CN213022100U - Sintering seat, core body structure, base assembly and differential pressure sensor - Google Patents
Sintering seat, core body structure, base assembly and differential pressure sensor Download PDFInfo
- Publication number
- CN213022100U CN213022100U CN202022336172.XU CN202022336172U CN213022100U CN 213022100 U CN213022100 U CN 213022100U CN 202022336172 U CN202022336172 U CN 202022336172U CN 213022100 U CN213022100 U CN 213022100U
- Authority
- CN
- China
- Prior art keywords
- cavity
- vibration
- sensing element
- pressure sensor
- differential pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The utility model provides a sintering seat, core structure, base subassembly and differential pressure sensor, this a sintering seat for differential pressure sensor include the casing and detect the structure, and the casing is equipped with first cavity and the second cavity of opening orientation second direction along the first direction interval, the second cavity has and deviates from the roof of second direction, the roof runs through and is equipped with the pressure hole, be equipped with the first passageway that is used for circulating fluid medium in the casing, first cavity and second cavity are used for installing respectively and feel the component that shakes towards the first component that shakes and the second that the second direction set up and feel the component that shakes. The utility model discloses when aiming at solving the component of shaking of feeling, the heat affected zone of the component of shaking of feeling is nearer from the induction zone, has reduced the performance of the component of shaking of feeling, can lead to the chip sensing to have the deviation to the pressure after the component transmission of shaking of feeling with actual pressure.
Description
Technical Field
The embodiment of the utility model provides a relate to pressure sensor technical field, in particular to sintering seat, core structure, base subassembly and differential pressure sensor.
Background
A differential pressure sensor is a sensor used to measure the difference between two pressures, and is typically used to measure the pressure difference across a device or component. The differential pressure sensor is generally applied to an Exhaust Gas recirculation system (abbreviated as EGR), which mainly functions to send part of Exhaust Gas exhausted by an engine back to an intake manifold and Re-enter air into a cylinder to perform combustion work, and due to incomplete combustion, if the Exhaust Gas directly enters a pressure hole of a core body, particulate matters are accumulated at the pressure hole, even the pressure hole is blocked, so that a sintering seat is required to be adopted, and the chip is installed in the sintering seat to protect the chip and prevent the pressure hole from being blocked and the like.
The base component of the differential pressure sensor applied to the exhaust gas recirculation system in the prior art comprises a core body with a sintering seat, two sealing joints and a base, wherein the sintering seat transversely extends, two vibration sensing elements of the core body are transversely deviated from each other and are respectively connected with one ends of the two sealing joints in a sealing manner, the other ends of the two sealing joints are arranged on the base, and because the vibration sensing elements are smaller, a heat affected zone of the vibration sensing elements is closer to an induction zone, so that the performance of the vibration sensing elements is reduced, the pressure sensed by a chip and transmitted by the vibration sensing elements is deviated from the actual pressure, the chip with a small measuring range (below 50 kPa) is sensitive, the pressure measured by the chip is larger than the actual pressure difference, the measurement precision is reduced, the problem can be solved by increasing the diameter of the vibration sensing elements, and the integral increase of the core body of the sintering seat can be caused, resulting in an overall increase in differential pressure sensor product.
SUMMERY OF THE UTILITY MODEL
An embodiment of the utility model provides a sintering seat, core structure, base subassembly and differential pressure sensor aims at solving and feels when shaking the component less, and the heat affected zone that feels the component that shakes is nearer from the induction zone, has reduced the performance that feels the component that shakes, can lead to the chip sensing to feel the problem that there is the deviation through the pressure after the component transmission that shakes and actual pressure.
In order to solve the above technical problem, an embodiment of the present invention provides a sintering seat for a differential pressure sensor, including:
the vibration sensor comprises a shell, a first cavity and a second cavity, wherein the first cavity and the second cavity are arranged in the first direction at intervals, the openings of the first cavity and the second cavity face the second direction, the second cavity is provided with a top wall in the second direction, a pressure hole penetrates through the top wall, a first passage for circulating a fluid medium is arranged in the shell, and the first cavity and the second cavity are used for respectively installing a first vibration sensing element and a second vibration sensing element which face the second direction.
The utility model discloses a set up the opening towards the first cavity and the second cavity of second direction along first direction interval, first cavity and second cavity are used for the installation respectively and shake component and the second of shaking towards the first sense that the second direction set up, so, can not increase core structure height when the first sense of increase shakes component and/or second sense shakes the component size.
In order to achieve the above object, the present invention also provides a core structure, including:
the sintering seat for the differential pressure sensor;
the detection structure comprises a first vibration sensing element and a second vibration sensing element, wherein the first vibration sensing element and the second vibration sensing element are arranged towards a second direction, are respectively arranged in the first cavity and the second cavity and are used for respectively separating the first cavity and the second cavity into an upper cavity and a lower cavity along the second direction, the upper cavity, the first passage and the pressure hole of the first cavity are communicated, and the upper cavity of the second cavity is used for being provided with a fluid medium; and the number of the first and second groups,
and the chip is installed on the top wall of the second chamber and covers the pressure hole.
Preferably, the first vibration-sensing element and/or the second vibration-sensing element is a metal piece.
Preferably, the first vibration-sensing element is a first corrugated sheet; and/or the second vibration-sensing element is a second corrugated sheet.
Preferably, the first corrugated sheet is welded to an inner wall of the first chamber; and/or the presence of a gas in the gas,
the second corrugated sheet is welded to the inner wall of the second chamber.
Preferably, the diameter of the first corrugated sheet and/or the second corrugated sheet is D, and D is more than or equal to 16mm and less than or equal to 22 mm.
Preferably, the first corrugated sheet and/or the second corrugated sheet have a wavy cross-sectional shape.
Preferably, the first direction is arranged perpendicular to the second direction.
In order to achieve the above object, the present invention also provides a base assembly, including:
a base;
the core structure is mounted on the base.
In order to achieve the above object, the present invention further provides a differential pressure sensor, including the above base assembly.
Drawings
One or more embodiments are illustrated by way of example in the accompanying drawings, which correspond to the figures in which like reference numerals refer to similar elements and which are not to scale unless otherwise specified.
Fig. 1 is a perspective view of a differential pressure sensor according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of FIG. 1;
FIG. 3 is a perspective view of one embodiment of the core structure of FIG. 2;
FIG. 4 is a cross-sectional view of FIG. 3;
fig. 5 is another cross-sectional view of fig. 3.
The utility model discloses the drawing reference number explains:
reference numerals | Name (R) | Reference numerals | Name (R) |
100 | |
2112a | Roof wall |
10 | Base assembly | 2112a1 | Pressure hole |
1 | |
2113 | First path |
2 | Core structure | 212 | Detection structure |
21 | Sintering for |
2121 | First vibration- |
211 | |
2122 | Second vibration- |
2111 | The |
22 | Chip and method for manufacturing the same |
2112 | Second chamber |
The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, if directional indications (such as upper, lower, left, right, front and rear … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Fig. 1 to 5 show an embodiment of a sintering seat for a differential pressure sensor provided by the present invention, the present invention provides a sintering seat for a differential pressure sensor, please refer to fig. 4 and 5, the sintering seat 21 for a differential pressure sensor comprises a housing 211, the housing 211 is provided with a first chamber 2111 and a second chamber 2112 which are opened towards a second direction along a first direction interval, the second chamber 2112 has a top wall 2112a along the second direction, the top wall 2112a is provided with a pressure hole 2112a1, and a first passage 2113 for circulating a fluid medium is provided in the housing 211.
The utility model discloses a set up opening towards the first cavity 2111 and the second cavity 2112 of second direction along first direction interval, first cavity 2111 and second cavity 2112 are used for installing the first element 2121 and the second element 2122 that shakes towards the setting of second direction, so, can not increase core structure 2 height when increasing first element 2121 and the second element 2122 size of shaking, it is less to have solved the element that shakes, the heat affected zone of the element that shakes is close from the induction zone, the performance of the element that shakes is felt to have been reduced, the problem that can lead to the chip sensing to have the deviation through the pressure after the element transmission that shakes and actual pressure.
Referring to fig. 3 to 5, the present invention further provides a core structure 2, the core structure 2 includes the above-mentioned sintering seat 21 for a differential pressure sensor, a detecting structure 212 and a chip 22 (the chip 22 may be one or two, and is not limited in this respect), the detecting structure 212 includes a first vibration-sensing element 2121 and a second vibration-sensing element 2122, the first vibration-sensing element 2121 and the second vibration-sensing element 2122 are disposed to face a second direction, and are respectively installed in the first chamber 2111 and the second chamber 2112, for partitioning the first chamber 2111 and the second chamber 2112 into an upper chamber and a lower chamber, respectively, in a second direction, the upper chamber of the first chamber 2111, the first passage 2113 and the pressure port 2112a1 are placed in communication, the upper chamber of the second chamber 2112 is adapted to be provided with a fluid medium (which may be conventional silicone oil or the like), and the chip 22 is mounted on the top wall 2112a of the second chamber 2112 and covers the pressure port 2112a 1.
The core structure 2 comprises the above-described sintered seat 21 for a differential pressure sensor, and the core structure 2 comprises an embodiment of the above-described sintered seat 21 for a differential pressure sensor.
The upper chamber of the first chamber 2111, the first passage 2113, and the pressure hole 2112a1 are filled with a fluid medium through which pressure is transmitted to the upper surface of the chip when the first vibration element 2121 senses the pressure. The upper cavity of the second chamber 2112 is filled with a fluid medium, and when the second vibration sensing element 2122 senses pressure, the pressure is transmitted to the lower surface of the chip through the fluid medium in the upper cavity of the second chamber 2112.
When the chip is in a certain range, the sizes of the first vibration sensing element 2121 and the second vibration sensing element 2122 are too small, the sensing areas of the first vibration sensing element 2121 and the second vibration sensing element 2122 are closer to the heat affected area of the welding, the performance of the first vibration sensing element 2121 and the second vibration sensing element 2122 is more greatly affected, and the pressure sensed by the chip and transmitted by the vibration sensing elements deviates from the actual pressure, particularly, the chip in a small range (below 50 kPa) is sensitive, the pressure measured by the chip is more different from the actual pressure, and the measurement accuracy is reduced.
The utility model discloses a set up opening towards the first cavity 2111 and the second cavity 2112 of second direction along first direction interval, first vibration sensing element 2121 with second vibration sensing element 2122 sets up towards the second direction, and installs respectively first cavity 2111 with second cavity 2112, so, can not increase core structure 2 height when increasing first vibration sensing element 2121 and/or second vibration sensing element 2122 size (diameter).
The first vibration-sensing element 2121 and/or the second vibration-sensing element 2122 can be a conventional metal piece for sensing pressure. If the first vibration-sensing element 2121 and the second vibration-sensing element 2122 are flat metal vibration-sensing elements, when the differential pressure sensor 100 is evacuated, the first vibration-sensing element 2121 and the second vibration-sensing element 2122 deform in a large amount and the restoring speed is slow, so in other embodiments, the first vibration-sensing element 2121 is a first corrugated sheet, and the second vibration-sensing element 2122 is a second corrugated sheet, so that the deformation amount is small when the differential pressure sensor 100 is evacuated, and the influence on the performance of the first vibration-sensing element 2121 and the second vibration-sensing element 2122 is small.
The first and second bellows may be secured in a conventional manner, and in this embodiment, the first bellows is welded to an inner wall of the first chamber 2111, and the second bellows is welded to an inner wall of the second chamber 2112. The first corrugated sheet and the second corrugated sheet are welded on the inner walls of the first chamber 2111 and the second chamber 2112 respectively, on one hand, the sealing performance is better, and on the other hand, the failure at high temperature is avoided compared with a glue bonding mode.
The first corrugated sheet and the second corrugated sheet are too large, which results in too much fluid medium, the response speed is slow, the first corrugated sheet and the second corrugated sheet are too small, the sensing areas of the first vibration-sensing element 2121 and the second vibration-sensing element 2122 are closer to the heat-affected area of welding, the performance of the first vibration-sensing element 2121 and the second vibration-sensing element 2122 is more affected, the diameter of the first corrugated sheet and/or the second corrugated sheet is D, and D is more than or equal to 16mm and less than or equal to 22 mm. Preferably, D is 17.5mm, 20mm, 21 mm.
Preferably, in this embodiment, the first corrugated sheet and/or the second corrugated sheet have a wavy cross-sectional shape.
In this embodiment, the first direction is perpendicular to the second direction. Preferably, the first direction is a lateral direction and the second direction is a downward direction.
Referring to fig. 1 and fig. 2, the present invention further provides a base assembly 10, in which the base assembly 10 includes a base 1 and the core structure 2, and the core structure 2 is installed on the base 1. The base assembly 10 comprises the above-described core structure 2, and the base assembly 10 comprises an embodiment of the above-described core structure 2.
Referring to fig. 1 and 2, the present invention further provides a differential pressure sensor 100, which includes the base assembly 10. The differential pressure sensor 100 includes the base assembly 10 described above, and the differential pressure sensor 100 includes an embodiment of the base assembly 10 described above.
The above is only the preferred embodiment of the present invention, not so limiting the patent scope of the present invention, all of which are in the utility model discloses a conceive, utilize the equivalent structure transform that the content of the specification and the attached drawings did, or directly/indirectly use all to include in other relevant technical fields the patent protection scope of the present invention.
Claims (10)
1. A sintered seat for a differential pressure sensor, comprising:
the vibration sensor comprises a shell, a first cavity and a second cavity, wherein the first cavity and the second cavity are arranged in the first direction at intervals, the openings of the first cavity and the second cavity face the second direction, the second cavity is provided with a top wall in the second direction, a pressure hole penetrates through the top wall, a first passage for circulating a fluid medium is arranged in the shell, and the first cavity and the second cavity are used for respectively installing a first vibration sensing element and a second vibration sensing element which face the second direction.
2. A core structure, comprising:
the sintered seat for a differential pressure sensor according to claim 1;
the detection structure comprises a first vibration sensing element and a second vibration sensing element, wherein the first vibration sensing element and the second vibration sensing element are arranged towards a second direction, are respectively arranged in the first cavity and the second cavity and are used for respectively separating the first cavity and the second cavity into an upper cavity and a lower cavity along the second direction, the upper cavity, the first passage and the pressure hole of the first cavity are communicated, and the upper cavity of the second cavity is used for being provided with a fluid medium; and the number of the first and second groups,
and the chip is installed on the top wall of the second chamber and covers the pressure hole.
3. The core structure according to claim 2, wherein the first vibration-sensing element and/or the second vibration-sensing element is a metal member.
4. The core structure according to claim 2, wherein the first vibration-sensing element is a first corrugated sheet; and/or the second vibration-sensing element is a second corrugated sheet.
5. The core structure of claim 4, wherein the first corrugated sheet is welded to an inner wall of the first chamber; and/or the presence of a gas in the gas,
the second corrugated sheet is welded to the inner wall of the second chamber.
6. A core structure according to claim 5, characterized in that the diameter of the first and/or the second corrugated sheet is D, 16mm D22 mm.
7. The core structure of claim 4, wherein the first corrugated sheet and/or the second corrugated sheet have a wavy cross-sectional shape.
8. The core structure of claim 2, wherein the first direction is disposed perpendicular to the second direction.
9. A base assembly, comprising:
a base;
a wick structure according to any one of claims 2 to 8, which is mounted to the base.
10. A differential pressure sensor comprising the base assembly of claim 9.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202022336172.XU CN213022100U (en) | 2020-10-18 | 2020-10-18 | Sintering seat, core body structure, base assembly and differential pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202022336172.XU CN213022100U (en) | 2020-10-18 | 2020-10-18 | Sintering seat, core body structure, base assembly and differential pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
CN213022100U true CN213022100U (en) | 2021-04-20 |
Family
ID=75481126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202022336172.XU Active CN213022100U (en) | 2020-10-18 | 2020-10-18 | Sintering seat, core body structure, base assembly and differential pressure sensor |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN213022100U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112129453A (en) * | 2020-10-18 | 2020-12-25 | 武汉飞恩微电子有限公司 | Sintering seat, core body structure, base assembly and differential pressure sensor |
CN113029430A (en) * | 2020-10-18 | 2021-06-25 | 武汉飞恩微电子有限公司 | Core structure and pressure sensor |
-
2020
- 2020-10-18 CN CN202022336172.XU patent/CN213022100U/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112129453A (en) * | 2020-10-18 | 2020-12-25 | 武汉飞恩微电子有限公司 | Sintering seat, core body structure, base assembly and differential pressure sensor |
CN113029430A (en) * | 2020-10-18 | 2021-06-25 | 武汉飞恩微电子有限公司 | Core structure and pressure sensor |
WO2022077879A1 (en) * | 2020-10-18 | 2022-04-21 | 武汉飞恩微电子有限公司 | Core structure and pressure transducer |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN213022100U (en) | Sintering seat, core body structure, base assembly and differential pressure sensor | |
EP0295647B1 (en) | Hot-wire type air flow meter. | |
CN214471485U (en) | Sintering seat, core body structure and pressure sensor | |
US10429259B2 (en) | Pressure sensor for measuring a pressure of a fluid medium | |
EP0164240A2 (en) | Differential pressure sensor | |
CN105444943B (en) | Sensor for detecting the pressure of a fluid medium | |
US20070056363A1 (en) | Flow detecting device and intake system having the same | |
CN112304474A (en) | Pressure sensor | |
EP2615429A1 (en) | Thermal type fluid flow rate measuring device | |
JP2023552853A (en) | Sensor assembly and valve gear | |
KR20080015926A (en) | Flow sensor | |
CN112129453A (en) | Sintering seat, core body structure, base assembly and differential pressure sensor | |
JP4380028B2 (en) | Pressure sensor | |
WO2003106956A1 (en) | Low-cost capacitive pressure transmitter with plate coating, particle filter, self-contained | |
CN214010595U (en) | Pressure sensor | |
EP1221593B1 (en) | Gas flow measurement device | |
US6474154B2 (en) | Flow measurement device for measuring flow rate and flow velocity | |
JP6387912B2 (en) | Pressure sensor | |
KR102456210B1 (en) | Temperature measuring device for detecting temperature of a flowing fluid medium | |
US11268920B2 (en) | Physical quantity detection device | |
JP4708679B2 (en) | Liquid ring type pressure sensor | |
US20200209034A1 (en) | Physical quantity detection device | |
EP4141401B1 (en) | Pressure sensor | |
CN112345125B (en) | Seal glass geometry for enhanced thick film piezoresistive pressure sensor sensitivity | |
CN219977457U (en) | Temperature and humidity sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant |