Silicon carbide crystal taking-off device
Technical Field
The invention relates to the field of silicon carbide production, in particular to a silicon carbide crystal taking-down device.
Background
Silicon carbide (SiC) single crystal has excellent semiconductor physical properties such as high thermal conductivity, high breakdown voltage, extremely high carrier mobility, high chemical stability and the like, can be manufactured into high-frequency and high-power electronic devices and optoelectronic devices which work under the conditions of high temperature and strong radiation, has great application value in the fields of national defense, high technology, industrial production, power supply and power transformation, and is regarded as a third-generation wide-bandgap semiconductor material with great development prospect.
At present, physical vapor deposition (PVT) is a commonly used method for growing silicon carbide crystals, in which silicon carbide powder is used as a raw material, the silicon carbide powder in a crucible is heated to a certain temperature and is significantly sublimated, and decomposed silicon carbide gas is transported along a temperature gradient and condensed at a silicon carbide seed crystal. Generally, a seed crystal is placed at the upper end of a seed crystal bracket which is hollow and through, the seed crystal bracket is placed in a crucible, and a crucible cover is covered; or directly placing the seed crystal at the upper end of the crucible, and then covering the crucible cover for the growth of the seed crystal. After the crystal growth is finished, the crystal needs to be taken out, the crystal attached to the crucible or the seed crystal bracket is taken out by striking the crucible or the seed crystal bracket on the operating platform manually at present, the crystal is easy to crack, and the efficiency is low.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a silicon carbide crystal taking-off device, which solves the problem that the existing silicon carbide crystal taking-off device adopts a direct ejection mode to make the crystal fall off unevenly so as to cause breakage.
In order to achieve the purpose, the invention is realized by the following technical scheme: the utility model provides a silicon carbide crystal takes off device, includes two supporting disks and three connecting rod, and three connecting rod is located between two supporting disks, and the upper and lower both ends of three connecting rod are close to one side fixed connection each other with two supporting disks respectively.
Clamping machine constructs all to be installed to the lower extreme of three connecting rod, is provided with extrusion mechanism between the three connecting rod upper end, and extrusion mechanism is provided with knocking mechanism through three diaphragm A and three connecting rod fixed connection between the three connecting rod, knocking mechanism through three diaphragm B and three connecting rod fixed connection, and knocking mechanism cup joints in extrusion mechanism's outside, and knocking mechanism is connected with the extrusion mechanism transmission.
The extrusion mechanism comprises a sleeve, a pressure rod, a pressure plate and a spring, wherein the sleeve is fixedly connected with one end, close to each other, of three transverse plates A, the upper end of the pressure rod is inserted into the sleeve, the pressure plate is fixedly connected with the lower end of the pressure rod, a baffle is sleeved outside the pressure rod, the spring is sleeved outside the pressure rod and is positioned below the baffle, the upper end of the spring is fixedly connected with the bottom surface of the baffle, the lower end of the spring is fixedly connected with the lower end of the sleeve, stress plates are fixedly arranged at the upper end of the pressure rod and the inner top wall of the sleeve, a fixed sleeve is fixedly arranged on the circumferential surface of the sleeve, a threaded rod A is rotatably inserted into the fixed sleeve, threaded sleeves A are respectively sleeved at the front end and the rear end of the threaded rod A in a threaded manner, wedge plates are hinged to one ends, close to each other, of the two wedge plates, the special-shaped wheel is sleeved outside the pressure rod, the sleeve is fixedly connected with the special-shaped wheel through a plurality of inclined plates A, and the knocking mechanism is in transmission connection with the special-shaped wheel.
Clamping mechanism includes the lantern ring, motor, band pulley and solid fixed ring, the lantern ring and the one side fixed connection that three diaphragm B is close to each other, the lower extreme of band pulley runs through the lantern ring and is connected rather than rotating, the underrun of band pulley a plurality of swash plate B and solid fixed ring fixed connection, motor and diaphragm B fixed connection, the output shaft of motor passes through the belt and is connected with the band pulley transmission, gu fixed ring's outside articulates there is a plurality of rocker, the piece of strikeing is all installed to the lower extreme of rocker, a plurality of rocker is connected with the special-shaped wheel transmission.
Preferably, the extrusion mechanism comprises a guide rail, a clamping block, a threaded rod B and a threaded sleeve B, the guide rail is fixedly connected with the connecting rod, the lower end of the clamping block is connected with the guide rail in a sliding mode, the threaded sleeve B is fixedly connected with the outer end of the guide rail, one end of the threaded rod B is rotatably connected with the clamping block, and the other end of the threaded rod B penetrates through the threaded sleeve B and is in threaded connection with the threaded sleeve B.
Preferably, the surfaces, close to each other, of the two stress plates are both conical surface structures, the ends, close to each other, of the two wedge-shaped plates are both inclined surface tip-shaped structures, and the two wedge-shaped plates are arranged in opposite directions.
Preferably, the special-shaped wheel and the sleeve are concentrically arranged, and the circumferential surface of the special-shaped wheel is of a rugged structure.
Preferably, the lantern ring and the sleeve are concentrically arranged, and the fixing ring and the lantern ring are concentrically arranged.
Preferably, the middle position of the rocker is rotatably connected with a roller, and the roller is in contact with the circumferential surface of the special-shaped wheel.
Compared with the prior art, the invention has the following beneficial effects: 1. the silicon carbide crystal taking-off device is provided with a clamping mechanism, an extrusion mechanism and a knocking mechanism, and is characterized in that the clamping mechanism is adjusted, a crucible or a seed crystal bracket can be fixed, a belt wheel is driven to rotate by controlling the rotation of a motor, then a fixed ring starts to rotate under stress, a rocker is driven to rotate when the fixed ring rotates, the rocker can swing according to the shape of a special-shaped wheel when rotating along the special-shaped wheel, a knocking block can knock on the circumferential surface of the crucible when swinging, the quantity of the rockers is large, the crucible can be uniformly stressed, two wedge-shaped plates are driven to approach each other through a rotating threaded rod A, the stress plates are extruded when approaching the stress plates, the stress plates drive a pressure rod and a pressure plate to play an extrusion effect on crystals, the two wedge-shaped plates can be overlapped, when the stress plates are gradually extruded, the pressure plate generates slow and uniform pressure on the crystals, the crystals can completely fall off, and the problem that the existing silicon carbide crystal To a problem of (a).
2. The silicon carbide crystal taking-off device is provided with three clamping mechanisms, the clamping blocks are of a trapezoidal structure, the crucible can be clamped, the falling of the crystal cannot be influenced, and three crucibles which can be matched with different sizes are arranged.
3. The silicon carbide crystal taking-off device is provided with the roller, and the roller is in contact with the special-shaped wheel when the rocker moves forward, so that the friction force between the rocker and the special-shaped wheel can be reduced.
Drawings
FIG. 1 is a schematic view of the structure of the present invention.
Fig. 2 is a front view of the structure of the present invention.
FIG. 3 is a top view of the structure of the present invention.
FIG. 4 is a schematic view of a portion of the structure of the present invention.
FIG. 5 is a schematic view of the connection between the pressing mechanism and the striking mechanism of the present invention.
Fig. 6 is a schematic structural view of the pressing mechanism and the knocking mechanism of the present invention.
Fig. 7 is a schematic structural view of the clamping mechanism of the invention.
Fig. 8 is an enlarged view of the structure of fig. 5 at a according to the present invention.
The device comprises a support plate 1, a connecting rod 2, a clamping mechanism 3, a guide rail 301, a clamping block 302, a threaded rod B303, a threaded sleeve B304, a squeezing mechanism 4, a sleeve 401, a compression rod 402, a pressure plate 403, a spring 404, a baffle 405, a stress plate 406, a fixed sleeve 407, a threaded rod A408, a threaded sleeve 409A, a wedge plate 410, a special-shaped wheel 411, an inclined plate 412, a transverse plate A5, a knocking mechanism 6, a lantern ring 601, a motor 602, a belt wheel 603, a fixed ring 604, an inclined plate B605, a belt 606, a rocker 607, a knocking block 608, a roller 609 and a transverse plate B7.
Detailed Description
In the first embodiment, as shown in fig. 1 to 8, a silicon carbide crystal taking-off device includes two supporting disks 1 and three connecting rods 2, the three connecting rods 2 are located between the two supporting disks 1, the upper and lower ends of the three connecting rods 2 are respectively fixedly connected with the mutually adjacent surfaces of the two supporting disks 1, and a cushion pad can be placed inside the supporting disk 1 below.
Clamping machine constructs 3 is all installed to the lower extreme of three connecting rod 2, is provided with extrusion mechanism 4 between the 2 upper ends of three connecting rod, and extrusion mechanism 4 is through three diaphragm A5 and three connecting rod 2 fixed connection, is provided with knocking mechanism 6 between three connecting rod 2, and knocking mechanism 6 is through three diaphragm B7 and three connecting rod 2 fixed connection, and knocking mechanism 6 cup joints in the outside of extrusion mechanism 4, and knocking mechanism 6 is connected with the 4 transmissions of extrusion mechanism.
The extrusion mechanism 4 comprises a sleeve 401, a pressure lever 402, a pressure plate 403 and a spring 404, wherein the sleeve 401 is fixedly connected with one end, close to each other, of three transverse plates A5, the upper end of the pressure lever 402 is inserted into the sleeve 401, the pressure plate 403 is fixedly connected with the lower end of the pressure lever 402, a baffle 405 is sleeved outside the pressure lever 402, the spring 404 is positioned below the baffle 405, the upper end of the spring 404 is fixedly connected with the bottom surface of the baffle 405, the lower end of the spring 404 is fixedly connected with the lower end of the sleeve 401, the upper end of the pressure lever 402 and the inner top wall of the sleeve 401 are both fixedly provided with stress plates 406, the circumferential surface of the sleeve 401 is fixedly provided with a fixed sleeve 407, the inside of the fixed sleeve 407 is rotatably inserted with a threaded rod A408, the front and rear ends of the threaded rod A408 are both in threaded sleeve connection with threaded sleeves A409, one end, close to each other, of the two threaded sleeves A, the one side that two atress boards 406 are close to each other is the conical surface structure, the one end that two wedge boards 410 are close to each other is the sharp point column structure of inclined plane, two wedge boards 410 are reverse setting, can make two wedge boards 410 overlap, the lower extreme of sleeve 401 is provided with special-shaped wheel 411, special-shaped wheel 411 cup joints the outside at depression bar 402, special-shaped wheel 411 sets up with sleeve 401 is concentric, the periphery of special-shaped wheel 411 is unsmooth column structure, sleeve 401 is through a plurality of swash plate A412 and special-shaped wheel 411 fixed connection, knocking mechanism 6 is connected with special-shaped wheel 411 transmission.
The knocking mechanism 6 comprises a lantern ring 601, a motor 602, a belt wheel 603 and a fixing ring 604, wherein the lantern ring 601 is fixedly connected with one side, close to each other, of three transverse plates B7, the lower end of the belt wheel 603 penetrates through the lantern ring 601 and is rotatably connected with the same, the bottom surface of the belt wheel 603 is fixedly connected with the fixing ring 604 through a plurality of inclined plates B605, the lantern ring 601 and the sleeve 401 are concentrically arranged, the fixing ring 604 and the lantern ring 601 are concentrically arranged, the motor 602 is fixedly connected with a transverse plate B7, an output shaft of the motor 602 is in transmission connection with the belt wheel 603 through a belt 606, a plurality of rocking rods 607 are hinged to the outer part of the fixing ring 604, knocking blocks 608 are mounted at the lower ends of the rocking rods 607, the rocking rods 607 are in transmission connection with the special-shaped.
In the second embodiment, as shown in fig. 1 to 7, the clamping mechanism 3 includes a guide rail 301, a clamping block 302, a threaded rod B303 and a threaded sleeve B304, the guide rail 301 is fixedly connected to the connecting rod 2, the lower end of the clamping block 302 is slidably connected to the guide rail 301, the threaded sleeve B304 is fixedly connected to the outer end of the guide rail 301, one end of the threaded rod B303 is rotatably connected to the clamping block 302, and the other end of the threaded rod B303 penetrates through the threaded sleeve B304 and is in threaded connection therewith.
When the crucible or the seed crystal bracket is used, the crucible or the seed crystal bracket can be fixed by adjusting the clamping mechanism 3, the belt wheel 603 is driven to rotate by controlling the rotation of the motor 602, the fixing ring 604 is stressed to start rotating, the rocker 607 is driven to rotate, the rocker 607 can swing along the shape of the special-shaped wheel 411 when rotating, the knocking block 608 can knock the circumferential surface of the crucible when the rocker 607 swings, the quantity of the rockers 607 is large, the crucible can be stressed uniformly, the two wedge-shaped plates 410 are driven to approach each other by rotating the threaded rod A408, the stress plate 406 is extruded when the wedge-shaped plate 410 approaches the stress plate 406, the stress plate 406 drives the pressure rod 402 and the pressure plate 403 to extrude crystals, the two wedge-shaped plates 410 can be overlapped, and when the stress plate 406 is gradually extruded by the wedge-shaped plate 410, the pressure plate 403 generates slow and uniform pressure on the crystals.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.