CN201749128U - Servo circuit of quartz flexible accelerometer - Google Patents
Servo circuit of quartz flexible accelerometer Download PDFInfo
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- CN201749128U CN201749128U CN2010205055629U CN201020505562U CN201749128U CN 201749128 U CN201749128 U CN 201749128U CN 2010205055629 U CN2010205055629 U CN 2010205055629U CN 201020505562 U CN201020505562 U CN 201020505562U CN 201749128 U CN201749128 U CN 201749128U
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- amplifier
- servo circuit
- compensator
- mutual conductance
- quartz flexible
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Abstract
The utility model relates to a servo circuit of a quartz flexible accelerometer, which comprises a modulation-demodulation switching amplifier and a transconductance compensated amplifier, wherein the modulation-demodulation switching amplifier modulates and amplifies the electric signal output by an accelerometer, and then outputs the voltage signal to the transconductance compensated amplifier, and the transconductance compensated amplifier outputs the current signal to a swing assembly of the accelerometer head. The utility model comprises the modulation-demodulation switching amplifier and the transconductance compensated amplifier, wherein the modulation-demodulation switching amplifier is mainly used for detecting differential motion capacity and converting the current signal which is proportional to the differential motion capacity, the current signal is input into the input end of the transconductance compensated amplifier after being amplified, and is then compensated and calibrate, so that the dynamic and static characteristics of the system can be improved, and the current signal is output to a torque coil in a constant current flow source form so as to balance the current.
Description
Technical field
The utility model relates to the senser element field, especially a kind of servo circuit of quartz flexible accelerometer.
Background technology
Accelerometer is a kind of senser element, and it is the heart of navigational system.Quartz flexible accelerometer is a kind of of accelerometer, is called for short and adds table, and be novel advanced sensors with international most advanced level.Its precision height, long-time stability are good, volume is little, to acceleration, speed, distance, wave, shake, physical quantity such as inclination is very responsive.
The quartz flexible accelerometer servo circuit is to be the supporting special circuit of quartz flexible accelerometer, in recent years, continuous expansion along with the quartz flexible accelerometer application, from the initial high-end fields such as Aero-Space that just are applied to, constantly expand to every field such as weapons, boats and ships, oil, automobile, bridge, buildings, cause recent years, the situation that annual demand to the accelerometer servo circuit presents continually, sharply increases.Yet China's quartz flexible accelerometer servo circuit can't obtain in higher precision field breaking through, and has limited the whole raising of showing industry that adds.
The utility model content
The purpose of this utility model is to provide a kind of measuring accuracy height, can improve system dynamically and the servo circuit of the quartz flexible accelerometer of static characteristics.
For achieving the above object, the utility model has adopted following technical scheme: a kind of servo circuit of quartz flexible accelerometer, servo circuit is made up of modulation conversion amplifier and mutual conductance compensator-amplifier unit, modulation conversion amplifier outputs voltage signal to the mutual conductance compensator-amplifier unit after the electric signal of gauge outfit output is modulated, amplified, and mutual conductance compensator-amplifier unit output current signal is to the pendulum assembly of gauge outfit.
As shown from the above technical solution, the utility model is made up of modulation conversion amplifier and mutual conductance compensator-amplifier unit, modulation conversion amplifier is mainly finished the detection of differential capacitor, the current signal that also will be directly proportional with differential capacitor converts voltage signal to, the input end of input mutual conductance compensator-amplifier unit after amplifying, signal is compensated and proofreaies and correct, the improvement system dynamically and static characteristics, and export to the torquer coil with balanced balanced current again with the constant current source form.
Description of drawings
Fig. 1 is a circuit block diagram of the present utility model.
Embodiment
A kind of servo circuit of quartz flexible accelerometer, servo circuit 4 is made up of modulation conversion amplifier and mutual conductance compensator-amplifier unit 9, modulation conversion amplifier outputs voltage signal to mutual conductance compensator-amplifier unit 9 after the electric signal of gauge outfit 1 output is modulated, amplified, mutual conductance compensator-amplifier unit 9 output current signals are to the pendulum assembly of gauge outfit 1, as shown in Figure 1.
As shown in Figure 1, described gauge outfit 1 is made up of acceleration input shaft, torquer 2 and differential capacitance sensor 3, and torquer moving-coil and differential capacitance sensor moving-coil are formed the pendulum assembly, and differential capacitance sensor 3 output electric signal are to modulation conversion amplifier.
Described modulation conversion amplifier is made up of differential capacitor detecting device 5, triangular-wave generator 6, integrator 7 and prime amplifier 8, differential capacitor detecting device 5 links to each other with differential capacitance sensor 3, the differential electric signal that is output into direct ratio of 5 outputs of differential capacitor detecting device and differential capacitance sensor 3.Triangular-wave generator 6 is carrier power sources of differential capacitor detecting device 5, and the differential capacitor signal is modulated.Differential capacitor detecting device 5 links to each other with the input end of prime amplifier 8 by integrator 7, and the output terminal of prime amplifier 8 links to each other with the input end of mutual conductance compensator-amplifier unit 9, and the output terminal of mutual conductance compensator-amplifier unit 9 links to each other with the pendulum assembly of gauge outfit 1.The output terminal output current signal of described mutual conductance compensator-amplifier unit 9 is to the torquer moving-coil, and the torquer moving-coil is by resistance R ground connection.9 pairs of signals of integrator 7 and mutual conductance compensator-amplifier unit compensate and proofread and correct, dynamic and the static characteristics of improvement system, and export to the torquer moving-coil with balanced balanced current again, and, constitute a complete force balance type closed-loop system with differential capacitance sensor 3 and pendulum assembly with the constant current source form.
When the input shaft along accelerometer has acceleration a
iDo the time spent, the pendulum assembly is done small deflection, and then the capacitance of differential capacitance sensor 3 changes.Servo circuit 4 detects this variation, and it is transformed into corresponding output current i, the acceleration a of the size of this electric current and input
iBe directly proportional, output current i feeds back to the torquer moving-coil, and the torquer moving-coil by electric current can polarization in the magnetic field that permanent magnet produces, and this polarity has makes the pendulum assembly turn back to the tendency of origin-location, thereby makes the pendulum assembly come back to the equilibrium position.The size of the current i that is applied in the torquer moving-coil has been represented input acceleration a
iSize, the direction of current i has then reflected input acceleration a
iDirection.
The utility model can accurately detect the variation of differential capacitance sensor 3, provides enough balanced balanced currents again for torquer 2 in desired measurement range; Possess good frequency response characteristic, can make system's steady operation in desired dynamic range, and have enough dynamic and static measuring accuracy; As far as possible little temperature coefficient and time drift coefficient, the power consumption of circuit is little; Operating temperature range is wide, can work in-55 ℃～125 ℃ temperature ranges; The circuit high conformity.
Claims (4)
1. the servo circuit of a quartz flexible accelerometer, it is characterized in that: servo circuit (4) is made up of modulation conversion amplifier and mutual conductance compensator-amplifier unit (9), modulation conversion amplifier outputs voltage signal to mutual conductance compensator-amplifier unit (9) after the electric signal of gauge outfit (1) output is modulated, amplified, and mutual conductance compensator-amplifier unit (9) output current signal is to the pendulum assembly of gauge outfit (1).
2. the servo circuit of quartz flexible accelerometer according to claim 1, it is characterized in that: described gauge outfit (1) is made up of acceleration input shaft, torquer (2) and differential capacitance sensor (3), torquer moving-coil and differential capacitance sensor moving-coil are formed the pendulum assembly, and differential capacitance sensor (3) output electric signal is to modulation conversion amplifier.
3. the servo circuit of quartz flexible accelerometer according to claim 1 and 2, it is characterized in that: described modulation conversion amplifier is by differential capacitor detecting device (5), triangular-wave generator (6), integrator (7) and prime amplifier (8) are formed, differential capacitor detecting device (5) links to each other with differential capacitance sensor (3), triangular-wave generator (6) is the carrier power source of differential capacitor detecting device (5), differential capacitor detecting device (5) links to each other with the input end of prime amplifier (8) by integrator (7), the output terminal of prime amplifier (8) links to each other with the input end of mutual conductance compensator-amplifier unit (9), and the output terminal of mutual conductance compensator-amplifier unit (9) links to each other with the pendulum assembly of gauge outfit (1).
4. the servo circuit of quartz flexible accelerometer according to claim 1 and 2 is characterized in that: the output terminal output current signal of described mutual conductance compensator-amplifier unit (9) is to the torquer moving-coil, and the torquer moving-coil is by resistance R ground connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205055629U CN201749128U (en) | 2010-08-18 | 2010-08-18 | Servo circuit of quartz flexible accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205055629U CN201749128U (en) | 2010-08-18 | 2010-08-18 | Servo circuit of quartz flexible accelerometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201749128U true CN201749128U (en) | 2011-02-16 |
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ID=43583804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205055629U Expired - Fee Related CN201749128U (en) | 2010-08-18 | 2010-08-18 | Servo circuit of quartz flexible accelerometer |
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| CN (1) | CN201749128U (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102520209A (en) * | 2011-12-28 | 2012-06-27 | 天津大学 | Quartz flexible accelerometer based on laser self-mixing interference |
| CN102830248A (en) * | 2012-09-07 | 2012-12-19 | 中国兵器工业集团第二一四研究所苏州研发中心 | Micro temperature-compensating servo circuit for quartz accelerometer |
| CN103543293A (en) * | 2012-07-11 | 2014-01-29 | 罗伯特·博世有限公司 | Calibration device, sensor and method |
| CN103675317A (en) * | 2013-11-28 | 2014-03-26 | 航天科工惯性技术有限公司 | Low-power-consumption servo circuit for quartz flexure accelerometer |
| CN108240902A (en) * | 2016-12-27 | 2018-07-03 | 天津大学 | A kind of test device and test method of electromagnetic torque device |
| AU2016394137B2 (en) * | 2016-02-25 | 2018-08-16 | Institute Of Geology And Geophysics, Chinese Academy Of Sciences | Flexible high-precision accelerometer |
| CN109186638A (en) * | 2018-10-17 | 2019-01-11 | 西安微电子技术研究所 | A kind of accelerometer servo circuit that electric current constant multiplier is controllable and its manufacturing process |
| CN111024982A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | High-temperature quartz flexible accelerometer servo circuit |
| CN111830594A (en) * | 2020-06-23 | 2020-10-27 | 中国船舶重工集团公司第七0七研究所 | Electromagnetic force application type accelerometer servo system testing device, compensation system and method |
| CN113009182A (en) * | 2021-02-26 | 2021-06-22 | 西安微电子技术研究所 | Integrated zero-offset adjustable accelerometer servo circuit and manufacturing method and application thereof |
| CN114264843A (en) * | 2021-12-17 | 2022-04-01 | 贵州振华风光半导体股份有限公司 | Servo circuit for wide-range quartz flexible accelerometer |
| CN115932326A (en) * | 2023-01-09 | 2023-04-07 | 保定开拓精密仪器制造有限责任公司 | Quartz flexible accelerometer servo circuit |
-
2010
- 2010-08-18 CN CN2010205055629U patent/CN201749128U/en not_active Expired - Fee Related
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102520209B (en) * | 2011-12-28 | 2013-06-19 | 天津大学 | Quartz flexible accelerometer based on laser self-mixing interference |
| CN102520209A (en) * | 2011-12-28 | 2012-06-27 | 天津大学 | Quartz flexible accelerometer based on laser self-mixing interference |
| CN103543293A (en) * | 2012-07-11 | 2014-01-29 | 罗伯特·博世有限公司 | Calibration device, sensor and method |
| CN103543293B (en) * | 2012-07-11 | 2017-12-12 | 罗伯特·博世有限公司 | Means for correcting, sensor and method |
| CN102830248A (en) * | 2012-09-07 | 2012-12-19 | 中国兵器工业集团第二一四研究所苏州研发中心 | Micro temperature-compensating servo circuit for quartz accelerometer |
| CN102830248B (en) * | 2012-09-07 | 2014-09-17 | 中国兵器工业集团第二一四研究所苏州研发中心 | Micro temperature-compensating servo circuit for quartz accelerometer |
| CN103675317A (en) * | 2013-11-28 | 2014-03-26 | 航天科工惯性技术有限公司 | Low-power-consumption servo circuit for quartz flexure accelerometer |
| CN103675317B (en) * | 2013-11-28 | 2016-01-06 | 航天科工惯性技术有限公司 | A kind of low-power consumption servo circuit for quartz flexible accelerometer |
| US10309984B2 (en) | 2016-02-25 | 2019-06-04 | Institute Of Geology And Geophysics, Chinese Academy Of Sciences | High-precision pendulous accelerometer |
| AU2016394137B2 (en) * | 2016-02-25 | 2018-08-16 | Institute Of Geology And Geophysics, Chinese Academy Of Sciences | Flexible high-precision accelerometer |
| CN108240902A (en) * | 2016-12-27 | 2018-07-03 | 天津大学 | A kind of test device and test method of electromagnetic torque device |
| CN109186638A (en) * | 2018-10-17 | 2019-01-11 | 西安微电子技术研究所 | A kind of accelerometer servo circuit that electric current constant multiplier is controllable and its manufacturing process |
| CN111024982A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | High-temperature quartz flexible accelerometer servo circuit |
| CN111024982B (en) * | 2019-12-18 | 2024-01-30 | 青岛航天半导体研究所有限公司 | Servo circuit of high-temperature quartz flexible accelerometer |
| CN111830594A (en) * | 2020-06-23 | 2020-10-27 | 中国船舶重工集团公司第七0七研究所 | Electromagnetic force application type accelerometer servo system testing device, compensation system and method |
| CN113009182A (en) * | 2021-02-26 | 2021-06-22 | 西安微电子技术研究所 | Integrated zero-offset adjustable accelerometer servo circuit and manufacturing method and application thereof |
| CN114264843A (en) * | 2021-12-17 | 2022-04-01 | 贵州振华风光半导体股份有限公司 | Servo circuit for wide-range quartz flexible accelerometer |
| CN114264843B (en) * | 2021-12-17 | 2023-05-12 | 贵州振华风光半导体股份有限公司 | Servo circuit for wide-range quartz flexible accelerometer |
| CN115932326A (en) * | 2023-01-09 | 2023-04-07 | 保定开拓精密仪器制造有限责任公司 | Quartz flexible accelerometer servo circuit |
| CN115932326B (en) * | 2023-01-09 | 2023-08-11 | 保定开拓精密仪器制造有限责任公司 | Quartz flexible accelerometer servo circuit |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110216 Termination date: 20140818 |
|
| EXPY | Termination of patent right or utility model |