CN206399564U - A kind of wireless pressure sensor - Google Patents
A kind of wireless pressure sensor Download PDFInfo
- Publication number
- CN206399564U CN206399564U CN201720012826.9U CN201720012826U CN206399564U CN 206399564 U CN206399564 U CN 206399564U CN 201720012826 U CN201720012826 U CN 201720012826U CN 206399564 U CN206399564 U CN 206399564U
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- Prior art keywords
- pressure
- circuit board
- pressure chip
- chip
- pressure sensor
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Abstract
The utility model discloses a kind of wireless pressure sensor, including pressure chip, it is vacuum state to be provided with inside the pressure chip in annular seal space, the annular seal space, in addition to：Base, the surrounding edges and corners of the base are equipped with mounting hole, the base upper end is provided with carrying housing, the side of the carrying housing is provided with signal output connector, and the carrying housing is equipped with passage on the both sides of signal output connector, and the pressure chip is located in carrying housing, bearing ring is provided between the pressure chip and carrying shell top wall, the pressure chip lower end is provided with circuit board, and the circuit board is provided with sensitive surface, and the diameter of the sensitive surface is equal to annular seal space diameter.The utility model acts on measured pressure value by pressure chip and circuit board, and circuit board is arranged on away from the side of external force point, reduces the damage of circuit board, extends pressure sensor service life, and improve the reliability of sensor.
Description
Technical field
The utility model is related to sensor technical field, more particularly to a kind of wireless pressure sensor.
Background technology
Pressure sensor is the most commonly used a kind of sensor in industrial practice, and it is widely used in various industrial automatic control rings
Border, be related to water conservancy and hydropower, railway traffic, intelligent building, production automatic control, Aero-Space, military project, petrochemical industry, oil well, electric power, ship,
Numerous industries such as lathe, pipeline.Traditional pressure sensor is referred to based on the device of mechanical structure type with the deformation of flexible member
Show pressure, but this physical dimension is big, quality weight, it is impossible to electricity output is provided；With the development of semiconductor technology, semiconductor pressure
Force snesor also arises at the historic moment.Small volume, light weight, degree of accuracy height, good temp characteristic are characterized in, especially with MEMS skills
The development of art, semiconductor transducer is towards miniaturization, and its small power consumption, reliability are high.
Through retrieval, Chinese patent, application number：201020270460.3；Publication number：CN201757688U；Denomination of invention：Pressure
Force snesor；It is related to a kind of wireless pressure sensor, it is therefore an objective to provide a kind of pressure sensor of the high and low cost of measurement accuracy.
Including base, the opening flexible supporting body being arranged on base, supporting body is interior, overthe openings are provided with four stress gauges, and four should
Become meter to be symmetricly set in the same level in supporting body, four stress gauges connect into bridge like circuit.Pass through four stress gauges
Design, greatly improve overall measurement accuracy, by the structure change of supporting body, make strain gauge to the pressure change of supporting body
More sensitive, so as to further increase sensor accuracy class, overall cost increase is few, adds the cost performance of product；But
It is that sensor pressure-bearing is partially exposed at outer end, it is easy to cause to damage, need to be repaired after broken evil idea so that away from sensor cost
Rise, while causing the waste of resource.
Utility model content
The utility model is intended at least solve one of technical problem in correlation technique to a certain extent.Therefore, this reality
It is to propose a kind of wireless pressure sensor with a new purpose, device for prolonging pressure sensor service life, and
And improve the reliability of sensor.
According to a kind of wireless pressure sensor of the utility model embodiment, including pressure chip, in the pressure chip
It is vacuum state that portion, which is provided with annular seal space, the annular seal space, in addition to：Base, the surrounding edges and corners of the base are equipped with peace
Hole is filled, the base upper end is provided with signal output connector, the carrying housing provided with carrying housing, the side of the carrying housing
Passage is equipped with the both sides of signal output connector, the pressure chip is located in carrying housing, the pressure chip
Bearing ring is provided between carrying shell top wall, the pressure chip lower end is provided with circuit board, and the circuit board is provided with sensing
Face, the diameter of the sensitive surface is equal to annular seal space diameter；Top cover, the top cover is located at the top of carrying housing upper end, the top cover
For groove-like；Connecting line, one end of the connecting line is fixed on the side of circuit board, and the other end and signal of the connecting line are defeated
Go out joint connection.
In some embodiments of the present utility model, the connecting line and circuit board, the connected mode of signal output connector
For welding.
In other embodiments of the present utility model, the numerical value that the pressure chip is measured passes through the sensing on circuit board
Face, connecting line, signal output connector are transmitted to external meters.
In other embodiments of the present utility model, the pressure chip is pressure resistance type MEMS pressure chips.
In other embodiments of the present utility model, the pressure chip by monocrystalline silicon layer and Pyrex layer bonding and
Into.
Beneficial effect in the utility model is：The surrounding edges and corners of base are equipped with mounting hole, are passed for fixation pressure
Sensor, carrying housing is arranged in base upper end, and carrying housing and is provided with pressure chip and circuit board, pressure chip and circuit
The mating reaction of plate realizes that pressure sensor measures and transmits the effect of signal, and pressure chip is provided with inwall on carrying housing and held
Trim ring, it is ensured that contact of the carrying housing with pressure chip, on the other hand protection pressure chip, prevents it from damaging, on carrying housing
End is provided with top cover, and top cover top is groove-like, facilitates contact of the external force point with top cover, the power suffered by top cover passes through pressure-bearing
Circle is transmitted to pressure chip, and pressure chip is contacted with the sensitive surface on circuit board and measures current pressure values, and signal is delivered into electricity
Road plate one end, transmits signal to signal output connector by connecting line, finally transmits to external meters, complete the survey of pressure value
Fixed, passage effect makes the free flow of gas inside and outside carrying housing, can balance inner and outer air pressure, improves the reliability of sensor；
The utility model acts on measured pressure value by pressure chip and circuit board, and circuit board is arranged on away from external force point
Side, reduces the damage of circuit board, extends pressure sensor service life, and improve the reliability of sensor.
Brief description of the drawings
Accompanying drawing is used for providing further understanding to of the present utility model, and constitutes a part for specification, with this practicality
New embodiment is used to explain the utility model together, does not constitute to limitation of the present utility model.In the accompanying drawings：
Fig. 1 be the utility model proposes a kind of wireless pressure sensor internal structure sectional view.
Fig. 2 be the utility model proposes a kind of wireless pressure sensor structural representation.
In figure：1 base, 2 carrying housings, 3 top covers, 4 mounting holes, 5 circuit boards, 6 pressure chips, 7 annular seal spaces, 8 sensitive surfaces,
9 passages, 10 signal output connectors, 11 connecting lines, 12 bearing rings.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the utility model, rather than whole
Embodiment.
The example of the embodiment is shown in the drawings, wherein same or similar label represents identical or class from beginning to end
As element or the element with same or like function.The embodiments described below with reference to the accompanying drawings are exemplary, purport
For explaining the utility model, and it is not intended that to limitation of the present utility model.
In description of the present utility model, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer ", " suitable
The orientation or position relationship of the instruction such as hour hands ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " are based on orientation shown in the drawings
Or position relationship, be for only for ease of description the utility model and simplify and describe, rather than indicate or imply signified device or
Element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to limit of the present utility model
System.
In addition, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include one or more this feature.In description of the present utility model, " multiple " are meant that two or two
More than, unless otherwise specifically defined.
In the utility model, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " Gu
It is fixed " etc. term should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integrally；Can be
Mechanically connect or electrically connect；Can be joined directly together, can also be indirectly connected to by intermediary, can be two
The connection of element internal or the interaction relationship of two elements.For the ordinary skill in the art, can basis
Concrete condition understands concrete meaning of the above-mentioned term in the utility model.
Reference picture 1-2, a kind of wireless pressure sensor, including pressure chip 6, the inside of pressure chip 6 are provided with annular seal space 7,
It is vacuum state in annular seal space 7, in addition to：Base 1, the surrounding edges and corners of base 1 are equipped with mounting hole 4, and the upper end of base 1 is provided with
Housing 2 is carried, the side of carrying housing 2 is provided with signal output connector 10, and carrying housing 2 is close to the both sides of signal output connector 10
On be equipped with passage 9, pressure chip 6 is located in carrying housing 2, and pressure-bearing is provided between pressure chip 6 and the carrying upper wall of housing 2
Circle 12, the lower end of pressure chip 6 is provided with circuit board 5, and circuit board 5 is provided with sensitive surface 8, and the diameter of sensitive surface 8 is straight equal to annular seal space 7
Footpath；Top cover 3, top cover 3 is located at carrying housing 2 upper end, and the top of top cover 3 is groove-like；Connecting line 11, one end of connecting line 11 is fixed
In the side of circuit board 5, the other end of connecting line 11 is connected with signal output connector 10；Connecting line 11 and circuit board 5, signal are defeated
It is welding to go out the connected mode of joint 10；The numerical value that pressure chip 6 is measured by the sensitive surface 8 on circuit board 5, connecting line 11,
Signal output connector 10 is transmitted to external meters；Pressure chip 6 is pressure resistance type MEMS pressure chips；Pressure chip 10 is by monocrystalline
Silicon layer and Pyrex layer bonding are formed.
The surrounding edges and corners of base 1 are equipped with mounting hole 4, for fixation pressure sensor, and carrying housing 2 is arranged on base
Pressure chip 6 and circuit board 5 are installed, the mating reaction of pressure chip 6 and circuit board 5 is realized in 1 upper end, and carrying housing 2
Pressure sensor measures and transmits the effect of signal, and pressure chip 6 is provided with bearing ring 12 with inwall on carrying housing 2, it is ensured that hold
The contact with pressure chip 6 of housing 2 is carried, on the other hand protection pressure chip 6, prevents it from damaging, carrying housing 2 upper end is provided with top
Lid 3, the top of top cover 3 is groove-like, facilitates the contact with top cover 3 of external force point, the power suffered by top cover 3 passes through bearing ring 12
Transmit to pressure chip 6, pressure chip 6 contacts with the sensitive surface 8 on circuit board 5 and measures current pressure values, signal is delivered to
The one end of circuit board 5, transmits signal to signal output connector 10 by connecting line 11, finally transmits to external meters, complete pressure
The measure of force value, the effect of passage 9 makes the free flow of gas inside and outside carrying housing 2, can balance inner and outer air pressure, improves sensor
Reliability；The utility model acts on measured pressure value by pressure chip 6 and circuit board 5, and circuit board 5 is arranged on deviated from
The side of external force point, reduces the damage of circuit board 5, extends pressure sensor service life, and improve sensing
The reliability of device.
A kind of wireless pressure sensor, the groove-like on the top of top cover 3, extraneous stress will be concentrated easily, from top cover 3 transmit to
Carry on housing 2, carrying housing 2 is by bearing ring 12 by institute's force transmission to pressure chip 6, and pressure chip 6 is interior provided with sealing
Chamber 7, has saved material resources, in addition, the vacuum-sealed cavity 7 set improves the maximum pressure value that pressure chip 6 can bear；
Pressure chip 6 is acted on the sensitive surface 8 on circuit board 5, and the diameter of sensitive surface 8 is identical with the diameter of annular seal space 7, the conduct of pressure chip 6
Sensing element, circuit board 5 is as installation carrier and for transmitting signal；The surrounding of base 1 of carrying housing 2 lower end is equipped with installation
Hole 4, facilitates the fixation of sensor, and connecting line 11 is welded with circuit board 5, the input of signal output connector 10 respectively, signal output
The output end of joint 10 is connected with external meters, facilitates the transmission of signal, the power supply of instrumentation only need to be with signal output connector 10
Connection just can be accurately detected on top cover 3 current suffered pressure value, and signal output connector 10 passes through outer end wireless transmitter module
Complete the transmission of data.
In the utility model, unless otherwise clearly defined and limited, fisrt feature is "above" or "below" second feature
Can be that the first and second features are directly contacted, or the first and second features pass through intermediary mediate contact.Moreover, first is special
Levy second feature " on ", " top " and " above " but fisrt feature directly over second feature or oblique upper, or only
Represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be with
Be fisrt feature immediately below second feature or obliquely downward, or be merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means to combine specific features, structure, material or the spy that the embodiment or example are described
Point is contained at least one embodiment of the present utility model or example.In this manual, to the schematic table of above-mentioned term
State and be not necessarily referring to identical embodiment or example.Moreover, specific features, structure, material or the feature of description can be
Combined in an appropriate manner in any one or more embodiments or example.
It is described above, only the utility model preferably embodiment, but protection domain of the present utility model is not
This is confined to, any one skilled in the art is in the technical scope that the utility model is disclosed, according to this practicality
New technical scheme and its utility model design are subject to equivalent substitution or change, should all cover in protection model of the present utility model
Within enclosing.
Claims (5)
1. it is provided with inside a kind of wireless pressure sensor, including pressure chip, the pressure chip in annular seal space, the annular seal space
For vacuum state, it is characterised in that also include：
Base, the surrounding edges and corners of the base are equipped with mounting hole, and the base upper end is provided with carrying housing, the carrying shell
The side of body is provided with signal output connector, and the carrying housing is equipped with passage, institute on the both sides of signal output connector
State pressure chip to be located in carrying housing, bearing ring, the pressure core are provided between the pressure chip and carrying shell top wall
Piece lower end is provided with circuit board, and the circuit board is provided with sensitive surface, and the diameter of the sensitive surface is equal to annular seal space diameter；
Top cover, it is groove-like that the top cover, which is located at the top of carrying housing upper end, the top cover,；
Connecting line, one end of the connecting line is fixed on the side of circuit board, and the other end and the signal output of the connecting line connect
Head connection.
2. a kind of wireless pressure sensor according to claim 1, it is characterised in that：The connecting line and circuit board, letter
The connected mode of number out splice going splice is welding.
3. a kind of wireless pressure sensor according to claim 1, it is characterised in that：The numerical value that the pressure chip is measured
Transmitted by the sensitive surface on circuit board, connecting line, signal output connector to external meters.
4. a kind of wireless pressure sensor according to claim 1, it is characterised in that：The pressure chip is pressure resistance type
MEMS pressure chips.
5. a kind of wireless pressure sensor according to claim 4, it is characterised in that：The pressure chip is by monocrystalline silicon layer
Formed with Pyrex layer bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720012826.9U CN206399564U (en) | 2017-01-05 | 2017-01-05 | A kind of wireless pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720012826.9U CN206399564U (en) | 2017-01-05 | 2017-01-05 | A kind of wireless pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206399564U true CN206399564U (en) | 2017-08-11 |
Family
ID=59513403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720012826.9U Expired - Fee Related CN206399564U (en) | 2017-01-05 | 2017-01-05 | A kind of wireless pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206399564U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108254108A (en) * | 2018-02-05 | 2018-07-06 | 安徽微泰导航电子科技有限公司 | A kind of MEMS pressure sensor based on information engineering |
| CN114120532A (en) * | 2021-12-01 | 2022-03-01 | 武汉轻购云科技有限公司 | Multiple force transducer weighing and identifying cargo channel |
-
2017
- 2017-01-05 CN CN201720012826.9U patent/CN206399564U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108254108A (en) * | 2018-02-05 | 2018-07-06 | 安徽微泰导航电子科技有限公司 | A kind of MEMS pressure sensor based on information engineering |
| CN114120532A (en) * | 2021-12-01 | 2022-03-01 | 武汉轻购云科技有限公司 | Multiple force transducer weighing and identifying cargo channel |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170811 Termination date: 20200105 |