cavity, and the accommodating cavity and the pressure hole jointly define an upper cavity.
4. The pressure sensor of claim 3, wherein the pressure sensing structure is clamped between the metal piece and the pressure fitting and then welded together.
5. The pressure sensor of any of claims 1-4, wherein the pressure sensing structure is a corrugated sheet.
6. The pressure sensor of claim 1, wherein the pressure chip has a sensing surface and a mounting surface opposite the sensing surface, the mounting surface being disposed opposite the first surface.
7. The pressure sensor of claim 1, further comprising a circuit board mounted to the first face.
8. The pressure sensor of claim 7, wherein the circuit board is provided with a mounting slot, the pressure chip being located in the mounting slot.
9. The pressure sensor of claim 1, wherein the pressure fitting has a through-hole extending therethrough in a first direction, the through-hole and the pressure sensing structure defining the lower cavity therebetween.
10. The pressure sensor of claim 9, wherein the through hole is filled with an anti-freeze.
CN202022769909.7U 2020-11-26 2020-11-26 Pressure sensor Active CN214010595U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202022769909.7U CN214010595U (en) 2020-11-26 2020-11-26 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202022769909.7U CN214010595U (en) 2020-11-26 2020-11-26 Pressure sensor

Publications (1)

Publication Number Publication Date
CN214010595U true CN214010595U (en) 2021-08-20

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Application Number Title Priority Date Filing Date
CN202022769909.7U Active CN214010595U (en) 2020-11-26 2020-11-26 Pressure sensor

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112304474A (en) * 2019-12-04 2021-02-02 武汉飞恩微电子有限公司 Pressure sensor
WO2024124765A1 (en) * 2022-12-13 2024-06-20 武汉飞恩微电子有限公司 Pressure sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112304474A (en) * 2019-12-04 2021-02-02 武汉飞恩微电子有限公司 Pressure sensor
WO2024124765A1 (en) * 2022-12-13 2024-06-20 武汉飞恩微电子有限公司 Pressure sensor

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