CN211005718U - Crystal taking-out device - Google Patents

Crystal taking-out device Download PDF

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Publication number
CN211005718U
CN211005718U CN201921364817.1U CN201921364817U CN211005718U CN 211005718 U CN211005718 U CN 211005718U CN 201921364817 U CN201921364817 U CN 201921364817U CN 211005718 U CN211005718 U CN 211005718U
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China
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crystal
gland
boss
barrel
edge
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CN201921364817.1U
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Chinese (zh)
Inventor
万冠军
刘星
柏文文
张亮
李斌
张健
许登基
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Shandong Tianyue Advanced Technology Co Ltd
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Sicc Co ltd
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Abstract

The utility model provides a crystal taking-out device, include: the inner side wall of the cylinder body is provided with an inward-protruding step for placing an attached crystal device, and the top end of the cylinder body is symmetrically and fixedly provided with a plurality of springs; the outer side of the gland is provided with an edge, the middle of the gland is provided with a boss for pressing the crystal, a groove is formed between the edge and the boss, and the end part of the edge is provided with a plurality of hole grooves for detachably connecting the springs. This application adopts barrel and gland structure, puts into the device back of adhering to the crystal in barrel step department, and the boss of gland acts on the crystal, makes the crystal slip that drops, can be convenient take out the crystal. This application is through the spring in the middle of barrel and the gland, makes the power of boss evenly act on the crystal, prevents that the crystal from taking out in-process crystal fracture. The device of this application simple structure, the crystal that takes out that can be convenient can prevent that the crystal from taking out in-process crystal fracture, guarantees the integrity of the crystal of taking out and has improved work efficiency.

Description

Crystal taking-out device
Technical Field
The utility model relates to a crystal remove device belongs to the equipment field for the crystal production.
Background
Silicon carbide (SiC) single crystal has excellent semiconductor physical properties such as high thermal conductivity, high breakdown voltage, extremely high carrier mobility, high chemical stability and the like, can be manufactured into high-frequency and high-power electronic devices and optoelectronic devices which work under the conditions of high temperature and strong radiation, has great application value in the fields of national defense, high technology, industrial production, power supply and power transformation, and is regarded as a third-generation wide-bandgap semiconductor material with great development prospect.
At present, physical vapor deposition (PVT) is a commonly used method for growing silicon carbide crystals, in which silicon carbide powder is used as a raw material, the silicon carbide powder in a crucible is heated to a certain temperature and is significantly sublimated, and decomposed silicon carbide gas is transported along a temperature gradient and condensed at a silicon carbide seed crystal. Generally, a seed crystal is placed at the upper end of a seed crystal bracket which is hollow and through, the seed crystal bracket is placed at the upper part of a crucible body, and a crucible cover is covered; or directly placing the seed crystal at the upper end of the crucible body, and then covering the crucible cover for the growth of the seed crystal. After the crystal growth is finished, the crystal needs to be taken out and attached to the crucible body or the crystal on the seed crystal bracket, and the crystal is taken out by striking the crucible body or the seed crystal bracket on the operation table manually at present, so that the crystal is easy to crack and the efficiency is low. In the prior art, a device for taking out the crystal in the crucible body or the seed crystal bracket does not exist.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, the application provides a crystal taking-out device, has avoided relying on the manual drawback of striking taking out the crystal on the operation panel, prevents to get crystal process crystal fracture and has improved work efficiency.
The technical scheme adopted by the application is as follows:
a crystal retrieval apparatus, comprising:
the inner side wall of the cylinder body is provided with an inward-protruding step for placing an attached crystal device, and the top end of the cylinder body is symmetrically and fixedly provided with a plurality of springs;
the outer side of the gland is provided with an edge, the middle of the gland is provided with a boss for pressing the crystal, a groove is formed between the edge and the boss, and the end part of the edge is provided with a plurality of hole grooves for detachably connecting the springs.
Further, the step is L-shaped step, the width of L-shaped step is equal to or less than the thickness of the crystal attachment device, and the height of L-shaped step is less than the height of the crystal attachment device.
Further, the outer diameter of the gland is approximately equal to the outer diameter of the cylinder.
Furthermore, the height of the edge is smaller than that of the boss, and the thickness of the edge is smaller than that of the upper part of the cylinder body.
Further, the number of the springs is 4.
Furthermore, the outer sleeve of the barrel is provided with a shell, and the height of the shell is approximately equal to the sum of the heights of the barrel and the gland.
Furthermore, the top end of the cylinder body is opened, and foam cotton is paved at the bottom of the cylinder body.
Further, the crystal attachment device is a crucible or a seed crystal bracket with a hollow through hole.
Further, a T-shaped handle is arranged at the top of the gland.
Furthermore, the cylinder is a hollow cylinder, and the boss is a solid cylinder.
The beneficial effect of this application does: the crystal taking device adopts a cylinder body and gland structure, and after a crystal attaching device is placed at the step of the cylinder body, a boss of the gland acts on the crystal to enable the crystal to fall off and slide, so that the crystal can be taken out conveniently; through the elastic part between the cylinder body and the gland, the force of the boss is uniformly applied to the crystal, and the crystal is prevented from cracking in the crystal taking-out process. The device of this application simple structure, the crystal that takes out that can be convenient can prevent that the crystal from taking out in-process crystal fracture, guarantees the integrity of the crystal of taking out and has improved work efficiency.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:
FIG. 1 is a schematic view of the apparatus of the present invention;
wherein, 1, a shell; 2. a barrel; 3. a gland; 4. a step; 5. an edge; 6. a boss; 7. a groove; 8. a spring; 9. a handle; 10. a seed crystal holder; 11. a silicon carbide crystal.
Detailed Description
The present application will be described in detail with reference to examples, but the present application is not limited to these examples.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, the present application may be practiced in other ways than those described herein, and therefore the scope of the present application is not limited by the specific embodiments disclosed below.
In addition, in the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," and the like are to be construed broadly and include, for example, fixed connections, removable connections, or integral connections; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
A crystal take-out apparatus is provided that is suitable for taking out crystals grown on a seed crystal in the upper portion of a crucible, particularly for taking out crystals grown using a seed crystal holder, including but not limited to silicon carbide, single crystal silicon, polycrystalline silicon, and the like.
As shown in fig. 1, the present application provides a crystal retrieving apparatus including a barrel 2 and a cover 3.
In one embodiment, the inner side wall of the cylinder 2 is provided with an inward protruding step 4, the step 4 is used for placing an attached crystal device, and a plurality of springs 8 are symmetrically and fixedly arranged at the top end of the cylinder 2; the outside of gland 3 has border 5, and the middle part is provided with the boss 6 of pressing the crystal, forms recess 7 between border 5 and the boss 6, and 5 tip correspondently in border are provided with the hole groove of dismantling coupling spring 8. After crystal growth is finished, the crystal growing in the crucible or on the seed crystal bracket needs to be taken out, the step in the barrel 2 is put into the crystal attaching device, the pressing cover 3 is pressed downwards by force through correspondingly installing the spring 8 at the hole groove, the boss 6 acts on the crystal, and the crystal is loosened on the crucible or the seed crystal bracket after receiving even pressing force, so that the crystal is separated from the crucible or the seed crystal bracket, and the crystal is taken out conveniently. The arrangement of the groove 7 is convenient for the boss 6 to extrude the crystal, and can also avoid damaging the seed crystal bracket when the boss 6 presses the crystal, so that the seed crystal bracket can be repeatedly used.
The step is L shape step, the width of L shape step is equal to or less than the thickness of the crystal attachment device, the height of L shape step is less than the height of the crystal attachment device, the specific size of L shape step can be adjusted, as long as it is ensured that the boss 6 can press the crystal, the crystal will not touch the inner wall of the cylinder when falling, when the seed crystal bracket with the crystal is placed on the lower surface of L shape step, the press cover 3 is pressed downwards in the crystal taking process, the crystal loosens and falls from the seed crystal bracket, and the crystal will not collide the inner wall of the cylinder.
The outer diameter of the gland 3 is approximately equal to that of the cylinder 2, the height of the edge 5 is smaller than that of the boss 6, and the thickness of the edge 5 is smaller than that of the upper part of the cylinder 2. the height of the edge 5 is smaller than that of the boss 6, so that the stroke of pressing down the gland boss can be increased, crystals can be pressed out relatively easily, when crystals are taken, L-shaped steps can be arranged in the groove 7, the boss 6 can enter the cavity of the crystal attachment device, the sizes of the edge 5 and the boss 6 can be adjusted, and the boss 6 can act on the crystals for a distance.
Preferably, the height difference between the edge 5 and the boss 6 is smaller than the height of the L-shaped step, when the boss 6 presses the crystal, the maximum distance that the boss 6 extends into the cavity of the cylinder 1 is the height difference between the edge 5 and the boss 6, and the crystal only needs to be loosened and fall off without exerting force on the crystal for too long distance, so as to avoid the cracking of the crystal caused by too large moment.
In an alternative embodiment, the spring 8 may be implemented by other elastic members, and the corresponding mounting portion for connecting the spring may also be implemented by the method implemented in the art. In the crystal taking process, due to the existence of the spring elastic piece, the force acting on the crystal can be buffered, and the crystal is prevented from cracking caused by over-violent force on the crystal. The connection of the spring 8 to the slot may also be by any other means of detachable connection available in the art.
Preferably, the number of the springs 8 is 4. 4 the homogeneity of gland 3 power has been guaranteed to the spring 8 of symmetry setting, and it is also more convenient to use the dismantlement.
In one embodiment, the device further comprises a shell 1, the shell 1 is sleeved outside the cylinder 2, and the height of the shell 1 is approximately equal to the sum of the heights of the cylinder 2 and the gland 3. Only detachable gaps are reserved among the shell 1, the cylinder body 2 and the gland 3. Shell 1 plays certain guard action, has avoided pushing down gland 3 hard, rocks about gland 3, and the height of shell can not be too big to influence removing of spring from the hole groove in the gland, inconvenient gland takes out.
In one embodiment, the barrel 2 and the gland 3 are both made of a high purity graphite material or a high purity organic material. The high-purity graphite material or the high-purity organic material refers to a material with the purity of graphite or organic matters being more than 99.999 percent, and ensures that the material contacted with the crystal and the growth device thereof can not pollute the crystal.
The top of the cylinder body 2 is open, and foam cotton is paved at the bottom. The foam cotton prevents the crystal from being broken when the crystal falls off from the seed crystal bracket. The cylinder body 2 can also be a hollow through cylinder, and foam cotton is paved on the lower part of the cylinder only when crystals are taken, so that the crystals are prevented from being broken.
The crystal attachment device is a crucible or a seed crystal bracket with a hollow through hole. Preferably, the crystal attachment device is a seed crystal bracket which is hollow and penetrates through.
The cylinder body 2 is a hollow cylinder, and the boss 6 is a solid cylinder. The seed holder or crucible is circular in caliber as is conventional in the art, and thus the barrel 2 and housing 1 described herein are hollow cylinders or the like.
The top of the gland 3 is provided with a handle 9; preferably, the handle is a T-shaped handle. The handle is held, so that the pressing cover 3 is conveniently forced downwards.
When the device is used, the seed crystal bracket 10 with the silicon carbide crystal 11 growing on the top is placed at the step 4 of the cylinder 2, the spring is placed in the hole groove, the handle is held to press the gland 3 slowly and uniformly with force, so that the seed crystal bracket is prevented from being damaged in an inclined mode when the pressure is pressed downwards, the crystal is prevented from being damaged by pressing too hard, the boss 6 acts on the crystal, and the crystal is loosened and falls off at the bottom of the cylinder 2; the gland 3 is then removed and the crystal is removed. The crystal surface is complete without any cracking and scratching.
Comparative example 1
And taking out the seed crystal bracket with the crystal growing on the upper part, and taking out the crystal by impacting the seed crystal bracket, wherein the surface of the crystal has cracks, scratches and damages.
The above description is only an example of the present application, and the protection scope of the present application is not limited by these specific examples, but is defined by the claims of the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the technical idea and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. A crystal retrieval apparatus, comprising:
the inner side wall of the cylinder body is provided with an inward-protruding step for placing an attached crystal device, and the top end of the cylinder body is symmetrically and fixedly provided with a plurality of springs;
the outer side of the gland is provided with an edge, the middle of the gland is provided with a boss for pressing the crystal, a groove is formed between the edge and the boss, and the end part of the edge is provided with a plurality of hole grooves for detachably connecting the springs.
2. The crystal taking-out apparatus of claim 1, wherein the step is L-shaped step, the L-shaped step has a width equal to or less than the thickness of the attachment crystal device, and the L-shaped step has a height less than the height of the attachment crystal device.
3. The crystal retrieval device of claim 1, wherein the outer diameter of the gland is substantially equal to the outer diameter of the barrel.
4. The crystal retrieval device of claim 1, wherein the rim has a height less than a height of the boss and a thickness less than a thickness of the upper portion of the barrel.
5. The crystal retrieval device of claim 1, wherein the number of the springs is 4.
6. The crystal taking-out device as claimed in claim 1, wherein the outer sleeve of the barrel body is provided with a shell, and the height of the shell is approximately equal to the sum of the heights of the barrel body and the gland.
7. The crystal taking-out device as claimed in claim 1, wherein the top end of the cylinder is open and the bottom is paved with foam cotton.
8. A crystal withdrawal apparatus as claimed in claim 1, wherein the means for attaching the crystal is a crucible or a hollow through-penetrating seed holder.
9. The crystal retrieval device of claim 1, wherein the top of the gland is provided with a T-shaped handle.
10. The crystal retrieval device of claim 1, wherein the barrel is a hollow cylinder and the boss is a solid cylinder.
CN201921364817.1U 2019-08-20 2019-08-20 Crystal taking-out device Active CN211005718U (en)

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Application Number Priority Date Filing Date Title
CN201921364817.1U CN211005718U (en) 2019-08-20 2019-08-20 Crystal taking-out device

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Application Number Priority Date Filing Date Title
CN201921364817.1U CN211005718U (en) 2019-08-20 2019-08-20 Crystal taking-out device

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112226814A (en) * 2020-12-14 2021-01-15 烟台工程职业技术学院(烟台市技师学院) Silicon carbide crystal taking-off device
CN112853480A (en) * 2020-12-31 2021-05-28 湖南三安半导体有限责任公司 Seed crystal pasting jig, flow guide assembly and method for pasting seed crystal on edge

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112226814A (en) * 2020-12-14 2021-01-15 烟台工程职业技术学院(烟台市技师学院) Silicon carbide crystal taking-off device
CN112226814B (en) * 2020-12-14 2021-03-09 烟台工程职业技术学院(烟台市技师学院) Silicon carbide crystal taking-off device
CN112853480A (en) * 2020-12-31 2021-05-28 湖南三安半导体有限责任公司 Seed crystal pasting jig, flow guide assembly and method for pasting seed crystal on edge

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Address after: No.99, Tianyue South Road, Huaiyin District, Jinan City, Shandong Province

Patentee after: Shandong Tianyue advanced technology Co., Ltd

Address before: 250100 Shandong city of Ji'nan province high tech Zone Xinyu Road on the west side of century wealth center AB block 1106-6-01

Patentee before: Shandong Tianyue Advanced Materials Technology Co.,Ltd.

CP03 "change of name, title or address"