CN110528078B

CN110528078B - Crystal taking-out device

Info

Publication number: CN110528078B
Application number: CN201910770791.9A
Authority: CN
Inventors: 万冠军; 刘星; 柏文文; 张亮; 李斌; 张健; 许登基
Original assignee: SICC Science and Technology Co Ltd
Current assignee: Shandong Tianyue Advanced Technology Co Ltd
Priority date: 2019-08-20
Filing date: 2019-08-20
Publication date: 2020-10-02
Anticipated expiration: 2039-08-20
Also published as: CN110528078A

Abstract

The invention provides a crystal taking-out device, comprising: the inner side wall of the cylinder body is provided with an inward-protruding step for placing an attached crystal device, and the top end of the cylinder body is symmetrically provided with a plurality of elastic pieces; the outer side of the gland is provided with an edge, the middle of the gland is provided with a boss for pressing the crystal, a groove is formed between the edge and the boss, and the end part of the edge is correspondingly provided with a plurality of mounting parts connected with the elastic part. According to the invention, the elastic piece between the cylinder body and the gland is used, so that the force of the boss is uniformly applied to the crystal, and the crystal is prevented from cracking in the crystal taking-out process. The device of this application simple structure, the crystal that takes out that can be convenient can prevent that the crystal from taking out in-process crystal fracture, guarantees the integrity of the crystal of taking out and has improved work efficiency.

Description

Crystal taking-out device

Technical Field

The invention relates to a crystal taking-out device, and belongs to the field of equipment for crystal production.

Background

Silicon carbide (SiC) single crystal has excellent semiconductor physical properties such as high thermal conductivity, high breakdown voltage, extremely high carrier mobility, high chemical stability and the like, can be manufactured into high-frequency and high-power electronic devices and optoelectronic devices which work under the conditions of high temperature and strong radiation, has great application value in the fields of national defense, high technology, industrial production, power supply and power transformation, and is regarded as a third-generation wide-bandgap semiconductor material with great development prospect.

At present, physical vapor deposition (PVT) is a commonly used method for growing silicon carbide crystals, in which silicon carbide powder is used as a raw material, the silicon carbide powder in a crucible is heated to a certain temperature and is significantly sublimated, and decomposed silicon carbide gas is transported along a temperature gradient and condensed at a silicon carbide seed crystal. Generally, a seed crystal is placed at the upper end of a seed crystal bracket which is hollow and through, the seed crystal bracket is placed in a crucible, and a crucible cover is covered; or directly placing the seed crystal at the upper end of the crucible, and then covering the crucible cover for the growth of the seed crystal. After the crystal growth is finished, the crystal needs to be taken out, the crystal attached to the crucible or the seed crystal bracket is taken out by striking the crucible or the seed crystal bracket on the operating platform manually at present, the crystal is easy to crack, and the efficiency is low. In the prior art, a device for taking out the crystal in the crucible body or the seed crystal bracket does not exist.

Disclosure of Invention

In order to solve the problem, the application provides a crystal taking-out device, has avoided relying on the manual drawback of striking taking out the crystal on the operation panel, prevents to get crystal process crystal fracture and has improved work efficiency.

The technical scheme adopted by the application is as follows:

a crystal retrieval apparatus, comprising: the inner side wall of the cylinder body is provided with an inward-protruding step for placing an attached crystal device, and the top end of the cylinder body is symmetrically provided with a plurality of elastic pieces; the outer side of the gland is provided with an edge, the middle of the gland is provided with a boss for pressing the crystal, a groove is formed between the edge and the boss, and the end part of the edge is correspondingly provided with a plurality of mounting parts connected with the elastic part.

Furthermore, the step is an L-shaped step, the width of the L-shaped step is equal to or less than the thickness of the crystal attachment device, and the height of the L-shaped step is less than the height of the crystal attachment device.

Furthermore, the outer diameter of the gland is approximately equal to that of the cylinder, the height of the edge is smaller than that of the boss, and the thickness of the edge is smaller than that of the upper part of the cylinder.

Furthermore, the elastic part is a spring, and the mounting part detachably connected with the spring is a hole groove.

Preferably, the number of the springs is 3-6; preferably, 4.

Furthermore, the outer sleeve of the barrel is provided with a shell, and the height of the shell is approximately equal to the sum of the heights of the barrel and the gland.

Further, the cylinder and the gland are both made of high-purity graphite material or high-purity organic material.

Furthermore, the top of the cylinder body is provided with an opening, and a soft material layer is laid at the bottom of the cylinder body; preferably, the soft material layer is foam cotton.

Further, the crystal attachment device is a crucible or a seed crystal bracket with a hollow through hole.

Further, a handle is arranged at the top of the gland; preferably, the handle is a T-shaped handle.

The beneficial effect of this application does:

(1) this application adopts barrel and gland structure, puts into in barrel step department and adheres to the crystal device after, the boss of gland presses and is used in on the crystal, makes the crystal not hard up drop, can be convenient take out the crystal.

(2) This application makes the power of boss evenly act on the crystal through the elastic component in the middle of barrel and the gland, prevents that the crystal from taking out in-process crystal fracture.

(3) The device of this application simple structure, the crystal that takes out that can be convenient can prevent that the crystal from taking out in-process crystal fracture, guarantees the integrity of the crystal of taking out and has improved work efficiency.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

FIG. 1 is a schematic view of the apparatus of the present invention;

FIG. 2 is a photograph of a silicon carbide crystal taken using the apparatus of the present invention;

FIG. 3 is a photograph of a silicon carbide crystal removed using a prior art method;

wherein, 1, a shell; 2. a barrel; 3. a gland; 4. a step; 5. an edge; 6. a boss; 7. a groove; 8. a spring; 9. a handle; 10. a seed crystal holder; 11. a silicon carbide crystal.

Detailed Description

The present application will be described in detail with reference to examples, but the present application is not limited to these examples.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, however, the present application may be practiced in other ways than those described herein, and therefore the scope of the present application is not limited by the specific embodiments disclosed below.

In addition, in the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present application.

The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "coupled," and the like are to be construed broadly and include, for example, fixed or removable connections or integral parts; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. In the description herein, reference to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

A crystal take-out apparatus is provided that is suitable for taking out crystals grown on a seed crystal at the inner upper end of a crucible, particularly for taking out crystals grown using a seed crystal holder, including but not limited to silicon carbide, single crystal silicon, polycrystalline silicon, and the like.

As shown in fig. 1, the present application provides a crystal retrieving apparatus including a barrel 2 and a cover 3.

In one embodiment, the inner side wall of the cylinder 2 is provided with an inward protruding step 4, the step 4 is used for placing an attached crystal device, and the top end of the cylinder 2 is symmetrically provided with a plurality of springs 8; the outside of gland 3 has border 5, and the middle part is provided with the boss 6 of pressing the crystal, forms recess 7 between border 5 and the boss 6, and 5 tip correspondently in border are provided with the hole groove of installation spring 8. After crystal growth is finished, the crystal growing in the crucible or on the seed crystal bracket needs to be taken out, the step in the cylinder 2 is put into the crystal attaching device, the pressing cover 3 is uniformly pressed downwards with force by correspondingly installing the spring at the hole groove, the boss 6 acts on the crystal, and the crystal is loosened on the crucible or the seed crystal bracket after receiving uniform pressing force, so that the crystal is separated from the crucible or the seed crystal bracket, and the crystal is taken out conveniently. The arrangement of the groove 7 is convenient for the boss 6 to extrude the crystal, and can also avoid damaging the seed crystal bracket when the boss 6 presses the crystal, so that the seed crystal bracket can be repeatedly used.

The step is L-shaped, the width of the L-shaped step is equal to or less than the thickness of the crystal attachment device, and the height of the L-shaped step is less than the height of the crystal attachment device. The specific size of the L-shaped step can be adjusted as long as the boss 6 can press the crystal, and the crystal cannot touch the inner wall of the cylinder 2 when falling off. After the seed crystal bracket attached with the crystal is placed on the lower surface of the L-shaped step, the pressing cover 3 is pressed downwards in the crystal taking process, the crystal is loosened and falls off from the seed crystal bracket, and the crystal cannot collide with the inner wall of the barrel body 2.

The outer diameter of the gland 3 is approximately equal to that of the cylinder 2, the height of the edge 5 is smaller than that of the boss 6, and the thickness of the edge 5 is smaller than that of the upper part of the cylinder 2. Because the height of the edge 5 is less than that of the boss 6, the stroke of the pressing cover boss during pressing can be increased, and crystals can be pressed out relatively easily. When taking crystal, the L-shaped step can be arranged inside the groove 7, and the boss 6 can enter the cavity of the crystal attachment device. The dimensions of the rim 5 and the boss 6 can be adjusted as long as it is ensured that the boss 6 can act on the crystal for a distance.

Preferably, the height difference between the edge 5 and the boss 6 is smaller than the height of the L-shaped step, when the boss 6 presses the crystal, the maximum distance that the boss 6 extends into the cavity of the cylinder body 2 is the height difference between the edge 5 and the boss 6, and the crystal only needs to be loosened and fall off without exerting force for too long distance on the crystal, so that the crystal is prevented from cracking easily caused by too much moment.

In an alternative embodiment, the spring 8 may also be implemented by other elastic members, and the corresponding mounting portion connected to the elastic member may also be implemented by the manner implemented in the art. In the crystal taking process, due to the existence of the elastic piece, the force acting on the crystal can be buffered, and the crystal is prevented from cracking caused by over-violent force on the crystal. The connection between the elastic element and the mounting part is detachable, and any other mode which can be realized in the field can be adopted.

Preferably, the number of the springs 8 is 3-6; preferably, 4. 4 the spring 8 of symmetry setting has guaranteed the homogeneity of gland 3 power, and it is also more convenient to use the dismantlement.

In one embodiment, the device further comprises a shell 1, the shell 1 is sleeved outside the cylinder 2, and the height of the shell 1 is approximately equal to the sum of the heights of the cylinder 2 and the gland 3. Only detachable gaps are reserved among the shell 1, the cylinder body 2 and the gland 3. Shell 1 plays certain guard action, has avoided pushing down gland 3 hard, rocks about gland 3, and the height of shell can not be too big to influence removing of spring from the hole groove in gland 3, inconvenient gland takes out.

In one embodiment, the barrel 2 and the gland 3 are both made of a high purity graphite material or a high purity organic material. The high-purity graphite material or the high-purity organic material refers to a material with the purity of graphite or organic matters being more than 99.999 percent, so that the material contacted with the crystal cannot pollute the crystal, the pollution to the seed crystal bracket can be avoided, the reuse of the seed crystal bracket is ensured, and the cost is saved.

The top of the cylinder body 2 is provided with an opening, and the bottom of the cylinder body is paved with a soft material layer; preferably, the soft material layer is foam cotton. Due to the arrangement of the soft material layer, the crystal is prevented from being broken when falling off from the seed crystal bracket. The cylinder body 2 can also be a hollow through cylinder, and foam cotton is paved below the cylinder only when crystals are taken, so that the crystals are prevented from being broken.

The crystal attachment device is a crucible or a seed crystal bracket with a hollow through hole. The seed holder or crucible body is circular in caliber as is conventional in the art, and thus, the barrel 2 and housing 1 described herein are hollow cylinders or the like.

The top of the gland 3 is provided with a handle 9; preferably, the handle is a T-shaped handle. The handle is held to facilitate downward force application of the gland.

The device of this application is when using, and the step 4 department of barrel 2 is put into with the seed crystal bracket 10 that the top has carborundum crystal 11, aims at the hole groove and packs into the spring, holds the handle and evenly exerts force gland 3 and slowly pushes down simultaneously to avoid when pushing down oblique damage seed crystal bracket and too violently push down the damage crystal, boss 6 acts on the crystal, and the crystal is not hard up and drops in the bottom of barrel 2. The gland 3 is then removed and the crystal is removed. The crystal surface was intact without any cracking scratch damage, as shown in figure 2.

Comparative example 1

After taking out the seed crystal bracket with the crystal growing on the upper part, the crystal is taken out by impacting or colliding the seed crystal bracket, and the surface of the crystal has cracks, scratches and damages, as shown in figure 3.

The above description is only an example of the present application, and the protection scope of the present application is not limited by these specific examples, but is defined by the claims of the present application. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the technical idea and principle of the present application should be included in the protection scope of the present application.

Claims

1. A crystal retrieval apparatus, comprising:

the crystal attachment device comprises a barrel, a plurality of elastic pieces and a plurality of elastic pieces, wherein the inner side wall of the barrel is provided with an inward-protruding step, the step is used for placing an attachment crystal device, the attachment crystal device is a hollow through seed crystal bracket, and the top end of the barrel is symmetrically provided with the plurality of elastic pieces;

the outer side of the gland is provided with an edge, the middle of the gland is provided with a boss for pressing the crystal, a groove is formed between the edge and the boss, and the end part of the edge is correspondingly provided with a plurality of mounting parts connected with the elastic part.

2. The crystal taking-out apparatus as claimed in claim 1, wherein the step is an L-shaped step, the width of the L-shaped step is equal to or less than the thickness of the attachment crystal means, and the height of the L-shaped step is less than the height of the attachment crystal means.

3. The crystal retrieval device of claim 1, wherein the outer diameter of the gland is substantially equal to the outer diameter of the barrel, the height of the rim is less than the height of the boss, and the thickness of the rim is less than the thickness of the upper portion of the barrel.

4. The crystal taking-out apparatus according to claim 1, wherein the elastic member is a spring, and the mounting portion detachably attached to the spring is a hole groove.

5. The crystal retrieving apparatus of claim 4, wherein the number of the springs is 3-6.

6. The crystal retrieving apparatus of claim 4, wherein the number of the springs is 4.

7. The crystal taking-out device as claimed in claim 1, wherein the outer sleeve of the barrel body is provided with a shell, and the height of the shell is approximately equal to the sum of the heights of the barrel body and the gland.

8. The crystal taking-out apparatus according to claim 1, wherein the cylinder and the gland are each made of a high-purity graphite material or a high-purity organic material.

9. The crystal taking-out device as claimed in claim 1, wherein the top end of the cylinder is open, and a soft material layer is laid at the bottom.

10. The crystal retrieval device of claim 9, wherein the layer of soft material is foam cotton.

11. The crystal retrieval device of claim 1, wherein a top of the gland is provided with a handle.

12. The crystal retrieval device of claim 11, wherein the handle is a T-handle.