CN202282352U - 通过外延方法形成fs层的高压igbt - Google Patents
通过外延方法形成fs层的高压igbt Download PDFInfo
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- CN202282352U CN202282352U CN 201120268817 CN201120268817U CN202282352U CN 202282352 U CN202282352 U CN 202282352U CN 201120268817 CN201120268817 CN 201120268817 CN 201120268817 U CN201120268817 U CN 201120268817U CN 202282352 U CN202282352 U CN 202282352U
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CN 201120268817 CN202282352U (zh) | 2011-07-27 | 2011-07-27 | 通过外延方法形成fs层的高压igbt |
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CN 201120268817 CN202282352U (zh) | 2011-07-27 | 2011-07-27 | 通过外延方法形成fs层的高压igbt |
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CN 201120268817 Expired - Lifetime CN202282352U (zh) | 2011-07-27 | 2011-07-27 | 通过外延方法形成fs层的高压igbt |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102903743A (zh) * | 2012-10-29 | 2013-01-30 | 江苏物联网研究发展中心 | 采用金属硅化物的功率半导体器件结构及制备方法 |
CN102931227A (zh) * | 2012-11-09 | 2013-02-13 | 江苏物联网研究发展中心 | 钝化半导体接触表面的功率半导体器件结构及制备方法 |
CN103489776A (zh) * | 2013-09-18 | 2014-01-01 | 中国东方电气集团有限公司 | 一种实现场截止型绝缘栅双极型晶体管的工艺方法 |
WO2014012425A1 (zh) * | 2012-07-19 | 2014-01-23 | 无锡华润上华半导体有限公司 | 场终止igbt的制造方法 |
CN103928318A (zh) * | 2013-01-14 | 2014-07-16 | 上海宝芯源功率半导体有限公司 | 一种场终止型igbt 器件的制造方法 |
RU2524145C1 (ru) * | 2013-01-09 | 2014-07-27 | Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Дагестанский Государственный Технический Университет" (Дгту) | Способ изготовления бсит-транзистора с охранными кольцами |
CN103972085A (zh) * | 2013-01-30 | 2014-08-06 | 无锡华润上华半导体有限公司 | 一种形成高压igbt的fs层的方法及igbt器件 |
CN104269357A (zh) * | 2013-03-26 | 2015-01-07 | 杭州士兰集成电路有限公司 | 功率半导体器件及其制造方法 |
-
2011
- 2011-07-27 CN CN 201120268817 patent/CN202282352U/zh not_active Expired - Lifetime
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014012425A1 (zh) * | 2012-07-19 | 2014-01-23 | 无锡华润上华半导体有限公司 | 场终止igbt的制造方法 |
CN103578980A (zh) * | 2012-07-19 | 2014-02-12 | 无锡华润上华半导体有限公司 | 场终止绝缘栅双极型晶体管的制备方法 |
CN102903743A (zh) * | 2012-10-29 | 2013-01-30 | 江苏物联网研究发展中心 | 采用金属硅化物的功率半导体器件结构及制备方法 |
CN102903743B (zh) * | 2012-10-29 | 2015-03-18 | 江苏物联网研究发展中心 | 采用金属硅化物的功率半导体器件结构及制备方法 |
CN102931227A (zh) * | 2012-11-09 | 2013-02-13 | 江苏物联网研究发展中心 | 钝化半导体接触表面的功率半导体器件结构及制备方法 |
RU2524145C1 (ru) * | 2013-01-09 | 2014-07-27 | Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Дагестанский Государственный Технический Университет" (Дгту) | Способ изготовления бсит-транзистора с охранными кольцами |
CN103928318A (zh) * | 2013-01-14 | 2014-07-16 | 上海宝芯源功率半导体有限公司 | 一种场终止型igbt 器件的制造方法 |
CN103972085A (zh) * | 2013-01-30 | 2014-08-06 | 无锡华润上华半导体有限公司 | 一种形成高压igbt的fs层的方法及igbt器件 |
CN104269357A (zh) * | 2013-03-26 | 2015-01-07 | 杭州士兰集成电路有限公司 | 功率半导体器件及其制造方法 |
CN103489776A (zh) * | 2013-09-18 | 2014-01-01 | 中国东方电气集团有限公司 | 一种实现场截止型绝缘栅双极型晶体管的工艺方法 |
CN103489776B (zh) * | 2013-09-18 | 2016-06-01 | 中国东方电气集团有限公司 | 一种实现场截止型绝缘栅双极型晶体管的工艺方法 |
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Owner name: INST OF MICROELECTRONICS, C. A. S JIANGSU JUNSHINE Effective date: 20130307 |
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Effective date of registration: 20130307 Address after: 214135 Jiangsu New District of Wuxi City Linghu Road No. 200 China Sensor Network International Innovation Park C building 4 floor Patentee after: JIANGSU R & D CENTER FOR INTERNET OF THINGS Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Patentee after: JIANGSU ZHONGKE JUNSHINE TECHNOLOGY Co.,Ltd. Address before: 214135 Jiangsu New District of Wuxi City Linghu Road No. 200 China Sensor Network International Innovation Park C building 4 floor Patentee before: JIANGSU R & D CENTER FOR INTERNET OF THINGS |
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Granted publication date: 20120620 |